This dissertation concerns quasistatic torsional mirror's for optical applications. The intended main area of application is the use as switch in optical network's, replacing the conventional optical-electro-optical conversation. With these actuator's a new concept of electrostatic actuation has been realised. While the drive electrodes are integrated into the deflectable mirror, the whole counter electrode below the mirror plate remains at equal ground potential. The device is manufactured out of two parts using method's of silicon bulk mikro machining. A deflectable mirror plate, torsional spring's and the surrounding support structure are fabricated within the thin device layer at the top of BSOI material. The counter electrode is manufactured out of a highly doped silicon wafer. Both part's are assembled together by adhesive bonding at die level at the end. Since the driving potential is supplied to the mirror plate and the counter electrode is at ground level, lateral tolerances because of device assembly mismatches does not appear with the use of the new concept. In detail the mirror plate itself is divided into two seperate electrodes by a parallel arrangement of filled isolating trenches. The highly doped device layer provides electrical connection via the torsional spring's to the mirror electrodes. A quasistatic torsional actuation is performed if a dc-voltage is applied between one mirror side and the counter electrode. Several design's have been fabricated. The lateral dimension of the torsional mirror plate vary from 0,5 mm to 2,0 mm. The designed characteristic frequencies vary from 0,5 to 3 kHz. For quasistatic actuation the pull in angle vary from 1 to 5 degree and the pull in voltage goes up to several hundred volts. Accessorily the mirror plate is enclosed by a comb drive structure. So that the device could be used for low voltage resonant actuation or an capacitive position read out becomes feasible. Within this thesis the new concept has been verified and functionality has been demonstrated. Depending on their characteristic frequency, devices are suitable to perform quasistatic actuation within 10 ms. Experiments indicated that the electrical isolation damages irreversible at drive voltage's above 400 volt. It limits the maximum deflection of nearly all design's. At prototype actuators repeatability has been studied. No drift was observed in the static characteristic within several cycles for certain designs. Closed-loop position control is not mandatory for the actuators fabricated within this thesis. Mechanical stress inside the mirror plate causes deformation of the reflective surface larger than permitted by optical criteria. This paves the way for further device optimization, yield improvement and system integration.

Der Siegeszug der Mikroelektronik ist faszinierend. In den vergangenen Jahrzehnten bestimmte die Mikroelektronik das Geschehen in der Informationstechnik: Immer leistungsstärkere Computer, vernetzte Systeme und das Internet sind ohne Mikroelektronik nicht denkbar. Weltweit haben Mikroelektronik-Firmen ihre strategischen Ziele im Rahmen einer in regelmäßigen Abständen aktualisierten “Roadmap” niedergelegt. Alle gehen davon aus, dass die bisher zu beobachtende Steigerung der Leistungsfähigkeit mikroelektronischer Produkte auch in den nächsten Jahrzehnten fortgesetzt werden wird. Das bedeutet konkret, dass an vielen Stellen – auch in der heutigen Massenfertigung der Mikroelektronik – die charakteristischen Abmessungen der Einzelelemente im Nanometerbereich liegen, also eigentlich schon als Nanoelektronik bezeichnet werden können. Hinzu kommt ein weiteres, ebenso spannendes Feld: die Mikrosystemtechnik.

Vad karaktäriserar en kristall? Svaret på denna till synes enkla fråga blir kanske att det är en anordning av atomer uppradade i periodiska mönster. Så ordnade strukturer kan studeras genom att det uppträder så kallade Braggtoppar i röntgendiffraktionsmönstret. Om frågan gäller elektrontäthetsfördelningen, kanske svaret blir att denna är periodisk och grundar sig på elektronvågor som genomtränger hela kristallen. I och med att nya typer av ordnade system, så kallade kvasikristaller, upptäcks och framställs på artificiell väg blir svaren på dessa frågor mer intrikata. En kristall behöver inte bestå av enheter upprepade periodiskt i rummet, och den klassiska metoden att karaktärisera strukturer via röntgendiffraktionsmönstret kanske inte alls är den allena saliggörande. I denna avhandling visas att ett ordnat gitter vars röntgendiffraktionsmönster saknar inre struktur, dvs är av samma diffusa typ som vad ett oordnat material uppvisar, fortfarande kan ha elektronerna utsträckta över hela strukturen. Detta implicerar att det inte finns något enkelt samband mellan diffraktionsmönstret från gittret och dess fysikaliska egenskaper såsom t ex lokalisering av vågfunktionerna. Man talar om lokalisering när en vågfunktion är begränsad inom en del av materialet och inte utsträckt över hela dess längd, vilket är av betydelse när man vill avgöra huruvida ett material är en isolator, halvledare eller ledare. Det vittnar samtidigt om behovet av att söka efter andra karakteristika när man försöker beskriva skillnaden mellan ett ordnat och ett oordnat material, där den senare kategorin kan uppvisa lokalisering. Resultaten utgör en klassificering av det svåröverskådliga området aperiodiska gitter i en dimension. Det leder till hypotesen att ideala kvasikristaller, genererade med bestämda regler, har kontinuerligt energispektrum av fraktal natur. I reella material spelar korrelation en viktig roll. Vid icke-linjär återkoppling till gittret kan man erhålla intrinsiskt lokaliserade vågor, som i många avseenden beter sig som partiklar, solitoner, vilka har visat sig ha viktiga tillämpningar inom bl a optisk telekommunikation. Sådana vågors roll for lagring och transport av energi har undersökts i teoretiska modeller for optiska vågledare och kristaller där ljuset har en förmåga att manipulera sig självt. / Spectral and dynamical properties of electrons, phonons, electromagnetic waves, and nonlinear coherent excitations in one-dimensional modulated structures with long-range correlations are investigated from a theoretical point of view. First a proof of singular continuous electron spectrum for the tight-binding Schrödinger equation with an on-site potential, which, in analogy with a random potential, has an absolutely continuous correlation measure, is given. The critical behavior of such a localization phenomenon manifests in anomalous diffusion for the time-evolution of electronic wave packets. Spectral characterization of elastic vibrations in aperiodically ordered diatomic chains in the harmonic approximation is achieved through a dynamical system induced by the trace maps of renormalized transfer matrices. These results suggest that the zero Lebesgue measure Cantor-set spectrum (without eigenvalues) of the Fibonacci model for a quasicrystal is generic for deterministic aperiodic superlattices, for which the modulations take values via substitution rules on finite sets, independent of the correlation measure. Secondly, a method to synthesize and analyze discrete systems with prescribed long-range correlated disorder based on the conditional probability function of an additive Markov chain is effectively implemented. Complex gratings (artificial solids) that simultaneously display given characteristics of quasiperiodic crystals and amorphous solids on the Fraunhofer diffraction are designated. A mobility edge within second order perturbation theory of the tight-binding Schrödinger equation with a correlated disorder in the dichotomic potential realizes the success of the method in designing window filters with specific spectral components. The phenomenon of self-localization in lattice dynamical systems is a subject of interest in various physical disciplines. Lattice solitons are studied using the discrete nonlinear Schrödinger equation with on-site potential, modeling coherent structures in, for example, photonic crystals. The instability-induced dynamics of the localized gap soliton is found to thermalize according to the Gibbsian equilibrium distribution, while the spontaneous formation of persisting intrinsic localized modes from the extended out-gap soliton reveals a phase transition of the solution.

This discourse deals with a theoretical study of the radiation passage through a diffraction screen with non-zero size in the propagation direction of the radiation, i.e. the radiation passage through a three-dimensional object. Without any loss of generality, we solve the problem for cylindrical cavity in metal. The task exceeds evidently standard scalar theory of diffraction, thus we solve the problem using a waveguiding theory. Following the principles of the electromagnetic theory, we derive required formulae to determine mode distribution at the entry of the cavity. Further, we solve numerically the radiation propagation through the cavity, then we actually seek for radiation distribution at the very end of the cavity. This yields, with a help of the discrete Fourier transform, an intensity distribution of Fraunhofer diffraction pattern, consequently compared with an intesity distribution of the radiation pattern of Fraunhofer diffraction on infinitely thin circular opening having the radius of the cylinder cavity under study. A comparison of such patterns results to a conclusion, that the cavity length has a significatn influence on the diffraction pattern and more importantly, that the scalar diffraction theory appears incorrect for a coherent light passage through cavities longer than their radius squared. Similarly, the same conclusion is inversely proportional to a wavelength of the interacting radiation. Finally, we mention an existence of the so called "focal regime", when the radiation repeatedly exhibits roughly one order increased intensity on the symmetry axis of the cavity.

Die aktuelle Ausgabe des Newsletter für Freunde, Absolventen und Ehemalige der Technischen Universität Chemnitz.

An LKW-Achsen werden hohe Anforderungen an Sauberkeit und Lackhaftung gestellt. Lackbenetzungsstörende Substanzen (LBS) müssen deshalb vor dem Lackierprozess entfernt werden. Ohne eine inlinefähige 100%-Kontrolle auf LBS können die Qualitätsanforderungen nicht erreicht werden. Am Beispiel einer inlinefähigen Detektion von LBS wird auf die Vorgehensweise bei F&E-Projekten des Fraunhofer IVV eingegangen: Anpassung des Messsystems an den Anwendungsfall, Erprobung der Messung am realen Objekt, Erstellung von Konzepten zur Umsetzung der Mess- und Kontrollaufgabe, Integration des Detektionsmoduls in die Fertigungslinie

Aktuelle Arbeitsinhalte des Teams Industrielle Bauteilreinigung am Fraunhofer IVV Dresden sind filmische Verunreinigungen, Reinigungsanalysen und -optimierung, Reinigungstechnik, Verschmutzungssensorik und die Prozesskettenanalyse. Neben der vorhandenen Sachkenntnis zur wässrigen Bauteilreinigung erweitert das Fraunhofer IVV Dresden Know-How zu alternativen Verfahren zur Funktionsflächenreinigung wie der CO2-Schneestrahl-, Atmosphärendruckplasma- und Trockendampfreinigung. Im Vortrag wird deshalb das SAB/EFRE-geförderte Projekt 'Lernfabrik' vorgestellt, bei dem ein innovatives Reinigungszentrum für Anwender entsteht. Neben einem Zugang zu breitem Forschungsdienstleistungs- und Technologieportfolio werden zukünftig Beratungen und Schulungen angeboten.

In this doctoral thesis we investigate several experiments exploring the light orbital angular momentum and the Fraunhofer diffraction of light. Our investigations goes from coherent propagation, continue through incoherent propagation, arriving at semiclassical states used to explore one fundamental problem in quantum mechanics, i. e., the Born’s rule. Therefore, concerning coherent propagation of light with orbital angular momentum, we were first involved with studies about Fraunhofer diffraction of this type of light, by a single slit and by a square aperture. In the former work we studied the Fraunhofer diffraction when the slit center is aligned with the vortex center and when it is out of the vortex center. Concerning the work related to the square aperture, we show that the diffraction by such aperture is not sufficient to characterize the topological charge. Continuing the works, we also investigate the Fraunhofer diffraction of light with orbital angular momentum of fractional topological charge in the real space. An interesting phenomenon, the birth of a vortex, was studied at Fraunhofer plane, showing new conclusions in the study of fractional topological charges. Our studies continued with the Fraunhofer propagation of vortices in incoherent light, unveiling strong correlations between incoherent vortices. Finally, we explored semiclassical aspects of light with orbital angular momentum. Firstly, the topological charge determination via the spatial probability distribution of detection of photons diffracted by a triangular aperture. After, the validation of the Born’s rule using diffraction, by three slits disposed in a triangular configuration, of photons with an extra phase, i. e., the azimuthal phase added to the path phase. / Conselho Nacional de Desenvolvimento Científico e Tecnológico / Nesta tese de doutorado investigamos diversos experimentos que exploram o momento angular orbital da luz e a difração de Fraunhofer. Nossas investigações abrangeram desde propagação coerente, passando por propagação incoerente, chegando a estados semiclássicos usados para explorar uma questão fundamental da mecânica quântica, a saber, a regra de Born. Portanto, no que concerne à propagação de luz coerente com momento angular orbital, estivemos envolvidos primeiramente com estudos da difração de Fraunhofer deste tipo de luz, por uma fenda simples e por uma abertura quadrada. No primeiro trabalho estudamos a difração de Fraunhofer quando o centro da fenda está alinhado com o centro do vórtice e quando está deslocado do centro do vórtice. Quanto ao trabalho relacionado à abertura quadrada, mostramos que a difração de Fraunhofer por tal abertura não permite caracterizar a carga topológica. Prosseguindo os trabalhos, investigamos também a difração no plano de Fraunhofer de luz com momento angular de carga fracionária no plano real. Um interessante fenômeno, o nascimento de um vórtice, foi estudado no plano de Fraunhofer, mostrando novas conclusões nos estudos relacionados à carga fracionária. Nossos estudos continuaram com a propagação de Fraunhofer de vórtices em luz incoerente, revelando fortes correlações entre vórtices incoerentes. Por fim, exploramos aspectos semiclássicos da luz com momento angular orbital. Primeiramente, a determinação da carga topológica via distribuição de probabilidade espacial de detecção de fótons difratados por uma abertura triangular. Posteriormente, a validação da regra de Born utilizando difração, por três fendas simples dispostas na forma triangular, de fótons com uma fase extra, ou seja, a fase azimutal, adicionada à fase de caminho.

This diploma thesis deals with a design modification of detection part of the laboratory instrument for measuring the topography of rough surfaces – laser goniometric scatterometer (SM II). Design modification is based on replacement of so far used detector instead for the detector of higher quality with better measurement parameters. The first part of the diploma thesis contains theoretical basics, which are necessary to understand the relationship between scalar diffraction theory and scattering measurements of monochromatic light. The emphasis is on the importance of choosing appropriate detection coordinates, which are affecting the aberrations of detected diffracted light. The practical part is dedicated to improving the sensitivity of the detection part of the scatterometer SM II that is used in The laboratory of coherence optics at IFE FME BUT. This part justifies the choice of the detector which predetermines both the use of optical elements and the overall design of the detection part as the goniometer.

Der Siegeszug der Mikroelektronik ist faszinierend. In den vergangenen Jahrzehnten bestimmte die Mikroelektronik das Geschehen in der Informationstechnik: Immer leistungsstärkere Computer, vernetzte Systeme und das Internet sind ohne Mikroelektronik nicht denkbar. Weltweit haben Mikroelektronik-Firmen ihre strategischen Ziele im Rahmen einer in regelmäßigen Abständen aktualisierten “Roadmap” niedergelegt. Alle gehen davon aus, dass die bisher zu beobachtende Steigerung der Leistungsfähigkeit mikroelektronischer Produkte auch in den nächsten Jahrzehnten fortgesetzt werden wird. Das bedeutet konkret, dass an vielen Stellen – auch in der heutigen Massenfertigung der Mikroelektronik – die charakteristischen Abmessungen der Einzelelemente im Nanometerbereich liegen, also eigentlich schon als Nanoelektronik bezeichnet werden können. Hinzu kommt ein weiteres, ebenso spannendes Feld: die Mikrosystemtechnik.