Este trabalho apresenta um novo modelo numérico para simulação de juntas de argamassa em estruturas de alvenaria no plano via método dos elementos finitos. Neste modelo, blocos de alvenaria e juntas de argamassa são representados separadamente. Elementos finitos com alta razão de aspecto são utilizados para representar as juntas de argamassa e são inseridos na malha de elementos finitos através de uma técnica de fragmentação de malha. A principal vantagem desta técnica consiste na utilização de modelos constitutivos contínuos para representar regiões descontínuas, uma vez que seu campo de deformações quando a altura do elemento de interface tende a zero é semelhante ao apresentado pela abordagem de aproximação contínua de descontinuidades fortes. Um modelo constitutivo contínuo baseado na mecânica do dano foi desenvolvido para representar o comportamento dos elementos de interface. Este modelo consegue representar a abertura e fechamento de fraturas, bem como o efeito de atrito em função da tensão de confinamento nas interfaces. Como o objetivo deste trabalho consiste na simulação da formação e propagação de fraturas ao longo das juntas de argamassa, comportamento elástico linear foi atribuindo aos elementos triangulares de três nós utilizados na discretização dos blocos de alvenaria. Vários exemplos numéricos são apresentados. Inicialmente, testes básicos são realizados para demonstrar as principais características do modelo quando submetido a carregamentos de tração, compressão e cisalhamento. Posteriormente, estruturas de alvenaria submetidas a carregamentos estáticos são analisadas e os resultados comparados com as respostas experimentais a fim de validar o modelo proposto. A técnica proposta se mostrou bastante promissora para simulação da formação e propagação de fratura em juntas de argamassa de estruturas de alvenaria. / This work presents a novel numerical model to simulate the failure process in masonry structures subjected to static loads via finite element method. Brick and mortar joints are modeled separately with their own constitutive equations. Interface finite element with high aspect ratio are used to simulate the mortar interface and inserted by the mesh fragmentation technique. The main advantage of this strategy is supported by the fact that, as the aspect ratio of a standard low-order solid finite element increases, the element strains also increase, approaching the same kinematics as the Continuum Strong Discontinuity Approach. A constitutive model was developed, based on the continuum damage mechanics, in order to represent the behavior of the interface finite elements. This model is able to simulate the creation and propagation of cracks, as well as, the frictional effects in dependence on stress confinement on the interfaces. Furthermore, as the objective of this work aims to simulate the failure in the mortar joints, the brick elements are assumed as linear elastic material. Three node standard triangular finite element are used to represent the bricks. Several numerical models are carried out. Initially, basics tests are show in order to demonstrate the main characteristics of the proposed model subjected to tensile, compression and shear loads. Subsequently, masonry structures are subjected to static loads are analyzed and the results compared with the experimental responses in order to validate the proposed model. This technique proved to be very promising for the simulation of failure onset and propagation in mortar joints of masonry structures.

No description available.

The aim of this investigation was to review literature for the most suitable aeroelastic tailoring analysis tools for long slender composite structures, and integrate them into an aeroelastic tailoring process. The JS1C Revelation is a high performance sailplane made from modern composites, mostly carbon fibre. This has the advantage of being more rigid than traditional engineering materials, thereby reducing the effects of the twisting deflections on these long slender structures due to aerodynamic loads. The implementing of aeroelastic tailoring can create bend-twist couples for performance improvements. Composites enable the use of aeroelastic tailoring to improve gliding performance. Flaperon 3 of the JS1C 21 m was used as the design problem for aeroelastic tailoring. Aeroelastic tailoring was done by analysing the flaperon structure at the different layup angles to determine the correct design point to tailor the structure to improve aerodynamic performance at thermalling and cruise, but mostly cruise since it accounts for 70% of the flight time. The composite structure analysis tool has the objective to get results during concept design. This directed the line of research of analysis tools to a solution method of two dimensional cross-section mesh properties projected onto a one dimensional beam. The literature of Hodges had good verification and published data on the analysis tools. The analysis tools comprised of three programs that were not very user friendly. Thus the author compiled a Matlab program as a user interface tool to run the three programs together. The aeroelastic tailoring process systematically works through the known design variables and objectives, which are given as inputs to the analysis tool. The analysis tool plots the coupling data versus layup angle. From this the best layup angles for a sought-after bend-twist couple is used to aeroelastically tailor the wing. The composite structure analysis tool’s accuracy was verified by analysing cantilever beam deflections and comparing the results with hand calculations and SolidWorks Simulation FEM results. The analysis tool’s accuracy was further verified by comparing the aerodynamic torsional load’s twist deflections with thin walled tube theory. The analysis tool was validated by applying a torsional load at the tip of a JS1C production Flaperon 3 in an experimental setup and then comparing this result with the Flaperon 3 modelled in the analysis tool. These comparisons also ensured that the model’s composite material properties and the meshing of the flaperon cross-sectional properties were correct. This aeroelastic tailoring was validated with the advantage of then being used to improve the aerodynamic performance of the JS1C Revelation 21 m tip’s flaperon. This improvement could be made by making use of a tailored bend-twist couple to reduce the effect of the aerodynamic load’s twist deflections. A test sample of the JS1C 21 m flaperon 3 was used to validate aeroelastic tailoring. The test sample was designed to be 1 m in length and have all the specified tailoring coupling characteristics that could improve the aerodynamic performance of the JS1C 21 m flaperon 3. The test sample was manufactured according to Jonker Sailplanes manufacturing standards and experimentally set up with the same applied deflections as in the analysis tool. The calculated bend-twist values and the experimental setup results were similar with a negligible difference, assuming small displacements and an aspect ratio greater than 13; this confirmed that the PreVABS/VABS/GEBT composite structure analysis tool could be used in aeroelastic tailoring to predict and design the bend-twist couple needed to improve the aerodynamic performance of the JS1C 21 m. While the twist behaviour of Flaperon 3 was improved by the tailored bend-twist couple, it was still necessary to add pre-twist as well, to fully address the effects of twisting by aerodynamic forces. / MIng (Mechanical Engineering), North-West University, Potchefstroom Campus, 2014

The aim of this investigation was to review literature for the most suitable aeroelastic tailoring analysis tools for long slender composite structures, and integrate them into an aeroelastic tailoring process. The JS1C Revelation is a high performance sailplane made from modern composites, mostly carbon fibre. This has the advantage of being more rigid than traditional engineering materials, thereby reducing the effects of the twisting deflections on these long slender structures due to aerodynamic loads. The implementing of aeroelastic tailoring can create bend-twist couples for performance improvements. Composites enable the use of aeroelastic tailoring to improve gliding performance. Flaperon 3 of the JS1C 21 m was used as the design problem for aeroelastic tailoring. Aeroelastic tailoring was done by analysing the flaperon structure at the different layup angles to determine the correct design point to tailor the structure to improve aerodynamic performance at thermalling and cruise, but mostly cruise since it accounts for 70% of the flight time. The composite structure analysis tool has the objective to get results during concept design. This directed the line of research of analysis tools to a solution method of two dimensional cross-section mesh properties projected onto a one dimensional beam. The literature of Hodges had good verification and published data on the analysis tools. The analysis tools comprised of three programs that were not very user friendly. Thus the author compiled a Matlab program as a user interface tool to run the three programs together. The aeroelastic tailoring process systematically works through the known design variables and objectives, which are given as inputs to the analysis tool. The analysis tool plots the coupling data versus layup angle. From this the best layup angles for a sought-after bend-twist couple is used to aeroelastically tailor the wing. The composite structure analysis tool’s accuracy was verified by analysing cantilever beam deflections and comparing the results with hand calculations and SolidWorks Simulation FEM results. The analysis tool’s accuracy was further verified by comparing the aerodynamic torsional load’s twist deflections with thin walled tube theory. The analysis tool was validated by applying a torsional load at the tip of a JS1C production Flaperon 3 in an experimental setup and then comparing this result with the Flaperon 3 modelled in the analysis tool. These comparisons also ensured that the model’s composite material properties and the meshing of the flaperon cross-sectional properties were correct. This aeroelastic tailoring was validated with the advantage of then being used to improve the aerodynamic performance of the JS1C Revelation 21 m tip’s flaperon. This improvement could be made by making use of a tailored bend-twist couple to reduce the effect of the aerodynamic load’s twist deflections. A test sample of the JS1C 21 m flaperon 3 was used to validate aeroelastic tailoring. The test sample was designed to be 1 m in length and have all the specified tailoring coupling characteristics that could improve the aerodynamic performance of the JS1C 21 m flaperon 3. The test sample was manufactured according to Jonker Sailplanes manufacturing standards and experimentally set up with the same applied deflections as in the analysis tool. The calculated bend-twist values and the experimental setup results were similar with a negligible difference, assuming small displacements and an aspect ratio greater than 13; this confirmed that the PreVABS/VABS/GEBT composite structure analysis tool could be used in aeroelastic tailoring to predict and design the bend-twist couple needed to improve the aerodynamic performance of the JS1C 21 m. While the twist behaviour of Flaperon 3 was improved by the tailored bend-twist couple, it was still necessary to add pre-twist as well, to fully address the effects of twisting by aerodynamic forces. / MIng (Mechanical Engineering), North-West University, Potchefstroom Campus, 2014

A near-field technique known as evanescent interferometric lithography allows for high resolution imaging. However its primary limitation is that the image exponentially decays within the photoresist due to physical limits. This thesis aims to overcome this limitation and presents a method to considerably enhance the depth of focus of images created using evanescent interferometric lithography by using a material underlay beneath the photoresist. A key enabler of this is the understanding that evanescent fields couple to surface states and operating within proximity of a resonance, the strength of the coupling allows for considerable energy extraction from the incident beam and redistribution of this energy in a photoresist cavity. This led to the analysis of the Fresnel equations, which suggested that such coupling was in fact the result of an enhanced reflectance that takes place at boundaries of carefully chosen materials. While it is known that metals and lossy dielectrics result in surface plasmon polaritons (SPP) and surface exciton polaritons (SEP) as conventional solutions to the Fresnel reflection equations for the TM polarization of light, there is no such naturally occurring surface state that allows evanescent wave enhancement with the TE polarization of light. Further investigation of the Fresnel reflection equations revealed both for TM and TE that in fact another solution exists that is but unconventional to enhance the reflectivity. This solution requires that one of the media have a negative loss. This is a new type of surface resonance that requires that one of the media be a gain medium; not one in the optical pumped sense but one that would naturally supply energy to a wave to make it grow. This new surface resonance is also a key result of this thesis. Clearly, however this is only a hypothetical solution as a real gain medium would violate the conservation of energy. However, as it is only the reflectance of this gain medium that is useful for evanescent wave enhancement, in fact a multilayered stack consisting of naturally occurring materials is one way to achieve the desired reflectivity. This would of course be only an emulation of the reflectivity aspect of the gain medium. This multilayered stack is then an effective gain medium for the reflectivity purposes when imaging is carried out at a particular NA at a particular wavelength. This proposal is also a key idea of this thesis. At λ = 193 nm, this method was used to propose a feasible design to image high resolution structures, NA = 1.85 at an aspect ratio of ~3.2. To experimentally demonstrate the enhancements, a new type of solid immersion test bed, the solid immersion Lloyd's mirror interference lithography test-bed was constructed. High quality line and space patterns with a half-pitch of 55.5 nm were created using λ = 405 nm, corresponding to a NA of 1.824, that is well in the evanescent regime of light. Image depths of 33-40 nm were seen. Next, the evanescent image was coupled to an effective gain medium made up of a thin layer of hafnium oxide (HfO) upon silicon dioxide (SiO2). This resulted in a considerable depth enhancement, and 105 nm tall structures were imaged. The work in this thesis details the construction of the solid immersion lithography test-bed, describes the implementation of the modeling tools, details the theory and analysis required to achieve the relevant solutions and understanding of the physical mechanism and finally experimentally demonstrates an enhancement that allows evanescent interferometric lithography beyond conventional limits.

High aspect ratio silicon etching used for DRAM manufacturing still remains as one of the biggest challenges in semiconductor fabrication, requiring well understood and characterized process fundamentals. In this study, physical and chemical interactions during etching silicon in capacitively coupled plasma discharges were investigated in detail for different HBr/NF3 mixed chemistries for single frequency as well as dual frequency operation and medium discharge pressures inside an industrial MERIE CCP reactor typically used for DRAM fabrication. Utilization of the dual frequency concept for separate control of ion energy and ion flux, as well as the impact on discharge properties and finally on etching at relevant substrate surfaces were studied systematically. The complex nature of multi frequency rf sheaths was both analyzed experimentally by applying mass resolved ion energy analysis, and from simulation of ion energy distributions by using a Hybrid Plasma Sheath Model. Discharge composition and etch processes were investigated by employing standard mass spectrometry, Appearance Potential Mass Spectrometry, Quantum Cascade Laser Absorption Spectroscopy, rf probe measurements, gravimetry and ellipsometry. An etch model is developed to explain limitations of silicon etching in HBr/NF3 discharges to achieve highly aniostropic etching. / Siliziumätzen mit hohen Aspektverhältnissen zur Herstellung von DRAM-Speicherstrukturen stellt nach wie vor eine der größten Herausforderungen in der Halbleiterherstellung dar und erfordert ein grundlegendes Prozessverständnis. Diese Studie beinhaltet eine umfassende und detaillierte Untersuchung physikalischer und chemischer Wechselwirkungen von Siliziumätzprozessen in kapazitiv gekoppelten HBr/NF3-Gasentladungen in einem kommerziellen, typischerweise für die DRAM-Fertigung eingesetzten MERIE CCP Reaktor mit Ein- und Zweifrequenzanregung bei mittleren Entladungsdrücken. Die Anwendung eines Zweifrequenzkonzeptes zur separaten Kontrolle von Ionenenergie und Ionenstromdichte, als auch deren Einfluss auf die Entladungseigenschaften und letztendlich auf das Ätzverhalten auf relevanten Substratoberflächen wurden systematisch untersucht. Die komplexe Natur von mehrfrequenzangeregten HF-Randschichten wurde sowohl experimentell über eine Anwendung von massenaufgelöster Ionenenergieanalyse als auch rechnerisch über Simulationen von Ionenenergieverteilungsfunktionen mit Hilfe eines hybriden Plasmarandschichtmodells analysiert. Gaszusammensetzungen verschiedener Entladungen und Ätzprozesse wurden mit Hilfe von Standard-Massenspektrometrie, Schwellwert-Massenspektrometrie, Quantenkaskaden-Laserabsorptionsspektroskopie, HF-Sondenmessungen, Gravimetrie und Ellipsometrie charakterisiert. Eine neuartige Modellvorstellung zum Siliziumätzen in HBr/NF3-Entladungsgemischen liefert eine plausible Erklärung für die Limitierung der Ätzrate zum Erreichen eines hoch anisotropen Ätzverhaltens.

Submitted by PEDRO ROGERIO CLETO null (pedro.constant@gmail.com) on 2016-06-28T20:02:04Z No. of bitstreams: 1 Dissertacao_PedroCleto_VF.pdf: 6736443 bytes, checksum: adef1b42d29662c6340d24f74ffa54ec (MD5) / Approved for entry into archive by Ana Paula Grisoto (grisotoana@reitoria.unesp.br) on 2016-06-30T17:45:25Z (GMT) No. of bitstreams: 1 cleto_pr_me_bauru.pdf: 6736443 bytes, checksum: adef1b42d29662c6340d24f74ffa54ec (MD5) / Made available in DSpace on 2016-06-30T17:45:25Z (GMT). No. of bitstreams: 1 cleto_pr_me_bauru.pdf: 6736443 bytes, checksum: adef1b42d29662c6340d24f74ffa54ec (MD5) Previous issue date: 2016-05-09 / Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES) / A técnica de fraturamento hidráulico é amplamente utilizada na indústria petrolífera para aumentar a permeabilidade da rocha-reservatório numa região próxima ao poço e permitir a extração, e consequente produção, de hidrocarbonetos armazenados em seus poros. Primeiramente a rocha é perfurada criando-se um poço e então injeta-se fluido a uma pressão suficientemente alta para fraturar a rocha. A injeção contínua de fluido permite que as fraturas se propaguem pelo reservatório, formando assim canais de alta permeabilidade. A modelagem e simulação computacional de fraturamento hidráulico são complexas em função da física envolvida no processo. O presente trabalho objetiva o estudo da formação e propagação de fraturas induzidas hidraulicamente em meios rochosos de baixa permeabilidade e também tem o propósito de verificar se a metodologia adotada é capaz de reproduzir características apresentadas num processo de fraturamento hidráulico, como a pressão necessária para causar a ruptura da rocha. Para tal, apresenta-se a técnica de fragmentação da malha utilizando elementos finitos de elevada razão de aspecto (ou elementos de interface) para representar a fratura, aos quais são atribuídas relações constitutivas baseadas na mecânica do dano. Além disso, os elementos de interface também possuem um acoplamento hidromecânico capaz de representar o canal de alta permeabilidade devido à ocorrência da fratura. Os resultados obtidos mostraram que os elementos de interface associados à técnica de fragmentação da malha foram capazes de representar tanto a formação quanto a propagação das fraturas induzidas hidraulicamente. Os resultados também mostraram que as curvas de pressão obtidas corresponderam àquelas idealizadas teoricamente. / The hydraulic fracturing technique is widely used to increase the permeability of reservoirs in the vicinity of the well and to allow the extraction and subsequent production of hydrocarbons trapped in its pores. Firstly, the rock is drilled, creating a well and then a fluid is injected at a sufficiently high pressure to fracture the rock. The continuous fluid injection allows the fractures to propagate through the reservoir, thereby forming some high permeability paths. The computer modeling and simulation of hydraulic fracturing are complex due to the physics involved in the process. This work aims to study the formation and propagation of hydraulically induced fractures in rocky media with low permeability and also aims to verify if the adopted methodology is able to reproduce the characteristics presented in a hydraulic fracturing process, as for instance, the required pressure to cause the breakdown of the rock. For this purpose, it is presented the mesh fragmentation technique using finite elements with a high aspect ratio (or interface elements) to represent the fracture, which are assigned constitutive relations based on damage mechanics. Besides, the interface elements also have a hydromechanical coupling which is able to represent the high permeability path due to the fracture. The results showed that the interface elements associated with the mesh fragmentation technique were able to represent both the formation and the propagation of hydraulically induced fractures. The results also showed that the obtained pressure curves corresponded to those theoretically idealized.

Cette thèse se concentre sur la contrôlabilité de l'indice de réfraction au niveau sub-micronique par changements d'indice induits par laser sur de longues dimensions i.e., avec des hauts rapports d'aspect élevés et des sections à l'échelle nanométrique. À cette fin, nous explorons les faisceaux ultracourts de Bessel non-diffractifs d'ordre zéro et les facteurs qui contribuent au confinement de l'énergie au-delà de la limite de diffraction. Le traitement par laser de matériaux transparents à l'aide de faisceaux non diffractifs offre un avantage important pour les structures sub-microniques en volume de haut rapport d'aspect à des fins applicatives en nanophotonique et en nanofluidique. Nous présentons l'effet de différentes conditions de focalisation et de paramètres laser sur la modification de la silice fondue, explorant ainsi les différents régimes d'interaction. Cette thèse aborde essentiellement des conditions modérées de focalisation car elles offrent un régime d'interaction stable sur une large gamme de paramètres laser, permettant l'ingénierie de la dispersion. La durée de l'impulsion laser s'est révélée être essentielle dans la définition du type de modification de l'indice de réfraction ou de modification structurale. Par exemple, l'usinage utilisant des impulsions laser femtosecondes entraîne une augmentation des structures d'indice de réfraction alors que les impulsions laser picosecondes engendrent une cavité uniforme i.e., des structures de faible indice. Pour acquérir un meilleur contrôle et une meilleure précision du dépôt d'énergie laser, un ensemble de mécanismes physiques responsables des dommages induits par laser dans des conditions d'excitation non-diffractives a été observé expérimentalement et examiné par des simulations indiquant le rôle essentiel de la diffusion de la lumière sur les électrons. Des mesures de microscopie pompe-sonde résolues en temps avec une résolution temporelle sub-picoseconde et spatiale sub-micronique donnent accès à l'excitation et à la relaxation dynamique instantanées. La transmission optique dynamique et le contraste de phase offrent des informations complémentaires sur la réponse électronique ou sur celle de la matrice vitreuse. La dynamique ultrarapide des porteurs libres a été particulièrement étudiée puisque le transfert d'énergie des électrons vers le réseau est la clé de transformation ultérieure du matériau. Le rôle de l'excitation instantanée pour différentes durées et énergie d'impulsion laser est exposé. Ainsi, la dynamique complète des porteurs de charge est présentée pour différents paramètres du laser. En particulier, la dynamique d'obtention de structures d'indice de réfraction positif et des cavités uniformes indique deux chemins différents de relaxation électronique et de dépôt de l'énergie: une relaxation rapide par l'intermédiaire de défauts pour les structures d'indice positif et une relaxation thermomécanique lente pour les cavités nanométriques. Enfin, en corrélant les résultats des études résolues en temps, les simulations et les résultats de photoluminescence après irradiation, nous formulons des scénarios potentiels de formation de l'indice de réfraction positif ainsi que des structures d'indice faible ou de vides uniformes / This thesis is focused on the controllability of laser-induced refractive index changes at sub-micron level over long dimensions i.e., with high aspect ratios and sections on the nanoscale. To this end, we explore non-diffractive zerothorder ultrafast Bessel beams and factors contributing to energy confinement beyond the diffraction limit. Laser processing of transparent materials using non-diffracting beams offers a strong advantage for high aspect ratio submicron structures inside the bulk in view of nanophotonics and nanouidics applications. We present the role of various focusing conditions and laser parameters on material modification in bulk fused silica and explore the different interaction regimes. This thesis tackles mostly the moderate focusing conditions as they offer a stable interaction regime backed up dispersion engineering over a large range of laser parameters. The laser pulse duration was found to be key in defining the type of laser induced refractive index or structural modification. For instance, machining using femtosecond laser pulses results in increased refractive index structures whereas picosecond laser pulses result in uniform void i.e., low index structures. To acquire better control over the laser energy deposition and precision, a range of physical mechanisms responsible for the laser induced damage in non-diffractive excitation conditions have been observed experimentally and further interrogated by simulations indicating a critical role of light scattering on carriers. Time-resolved pump-probe microscopy measurements with a sub-picosecond temporal and sub-micron spatial resolution allow access to the instantaneous excitation and relaxation dynamics. Dynamic optical transmission and phase contrast o_er complementary information of either electronic and glass matrix response. Primarily, ultrafast dynamics of free carriers was studied as the electron mediated energy transfer to the lattice is key to the subsequent material transformation. Role of instantaneous excitation at different laser pulse durations and energies is outlined. Then complete carrier dynamics is presented at different laser parameters. Particularly dynamics in conditions of positive refractive index structures and uniform voids is indicating two different paths of electronic relaxation and energy deposition: a fast defect mediated relaxation for positive index structures and slow thermomechanical relaxation for nanosize void structures. Finally, by correlating the results of time resolved studies, simulations and post-irradiated photoluminescence results, we formulate potential formation scenarios for the positive refractive index and low index or uniform void structures

High aspect ratio silicon etching used for DRAM manufacturing still remains as one of the biggest challenges in semiconductor fabrication, requiring well understood and characterized process fundamentals. In this study, physical and chemical interactions during etching silicon in capacitively coupled plasma discharges were investigated in detail for different HBr/NF3 mixed chemistries for single frequency as well as dual frequency operation and medium discharge pressures inside an industrial MERIE CCP reactor typically used for DRAM fabrication. Utilization of the dual frequency concept for separate control of ion energy and ion flux, as well as the impact on discharge properties and finally on etching at relevant substrate surfaces were studied systematically. The complex nature of multi frequency rf sheaths was both analyzed experimentally by applying mass resolved ion energy analysis, and from simulation of ion energy distributions by using a Hybrid Plasma Sheath Model. Discharge composition and etch processes were investigated by employing standard mass spectrometry, Appearance Potential Mass Spectrometry, Quantum Cascade Laser Absorption Spectroscopy, rf probe measurements, gravimetry and ellipsometry. An etch model is developed to explain limitations of silicon etching in HBr/NF3 discharges to achieve highly aniostropic etching. / Siliziumätzen mit hohen Aspektverhältnissen zur Herstellung von DRAM-Speicherstrukturen stellt nach wie vor eine der größten Herausforderungen in der Halbleiterherstellung dar und erfordert ein grundlegendes Prozessverständnis. Diese Studie beinhaltet eine umfassende und detaillierte Untersuchung physikalischer und chemischer Wechselwirkungen von Siliziumätzprozessen in kapazitiv gekoppelten HBr/NF3-Gasentladungen in einem kommerziellen, typischerweise für die DRAM-Fertigung eingesetzten MERIE CCP Reaktor mit Ein- und Zweifrequenzanregung bei mittleren Entladungsdrücken. Die Anwendung eines Zweifrequenzkonzeptes zur separaten Kontrolle von Ionenenergie und Ionenstromdichte, als auch deren Einfluss auf die Entladungseigenschaften und letztendlich auf das Ätzverhalten auf relevanten Substratoberflächen wurden systematisch untersucht. Die komplexe Natur von mehrfrequenzangeregten HF-Randschichten wurde sowohl experimentell über eine Anwendung von massenaufgelöster Ionenenergieanalyse als auch rechnerisch über Simulationen von Ionenenergieverteilungsfunktionen mit Hilfe eines hybriden Plasmarandschichtmodells analysiert. Gaszusammensetzungen verschiedener Entladungen und Ätzprozesse wurden mit Hilfe von Standard-Massenspektrometrie, Schwellwert-Massenspektrometrie, Quantenkaskaden-Laserabsorptionsspektroskopie, HF-Sondenmessungen, Gravimetrie und Ellipsometrie charakterisiert. Eine neuartige Modellvorstellung zum Siliziumätzen in HBr/NF3-Entladungsgemischen liefert eine plausible Erklärung für die Limitierung der Ätzrate zum Erreichen eines hoch anisotropen Ätzverhaltens.

No description available.