Orientador: Elnatan Chagas Ferreira / Tese (doutorado) - Universidade Estadual de Campinas, Faculdade de Engenharia Elétrica e de Computação / Made available in DSpace on 2018-08-24T07:34:18Z (GMT). No. of bitstreams: 1 Spengler_AndersonWedderhoff_D.pdf: 6948072 bytes, checksum: 5751258b2120091b7b942e5664da4fb2 (MD5) Previous issue date: 2014 / Resumo: São apresentadas neste trabalho novas técnicas de condicionamento e processamento de sinais para girômetros interferométricos a fibra óptica (IFOG) em malha fechada óptica para sistemas de navegação inercial. Uma nova técnica de condicionamento do sinal do girômetro foi desenvolvida com o objetivo de minimização do offset da medida. As técnicas de modulações mais usadas na configuração de malha fechada óptica foram comparadas através de simulações e implementações físicas indicando algumas contribuições para melhoria delas. Uma nova técnica de modulação foi desenvolvida, com quatro níveis e seis fases. Os detalhes da montagem final são mostrados, enfatizando os pontos críticos da implementação, como os filtros utilizados no condicionamento do sinal e os componentes eletrônicos utilizados na geração do sinal de realimentação. Um girômetro foi desenvolvido utilizando a eletrônica apresentada neste trabalho e a parte óptica feita pela Optsensys. Ele apresentou deriva de aproximadamente a 0,01°/h e estabilidade do fator de escala na ordem de 10 ppm, valores compatíveis com girômetros da classe inercial. O angle random walk deste girômetro foi 0,0022°??hr, superior ao indicado para a classe inercial / Abstract: In this work are presented new techniques for signal conditioning and processing for inter-ferometric fiber optic gyrometers (IFOG) with optical closed-loop for inertial navigation systems. A new conditioning technique for the gyro signal was developed in order to reduce the offset. The most commonly used modulation techniques were compared through simulations and im-plementations indicating some improvements. A new modulation technique was developed, with four levels and six phases. Details of the final assembly are shown, emphasizing the critical points of implementation, such as the filters used in signal conditioning and electronic components used in the generation of the feedback signal. A gyro was developed using shown electronics and an optical made by Optsensys. It achieved a bias instability of approximately 0.01 °/ h and scale factor stability on the order of 10 ppm, consistent with the inertial class specifications. The gyro¿s angle random walk was 0.0022 °/?hr, this value is higher than that indicated for the inertial class / Doutorado / Eletrônica, Microeletrônica e Optoeletrônica / Doutor em Engenharia Elétrica

The low size and budget of typical nanosatellite missions limit the available sensors for attitude estimation. Relatively high noise MEMS gyroscopes often must be employed when accurate knowledge of the spacecraft’s angular velocity is necessary for attitude determination and control. This thesis derived and tested in simulation the “Virtual Gyroscope” algorithm, which replaced a standard gyroscope with an array of spatially distributed accelerometers for a 1U CubeSat mission. A MEMS accelerometer model was developed and validated using Root Allan Variance, and the Virtual Gyroscope was tested both in the open loop configuration and as a replacement for a gyroscope in a Multiplicative Extended Kalman Filter. It was found that the quality of the Virtual Gyroscope’s rate measurement improved with a larger and higher quality array, but the error in the estimate was very large. The low signal-to-noise ratio and the unknown bias in the accelerometers caused the angular velocity estimate from the accelerometer array to be too poor for use in the propagation step of the Kalman filter. The Kalman filter performed better with attitude measurements alone than with the Virtual Gyroscope, even when the attitude were delivered at a low rate with added noise. Overall, the current Virtual Gyroscope algorithm that is presented in this thesis is not suitable to replace a MEMS gyroscope in a nanosatellite mission, although there is room for future improvements using bias prediction for the individual accelerometers in the array.

No description available.

This thesis, for the first time in literature, introduces a comprehensive study about analog controller designs for MEMS vibratory gyroscopes. A controller of a MEMS gyroscope is mandatory for robust operation, which is insensitive to sensor parameters and ambient con- ditions. Errors in the controller design not only deteriorate transient performance, such as settling time and overshoot, but also cause performance degradation due to stability problems. Accordingly, true controller design for a gyroscope is critical work in terms of functionality and system performance. This thesis gives details for modeling, analysis of closed-loop sys- tems, and design procedure for drive and sense modes. Controller loops are implemented both with discrete components and in a CMOS technology as an integrated circuit. Simulation and test results verify the modeling, analysis, and design procedure discussed in this thesis. Drive mode system developed previously at METU is optimized by taking circuit imperfec- tions into account, which results in an improved transient performance of 50 msec settling time with no overshoot for a 4&mu / m drive mode oscillation amplitude. This system has a 60 phase margin with the help of the pole-zero cancellation technique. In addition, a new gener- iv ation and simple drive mode controller for tactical grade applications is designed and verified with a moderate transient performance. Two different sense mode controller design procedures are also developed according to a new base-band equivalent model derived for mismatch operation, as a new contribution to the literature. Firstly, a PID controller is designed for low frequency separation between the drive and sense modes of the gyroscope. Secondly, an integral controller is used for moderate and high mismatch amount. The controller system designed with the new base-band equivalent model improves the linearity, angle random walk, and bias instability by factors of 4, 9, and 3, respectively. Proposed drive and sense mode controllers are also designed and implemented using a 0.6&mu / m standard CMOS process. These chips are the first functional chips developed at METU de- signed for MEMS gyroscopes. Functionality of the proposed three systems, i.e., conventional drive mode controller, new generation drive mode controller, and sense mode controller, are verified with tests. The first prototypes result in 0.033 degree/sqrt/(hr) angle random walk and 3 degree/hr bias instability for open-loop operation, which is very promising and can be improved even further in future designs.

The objective of our research is to develop system architectures and CMOS circuits that interface with high-Q silicon microgyroscopes to implement navigation-grade angular rate sensors. The MEMS sensor used in this work is an in-plane bulk-micromachined mode-matched tuning fork gyroscope (M² – TFG ), fabricated on silicon-on-insulator substrate. The use of CMOS transimpedance amplifiers (TIA) as front-ends in high-Q MEMS resonant sensors is explored. A T-network TIA is proposed as the front-end for resonant capacitive detection. The T-TIA provides on-chip transimpedance gains of 25MΩ, has a measured capacitive resolution of 0.02aF /√Hz at 15kHz, a dynamic range of 104dB in a bandwidth of 10Hz and consumes 400μW of power. A second contribution is the development of an automated scheme to adaptively bias the mechanical structure, such that the sensor is operated in the mode-matched condition. Mode-matching leverages the inherently high quality factors of the microgyroscope, resulting in significant improvement in the Brownian noise floor, electronic noise, sensitivity and bias drift of the microsensor. We developed a novel architecture that utilizes the often ignored residual quadrature error in a gyroscope to achieve and maintain perfect mode-matching (i.e.0Hz split between the drive and sense mode frequencies), as well as electronically control the sensor bandwidth. A CMOS implementation is developed that allows mode-matching of the drive and sense frequencies of a gyroscope at a fraction of the time taken by current state of-the-art techniques. Further, this mode-matching technique allows for maintaining a controlled separation between the drive and sense resonant frequencies, providing a means of increasing sensor bandwidth and dynamic range. The mode-matching CMOS IC, implemented in a 0.5μm 2P3M process, and control algorithm have been interfaced with a 60μm thick M2−TFG to implement an angular rate sensor with bias drift as low as 0.1°/hr ℃ the lowest recorded to date for a silicon MEMS gyro.

Orientador: Elnatan Chagas Ferreira / Dissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Elétrica e de Computação / Made available in DSpace on 2018-08-13T16:12:21Z (GMT). No. of bitstreams: 1 Fernandes_AlecioPontes_M.pdf: 6269465 bytes, checksum: 0d2b04f6049ffb1685b947932894c75d (MD5) Previous issue date: 2009 / Resumo: Giroscópios são dispositivos usados para medir rotação angular, sendo extensivamente empregados em sistemas de guiamento, navegação e estabilização. Entre os diversos tipos de giroscópios, o IFOG (Giroscópio Interferométrico a Fibra Óptica) baseado no efeito de Sagnac é uma das soluções mais interessante, dada sua alta sensibilidade, resolução, ausência de partes móveis, confiabilidade, tamanho compacto e imunidade a interferências eletromagnéticas. Este trabalho descreve a implementação de um circuito digital de demodulação para IFOGs operando em malha aberta utilizando a técnica de zero-crossing (cruzamento em zero). A técnica implementada no circuito eletrônico descrito neste trabalho emprega um clock quase-síncrono para processamento, o que leva a um esquema de demodulação digital preciso, simples e de baixo custo. O circuito de demodulação proposto foi testado em laboratório, utilizando um sinal de giroscópio emulado. Os resultados experimentais medidos no protótipo mostraram que a resolução final do circuito de detecção é 1000 vezes melhor que a resolução possível de se alcançar em um demodulador zero-crossing digital convencional com clock síncrono / Abstract: Gyroscopes are devices used to measure angular orientation, being extensively employed for guidance, navigation and stabilization. Among the many types of gyroscopes, IFOG (Interferometer Fiber Optic Gyroscope), based on Sagnac effect, is the most interesting solution due to its high sensitivity, resolution, reliability, small size and EMI immunity. The present work describes a digital electronic circuit implementation for open-loop IFOGs using zero-crossing demodulation techniques. The technique used in the electronic circuit described in this work employs a quasi-synchronous clock for signal processing which leads to an accurate, simple and low cost digital demodulation scheme. The experimental results of the prototype showed that the final detection resolution is 1000 times better than one achieved by the conventional synchronous clock zero-crossing digital demodulator / Mestrado / Eletrônica, Microeletrônica e Optoeletrônica / Mestre em Engenharia Elétrica

Ringlaser dienen dazu, durch genaue inertiale Messungen Rotationen ohne Bezug auf ein externes Referenzsystem lokal und praktisch in Echtzeit zu bestimmen. Sie wurden in den 1970er Jahren insbesondere für die Navigation von Flugzeugen entwickelt. In den letzten Jahrzehnten wurden Ringlaser dann so weit verbessert, dass sie nun auch als eigenständige Messinstrumente in der Geodäsie Verwendung finden. Aufgrund der erreichbaren Genauigkeit ist es inzwischen möglich, Variationen in der Erdrotation mit der dafür erforderlichen Präzision zu detektieren. Der stabilste unter den Ringlasern, der so genannte Ringlaser "G" der geodätischen Fundamentalstation Wettzell, erreicht eine Sensitivität von 1.2 x 10 -11 nrad. Damit ist dieses Instrument in der Lage, Neigungen von bis zu 1 nrad (dies entspricht einem Signal von 0.2 mas in der Polbewegung, in Änderung der Rotationsgeschwindigkeit der Erde) im täglichen und halb-täglichen Frequenzband zu messen. Motivation dieser Arbeit ist es, der in den letzten Jahren erreichten Verbesserung des Auflösungsvermögens und der Sensorstabilität Rechnung zu tragen und die für die Auswertung von Ringlaserdaten benutzten geophysikalischen Modelle weiter zu verbessern, um dadurch die variable Rotation der Erde noch präziser vermessen zu können. Die dafür relevanten Effekte werden in den einzelnen Kapiteln dieser Arbeit separat behandelt. Nach einer Einführung werden in Kapitel 2 dieser Arbeit drei lokale, topozentrische Koordinatensysteme konstruiert, mit welchen sich das zu beobachtende Sagnac-Signal eines Ringlasers in der ersten post-Newtonischen Näherung der Allgemeinen Relativitätstheorie adäquat beschrieben lässt. In Kapitel 3 wird ein verbessertes Modell für die Orientierung des Ringlasers, basierend auf Ergebnissen von Dehant et al. (1999), entwickelt. Ein in den bislang benutzten Modellen vernachlässigter Neigungsterm konnte dabei identifiziert werden. Ein Modell für die retrograde tägliche Polbewegung der Erde wird in Kapitel 4 entwickelt. Ausgehend von den dynamischen Gleichungen für eine starre Erde werden diese um elastische Effekte und Einflüsse der Mehrschichtigkeit der Erde ergänzt und die entsprechenden Euler-Liouvilleschen Gleichungen und Transfer-Funktionen abgeleitet. Gezeiteneinflüsse des Ozeans, speziell die dadurch hervorgerufene sub-tägliche Variation der Erdrotation und ozeanische Auflasteffekte, werden in Kapitel 5 behandelt. Es wird gezeigt, dass die ozeanischen Signale größer als 10 -9 Δf0 (Δf0 348 Hz für den Ringlaser "G") sind und damit in den Messdaten des Ringlasers "G" nachweisbar sein sollten. Auf Grundlage der in dieser Arbeit entwickelten Modelle wurde eine 168 Tage (30. April 17. Oktober 2010) umfassenden Datenreihe des Ringlasers "G" in Kapitel 6 ausgewertet. Für die Auswertung wurde die Software ETERNA 3.40 genutzt und entsprechend angepasst. Die tägliche retrograde Polbewegung konnte dabei mit einer Genauigkeit von 0.15 mas bestimmt werden. Diese Auswertung beweist ein weiteres Mal die Existenz eines flüssigen Erdkerns. Des weiteren konnte gezeigt werden, dass bestimmte Gezeitenparameter des halb-täglichen Frequenzbandes durch lokale Effekte beeinflusst werden. Lokal gemessene Luftdruckdaten wurden benutzt, um den Einfluss atmosphärischer Auflasteffekte auf den Ringlaser "G" zu untersuchen. Die Ergebnisse dieser Arbeit zeigen, dass sich für diese Effekte kein signifikanter Einfluss nachweisen lässt. Die Arbeit schließt mit einer Zusammenfassung der Resultate, einer Beschreibung der sich ergebenden Schlussfolgerungen und einem Ausblick auf zukünftige Arbeiten auf dem Gebiet der Ringlaseranalyse. / Ring laser gyroscopes measure inertial rotations locally and in real-time without the need for an external reference system. Initially, they were developed for aircraft navigation applications in the 1970s. With the improvement of ring laser technology during the last decades large ring laser gyroscopes (RLGs) are nowadays used as independent geodetic instruments. Due to the achievable accuracy more and more geophysical signals become observable in the data. The G-ring located at the Geodetic Observatory Wettzell is reckoned as the most stable one amongst the running large RLGs and reaches a sensitivity of 1.2 x 10 -11 nrad. Therefore, the instrument is able to detect a tilt signal of 1 nrad (equivalent to a signal of 0.2 mas in polar motion or 10 -9 Ω0 in variation of Earth rotation rate) in the diurnal and semi-diurnal band. This motivates us to improve previous geophysical models and estimate associated tilt and Earth rotation signals, which are the focuses of this Thesis. Firstly, we construct three local proper topocentric reference frames and interpret the Sagnac effect observed by large RLGs in the first post-Newtonian (PN) approximation of Einstein's theory of gravity. Secondly, in Chapter 3 we develop an improved orientation model for the Sagnac platform, based on the numerical results of Dehant et al. (1999). A missing tilt term in previous RLG tilt models is found. In Chapter 4, based on the Euler-Liouville equations or nutation transfer functions for a rigid Earth, a purely elastic Earth, a two-layered Earth and a three-layered Earth, five retrograde diurnal polar motion models are computed with the HW95 tidal potential catalogue. Thirdly, ocean tide effects (two aspects: effects on sub-daily variations of Earth rotation and loading effect on tilt) are considered in Chapter 5. We show that the Sagnac signals induced by ocean tides are larger than 10 -9 Δf0 (Δf0 348 Hz for the G-ring) and their influences are visible in the G-ring. Fourthly, based on the above-mentioned improved models and 168 days (from Apr.30 to Oct.17 in 2010) of G-ring data, in the diurnal band, we estimate the retrograde diurnal polar motion signal with an accuracy of 0.15 mas. The Earth tide software ETERNA 3.40 was adopted and modified to analyse this data. Our estimation provides one more evidence for the existence of the Earth's fluid outer core. Furthermore, we found that the tidal parameters for the G-ring are affected by the cavity and topographic effects in the semi-diurnal band. The local air pressure record is used in order to investigate the atmospheric loading effect on the G-ring by a simple regression model. Nevertheless, the preliminary result shows that no significant influence from atmospheric loading on our estimation is found. This Thesis closes with a summary of the obtained results, conclusions and suggestions how the analysis of ring laser data could be improved in future work.

La résolution d'un problème d'estimation de l'état d'un système nécessite de disposer d'un modèle régissant l'évolution des variables d'état et de mesurer de manière directe ou indirecte l'ensemble ou une partie de ces variables d'état. Les travaux exposés dans ce mémoire de thèse portent sur la problématique d'estimation en présence de méconnaissances de modèle et de pertes de capteurs. La première partie de ce travail constitue la synthèse d'un dispositif d'estimation d'état pour systèmes non linéaires. Cela consiste à sélectionner un estimateur d'état et convenablement le régler, puis à concevoir algorithmiquement, à partir d'un critère introduit pour la circonstance, une redondance matérielle visant à compenser la perte de certains capteurs. La seconde partie de ce travail porte sur la conception, à l'aide de la variance d'Allan, d'un sous-modèle permettant de compenser les incertitudes d'un modèle d'état, ce sous-modèle étant utilisable par un filtre de Kalman. Ce travail a été exploité pour tenir compte de dérives gyroscopiques dans le cadre d'une navigation inertielle hybridée avec des mesures GPS par un filtre de Kalman contraint. Les résultats obtenus, issus d'expériences sur deux trajectoires d'avion, ont montré un comportement sain et robuste de l'approche proposée.

This thesis presents the development of wafer level vacuum packaging processes using Au-Si eutectic and glass frit bonding contributing to the improvement of packaging concepts for a variety of MEMS devices. In the first phase of this research, micromachined resonators and pirani vacuum gauges are designed for the evaluation of the vacuum package performance. These designs are verified using MATLAB and Coventorware finite element modeling tool. Designed resonators and pirani vacuum gauges and previously developed gyroscopes with lateral feedthroughs are fabricated with a newly developed Silicon-On-Glass (SOG) process. In addition to these, a process for the fabrication of similar devices with vertical feedthroughs is initiated for achieving simplified packaging process and lower parasitic capacitances. Cap wafers for both types of devices with lateral and vertical feedthroughs are designed and fabricated. The optimization of Au-Si eutectic bonding is carried out on both planar and non-planar surfaces. The bonding quality is evaluated using the deflection test, which is based on the deflection of a thinned diaphragm due to the pressure difference between inside and outside the package. A 100% yield bonding on planar surfaces is achieved at 390&ordm / C with a v holding time and bond force of 60 min and 1500 N, respectively. On the other hand, bonding on surfaces where 0.15&mu / m feedthrough lines exist can be done at 420&ordm / C with a 100% yield using same holding time and bond force. Furthermore, glass frit bonding on glass wafers with lateral feedthroughs is performed at temperatures between 435-450&ordm / C using different holding periods and bond forces. The yield is varied from %33 to %99.4 depending on the process parameters. The fabricated devices are wafer level vacuum packaged using the optimized glass frit and Au-Si eutectic bonding recipes. The performances of wafer level packages are evaluated using the integrated gyroscopes, resonators, and pirani vacuum gauges. Pressures ranging from 10 mTorr to 60 mTorr and 0.1 Torr to 0.7 Torr are observed in the glass frit packages, satisfying the requirements of various MEMS devices in the literature. It is also optically verified that Au-Si eutectic packages result in vacuum cavities, and further study is needed to quantify the vacuum level with vacuum sensors based on the resonating structures and pirani vacuum gauges.

Today's state-of-the-art rate vibratory gyroscopes use a large proof mass that vibrates at a low resonance frequency (3-30 kHz), a condition that creates a performance tradeoff in which the gyroscope can either offer large bandwidth or high resolution, but not both. This tradeoff led to the development of the capacitive bulk acoustic wave (BAW) silicon disk gyroscope, a new class of micromachined rate vibratory gyroscopes operating in the frequency range of 1-10MHz with high device bandwidth and shock/vibration tolerance. By scaling the frequency, BAW gyroscopes can provide low mechanical noise without sacrificing the high bandwidth performance needed for most commercial applications. The drive loop of the BAW gyroscope can also be exploited as a timing device that can be integrated in existing commercial systems to provide competitive clock performance to the state-of-the-art using less area and power. This dissertation discusses the design and implementation of a CMOS ASIC architecture that interfaces with a high-Q, wide-bandwidth BAW gyroscope and the challenges associated with optimizing the noise performance to achieve navigation-grade levels of sensitivity as the frequency is scaled into the MHz regime. Mathematical models are derived to describe the operation of the sensor and are used to generate equivalent electrical circuit models of the gyroscope. A design strategy is then outlined for the ASIC to optimize the drive loop and sense channel for power and noise, and steps toward reducing this noise as the system is pushed to navigation-grade performance are presented that maintain optimum system power consumption. After analyzing the BAW gyroscope and identifying a strategy for developing the drive and sense interface circuitry, a complete fully-differential ASIC is designed in 0.18μm CMOS to interface with a bulk acoustic wave (BAW) disk gyroscope. As an oscillator, the gyroscope provides an uncompensated clock signal at ~9.64 MHz with a temperature sensitivity of -27 ppm/°C and phase noise of -104 dBc at 1 kHz from carrier. When the complete ASIC is interfaced with the gyroscope, the sensor shows a measured rate sensitivity of 1.15 mV/o/s with an open-loop bandwidth of 280 Hz and a bias instability of 0.095 o/s, suitable for the rate-grade performance commonly required for commercial and consumer electronics applications. The system is recorded to have a total power of 1.6 mW and a total area of 0.64 mm2. Following the design of the interface ASIC, this dissertation investigates in further detail the requirements for designing and optimizing charge pumps for capacitive MEMS devices. Basic charge pump design is outlined, followed by an overview of techniques that can be used to generate larger polarization voltages from the ASIC. Lastly, an alternate measurement technique for measuring the rotation rate of the gyroscope is discussed. This technique is based on the phase-shift modulation of the gyroscope output signal when the device is driven with two orthogonal signal inputs and can be easily modified to provide either linear scale factor measurement or a linear calibration curve that can be used to track and adjust the variation of the sensor scale factor over time.