<p>The production of a novel micropump based on the synthetic jet principle is investigated both numerically and experimentally. The proposed micropump consists of a synthetic jet actuator driven by a vibrating diaphragm issuing into an inverted T- shaped channel structure forming the inlet/outlet channels of the pump.</p> <p>The software package Ansys is used to perform numerical investigations of the operation of the proposed micropump. Simulations were performed to study the effect of changing the inlet/outlet channel dimensions as well as the operating frequency, amplitude and duty cycle of the excitation signal. Inlet/outlet channel widths ranging from 200 to 800 μm and operating amplitude and frequency of excitation of the 5 mm square membrane driving the synthetic jet actuator ranging from 20 to 60 μm and from 20 to 60 Hz respectively were investigated.</p> <p>Based on the findings of the numerical simulations, a prototype design was chosen and produced. Prototype production using microfabrication techniques as well as micromachining was investigated. The final prototype was micromachined using plexiglass as the working material. An experimental setup was constructed to test the performance of the produced prototype, which allowed for measuring the produced flow rate, pressure head, actuation amplitude and frequency.</p> <p>The findings of the numerical simulations verified the possibility to produce a working micropump with flow rates of up to 1.3 ml/min. Simulation results also showed the dependence of the produced flow rate on both the inlet and outlet channel widths. An increase in the inlet channel width resulted in a gain in the average flow rate through the pump while an increase in the outlet channel width results in a reduction in the flow rate. Increases in either the actuation amplitude or frequency of excitation both resulted in an improvement in the produced flow rate. Changes in the ejection duty cycle, or the ejection time relative to the suction time during an actuation cycle, were found to influence the flow rate produced by the pump. A shorter ejection time produced a higher flow rate from the pump as compared to a longer ejection time. It was also found that changes in dimensions or operating parameters affected the fluctuations in the flow rate through the pump associated with the pulsating nature of the synthetic jet. Experimental investigations confirmed the findings of the numerical simulations in terms of the flow rate and the trends in the dependence of the flow rate on operating parameters. Values of maximum back pressure of up to 500 Pa were also reported experimentally and membrane driving powers of up to 122 μW were calculated numerically.</p> / Doctor of Philosophy (PhD)

When paraffin wax melts it exhibits a large, relatively incompressible volume expansion. This can be used in microactuators for strong and large displacements, a rare combination among actuators. Furthermore, paraffin is inexpensive, inert and environmentally friendly, as well as easily processed and actuated. Together, these properties give paraffin actuators great potential for use in both low-cost and high-performance applications. In microfluidics, the miniaturization of various analysis systems decreases the volumes of samples and reagents needed, as well as the analysis throughput time. Using on-chip micropumps increases the efficiency of the microfluidic system, but a challenge for such pumps is the high back-pressure associated with separation, filtration or narrower channels. The objective of this thesis is to increase the understanding of paraffin in microactuators, as well as to further explore its possibilities and limitations. The main application area has been on-chip micropumps. For low-cost applications, actuators, pumps and dispensers have been fabricated in plastics and then evaluated. The dispenser is intended for on-chip storage and dispensing of liquids in a lab-on-a-chip that could be used in, e.g., point-of-care testing (POCT). For high-performance applications, metallic actuators, pumps and dispensers have been accomplished. The micropump is the world’s strongest mechanical micropump in sub-cubic centimetre size, capable of pressures of above 5 MPa. Possible applications are strong microhydraulics, on-chip chromatography, or medical microdosage systems. A limitation of paraffin is the relatively slow thermal actuation. In this thesis the thermal properties have also been turned into an advantage: Directional solidification is used to accomplish multiple stable states of the actuator displacement, withheld without any power consumption. For the future, the high-pressure capability may be improved by new designs. Optimization of speed and power consumption can be made by further work on modelling as well as on drive and control of the heating.

This doctoral thesis originated as a requirement of micropump for artificial heart with using a suitable type of electric drive. It is an interdisciplinary cooperation of FSI Brno, Department of Fluid Engineering of Viktor Kaplan, FEKT Brno, Department of Power Electronics and finally the doctors from Cardiology Medical Center in St. Ann’s Hospital. FSI Brno made mechanical solutions of micropump, FEKT Brno solved electric drive and Cardiologic Medical Center gave the knowledge of human anatomy. Work deals with design, creation and testing of various types micropumps for medicamentous using. In this thesis was suggested various solutions of electric drive for micropump, its structure and function. Work is primarily experimental in nature and is heavily supported by a creative approach in creating a variety of proposed solutions. Several proposals of micropump have been made with different types of electric drives (DC motors, hybrid stepper motor, piezomotors). Finally, from the technical and economical point of view was chosen the most suitable type of electric drive and it was created a functional prototype of the double-action pump and its properties were tested.

Thesis (MScEng (Mechanical and Mechatronic Engineering))--University of Stellenbosch, 2010. / ENGLISH ABSTRACT: The valveless micropump holds great potential for the biomedical community in applications such as drug delivery systems, blood glucose monitoring and many others. It is also a critical component in many a lab-on-a-chip device, which in turn promises to improve our treatment and diagnosis capabilities for diseases such as diabetes, tuberculosis, and HIV/AIDS. The valveless micropump has attracted attention from researchers on the grounds of its simple design, easy manufacturability and sensitive fluid handling characteristics, which are all important in biomedical applications. The pump consists of a pump chamber with a diffuser and nozzle on opposing sides of the pump chamber. The flow into the diffuser and nozzle is induced by an oscillating piezoelectric disc located on top of the pump chamber. The nozzle and diffuser rectify the flow in one direction, due to different pressure loss coefficients. The design process however is complex. In this study, we investigate the characteristics of a diffuser / nozzle based micropump using detailed computational fluid dynamic (CFD) analyses. Significant parameters are derived using the Buckingham-Pi theorem. In part based on this, the respective shapes of the diffuser and of the nozzle of the micropump are selected for numerical investigation. Hence the influence of the selected parameters on the flow rate of the micropump is studied using three-dimensional transient CFD analyses. Velocity profiles from the CFD simulations are also compared to the Jeffery-Hamel solution for flow in a wedge shaped channel. Significant similarities exist between the data and the predicted Jeffery-Hamel velocity profiles near the exit of the diffuser. Three different diffuser geometries were simulated at three frequencies. The flow rate and direction of flow are shown to be highly sensitive to inlet and outlet diffuser shapes, with the absolute flow rate varying by as much as 200% for the geometrical perturbations studied. Entrance losses at both the diffuser inlet and nozzle inlet appear to dominate the flow resistance at extremely laminar flow conditions with the average Reynolds number of Reave ≈ 500. / AFRIKAANSE OPSOMMING: Die kleplosemikropomp hou groot potensiaal in vir die biomediese gemeenskap in toepassings soos medisyne dosering sisteme, bloed glukose monitering en baie ander. Dit is ook ’n kritiese komponent in “lab-on-chip” sisteme, wat beloof om die behandeling en diagnose van siektes soos suikersiekte, tuberkulose enMIV/VIGS te verbeter. Die kleplose mikropomp het tot dusver die aandag van navorsers geniet as gevolg van sy eenvoudige ontwerp, maklike vervaardiging en sensitiewe vloeistof hantering. Hierdie kenmerke is krities inmenige biomediese toepassings. Die pomp bestaan uit ’n pompkamer met ’n diffusor en ’n mondstuk aan teenoorstaande kante van die pompkamer. Vloei in die diffusor en mondstuk in word geinduseer deur ’n ossillerende piëso-elektiese skyf wat bo-op die pompkamer geleë is. Weens verskillende druk verlies koëffisinëte van die diffusor en diemondstuk word die vloei in een rigting gerig. Die ontwerp-proses is egter kompleks. In hierdie studie word die eienskappe van die diffusor /mondstuk ondersoek deur gebruik temaak van gedetailleerde numeriese vloei-dinamiese analises. Belangrike parameters word afgelei deur gebruik te maak van die Buckingham-Pi teorema. Gedeeltelik gebaseer hierop word die onderskeidelike vorms van die diffusor en die mondstuk van die mikropomp geselekteer vir numeriese ondersoek. Gevlolglik word die invloed van die geselekteerde parameters op die vloei tempo van diemikropomp ondersoek deur gebruik temaak van drie-dimensionele tyd afhanklike numeriese vloei-dinamiese analises. Snelheids profiele van hierdie simulasiesword vergelykmet die Jeffrey-Hamel oplossing vir die vloei in ’n wigvormige kanaal. Daar is oorwegende ooreenkomstighede tussen hierdie data en die voorspelde Jeffrey-Hamel snelheids profiele veral by die uitgang van die diffusor. Drie verskillende diffusor vorms is by drie frekwensies gesimuleer. Daar is bewys dat die vloei tempo en vloeirigting baie sensitief is vir inlaat- en uitlaat diffusor vorms en dat die absolute vloei tempo kan varieermet soveel as 200%vir die geometriese versteuringswat ondersoek is. Inlaat verliese by beide die diffusor inlaat en die mondstuk inlaat, blyk om die vloei weerstand te domineer waar die vloei uiters laminêr ismet ’n gemiddelde Reynolds getal van Regem ≈ 500

In this thesis, microelectrode arrays of micropumps have been designed, fabricated and characterized for transporting microfluid by AC electro-osmosis (ACEO). In particular, the 3D stepped electrode design which shows superior performance to others in literature is adopted for making micropumps, and the performance of such devices has been studied and explored. A novel fabrication process has also been developed in the work, realizing 3D stepped electrodes on a flexible substrate, which is suitable for biomedical use, for example glaucoma implant. There are three major contributions to ACEO pumping in the work. First, a novel design of 3D “T-shaped” discrete electrode arrays was made using PolyMUMPs® process. The breakthrough of this work was discretizing the continuous 3D stepped electrodes which were commonly seen in the past research. The “T-shaped” electrodes did not only create ACEO flows on the top surfaces of electrodes but also along the side walls between separated electrodes. Secondly, four 3D stepped electrode arrays were designed, fabricated and tested. It was found from the experiment that PolyMUMPs® ACEO electrodes usually required a higher driving voltage than gold electrodes for operation. It was also noticed that a simulation based on the modified model taking into account the surface oxide of electrodes showed a better agreement with the experimental results. It thus demonstrated the possibility that the surface oxide of electrodes had impact on fluidic pumping. This methodology could also be applied to metal electrodes with a native oxide layer such as titanium and aluminum. Thirdly, a prototype of the ACEO pump with 3D stepped electrode arrays was first time realized on a flexible substrate using Kapton polyimide sheets and packaged with PDMS encapsulants. Comprehensive experimental testing was also conducted to evaluate the mechanical properties as well as the pumping performance. The experimental findings indicated that this fabrication process was a promising method to create flexible ACEO pumps that can be used as medical implants and wearable devices. / Thesis (Ph.D, Mechanical and Materials Engineering) -- Queen's University, 2013-05-06 10:57:48.077

A l’heure actuelle, la microfluidique est une science en plein développement ayant un besoin croissant de dispositifs permettant de générer des écoulements aux échelles micrométriques. Les phénomènes physiques mis en jeu lors du mouvement d’un fluide sont en effet majoritairement gouvernés par la viscosité (bas nombre de Reynolds) contrairement aux écoulements macroscopiques dominés par les effets inertiels.Dans cette thèse, les écoulements engendrés par le mouvement de parois mobiles ont été étudiés en vue d’une application aux micropompes, dispositifs essentiels en microfluidique.Dans une première partie, une étude analytique et numérique évalue la possibilité de générer un écoulement par un cylindre en rotation à proximité de parois mobiles.Les résultats obtenus du régime de Stokes (Re=0) jusqu’à un nombre de Reynolds Re=60 en régime stationnaire témoignent du potentiel notable d’intégration de cette géométrie dans les microsystèmes en tant que micropompes.Dans une seconde partie, une micropompe, basée sur un principe de fonctionnement novateur, est conçue par l’intermédiaire des techniques de microfabrication. Dans cette optique, le procédé de gravure RIE d’un élastomère est entièrement développé. Les performances de la micropompe en terme de pression et débit générés dépassent l’état de l’art des microsystèmes similaires et ceci en utilisant une technologie simple et bas-coût / Currently, microfluidic is a science field in constant development with an increasing need of devices able to generate flows at the micrometer order. At these length scales, physical phenomenons occurring in a moving fluid are mainly governed by its viscosity (low Reynolds number) contrary to macroscale flows dominated by inertial effects.In this thesis, a study on flows engendered by moving walls has been carried to fulfill to micropumps devices.In a first part, an analytical and a numerical study evaluates the possibility to generate a flow for a rotating cylinder close to moving boundaries.The results ranging from Stokes flows (Re=0) up to the low Reynolds number Re=60 in the stationary regime reveals the noticeable potential of integrating this device in microsystems as a micropump. In a second part, a new micropump, based on an innovative principle, is designed thanks to microfabrication technologies. In this perspective, the etching process of an elastomer called Silastic S is developed. Micropump performances in terms of pressure and flow rate are beyond the state of the art for similar microsystems and are achieved by using a simple and low-cost technology

<p>The objective of this thesis was to improve a paraffin actuated micropump design, to be able to pump against extreme pressures (above 100 bar). This was accomplished by initially studying the membrane activation, using video capturing. The micropump has been improved to withstand pressures high enough, to enable use in an high-performance liquid chromatography (HPLC) system. The micropump has been shown to pump against back pressures up to 150 bar, with a positive net-flow. This should be compared with the previously recorded maximum back pressure of 50 bar. The pumping against high back pressures was possible due to an increased understanding of the sealing of the membranes. This resulted in a new design that was manufactured and characterised. Without clamping the pump was measured to manage back pressures of 10 bar, and then starting to leak in a bond at the flow channel. With supporting clamping, the managed back pressures increased ten folded.</p><p>When measured on the different valves, pressure above 200 bar has been possible to withhold. Although the valves were below their maximum limit, the pressure was not possible to be further increased due to a limitation in the equipment, i.e. risk of damaging the connections. When examined after pressurised at extreme pressures (above 100 bar) several times, no signs of fatigue or damage of the membrane was seen.</p><p>A new behaviour of the valves was discovered. Above certain pressures some designs self sealed, i.e. withholding the pressure after the voltage was turned off. For these valves the pressure had to be released by some other means.</p>

The objective of this thesis was to improve a paraffin actuated micropump design, to be able to pump against extreme pressures (above 100 bar). This was accomplished by initially studying the membrane activation, using video capturing. The micropump has been improved to withstand pressures high enough, to enable use in an high-performance liquid chromatography (HPLC) system. The micropump has been shown to pump against back pressures up to 150 bar, with a positive net-flow. This should be compared with the previously recorded maximum back pressure of 50 bar. The pumping against high back pressures was possible due to an increased understanding of the sealing of the membranes. This resulted in a new design that was manufactured and characterised. Without clamping the pump was measured to manage back pressures of 10 bar, and then starting to leak in a bond at the flow channel. With supporting clamping, the managed back pressures increased ten folded. When measured on the different valves, pressure above 200 bar has been possible to withhold. Although the valves were below their maximum limit, the pressure was not possible to be further increased due to a limitation in the equipment, i.e. risk of damaging the connections. When examined after pressurised at extreme pressures (above 100 bar) several times, no signs of fatigue or damage of the membrane was seen. A new behaviour of the valves was discovered. Above certain pressures some designs self sealed, i.e. withholding the pressure after the voltage was turned off. For these valves the pressure had to be released by some other means.

The goal of this research was to develop acoustic sensors and actuators for microfluidic applications. To this end, capacitive micromachined ultrasonic transducers (cMUTs) were developed which generate guided acoustic waves in fluid half-spaces and microchannels. An interdigital transducer structure and a phased excitation scheme were used to selectively excite guided acoustic modes which propagate in a single lateral direction. Analytical models were developed to predict the geometric dispersion of the acoustic modes and to determine the sensitivity of the modes to changes in material and geometric parameters. Coupled field finite element models were also developed to predict the effect of membrane spacing and phasing on mode generation and directionality. After designing the transducers, a surface micromachining process was developed which has a low processing temperature of 250C and has the potential for monolithically integrating cMUTs with CMOS electronics. The fabrication process makes extensive use of PECVD silicon nitride depositions for membrane formation and sealing. The fabricated interdigital cMUTs were placed in microfluidic channels and demonstrated to sense changes in fluid sound speed and flow rate using Scholte waves and other guided acoustic modes. The minimum detectable change in sound speed was 0.25m/s, and the minimum detectable change in flow rate was 1mL/min. The unique nature of the Scholte wave allowed for the measurement of fluid properties of a semi-infinite fluid using two transducers on a single substrate. Changes in water temperature, and thus sound speed, were measured and the minimum detectable change in temperature was found to be 0.1C. For fluid pumping, interdigital cMUTs were integrated into microchannels and excited with phase-shifted, continuous wave signals. Highly directional guided waves were generated which in turn generated acoustic streaming forces in the fluid. The acoustic streaming forces caused the fluid to be pumped in a single, electronically-controlled direction. For a power consumption of 43mW, a flow rate of 410nL/min was generated against a pressure of 3.4Pa; the thermodynamic efficiency was approximately 5x10-8%. Although the efficiency and pressure head are low, these transducers can be useful for precisely manipulating small amounts of fluid around microfluidic networks.

In this dissertation physical phenomena relevant to (i) an interface formed between two fluids and a solid phase (wetting line) and (ii) an interface between three fluids (triple contact line) were investigated. In the former case, the wetting line (WL) phenomena which encompass the wetting line energy (WLE) or pinning, the wetting line velocity (WLV), and the contact angle hysteresis, were studied using a micropump based on electrowetting on dielectric (EWOD). In the latter case, the interfacial phenomena such as the air film lubrication effect and the liquid free surface deformation were taken into account to explain the dual equilibrium states of water droplets on liquid free surfaces. EWOD was implemented to devise a pumping method for a continuous flow in a microchannel. An active micropump with a simple layout and no moving parts is designed and fabricated which has on demand flow on/off capability. The micropump is based on droplet/meniscus pressure gradient generated by EWOD. By altering the contact angle between liquid and solid using an electric field a pressure gradient was induced and a small droplet was pumped into the channel via a uniform flow rate. A surface tension based propellant method was introduced as a low power consumption actuation method in microfluidic devices. For an initial droplet volume of 0.3µL and a power of 12nW a constant flow rate of 0.02µL/sec was demonstrated. Sample loading on-demand could be achieved by regulating an electric potential. Unexpectedly, the flow rate of the pump was found to be constant in spite of the changes in the droplet’s radius, which directly affects the pump’s driving pressure. iv The WL phenomena were studied in details to unravel the physical concept behind the micropump constant flow rate during the operation. An interesting observation was that the shrinking input droplet changes its shape in two modes in time sequence: (i) in the first mode its contact angle decreases while its wetting area remains constant due to the pinning, (ii) in the second mode the droplet’s WL starts to move while its contact angle changes as a function of its velocity. Contact angles were measured for the droplet advancing and receding WLs at different velocities to capture a full picture of contact angle behavior due to pinning and WLV effects. These results are also relevant to the meniscus inside the channel. The changes on the contact angle caused by the presence of EWOD at the bottom of the channel were studied in detail. The EWOD based micropump was used as a platform to study the contribution of the pinning and WLV effects on its constant flow rate. The effects of the WLE on the static contact angle and the WLV on the dynamic contact angle in the pump operation were investigated. Also the effect of EWOD voltage on the magnitude and uniformity of the micropump flow rate was studied. Dynamic contact angles (as a function of pinning and WLV) were used to accurately calculate the pressure gradient between the droplet and the meniscus and estimate the flow rate. It was shown that neglecting either of these effects not only results in a considerable gap between the predicted and the measured flow rates but also in an unphysical instability in the flow rate analysis. However, when the WLE and WLV effects were fully taken into account, an excellent agreement between the predicted and the measured flow rates was obtained. v For the study of the TCL between three fluids, aqueous droplets were formed at oil-air interface and two stable configurations of (i) non-coalescent droplet and (ii) cap/bead droplet were observed. General solutions for energy and force analysis were obtained and were shown to be in good agreement with the experimental observations. Further the energy barrier obtained for transition from configuration (i) to (ii), was correlated to the droplet release height and the probability of non-coalescent droplet formation. Droplets formed on the solid surfaces and on the free surface of immiscible liquids have various applications in droplet-based microfluidic devices. This research provides an insight into their formation and manipulation.