Pb(Zr₀.₅₂Ti₀.₄₈)O₃ (PZT) thin films are of interest for their large dielectric permittivity, ferroelectric, and piezoelectric properties. The material has been widely studied for use in high frequency transducers, multi-layered capacitors, and ferroelectric random access memory. Copper foils are an inexpensive, flexible substrate with a low resistivity which makes them ideal for many transducer and capacitor applications. PZT thin films on copper foils were produced by RF sputtering and crystallized under reducing conditions. Causes and prevention of a cuprous oxide interlayer are discussed. The film structure was characterized by XRD, SEM, and AFM. The permittivity was low, but remanent polarization increased to as high as ~40 μC/cm² as film thickness and crystallization temperature increased. Residual stresses were measured by x-ray diffraction using the sin²ψ method. The relative permittivity of the PZT/Cu films was measured as a function of applied AC electric field. By performing a Rayleigh analysis on this data one can determine the relative contributions of the intrinsic, reversible, and irreversible components to the permittivity. The residual stress could be correlated to the reversible part of the permittivity. The first order reversal curves (FORCs), which characterize the ferroelectric switching, give indications of the defect state of the film. Cantilever energy harvesters were fabricated. Large electrodes were able to be evaporated onto the films after oxidizing pinholes and cracks on a hot plate. Devices were tested on a shaker table at < 100 Hz. A dynamic model based on Euler-Bernoulli beam equations was used to predict power output of the fabricated devices. The observed output was comparable to model predictions. Resonant frequency calculations were in line with observed first and second resonances at ~17 Hz and ~35 Hz which were also close to those predicted by the dynamic model. / Graduation date: 2013

This thesis presents various studies on energy efficient design of wireless networks. It starts with a survey on recent shortest path based energy efficient routing algorithms developed for ad hoc and sensor networks, making a comprehensive classification for these algorithms. In addition to energy efficient design, sustainable and environmentally friendly deployment of wireless networks demands increased use of renewable energy. However, this calls for novel design principles to efficiently utilize the variation in the availability of the energy. The thesis continues with an investigation of state-of-the-art resource management and scheduling algorithms developed for energy harvesting wireless sensor networks. Building on the stateof- the-art, the main contribution of this thesis is to formulate and solve a utility maximizing scheduling problem in a multiuser broadcast channel with an energy harvesting transmitter. The goal is to determine the optimal power and time allocations to users between energy arrivals. The structural properties of the problem are analyzed, and its biconvexity is proved. A Block Coordinate Descent (BCD) based algorithm is developed to obtain the optimal solution. Two simple and computationally scalable heuristics, PTF and ProNTO, which mimic the characteristics of the optimal policy, are proposed. Finally, an online algorithm, PTF-On,that will bypass the need for offline knowledge about the energy harvesting statistics, is developed. PTF-On uses a Kalman filter based energy harvesting prediction algorithm, developed in this thesis, to predict the energy that will arrive in the future.

This thesis study presents the design, simulation, micro fabrication, and testing steps of microelectromechanical systems (MEMS) based electromagnetic micro power generators. These generators are capable of generating power using already available environmental vibrations, by implementing the electromagnetic induction technique. There are mainly two objectives of the study: (i) to increase the bandwidth of the traditional micro generators and (ii) to improve their efficiency at low frequency environmental vibrations of 1-100 Hz where most vibrations exist. Four main types of generators have been proposed within the scope of this thesis study. The first type of generator is mainly composed of 20 parylene cantilevers on which coils are fabricated, where the cantilevers are capable of resonating with external vibrations with respect to a stationary magnet. This generator has dimensions of 9.5&times / 8&times / 6 mm3, and it has been shown that 0.67 mV of voltage and 56 pW of power output can be obtained from a single cantilever of this design at a vibration frequency of 3.45 kHz. The second type generator aims to increase the bandwidth of the traditional designs by implementing cantilevers with varying length. This generator is sized 14&times / 12.5&times / 8 mm3, and the mechanical design and energy generation concept is similar to the first design. The test results show that by using 40 cantilevers with a length increment of 3 &amp / #956 / m, the overall bandwidth of the generator can be increased to 1000 Hz. It has also been shown that 9 mV of constant voltage and 1.7 nW of constant power output can be obtained from the overall device in a vibration frequency range of 3.5 to 4.5 kHz. The third type is a standard large mass coil type generator that has been widely used in the literature. In this case, the generator is composed of a stationary base with a coil and a magnet-diaphragm assembly capable of resonating with vibrations. The fabricated device has dimensions of 8.5&times / 7&times / 2.5 mm3, and it has been considered in this study for benchmarking purposes only. The test results show that 0.3 mV of voltage and 40 pW of power output can be obtained from the fabricated design at a vibration frequency of 113 Hz. The final design aims to mechanically up-convert low frequency environmental vibrations of 1-100 Hz to a much higher frequency range of 2-3 kHz. This type of generator has been implemented for the first time in the literature. The generator is composed of two parts / a diaphragm-magnet assembly on the top, and 20 cantilevers that have coils connected in series at the base. The diaphragm oscillates by low frequency environmental vibrations, and catches and releases the cantilevers from the tip points where magnetic nickel (Ni) areas are deposited. The released cantilevers then start decaying out oscillations that is at their damped natural frequency of 2-3 kHz. It has been shown with tests that frequency up-conversion is realized in micro scale. The fabricated device has dimensions of 8.5&times / 7&times / 2.5 mm3, and a maximum voltage and power output of 0.57 mV and 0.25 nW can be obtained, respectively, from a single cantilever of the fabricated prototype at a vibration frequency of 113 Hz.

The aim of the thesis is to investigate the design of efficient wireless networks through practical as well as theoretical considerations. We constructed a wireless sensor network (WSN) testbed with battery operated nodes capable of RF communication. The system is a centralized tree-based WSN to study challenges of target modeling, detection, and localization. The testbed employed magnetic sensors, on which relatively few results have been reported in the literature. A ferrous test target is modeled as magnetic dipole by validating experimentally. The problem of sensor sensitivity variation is addressed by including sensitivity estimates in model validation. After reliably detecting the target, maximum-likelihood and least-squares techniques are applied for localization. Practical considerations of constructing a WSN utilizing magnetic sensors addressed. Maximum-lifetime operation of these networks requires joint consideration of sensing and communication. Energy harvesting is promising to overcome this major challenge for energy-constrained systems. In the second part of the thesis, we considered the minimization of transmission completion time for a given number of bits per user in an energy harvesting multiuser communication system, where the energy harvesting instants are known beforehand. The two-user case with achievable rate region having structural properties satisfied by the AWGN Broadcast Channel is studied. It is shown that the optimal scheduler ends transmission to both users at the same time while deferring a nonnegative amount of energy from each energy harvest for later use. The problem is formulated as an optimization problem and solved by exploiting its special structure.

In recent years, vibration-based energy harvesting technologies have gained great importance because of reduced power requirement of small electronic components. External power source and maintenance requirement can be minimized by employment of mechanical vibration energy harvesters. Power sources that harvest energy from the environment have the main advantages of high safety, long shell life and low cost compared to chemical batteries. Electromagnetic, electrostatic and piezoelectric transduction mechanisms are the three main energy harvesting methods. In this thesis, it is aimed to apply the piezoelectric elements technology to develop means for energy storage in munitions launch. The practical problems encountered in the design of piezoelectric energy harvesters are investigated. The applicability of energy harvesting to high power needs are studied. The experience compiled in the study is to be exploited in designing piezoelectric energy harvesters for munitions applications. Piezoelectric energy harvesters for harmonic and mechanical shock loading conditions with different types of piezoelectric materials are designed and tested. The test results are compared with both responses from analytical models generated in MATLAB&reg / and ORCAD PSPICE&reg / , and finite element method models generated in ATILA&reg / . Optimum energy storage methods are considered.

This thesis study presents the design, simulation, and fabrication of a low frequency electromagnetic micro power generator. This power generator can effectively harvest energy from low frequency external vibrations (1-100 Hz). The main objective of the study is to increase the efficiency of the previously proposed structure in METU-MEMS Center, which uses the frequency up-conversion technique to harvest energy from low frequency vibration. The proposed structure has been demonstrated by constructing several macro scale prototypes. In one of the constucted prototypes, the diaphragms are connected to a fixed frame via metal springs. The upper diaphragm having lower resonance frequency carries a magnet, and the lower diaphragm carries a hand wound coil and a magnetic piece for converting 6 Hz external vibrations up to 85 Hz, resulting a maximum voltage and power levels of 11.1 mV and 5.1 &micro / W, respectively. In an improved prototype, the metal springs are replaced with rubber ones, providing higher energy conversion efficiency and flexibility to tune the resonance frequency of both diaphragms to desired values. This prototype provides 104 &micro / W maximum power and 37.7 mV maximum voltage in response to vibration levels of 30 Hz. The proposed structure is also suitable to be realized by using microfabrication techniques. Hence, the structure to be microfabricated is studied and optimized for this purpose. When scaled to microelectromechanical dimensions, the expected maximum power and voltage from the 10 x 8.5 x 2.5 mm3 generator is 119 nW and 15.2 mV, respectively. A microfabrication process has also been designed for the proposed generator structure. According to this process, the structure consists of a stack of two pieces, each carrying different diaphragms. The diaphragms are made of parylene, and the coil and the magnetic piece are electroplated copper and nickel, respectively. As a result of this study, a new topology is proposed for harvesting energy at low frequency vibrations by the frequency up-conversion technique, and an efficiency improvement is expected with more than three orders of magnitude (119 nanoWatts output for the same size) compared to the study realized in our laboratory in converting low frequency (70-150 Hz) environmental vibrations to electrical energy.

In an energy harvesting communication system, energy is derived from outside sources and becomes partially available at different points in time. The constraints induced by this property on energy consumption plays an active role in the design of efficient communication systems. This thesis focuses on the optimal design of transmission and networking schemes for energy harvesting wireless communication systems. In particular, an energy harvesting transmitter broadcasting data to two receivers in an AWGN broadcast channel assuming that energy harvests and data arrivals occur at known instants is considered. In this system, optimal packet scheduling that achieves minimum delay is analyzed. An iterative algorithm, DuOpt, that achieves the same structural properties as the optimal schedule is proposed. DuOpt is proved to obtain the optimal solution when weaker user data is ready at the beginning. A dual problem is defined and shown to be strictly convex. Taking advantage of the dual problem, uniqueness of the solution of the main problem is proved. Finally, it is observed that DuOpt is almost two orders of magnitude faster than the SUMT (sequential unconstrained minimization technique) algorithm that solves the same problem.

In this study the relationship between the dynamic response of the flexible substrate and the power generation for energy harvesting system is proposed. High electro-mechanical transformation of piezoelectric materials, high efficient energy transfer of mechanical structure and controlled circuit make the piezoelectric generator a high performance. The devices of cantilevers with lump structures on the flexible substrate and piezoelectric film (ZnO) are designed. Then some individual layers of power generator are stocked in parallel to form a multi-layer system with a broad resonant band width. When the generator is operated in a wide frequency range vibration environment, the multi-layer piezoelectric films in the form of cantilever structures can induce current. First the finite element method for the piezoelectric cantilever beam is constructed by using ANSYS software. Both modal analysis and harmonic response analysis are performed to obtain the structural modal parameters and frequency response functions, respectively. Besides, the beam structure is modeled by 3D coupled field piezoelectric element. This research will apply Taguchi¡¦s method to design including variations of dimensions and material properties for energy harvesting system. The flexible substrate is polymeric film (PET). Imprinting process is applied to transfer the simulated geometric configuration onto a flexible substrate to obtain a maximum power output. The results show the single devices can improve efficiently by using lump structures on the flexible substrate, the generator could achieve maximum OCV of 2.25V which is 0.276£gW every centimeter squared when attached to a stable source of vibration. The multi-layer system can be used in 50~500Hz of low frequency environment. Furthermore, the output voltage (OCV) is upward when the flexible substrate with low Young¡¦s modulus.

Energy harvesting and energy storage are two most important technologies in today's green and renewable energy science. As for energy harvesting, the fundamental science and practically applicable technologies are not only essential in realizing the self-powered electronic devices and systems, but also tremendously helpful in meeting the rapid-growing world-wide energy consumptions. Mechanical energy is one of the most universally-existing, diversely-presenting, but usually-wasted energies in the natural environment. Owing to the limitations of the traditional technologies for mechanical energy harvesting, it is highly desirable to develop new technology that can efficiently convert different types of mechanical energy into electricity. On the other hand, the electricity generated from environmental energy often needs to be stored before used to drive electronic devices. For the energy storage units such as Li-ion batteries as the power sources, the limited lifetime is the prominent problem. Hybridizing energy harvesting devices with energy storage units could not only provide new solution for this, but also lead to the realization of sustainable power sources. In this dissertation, the research efforts have led to several critical advances in a new technology for mechanical energy harvesting—triboelectric nanogenerators (TENGs). Previous to the research of this dissertation, the TENG only has one basic mode—the contact mode. Through rational structural design, we largely improved the output performance of the contact-mode TENG and systematically studied their characteristics as a power source. Beyond this, we have also established the second basic mode for TENG—the lateral sliding mode, and demonstrated sliding-based disk TENGs for harvesting rotational energy and wind-cup-based TENGs for harvesting wind energy. In order to expand the application and versatility of TENG by avoid the connection of the electrode on the moving part, we further developed another basic mode—freestanding-layer mode, which is capable of working with supreme stability in non-contact mode and harvesting energy from any free-moving object. Both the grating structured and disk-structured TENGs based on this mode also display much improved long-term stability and very high energy conversion efficiency. For the further improvement of the TENG’s output performance from the material aspect, we introduced the ion-injection method to study the maximum surface charge density of the TENG, and for the first time unraveled its dependence on the structural parameter—the thickness of the dielectric film. The above researches have largely propelled the development of TENGs for mechanical energy harvesting and brought a big potential of impacting people’s everyday life. Targeted at developing sustainable and independent power sources for electronic devices, efforts have been made in this dissertation to develop new fundamental science and new devices that hybridize the nanogenerator-based mechanical energy harvesting and the Li-ion-battery-based energy storage process into a single-step process or in a single device. Through hybridizing a piezoelectric nanogenerator with a Li-ion battery, a self-charging power cell has been demonstrated based on a fundamentally-new mechanical-to-electrochemcial process. The triboelectric nanogenerator as a powerful technology for mechanical energy harvesting has also been hybridized with a Li-ion battery into a self-charging power unit. This new concept of device can sustainably provide a constant voltage for the non-stop operation of electronic devices.

Energy harvesting is playing an increasingly important role in supplying power to monitoring and automation systems such as structural health monitoring using wireless sensor networks. This importance is most notable when the structures to be monitored are in rural, hazardous, or limited access environments such as busy highway bridges where traffic would be greatly disrupted during maintenance, inspection, or battery replacement. This thesis provides an overview of energy harvesting technologies and details the design, prototyping, testing, and simulation of an energy harvester which converts the vibrations of steel highway bridges into stored electrical energy through the use of a translational electromagnetic generator, to power a wireless sensor network for bridge structural health monitoring. An analysis of bridge vibrations, the use of nonlinear and linear harvester compliance, resonant frequency tuning, and bandwidth widening to maximize the energy harvested is presented. The design approach follows broad and focused background research, functional analysis, broad and focused concept generation and selection, early prototyping, parametric modeling and simulation, rapid prototyping with selective laser sintering, and laboratory testing with replicated bridge vibration. The key outcomes of the work are: a breadth of conceptual designs, extensive literature review, a prototype which harvests an average of 80µW under bridge vibration, a prototype which provides quick assembly, mounting and tuning, and the conclusion that a linear harvester out performs a nonlinear harvester with stiffening magnetic compliance for aperiodic vibrations such as those from highway bridges. / text