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Microstructure Analysis and Surface Planarization of Excimer-laser Annealed Si Thin FilmsYu, Miao January 2020 (has links)
The excimer-laser annealed (ELA) polycrystalline silicon (p-Si or polysilicon) thin film, which influences more than 100-billion-dollar display market, is the backplane material of the modern advanced LCD and OLED products. The microstructure (i.e. ELA microstructure) and surface morphology of an ELA p-Si thin film are the two main factors determining the material properties, and they significantly affect the performance of the subsequently fabricated thin film transistors (TFTs). The microstructure is the result of a rather complex crystallization process during the ELA which is characterized as far-from-equilibrium, multiple-pulse-per-area and processing-parameter dependent. Studies of the ELA microstructure and the surface morphology closely related to the device performance as well as the microstructure evolution during the ELA process are long-termly demanded by both the scientific research and the industrial applications, but unfortunately have not been thoroughly performed in the past.
The main device-performance-related characteristics of the ELA microstructure are generally considered to be the grain size and the presence of the dense grain boundaries. In the work of this thesis, an image-processing-based program (referred to as the GB extraction program) is developed to extract the grain boundary map (GB map) out of the transmission electron microscope (TEM) images of the ELA microstructure. The grain sizes are straightforwardly calculated from the GB map and statistically analyzed. More importantly, based on the GB maps, we propose and perform a rigorous scheme that we call the local-microstructure analysis (LMA) to quantitatively and systematically analyze the spatial distribution of the grain boundaries. The “local area” is mainly defined by the geometry and the location of a TFT. The successful extraction of the GB map and the subsequent LMA are permitted by our unique TEM skills to produce high-resolution TEM micrographs containing statistically significant number of grains for sensible quantitative analysis. The LMA unprecedentedly enables quantitative and rigorous analysis of spatial characteristics of the microstructure, especially the device geometry- and location-related characteristics. Additionally, we present and highlight the benefits of the LMA approach over the traditional statistical grain-size analysis of the ELA microstructure.
From the grain-size analysis, we find that grain size across a statistically significant number of grains generally follows the same distribution as in the stochastic grain growth scenario at the beginning of the ELA process when the laser pulse (i.e. shot) number is small. As the shot number increases, the overall grain size monotonically increases while the distribution profile becomes broader. When the scan number reaches the ELA threshold (several tens of laser shots), the distribution profile substantially deviates from the stochastic profile and shows two sharp peaks in grain size around 300nm and 450nm, which is consistent with the previously proposed theory of energy coupling and nonuniform energy deposition during ELA. From the LMA, local nonuniformity of grain boundary density (GB density) at the device length scales and regions of high grain boundary periodicity are identified.
More importantly, we find that the local nonuniformity is much more pronounced when p-Si film exhibits some level of spatial ordering, but less pronounced for a random grain arrangement. It is worth noting that the devices of different sizes and orientation have different sensitivity to the local nonuniformity of the ELA-generated p-Si thin film. In addition, based on the analysis results, the connection between the microstructure evolution and the partial melting and resolidification process of the Si film is discussed.
Aside from the microstructure, the surface morphology of the ELA films, featuring pronounced surface protrusions, is characterized via an atomic force microscope (AFM). Attempts to planarize those surface protrusions detrimental to the subsequent device performance are conducted. In the attempts, the as-is (oxide-capped) ELA films and the BHF-treated ELA films are subjected to single shots of excimer irradiation. When the results are compared, an anisotropic melting phenomenon of the p-Si grains is identified, which appears to be strongly affected by the presence of the surface oxide capping layer. Conceptual models are developed and numerical simulations are employed to explain the observation of the anisotropic melting phenomenon and the effect of the surface oxide layer. Eventually, 41.8% reduction of root mean square (RMS) surface roughness is achieved for BHF-treated ELA films.
The results gained in the systematic analysis of the ELA microstructure and the attempt of surface planarization further our understanding about (1) the device performance-related material microstructure of the ELA p-Si thin films, (2) the microstructure evolution occurring during multiple shots of the ELA process, and (3) the fundamental phase transformations in the far-from-equilibrium melt-mediated excimer-laser annealing processing of p-Si thin films. Such understanding could help engineers when designing the microelectronic devices and the ELA manufacturing process, as well as provide scientific researchers with insights on the melting and solidification of general polycrystalline materials, thus profoundly contributing to both the related scientific society and the technological community. The GB extraction program and the LMA scheme developed and demonstrated in the thesis, as another contribution to the related research filed, could also be generalized to the microstructural study of other polycrystalline materials where grain geometry and arrangement are of concern.
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Investigation of Photonic Annealing on the Atomic Layer Deposition Metal-Oxides Incorporated in Polymer Tunnel DiodesMattei, Ryan M. January 2019 (has links)
No description available.
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From Excitons to Excimers: Understanding the Steady-State Absorption and Photoluminescence Features of Perylene Diimide DyesBialas, April Lynn, 0000-0002-4210-3820 January 2022 (has links)
There is currently a great interest to develop and market organic electronic devices, and theoretical models are needed to provide physical insight and quality predictions when designing these materials. Many organic molecules absorb in the UV-vis region of light, and therefore, UV-vis spectroscopy is a relatively simple tool that can help experimentalists "see" the packing arrangements of the molecules within each material, as long as there is a solid theoretical understanding of the photophysics that links the interactions between molecules to changes in optical features. For example, the Kasha spectral shifts have been used for decades to identify J-aggregate and H-aggregate packing arrangements from red- and blue- spectral shifts, respectively. The innate presence of vibronic coupling in organic molecules gives rise to a unique set of additional spectral signatures that are far more reliable than the Kasha spectral shifts for inferring packing arrangements. Moreover, the Kasha shifts are based entirely on Coulomb coupling between molecules, which leads to the creation of delocalized Frenkel excitons. For many π-conjugated organic molecules, however, dispersion forces in π-conjugated chromophores encourage close packing distances of about 3.5-4 Å between organic monomers, which further introduces intermolecular couplings beyond the Coulomb coupling, due to intermolecular charge transfer (CT). Therefore, much theoretical research has focused on incorporating all these effects through a Frenkel-CT-Holstein Hamiltonian, in order to better understand how different packing arrangements within a given material can be identified through specific changes in steady-state absorption and photoluminescence features.
In this thesis, the Frenkel-CT-Holstein model is specifically applied to study the absorption and photoluminescent spectra of various derivatives of perylene diimide (PDI), which are of great interest as non-fullerene acceptors in organic photovoltaic design. PDIs display a plethora of packing arrangements and corresponding spectral signatures just by varying the substituents within the PDI core. This thesis first aims to understand the exciton band structure of two different PDI micro-crystals that both experience similar Frenkel-CT interference, but with one system displaying dominant Coulomb interactions while the other undergoes dominant Frenkel-CT coupling. Both are close to what is called a “null”-point, and the work in this thesis explores the photoluminescent signature as a reliable means to track which side of the “null”-point the Frenkel-CT interference lies.
While the Frenkel-CT-Holstein model is successful in modeling mostly absorption spectra of aggregates composed of PDI monomers, one challenge has been that aggregates of PDIs often exhibit so-called excimer features in their photoluminescence spectra, which the model cannot account for. Systems that emit broad, structureless and red-shifted excimer peaks typically display inefficient exciton transport in organic semiconductors. The bulk of this thesis has been to expand the model to account for excimer emission, which is made possible by utilizing a Holstein-Peierls (HP) Hamiltonian that incorporates the effects of both local vibronic coupling and nonlocal Frenkel-CT coupling to intermolecular motions within a dimer. The experimental spectra for two different PDI dimer systems that display different excimer features is successfully reproduced with the new theory.
This thesis concludes by analyzing how nonlocal coupling, which account for changes in the Frenkel-CT mixing along an intermolecular vibrational mode, can lead to various types of excimers. Different phase relations within the electron and hole nonlocal coupling parameters can combine with different phase relations within the electron and hole Frenkel-CT coupling parameters, leading to a rich array of excimer properties, especially when combined with the additional effects of Coulomb coupling, as well as local intermolecular vibronic coupling, which can either enhance or diminish the excimer photoluminescence. Overall, the Holstein-Peierls approach offers insight into the roles of Frenkel and CT excitons in excimer formation, and highlights the importance of the magnitude and phase of the intermolecular electron and hole transfer integrals in the ground and excited state geometries in producing distinct excimer features. The model provides further insight into the origin of excimers, which lays a foundation for future theoretical and experimental studies in designing organic materials. / Chemistry
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PHOTOLUMINESCENT POLYMER MATERIALS WITH BUILT-IN DEFORMATION AND TEMPERATURE SENSORSCrenshaw, Brent R. 26 January 2007 (has links)
No description available.
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Orderly Perforation of Polyester Films by Excimer LaserLi, Wenqi January 2014 (has links)
No description available.
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SELF-QUENCHING AND CROSS-QUENCHING REACTIONS OF PLATINUM(II) DIIMINE COMPLEXESFLEEMAN, WENDI LEIGH January 2003 (has links)
No description available.
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Femtosecond Transient Absorption Study of the Excited-State Dynamics of Single-Stranded Adenine-Containing Multinucleotides and Steady-State Absorption Spectroscopy of Mononucleotides in Cryogenic Water/Ethylene Glycol MatricesSu, Charlene 02 November 2010 (has links)
No description available.
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Estudo comparativo entre a ceratectomia fotorrefrativa (PRK) e a ceratectomia subepitelial borboleta assistida a laser (LASEK borboleta) / Comparative study between photorefractive keratectomy (PRK) and butterfly laser-assisted subepithelial keratectomy (BLASEK)Ghanem, Vinicius Coral 29 August 2007 (has links)
OBJETIVO: Avaliar comparativamente os resultados de duas técnicas de cirurgia refrativa de superfície com excimer laser, ceratectomia fotorrefrativa (PRK) e ceratectomia subepitelial borboleta assistida à laser (LASEKb). LOCAL: Hospital de Olhos Sadalla Amin Ghanem, Joinville, Santa Catarina, Brasil. MÉTODOS: Realizou-se um estudo prospectivo, randomizado e duplo-cego envolvendo 102 olhos de 51 pacientes. Cada paciente teve aleatoriamente um dos olhos operado com a técnica do PRK e o outro com LASEKb. Os pacientes foram acompanhados por 1 ano. RESULTADOS: Não houveram diferenças significativas entre os dois grupos na acuidade visual (AV) para longe, sem correção, (P = 0,5593). No 12o mês pós-operatório (PO), 98,04% dos olhos no grupo do PRK e 96,08% no grupo do LASEKb atingiram AV sem correção de 20/20. A previsibilidade, eficácia, segurança e estabilidade não apresentaram diferença estatisticamente significativa entre os grupos. O índice de segurança foi de 1 no PRK e 0,996 no LASEKb. Um olho do grupo do LASEKb perdeu uma linha de visão. A porcentagem de olhos que apresentou EE aos 12 meses na faixa de ±0,50 D foi de 94,1% no grupo do PRK e de 86,3% no grupo do LASEKb (P = 0,1883). Enquanto que na faixa de ±1,0 D foi de 100% no grupo do PRK e 98% no grupo do LASEKb (P = 0,3125). Não houve necessidade de reoperações. O tempo médio de cirurgia na técnica PRK foi de 304,86 + 58,77 segundos (aproximadamente 5 minutos) e na técnica LASEKb de 608,35 + 76,88 segundos (aproximadamente 10 minutos) (P < 0,001). O tempo médio de reepitelização no grupo do PRK foi de 4,35 ± 0,48 dias (variação, 4 a 5 dias) e no grupo do BLASEK foi de 4,75 ± 0,72 dias (variação, 4 a 6 dias) (P < 0,002). Os níveis de dor e o desconforto ocular PO não foram estatisticamente diferentes entre os grupos, entretanto houve uma tendência para menor dor no PRK (3,31 ± 4,09 vs 4,43 ± 4,27; P = 0,18). Houve uma redução estatisticamente significativa nos valores do teste de Schirmer em todas as avaliação PO, tanto no PRK (23,6 ± 8,1 vs 19,4 ± 10,1; P < 0,002) quanto no LASEKb (22,4 ± 8,7 vs 18,9 ± 9,7; P = 0,01), entretanto não houve diferença entre os grupos. A opacificação corneana (OC) PO foi pequena nos dois grupos. Somente no 1o mês foi observado diferença estatística entre os grupos, com maior intensidade da OC no grupo do LASEKb (0,18 ± 0,3881) quando comparado ao PRK (0,08 ± 0,2109) (P = 0,039936). A maior intensidade foi observada no 3o mês, com redução gradativa até o 12o mês. CONCLUSÃO: Dentro das condições deste estudo, conclui-se que o PRK e o LASEKb mostraram resultados semelhantes, exceto que o PRK apresentou menor tempo cirúrgico, reepitelização corneana mais rápida e menor OC no 30o PO. / PURPOSE: Comparatively evaluate the results of two techniques of surface excimer laser refractive surgery, photorefractive keratectomy (PRK) and butterfly laser-assisted subepithelial keratectomy (BLASEK). SETTING: Sadalla Amin Ghanem Eye Hospital, Joinville, Santa Catarina, Brazil. METHODS: This is a prospective, randomized and double-masked study including 102 eyes from 51 patients. Each patient was randomized to have one eye operated on with PRK and the other with BLASEK. Patients were followed for 1 year. RESULTS: There were no significant differences between the groups regarding uncorrected distant visual acuity (VA) (p= 0.5593). On the 12th post-operative (PO) month, 98.04% of the eyes in the PRK group and 96.08% in the BLASEK group reached uncorrected VA of 20/20. The predictability, efficacy, safety and stability did not present statically significant difference between groups. The safety index was of 1 for PRK and 0.996 for BLASEK. One eye of the BLASEK group lost one line on the 12th PO month. The percentage of the eyes that presented spherical equivalent at 12 months in the range of ±0.50 D was 94.1% in the PRK group and 86.3% in the BLASEK group (p = 0.1883). While in the range of ±1.0 D it was 100% in the PRK group and 98% in the BLASEK group (p = 0.3125). There were no retreatments. The mean surgical time was 304.86 + 58.77 seconds (approximately 5 minutes) in PRK and 608.35 + 76.88 seconds in BLASEK (approximately 10 minutes) (P < 0,001). The mean reepithelization time in the PRK group was 4.35 ± 0.48 days (range, 4 to 5 days), and in the BLASEK group was 4.75 ± 0.72 days (range, 4 to 6 days) (P < 0.002). Pain scores and ocular discomfort were not statistically different between groups, although there was a trend towards a lower pain level with PRK (3.31 ± 4.09 vs. 4.43 ± 4.27; P = 0.18). Schirmer test values were significantly reduced from preoperative levels through 12 months with both PRK (23.6 ± 8.1 vs. 19.4 ± 10.1; P < 0.002) and BLASEK (22.4 ± 8.7 vs. 18.9 ± 9.7; P = 0.01), however there was no difference between groups in any time point. Haze incidence was slight in both groups. Only in the 1st PO month statistical difference between the groups was observed, with higher intensity in the BLASEK group (0.18 ± 0.3881) when compared to the PRK (0.08 ± 0.2109) (p = 0.039936). The highest intensity was observed on the 3rd month, with gradual reduction until the 12th month. CONCLUSION: In the conditions of this study, it can be concluded that PRK and BLASEK showed similar results, except that PRK presented shorter surgical time, faster corneal reepithelization and less haze at 30th PO days.
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Modeling and Diagnosis of Excimer Laser AblationSetia, Ronald 23 November 2005 (has links)
Recent advances in the miniaturization, functionality, and integration of integrated circuits and packages, such as the system-on-package (SOP) methodology, require increasing use of microvias that generates vertical signal paths in a high-density multilayer substrate. A scanning projection excimer laser system has been utilized to fabricate the microvias. In this thesis, a novel technique implementing statistical experimental design and neural networks (NNs) is used to characterize and model the excimer laser ablation process for microvia formation. Vias with diameters from 10 50 micrometer have been ablated in DuPont Kapton(r) E polyimide using an Anvik HexScan(tm) 2150 SXE pulsed excimer laser operating at 308 nm. Accurate NN models, developed from experimental data, are obtained for microvia responses, including ablated thickness, via diameter, wall angle, and resistance. Subsequent to modeling, NNs and genetic algorithms (GAs) are utilized to generate optimal process recipes for the laser tool. Such recipes can be used to produce desired microvia responses, including open vias, specific diameter, steep wall angle, and low resistance. With continuing advancement in the use of excimer laser systems in microsystems packaging has come an increasing need to offset capital equipment investment and lower equipment downtime. In this thesis, an automated in-line failure diagnosis system using NNs and Dempster-Shafer (D-S) theory is implemented. For the sake of comparison, an adaptive neuro-fuzzy approach is applied to achieve the same objective. Both the D-S theory and neuro-fuzzy logic are used to develop an automated inference system to specifically identify failures. Successful results in failure detection and diagnosis are obtained from the two approaches. The result of this investigation will benefit both engineering and management. Engineers will benefit from high yield, reliable production, and low equipment down-time. Business people, on the other hand, will benefit from cost-savings resulting from more production-worthy (i.e., lower maintenance) laser ablation equipment.
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Estudo comparativo entre a ceratectomia fotorrefrativa (PRK) e a ceratectomia subepitelial borboleta assistida a laser (LASEK borboleta) / Comparative study between photorefractive keratectomy (PRK) and butterfly laser-assisted subepithelial keratectomy (BLASEK)Vinicius Coral Ghanem 29 August 2007 (has links)
OBJETIVO: Avaliar comparativamente os resultados de duas técnicas de cirurgia refrativa de superfície com excimer laser, ceratectomia fotorrefrativa (PRK) e ceratectomia subepitelial borboleta assistida à laser (LASEKb). LOCAL: Hospital de Olhos Sadalla Amin Ghanem, Joinville, Santa Catarina, Brasil. MÉTODOS: Realizou-se um estudo prospectivo, randomizado e duplo-cego envolvendo 102 olhos de 51 pacientes. Cada paciente teve aleatoriamente um dos olhos operado com a técnica do PRK e o outro com LASEKb. Os pacientes foram acompanhados por 1 ano. RESULTADOS: Não houveram diferenças significativas entre os dois grupos na acuidade visual (AV) para longe, sem correção, (P = 0,5593). No 12o mês pós-operatório (PO), 98,04% dos olhos no grupo do PRK e 96,08% no grupo do LASEKb atingiram AV sem correção de 20/20. A previsibilidade, eficácia, segurança e estabilidade não apresentaram diferença estatisticamente significativa entre os grupos. O índice de segurança foi de 1 no PRK e 0,996 no LASEKb. Um olho do grupo do LASEKb perdeu uma linha de visão. A porcentagem de olhos que apresentou EE aos 12 meses na faixa de ±0,50 D foi de 94,1% no grupo do PRK e de 86,3% no grupo do LASEKb (P = 0,1883). Enquanto que na faixa de ±1,0 D foi de 100% no grupo do PRK e 98% no grupo do LASEKb (P = 0,3125). Não houve necessidade de reoperações. O tempo médio de cirurgia na técnica PRK foi de 304,86 + 58,77 segundos (aproximadamente 5 minutos) e na técnica LASEKb de 608,35 + 76,88 segundos (aproximadamente 10 minutos) (P < 0,001). O tempo médio de reepitelização no grupo do PRK foi de 4,35 ± 0,48 dias (variação, 4 a 5 dias) e no grupo do BLASEK foi de 4,75 ± 0,72 dias (variação, 4 a 6 dias) (P < 0,002). Os níveis de dor e o desconforto ocular PO não foram estatisticamente diferentes entre os grupos, entretanto houve uma tendência para menor dor no PRK (3,31 ± 4,09 vs 4,43 ± 4,27; P = 0,18). Houve uma redução estatisticamente significativa nos valores do teste de Schirmer em todas as avaliação PO, tanto no PRK (23,6 ± 8,1 vs 19,4 ± 10,1; P < 0,002) quanto no LASEKb (22,4 ± 8,7 vs 18,9 ± 9,7; P = 0,01), entretanto não houve diferença entre os grupos. A opacificação corneana (OC) PO foi pequena nos dois grupos. Somente no 1o mês foi observado diferença estatística entre os grupos, com maior intensidade da OC no grupo do LASEKb (0,18 ± 0,3881) quando comparado ao PRK (0,08 ± 0,2109) (P = 0,039936). A maior intensidade foi observada no 3o mês, com redução gradativa até o 12o mês. CONCLUSÃO: Dentro das condições deste estudo, conclui-se que o PRK e o LASEKb mostraram resultados semelhantes, exceto que o PRK apresentou menor tempo cirúrgico, reepitelização corneana mais rápida e menor OC no 30o PO. / PURPOSE: Comparatively evaluate the results of two techniques of surface excimer laser refractive surgery, photorefractive keratectomy (PRK) and butterfly laser-assisted subepithelial keratectomy (BLASEK). SETTING: Sadalla Amin Ghanem Eye Hospital, Joinville, Santa Catarina, Brazil. METHODS: This is a prospective, randomized and double-masked study including 102 eyes from 51 patients. Each patient was randomized to have one eye operated on with PRK and the other with BLASEK. Patients were followed for 1 year. RESULTS: There were no significant differences between the groups regarding uncorrected distant visual acuity (VA) (p= 0.5593). On the 12th post-operative (PO) month, 98.04% of the eyes in the PRK group and 96.08% in the BLASEK group reached uncorrected VA of 20/20. The predictability, efficacy, safety and stability did not present statically significant difference between groups. The safety index was of 1 for PRK and 0.996 for BLASEK. One eye of the BLASEK group lost one line on the 12th PO month. The percentage of the eyes that presented spherical equivalent at 12 months in the range of ±0.50 D was 94.1% in the PRK group and 86.3% in the BLASEK group (p = 0.1883). While in the range of ±1.0 D it was 100% in the PRK group and 98% in the BLASEK group (p = 0.3125). There were no retreatments. The mean surgical time was 304.86 + 58.77 seconds (approximately 5 minutes) in PRK and 608.35 + 76.88 seconds in BLASEK (approximately 10 minutes) (P < 0,001). The mean reepithelization time in the PRK group was 4.35 ± 0.48 days (range, 4 to 5 days), and in the BLASEK group was 4.75 ± 0.72 days (range, 4 to 6 days) (P < 0.002). Pain scores and ocular discomfort were not statistically different between groups, although there was a trend towards a lower pain level with PRK (3.31 ± 4.09 vs. 4.43 ± 4.27; P = 0.18). Schirmer test values were significantly reduced from preoperative levels through 12 months with both PRK (23.6 ± 8.1 vs. 19.4 ± 10.1; P < 0.002) and BLASEK (22.4 ± 8.7 vs. 18.9 ± 9.7; P = 0.01), however there was no difference between groups in any time point. Haze incidence was slight in both groups. Only in the 1st PO month statistical difference between the groups was observed, with higher intensity in the BLASEK group (0.18 ± 0.3881) when compared to the PRK (0.08 ± 0.2109) (p = 0.039936). The highest intensity was observed on the 3rd month, with gradual reduction until the 12th month. CONCLUSION: In the conditions of this study, it can be concluded that PRK and BLASEK showed similar results, except that PRK presented shorter surgical time, faster corneal reepithelization and less haze at 30th PO days.
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