High performance microwave cavities for various circuits in the front-end of transceivers such as filters, diplexers, and oscillators have conventionally been built with rectangular or cylindrical metallic waveguides, which typically have low loss, high quality (Q) factor, and higher power handling capability. However such waveguide cavity based circuits made by traditional metal machining techniques tend to be costly, particularly for complex multiple cavity based circuits, and not well suited to high volume commercial applications and integration with planar microwave integrated circuits. As commercial transceiver applications progress toward higher microwave and millimetre-wave frequencies, the use of waveguide based circuits for compact, highly integrated transceivers is becoming feasible, along with an increasing need for cost effective batch fabrication processes for realizing complex metallic cavity circuits without sacrificing structural quality and performance. It is expected that significant advancements in both microwave performance and integration will be achieved through the development of novel technologies for realizing vertically oriented three-dimensional (3-D) structures.<p>Although improvement has been made on increasing the resonator Q factor by exploiting silicon micromachining and low-temperature cofired ceramics (LTCC) techniques, there are some drawbacks inherent to silicon cavity micromachining and LTCC technology, including non-vertical sidewalls, depth limitations, and surface roughness for the silicon resonator, and dielectric and radiation loss for LTCC resonator.<p>Polymer-based fabrication is a promising alternative to silicon etching and LTCC technologies for the batch fabrication of ultra-deep microwave cavity structures. In particular, deep X-ray lithography (XRL), as part of the LIGA process, is a microfabrication technology for precisely structuring polymers, and is increasingly being applied to RF/microwave microstructures. In addition to precise patterning capabilities, deep XRL is able to structure ultra-deep cavities due to the penetration ability of hard X-rays. Cavities of several millimetres are possible in a single lithographic exposure, and with excellent sidewall quality, including verticality near 90 degrees and surface roughness on the order of tens of nanometres. These structured polymers are subsequently used as electroforming templates for fabricating metal structures with correspondingly good sidewall quality.<p>This thesis investigates the possibility of realizing high-Q cavity resonators and filters at microwave frequencies using the LIGA microfabrication process. Finite element method (FEM) electromagnetic simulation results based on the cavity models representing different fabrication conditions show that smooth LIGA cavity structures result in promising Q improvement over silicon and LTCC structures. And the potential advantages of LIGA resonators are more dramatic with cavity height and increasing operating frequency. Deep polymer cavity structures (1.8 mm) fabricated using deep XRL demonstrate excellent sidewall verticality in the PMMA structure, with only slight shrinkage at the top surface of 8.5 2.5 mm in either lateral dimensions. This corresponds to sidewalls with verticality between 89.82o and 89.9o. The structure polymers are subsequently used as templates for metal electroforming to produce cavity resonators. The performance of the resonator is measured in a planar environment. A RT/duroid6010 soft substrate patterned with coupling structures forms the sixth side, and thus completes the cavity. Despite the rather crude test assembly for the sixth side made by clamping, the measured resonator has a high unloaded Q of 2122.2 85 at the resonant frequency of 24 GHz, indicating that LIGA cavities are especially promising for high performance applications. <p>The relatively simple, single-step lithographic exposure also facilitates extension to more structurally complicated waveguide and multiple cavity-based circuits. This research work also proposes a high performance ``split-post' 3-pole cylindrical post coupled Chebyshev bandpass filter suitable for LIGA fabrication. In addition to potentially batch fabricating such a filter lithographically by exposing the entire waveguide depth in a single exposure, the filter structures composed of three cavities with metallic multi-post coupling would be extremely difficult to fabricate using traditional machining techniques, due to the extremely fine post structure and high vertical aspect ratio required. However, these types of structures could be ideal for LIGA fabrication, which offers sub-micron features, aspect ratios of 100:1 or higher, resist thicknesses of up to 3 mm, and almost vertical and optically smooth sidewalls. Also, representative LIGA sidewall roughness is used to predict very low loss and high performance, suggesting that complicated structures with multiple resonator circuits and high internal components with high aspect ratios are possible.

High performance microwave cavities for various circuits in the front-end of transceivers such as filters, diplexers, and oscillators have conventionally been built with rectangular or cylindrical metallic waveguides, which typically have low loss, high quality (Q) factor, and higher power handling capability. However such waveguide cavity based circuits made by traditional metal machining techniques tend to be costly, particularly for complex multiple cavity based circuits, and not well suited to high volume commercial applications and integration with planar microwave integrated circuits. As commercial transceiver applications progress toward higher microwave and millimetre-wave frequencies, the use of waveguide based circuits for compact, highly integrated transceivers is becoming feasible, along with an increasing need for cost effective batch fabrication processes for realizing complex metallic cavity circuits without sacrificing structural quality and performance. It is expected that significant advancements in both microwave performance and integration will be achieved through the development of novel technologies for realizing vertically oriented three-dimensional (3-D) structures.<p>Although improvement has been made on increasing the resonator Q factor by exploiting silicon micromachining and low-temperature cofired ceramics (LTCC) techniques, there are some drawbacks inherent to silicon cavity micromachining and LTCC technology, including non-vertical sidewalls, depth limitations, and surface roughness for the silicon resonator, and dielectric and radiation loss for LTCC resonator.<p>Polymer-based fabrication is a promising alternative to silicon etching and LTCC technologies for the batch fabrication of ultra-deep microwave cavity structures. In particular, deep X-ray lithography (XRL), as part of the LIGA process, is a microfabrication technology for precisely structuring polymers, and is increasingly being applied to RF/microwave microstructures. In addition to precise patterning capabilities, deep XRL is able to structure ultra-deep cavities due to the penetration ability of hard X-rays. Cavities of several millimetres are possible in a single lithographic exposure, and with excellent sidewall quality, including verticality near 90 degrees and surface roughness on the order of tens of nanometres. These structured polymers are subsequently used as electroforming templates for fabricating metal structures with correspondingly good sidewall quality.<p>This thesis investigates the possibility of realizing high-Q cavity resonators and filters at microwave frequencies using the LIGA microfabrication process. Finite element method (FEM) electromagnetic simulation results based on the cavity models representing different fabrication conditions show that smooth LIGA cavity structures result in promising Q improvement over silicon and LTCC structures. And the potential advantages of LIGA resonators are more dramatic with cavity height and increasing operating frequency. Deep polymer cavity structures (1.8 mm) fabricated using deep XRL demonstrate excellent sidewall verticality in the PMMA structure, with only slight shrinkage at the top surface of 8.5 2.5 mm in either lateral dimensions. This corresponds to sidewalls with verticality between 89.82o and 89.9o. The structure polymers are subsequently used as templates for metal electroforming to produce cavity resonators. The performance of the resonator is measured in a planar environment. A RT/duroid6010 soft substrate patterned with coupling structures forms the sixth side, and thus completes the cavity. Despite the rather crude test assembly for the sixth side made by clamping, the measured resonator has a high unloaded Q of 2122.2 85 at the resonant frequency of 24 GHz, indicating that LIGA cavities are especially promising for high performance applications. <p>The relatively simple, single-step lithographic exposure also facilitates extension to more structurally complicated waveguide and multiple cavity-based circuits. This research work also proposes a high performance ``split-post' 3-pole cylindrical post coupled Chebyshev bandpass filter suitable for LIGA fabrication. In addition to potentially batch fabricating such a filter lithographically by exposing the entire waveguide depth in a single exposure, the filter structures composed of three cavities with metallic multi-post coupling would be extremely difficult to fabricate using traditional machining techniques, due to the extremely fine post structure and high vertical aspect ratio required. However, these types of structures could be ideal for LIGA fabrication, which offers sub-micron features, aspect ratios of 100:1 or higher, resist thicknesses of up to 3 mm, and almost vertical and optically smooth sidewalls. Also, representative LIGA sidewall roughness is used to predict very low loss and high performance, suggesting that complicated structures with multiple resonator circuits and high internal components with high aspect ratios are possible.

A novel CMOS tunable bandpass filter and a novel voltage controlled oscillator are proposed. Both circuits are designed using the UMC 0.5£gm CMOS process parameters. The CMOS tunablebandpass filter is realised by using the intrinic parasitic capacitance of the MOS transistor. This filter has neither on-chip planar inductor nor poly-capacitance; therefore, the chip area is reduced. Simulation results show that the bandpass filter is tunable in the range between 190MHz and 347MHz. Therefore, the filter is suitable for the IF filter application that is between 200MHz and 300MHz. The Q-factor is also tunable and has a maximum value of 983. Applying the circuit of the bandpass filter, a second order voltage controlled oscillator is designed. Simulation results show that the voltage controllable oscillator is tunable in the range between 444MHz and 746MHz.

Master of Science / Department of Electrical and Computer Engineering / William B. Kuhn / Inductors have been produced in LTCC in a unique manner that increases the cross-sectional area of the conductor. The method uses metal-filled trenches and cavities in the tape to create conductors which are as thick as an entire layer of tape. This geometry helps to compensate for high-frequency non-idealities such as skin effect, current crowding, and proximity effect. An array of test structures has been fabricated. The measured results achieved inductors with Qs of 60 and suggest that Qs up to 100 are possible. Accurate measurements of such values require careful consideration of error sources and are discussed. A potential application of the inductors is presented in a two-pole filter, which has been modeled and fabricated. Lastly, a list of conclusions which would be helpful for future work on this subject is presented.

With the rapid growth in the wireless industry there has been increasing demand to make devices with better performance. This means lower power, lower voltage, smaller, and in general more efficient. This has lead to the interest in and necessity for good quality passive components. Good quality passive components make better filters, baluns, voltage controlled oscillators, and matching networks. There has been a lot of work over the last ten years focused on improving the quality of inductors. Typical inductors fabricated on silicon have Q factors of approximately 10. This is because silicon is conductive and therefore acts like a lossy ground plane and develops interfering currents. Improvements that have been attempted include thicker metal layers, thicker dielectric layers, patterned ground shields, as well as using multiple metal layers. These methods, however, still do not improve inductors to the quality of those built on insulating substrates such as glass. The main successful attempt on silicon has been where the inductor coil is released so that it is in the air supported by posts. In some work the inductor coil is raised 50 to 100??m above the underpass by methods like etching or photoresist molding. The suspended inductor approach was applied to an insulating substrate to fabricate and characterize unique suspended inductors and transformers. Inductors were released to have 1??m of air underneath the coil by the use of a release etch. Transformers were made in a similar way except two released layers where used. The top coil, done in plated gold, was released as well as an interconnection layer. Such a small air gap and the transformers with two released metal layers are a couple of the unique features of this thesis work. The devices were characterized up to 20GHz before and after release. An improvement in the peak Q factor (up to 70), as well as in the self-resonance frequency (up to 4GHz higher) was noticed after release. This is expected due to the reduction in parasitics. The results were then compared with simulations and a couple closed form expressions, both of which were able to give a reasonable accuracy. There was also success in getting good high frequency transformers. Even though some good high-Q inductors were fabricated as part of this thesis, there is still further work that can be done. This includes packaging, integration with capacitors, and further optimization.

With the rapid growth in the wireless industry there has been increasing demand to make devices with better performance. This means lower power, lower voltage, smaller, and in general more efficient. This has lead to the interest in and necessity for good quality passive components. Good quality passive components make better filters, baluns, voltage controlled oscillators, and matching networks. There has been a lot of work over the last ten years focused on improving the quality of inductors. Typical inductors fabricated on silicon have Q factors of approximately 10. This is because silicon is conductive and therefore acts like a lossy ground plane and develops interfering currents. Improvements that have been attempted include thicker metal layers, thicker dielectric layers, patterned ground shields, as well as using multiple metal layers. These methods, however, still do not improve inductors to the quality of those built on insulating substrates such as glass. The main successful attempt on silicon has been where the inductor coil is released so that it is in the air supported by posts. In some work the inductor coil is raised 50 to 100µm above the underpass by methods like etching or photoresist molding. The suspended inductor approach was applied to an insulating substrate to fabricate and characterize unique suspended inductors and transformers. Inductors were released to have 1µm of air underneath the coil by the use of a release etch. Transformers were made in a similar way except two released layers where used. The top coil, done in plated gold, was released as well as an interconnection layer. Such a small air gap and the transformers with two released metal layers are a couple of the unique features of this thesis work. The devices were characterized up to 20GHz before and after release. An improvement in the peak Q factor (up to 70), as well as in the self-resonance frequency (up to 4GHz higher) was noticed after release. This is expected due to the reduction in parasitics. The results were then compared with simulations and a couple closed form expressions, both of which were able to give a reasonable accuracy. There was also success in getting good high frequency transformers. Even though some good high-Q inductors were fabricated as part of this thesis, there is still further work that can be done. This includes packaging, integration with capacitors, and further optimization.

Microwave tunable filters are key components in radar, satellite, wireless, and various dynamic communication systems. Compared to a traditional filter, a tunable filter is able to dynamically pass the required signal and suppress the interference from adjacent channels. In reconfigurable systems, tunable filters are able to adapt to dynamic frequency selection and spectrum access. They can also adapt to bandwidth variations to maximize data transmission, and can minimize interferences from or to other users. Tunable filters can be also used to reduce size and cost in multi-band receivers replacing filter banks. However, the tunable filter often suffers limited application due to its relatively low Q, noticeable return loss degradation, and bandwidth changing during the filter tuning. The research objectives of this thesis are to investigate the feasibility of designing high Q tunable filters based on dielectric resonators (DR) and coaxial resonators. Various structures and tuning methods that yield relatively high unloaded Q tunable filters are explored and developed. Furthermore, the method of designing high Q tunable filters with a constant bandwidth and less degradation during the tuning process has been also investigated. A series of novel structures of dielectric resonators have been proposed to realize in a high Q miniature tunable filters. The first type of TME mode DR filter is designed to be tuned by piezoelectric bending actuators outside the cavity, and has achieved a tuning range from 4.97 to 5.22 GHz and unloaded Q better than 536 over the tuning range. The second type of TME mode tunable filters are integrated with various tuning elements: GaAs varactors, MEMS switches, and MEMS capacitor banks are employed. The designed filter with MEMS switches operates at 4.72 GHz, and has achieved a tuning ratio of 3.5% with Q better than 510 over the tuning range. The designed filter with GaAs varactors operates at 4.92 GHz, and has achieved a tuning ratio of 2% with Q better than 170 over the tuning range. Finally, the designed filter with MEMS capacitor bank operates at 5.11 GHz, delivering a tuning ratio of 3.5% with Q better than 530 over the tuning range. Cavity combline/coaxial resonators are also used in the design of high Q tunable filters. This thesis presents a novel approach to design a tunable cavity combline filter tuned by a MEMS switched capacitor bank. Instead of mechanically moving the tuning disk, the cavity combline filter is tuned with capacitances loading on the tuning disks, which are electrically adjusted by MEMS switched capacitor bank. The assembled 2-pole filter operates at 2.5 GHz with a bandwidth of 22 MHz, a tuning range of 110 MHz and a Q better than 374 over the tuning range. The assembled 6-pole filter operates at 2.6 GHz with a bandwidth of 30 MHz and has a tuning range of 44 MHz. Finally, the design of high Q tunable filter with constant bandwidth is explored. A 4-pole high Q cavity combline tunable filter with constant bandwidth is demonstrated. The tuning has been realized manually and by using a piezoelectric motor respectively. The designed filter operates at 2.45 GHz and has achieved a stable bandwidth of 30 ??1.1 MHz over a tuning range of 400 MHz and an unloaded Q better than 3000. This design method for a constant bandwidth filter is applicable to both cavity combline filters and dielectric resonator filters.

Recent developments in quantum information processing have presented new and interesting ways to perform advanced algorithms and improve signal to noise ratios. Examples of these include optimal control theory pulse generation algorithms and the usage of high Q-factor resonators. However, these developments are blocked by current spectrometer designs. This thesis details the design and testing of a new spectrometer with sufficient accuracy, bandwidth, and control to implement these advances. The proposed solution is to use an FPGA-based development board together with custom computer software. This gives access to high-speed analogue inputs and outputs, as well as digital output pins. The spectrometer is then used in two X-band electron spin resonance experiments, showing how the advantages of the system allow for superior results to that possible with the previous equipment. In addition, the setup is used in a Nitrogen Vacancy (NV) system where a rabi experiment is performed.

The objective of this research dissertation is to design and implement two novel micromachined silicon vibratory gyroscopes, which attempt to incorporate all the necessary attributes of sub-deg/hr noise performance requirements in a single framework: large resonant mass, high drive-mode oscillation amplitudes, large device capacitance (coupled with optimized electronics), and high-Q resonant mode-matched operation. Mode-matching leverages the high-Q (mechanical gain) of the operating modes of the gyroscope and offers significant improvements in mechanical and electronic noise floor, sensitivity, and bias stability. The first micromachined silicon vibratory gyroscope presented in this work is the resonating star gyroscope (RSG): a novel Class-II shell-type structure which utilizes degenerate flexural modes. After an iterative cycle of design optimization, an RSG prototype was implemented using a multiple-shell approach on (111) SOI substrate. Experimental data indicates sub-5 deg/hr Allan deviation bias instability operating under a mode-matched operating Q of 30,000 at 23ºC (in vacuum). The second micromachined silicon vibratory gyroscope presented in this work is the mode-matched tuning fork gyroscope (M2-TFG): a novel Class-I tuning fork structure which utilizes in-plane non-degenerate resonant flexural modes. Operated under vacuum, the M2-TFG represents the first reported high-Q perfectly mode-matched operation in Class-I vibratory microgyroscope. Experimental results of device implemented on (100) SOI substrate demonstrates sub-deg/hr Allan deviation bias instability operating under a mode-matched operating Q of 50,000 at 23ºC. In an effort to increase capacitive aspect ratio, a new fabrication technology was developed that involved the selective deposition of doped-polysilicon inside the capacitive sensing gaps (SPD Process). By preserving the structural composition integrity of the flexural springs, it is possible to accurately predict the operating-mode frequencies while maintaining high-Q operation. Preliminary characterization of vacuum-packaged prototypes was performed. Initial results demonstrated high-Q mode-matched operation, excellent thermal stability, and sub-deg/hr Allan variance bias instability.

abstract: Micro-electro-mechanical systems (MEMS) film bulk acoustic resonator (FBAR) demonstrates label-free biosensing capabilities and is considered to be a promising alternative of quartz crystal microbalance (QCM). FBARs achieve great success in vacuum, or in the air, but find limited applications in liquid media because squeeze damping significantly degrades quality factor (Q) and results in poor frequency resolution. A transmission-line model shows that by confining the liquid in a thickness comparable to the acoustic wavelength of the resonator, Q can be considerably improved. The devices exhibit damped oscillatory patterns of Q as the liquid thickness varies. Q assumes its maxima and minima when the channel thickness is an odd and even multiple of the quarter-wavelength of the resonance, respectively. Microfluidic channels are integrated with longitudinal-mode FBARs (L-FBARs) to realize this design; a tenfold improvement of Q over fully-immersed devices is experimentally verified. Microfluidic integrated FBAR sensors have been demonstrated for detecting protein binding in liquid and monitoring the Vroman effect (the competitive protein adsorption behavior), showing their potential as a promising bio-analytical tool. A contour-mode FBAR (C-FBAR) is developed to further improve Q and to alleviate the need for complex integration of microfluidic channels. The C-FBAR consists of a suspended piezoelectric ring made of aluminum nitride and is excited in the fundamental radial-extensional mode. By replacing the squeeze damping with shear damping, high Qs (189 in water and 77 in human whole blood) are obtained in semi-infinite depth liquids. The C-FBAR sensors are characterized by aptamer - thrombin binding pairs and aqueous glycerine solutions for mass and viscosity sensing schemes, respectively. The C-FBAR sensor demonstrates accurate viscosity measurement from 1 to 10 centipoise, and can be deployed to monitor in-vitro blood coagulation processes in real time. Results show that its resonant frequency decreases as the viscosity of the blood increases during the fibrin generation process after the coagulation cascade. The coagulation time and the start/end of the fibrin generation are quantitatively determined, showing the C-FBAR can be a low-cost, portable yet reliable tool for hemostasis diagnostics. / Dissertation/Thesis / Ph.D. Electrical Engineering 2011