La volonté actuelle de réduire les risques environnementaux et humains amène les chercheurs à trouver de nouvelles solutions de traitement-recyclage poussé des combustibles usés. Dans le but de réduire les volumes d’effluents qu’elle génère, ses temps de réponse et son coût, la miniaturisation de l’analyse chimique en ligne constitue l’un des principaux enjeux de ces recherches. Dans ce contexte, le présent manuscrit traite de la conception, du dimensionnement, de la fabrication et de la caractérisation d’un capteur spectrophotométrique intégré sur verre borosilicate, pour l’analyse des cations radioactifs. Le dispositif, nommé « guide à nanocanal », est réalisé à l’aide des techniques de gravure sèche par plasma et d’échange d’ions. Il contient un coeur ruban surmonté d’un canal de (100 ± 10) nm de profondeur et d’un coeur plan, et permet la propagation d’un mode hybride optimisant ainsi l’interaction fluide/onde guidée sur un large domaine de longueurs d’ondes. Des mesures spectrales d’une solution de nitrate de néodyme en milieu nitrique peu acide (pH 2) et un traitement statistique ont permis de démontrer une limite de détection minimale en terme de coefficient d’absorption de (3,7 ± 0,9) x 10-3 cm-1 sur une longueur de (3,70 ± 0,05) cm et un volume de seulement (7 ± 3) nL. Une structure permettant d’augmenter la longueur d’interaction et donc de diminuer la limite de détection est proposée en perspectives de ce travail, de même qu’une étude préliminaire pour l’utilisation du dispositif en milieu actif. / The current will of reducing environment and human hazards has led the scientists to imagine new solutions for nuclear waste reprocessing. Miniaturized online chemical analysis of industrial processes has in particular an important role to play to reduce effluent volumes, response times and costs. In this context, we present the design, fabrication and characterization of an integrated spectrophotometric sensor on glass for chemical analysis of radioactive cations. The device is called a ―nanochannel waveguide‖ and is fabricated by reactive ion etching and ion exchange on glass. It is made of two borosilicate glass wafers bonded together. The first one contains a strip core and the second one a (100 ±10) nm deep nanochannel and a slab core. It allows the propagation of a hybrid mode, optimizing the fluid/guide wave interaction on a large wavelength range. Spectrometric measurements of a neodymium nitrate in nitric acid (pH 2) followed by statistical treatment have led to a limit of detection in terms of absorption coefficient of (3.7 ± 0.9) x 10-3 cm-1 for a device length of (3.70 ± 0.05) cm and fluid volume as low as (7 ± 3) nL. A structure allowing to increase the interaction length and therefore further decrease the detection limit has been proposed as an outlook of this work, and a preliminary study for use in a nuclear environment has been performed.

Dans ce travail, nous présentons la réalisation de composants originaux d’optique guidéeutilisant une technique de fabrication basée sur l'autofocalisation d’un faisceau lumineux.Cette technique permet la photo-induction de guides d’onde optiques au coeur de cristauxde LiNbO3 par effet photoréfractif.En premier lieu, des guides adiabatiques ont été générés dans des cristaux de LiNbO3 enappliquant un gradient de température selon l’axe de propagation lors de l’étaped’induction. Ces résultats expérimentaux ont été appuyés par un modèle numérique 3-Dprenant en compte la dynamique de l'effet photoréfractif.Dans un deuxième temps, nous avons démontré que la présence d’un micro-canal présentsur le trajet d’un faisceau ne perturbe pas son autofocalisation. Cette configuration a permisde fabriquer un capteur optofluidique qui permet de mesurer l'indice de réfraction d’unliquide présent dans le canal sur une plage de mesure de 1.2 à 1.8 avec une précision de4x10-3. Enfin, cette étude a été étendue à des faisceaux sous forts angles d’incidence avec lecanal ce qui a été exploité pour induire un séparateur de polarisation en optique guidée. Ceséparateur, fabriqué en une seule étape d’induction, est constitué d’un guide d’entrée seséparant en deux guides de sortie supportant des composantes croisées de polarisation. / In this work, we present the fabrication of innovative guided optics components using asimple and efficient method based on self-trapping of light beams. This technique leads tothe formation of optical waveguides inside LiNbO3 crystals by photorefractive effect.The generation of adiabatic waveguides is first achieved by applying a temperature gradientalong the propagation axis. These experimental results have been confirmed by a 3-Dnumerical model taking into account the photorefractive dynamic.Subsequently, we have shown that the presence of a micro-channel forming a gap on thebeam trajectory does not affect the self-trapping effect. This configuration has been used tofabricate an optofluidic sensor able to measure the refractive index of liquids present in thechannel with a measuring range between 1.2 and 1.8 and a resolution of 4x10-3. Finally, thisstudy has been extended to self-trapped beams at large angle of incidence with the channelwhich has been exploited to fabricate a guided polarization separator. This polarizationseparator is formed of one input waveguide that separates into two output waveguidessupporting crossed polarizations components.

No presente trabalho foi realizado um estudo da viabilidade de integrar dois dispositivos ópticos: micro-lâmpadas incandescentes e filtros interferenciais com o objetivo de construir um dispositivo único com características próprias. A fabricação destes dispositivos ópticos foi feita utilizando materiais dielétricos, obtidos por deposição química a vapor assistida por plasma (PECVD), e usando técnicas convencionais de microeletrônica desenvolvidas neste laboratório. São apresentadas simulações numéricas, processo de fabricação e caracterização de cada um dos dois dispositivos ópticos assim como a caracterização do dispositivo óptico integrado obtido. As micro-lâmpadas incandescentes foram fabricadas a partir de um filamento de cromo, isolado do meio ambiente por duas camadas dielétricas de oxinitreto de silício, sendo alimentado eletricamente com uma tensão contínua com a finalidade de aumentar a temperatura do filamento até atingir a incandescência. Com a finalidade de reduzir a dissipação térmica nessa região, o filamento foi projetado e construído para ficar suspenso através de uma corrosão anisotrópica parcial do substrato de silício. Por outro lado, os filtros interferenciais foram fabricados sobre substratos de vidro a partir de uma série de camadas depositadas por PECVD alternadas de Si3N4 e SiO2, com espessuras de 240 e 340 nm e índices de refração de 1.91 e 1.46 respectivamente, com a finalidade de produzir picos de atenuação na transmitância da luz na região do visível do espectro eletromagnético. Foram construídos filtros com 9, 11 e 13 camadas. Os resultados deste trabalho mostraram que é possível realizar a integração eficiente destes dois dispositivos ópticos para produzir uma fonte luminosa que permite a filtragem de uma determinada faixa de comprimentos de onda. Foi demonstrado também que tanto a largura da faixa, como a região de filtragem, podem ser controladas através do índice de refração, espessuras e número de camadas constituintes do filtro interferencial. Os resultados das simulações numéricas mostraram-se bastante coerentes com os resultados experimentais obtidos. / In the present work was realized a study of the viability of integrating two optical devices: incandescent micro-lamps and interferometric filters with the intention of obtaining a single device with specific characteristics. The fabrication of these optical devices was made using dielectric materials, obtained by plasma-enhanced chemical vapor deposition (PECVD), and using conventional microelectronics techniques developed at this laboratory. Numeric simulations, fabrication process and characterization of each one of the two optical devices as well as the characterization of the obtained integrated optical device are presented. The incandescent microlamps were fabricated from a chromium filament, isolated from the environment by two dielectric silicon oxynitride layers, which is powered electrically with a continuous voltage with the purpose of increasing the temperature of the filament to reach the incandescence. With the purpose of reducing the thermal dissipation in that area, the filament was designed and fabricated to be suspended through a partial anisotropic etch of the silicon substrate. On the other hand, the interferometric filters were fabricated on glass substrates starting from a series of alternate Si3N4 and SiO2 layers deposited by PECVD, with thickness of 240 and 340 nm and refraction indexes of 1.91 and 1.46 respectively, with the purpose of producing light transmittance attenuation peaks in the visible region of the electromagnetic spectrum. Filters were fabricated with 9, 11 and 13 layers. The results of this work showed that it is possible to develop the efficient integration of these two optical devices to produce a luminous source that it allows the filtering of a certain range of wavelengths. It was also demonstrated that, the bandwidth as well as the filtering area, can be controlled through the refraction index, thickness and number of constituent layers of the interferometric filter. The results of the numeric simulations showed to be quite coherent with the obtained experimental results.

Depuis plusieurs dizaines d'années, les matériaux hybrides organiques-inorganiques constituent une classe de matériaux particulièrement bien adaptée aux applications en optique intégrée. Le réseau minéral, élaboré par procédé sol-gel, confère au matériau la tenue mécanique. Quant au réseau organique, qui est réticulable par voie photochimique, il permet la formation des systèmes guidants. Des travaux antérieurs réalisés au sein de notre laboratoire ont montré le potentiel d'un matériau à base d'un précurseur hybride 2-(3,4 epoxycyclohexylethyltrimethoxysilane) (EETMOS) pour l'application en optique intégrée. Bien que la qualité des composants réalisés à 1,31µm se soit révélée satisfaisante, un problème subsiste : une trop forte atténuation à 1,55 µm. La transmission optique autour de ces longueurs d'ondes est limitée par la présence des groupements OH et CH aliphatiques.L'objectif principal de ce travail est de développer une nouvelle génération de matériaux hybrides avec une très grande réactivité et de diminuer la quantité de groupements impliqués dans l'atténuation. Nous avons choisi la fonction vinyl éther comme fonction organique grâce à sa grande réactivité par voie cationique en comparaison avec la fonction époxyde. Nous avons étudié la double fonctionnalité de polymérisation du nouveau matériau hybride à base d'un vinyl éther silane. En premier lieu, les réactions d'hydrolyse et de polycondensation du sol ont été suivies par la spectroscopie RMN liquide du Si-29 en fonction du temps, de la température et du pH de l'eau impliquée dans l'hydrolyse. Le but était d'obtenir le plus haut taux d'oligomère multifonctionnel possible et le minium de groupement OH. La photopolymérisation de type cationique de la fonction vinyl éther a ensuite été étudiée, en utilisant la spectroscopie d'absorption dans l'infrarouge moyen. En présence du photoamorceur diaryliodonium, la photopolymérisation a été étudiée en suivant l'évolution de la bande d'absorption de la double liaison vinyl éther avant et après irradiation. La photopolymérisation cationique est rapidement initiée dès le début de l'exposition aux UV, ce qui prouve la réactivité important de la fonction vinyl éther. En utilisant la spectroscopie d'absorption dans le proche infrarouge, les résultats montrent des niveaux d'atténuation très prometteurs pour l'utilisation de ce matériau en optique intégré à 1,31 et 1,55 µm. / In the last few years, organic-inorganic hybrid materials were particularly attractive for integrated optical circuits. Hybrid network could be prepared by the formation of inorganic and organic network simultaneously through sol-gel technique and photopolymerization process.A composition based on [2-(3, 4 epoxycyclohexylethyltrimethoxysilane)] has already allowed the fabrication of optical integrated devices. The organic polymerization is on a cationic way. Results show the contributions of OH and aliphatic CH groups to the attenuation in the third telecommunication window located at 1,55 µm.The main objective of this work is to remove this difficulty by developing a new generation of hybrid materials with a very high reactivity and low amount of groups involved in the attenuation. We have chosen vinyl ether function as an organic part because of their well known high polymerization rates via cationic way which are faster than the epoxide function and which lead to no OH groups generation and a very low aliphatic CH groups introduction.In this work, we study the dual functional structure of a new vinyl ether alkoxysilane hybrid precursor. Firstly, hydrolysis and polycondensation of vinyl ether based solution are followed by liquid and solid Si-NMR spectroscopy. The kinetic reaction is followed as a function of time, temperature and pH of the water involved in the hydrolysis, in order to obtain the highest reactive multifunctional oligomer and the lowest OH groups. Secondly, results of the cationic photopolymerization of vinyl ether- based monomers are also reported, using middle infrared spectroscopy. In the presence of diaryliodonium photoinitator, the photopolymerization is studied by monitoring the absorption band of vinyl ether double bond before and after irradiation. The cationic photopolymerization occurs rapidly upon UV-exposure and vinyl ether monomers proved to be very effective monomers. Using near infrared spectroscopy, results show promising attenuation for the use of this material in integrated optic at 1,31 µmand 1,55 µm.

O trabalho de doutorado teve como objetivo desenvolver um modulador óptico baseado em filme magnetostrictivo para aplicação como magnetômetro. A modelagem e simulação do dispositivo foi realizada utilizando software com cálculo por método dos elementos finitos (MEF) e teve como finalidade auxiliar iterativamente os processos de projeto e fabricação do modulador. A originalidade da proposta baseia-se na construção de um guia de onda em óptica integrada recoberto por um filme magnetostrictivo para permitir a modulação , via efeito elasto-óptico, da onda guiada pela aplicação de campos magnéticos externos. O campo magnético aplicado provoca a deformação o material magnetostrictivo que induz uma modificação no perfil de esforço aplicado ao substrato. O substrato tem suas propriedades ópticas alteradas devido ao efeito elasto-óptico, o que provoca mudanças nas propriedades da luz transmitida. O trabalho tem seu início com o estudo e a caracterização de filmes magnetostrictivos de Tb25F275 e Tb23Co77 depositados por sputtering sobre substratos de silício. Uma técnica para preparação das amostras e medição da magnetostricção foi estabelecida e os coeficientes de magnetostrição dos filmes foram determinados a partir das medições diretas dos deslocamentos das amostras, em função dos campos magnéticos aplicados, utilizando a técnica de Atomic Force Microscopy (AFM). Os resultados experimentais obtidos permitiram a realização de simulações por MEF para verificação dos modos de guiamento da luz gerados pelo perfil de esforços induzidos termicamente no processo de deposição do filme magnetostrictivo sobre substrato de B12GeO4 (BGO). Foi modelado e simulado também o efeito da aplicação do campo magnético sobre o guia óptico obtido inicialmente pelo efeito de esforço térmico. No resultado das simulações foi possível verificar as alterações do índice de refração efetivo e da intensidade óptica do modo guiado em função de campos magnéticos aplicados ao modulador. Ao final do trabalho realizaram-se a fabricação de alguns protótipos. Os resultados das caracterizações dos moduladores construídos permitirão, no futuro, ajustar os modelos de simulação elaborados. / The doctoral work aims are the development and simulation of an optical modulator based on the effect of magnetostriction for application as magnetometer. The multiphysics simulations were performed using the Finite Elements Method (FEM). In the manufacturing process of optical modulator integrated optics techniques were applied. The originality of the proposal is based on the construction of an integrated optical waveguide covered by a magnetostrictive film to allow the modulation of the guided wave, through the elasto-optical effect, by the application of external magnetic fields. The applied magnetic field causes deformation of the magnetostrictive material that induces a modification of the stress profile produced in substrate. The substrate has its optical properties altered due to the elasto-optical effect, which causes changes in the properties of transmitted light. The work begins with the study and characterization of TbFe and TbCo2 magnetostrictive films deposited by sputtering on silicon substrates. A method for sample preparation and measurement of magnetostriction was established. The magnetostrictive coefficient of the films was determined from the direct measurement of displacements of samples by AFM technique for magnetic fields applied. The experimental results obtained allowed to perform MEF simulations to verify the light guided modes generated by the profile of thermally induced stress created by deposition process of magnetostrictive film on B12GeO4 (BGO) substrate. It was also modeled and simulated the effect of the application of magnetic field on the optical guide obtained initially by the effect of thermal stress. In simulation results, it was possible to verify the changes of effective refractive index and optical intensity of guided modes as functions of magnetic fields applied to the modulator. At the end of the work, some prototypes were fabricated. The results of characterizations of the built modulators will allow, in the future, adjustments in simulation models.

As the microelectronics industry pushes microfabrication processes further, the lab-on-a-chip field has continued to piggy-back off the industry's fabrication capabilities with the goal of producing total chemical and biological systems on small chip-size platforms. One important function of such systems is the ability to perform single molecule detection. There are currently many methods being researched for performing single molecule detection, both macro and micro in scale. This dissertation focuses on an optofluidic, lab-on-a-chip platform called the ARROW biosensor, which possesses several advantages over macro-scale single molecule detection platforms. These advantages include an amplification-free detection scheme, cheap parallel fabrication techniques, rapid single molecule detection results, and extremely low volume sample probing, which leads to ultra-sensitive detection. The ARROW biosensor was conceived in the early 2000s; however, since then it has undergone many design changes to improve and add new functionality to the lab-on-a-chip; however, water absorption in the plasma enhanced chemical vapor deposited silicon dioxide has been a problem that has plagued the biosensor platform for some time. Moisture uptake in the oxide layer of the ARROWs leads to loss of waveguiding confinement and drastically decreases the overall sensitivity of the ARROW biosensors. New ARROW designs were investigated to alleviate the negative water absorption effects in the ARROWs. The new waveguide designs were tested for resiliency to water absorption and the buried ARROW (bARROW) design was determined to be the most successful at preventing negative water absorption effects from occurring in the PECVD oxide waveguides. The bARROWs were integrated into the full biosensor platforms and used to demonstrate high sensitivity single molecule detection without any signs of water absorption affecting the bARROWs' waveguiding capabilities. The bARROW biosensors are not only water resistant, they also proved to be the most sensitive biosensors yet fabricated with average signal-to-noise ratios around 80% higher than any previously fabricated ARROW biosensors.

Photonic crystals (PhCs) are periodic dielectric structures that exhibit a photonic band gap; a range of wavelengths for which light propagation is forbidden. 2D PhCs exhibit most of the properties as their three dimension counterparts with a compatibility with standard semiconductor processing techniques such as epitaxial growth, electron beam lithography, Plasma deposition/etching and electromechanical lapping/polishing. Indium Phosphide (InP) is the material of choice for photonic devices especially when it comes to realization of coherent light source at 1.55 μm wavelength. Precise engineering of the nanostructures in the PhC lattice offers novel ways to confine, guide and control light in phonic integrated circuits (PICs). Strong confinement of light in PhCs offer novel opportunities in many areas of physics and engineering. Dry etching, a necessary process step in PhC device manufacturing, is known to introduce damage in the etched material. Process induced damage and its impact on the electrical and optical properties of PhCs depends on the etched material, the etching technique and process parameters. We have demonstrated a novel post-etch process based on so-called mass-transport (MT) technology for the first time on InP-based PhCs that has significantly improved side-wall verticality of etched PhC holes. A statistical analysis performed on several devices fabricated by MT process technology shows a great deal of improvement in the reliability of optical transmission characteristics which is very promising for achieving high optical quality in PhC components. Several PhC devices were manufactured using MT technology. Broad enough PhC waveguides that operate in the mono/multi-mode regime are interesting for coarse wavelength de-multiplexing. The fundamental mode and higher order mode interaction creates mini-stop band (MSB) in the dispersion diagram where the higher order mode has a lower group velocity which can be considered as slow light regime. In this thesis work, the phenomena of MSBs and its impact on transmission properties have been evaluated. We have proposed and demonstrated a method that enables spectral tuning with sub-nanometer accuracy which is based on the transmission MSB. Along the same lines most of the thesis work relates to broad enough PhC guides that operated in the multimode regime. Temperature tuning experiments on these waveguides reveals a clear red-shift with a gradient of dλ/dT=0.1 nm/˚C. MSBs in these waveguides have been studied by varying the width in incremental amounts. Analogous to semiconductors heterostructures, photonic heterostructures are composed of two photonic crystals with different band-gaps obtained either by changing the air-fill factor or by the lattice constant. Juxtaposing two PhC and the use of heterostructures in waveguide geometry has been experimentally investigated in this thesis work. In particular, in multimode line defect waveguides the “internal” MSB effect brings a new dimension in single junction-type photonic crystal waveguide (JPCW) and heterostructure W3 (HW3) for fundamental physics and applications. We have also fabricated an ultra-compact polarization beam splitter (PBS) realized by combining a multimode waveguide with internal PhC. MSBs in heterostructure waveguides have shown interesting applications such as designable band-pass flat-top filters, and resonance-like filters with high transmission. In the course of this work, InGaAsP suspended membrane technology was developed. An H2 cavity with a linewidth of ~0.4 nm, corresponding to a Q value of ~3675 has been shown. InGaAsP PhC membrane is an ideal platform to study coupled quantum well/dot-nanocavity system. / <p>QC 20120831</p>

Temporal pulse shaping based on integrated Bragg gratings is investigated in this work to achieve arbitrary output waveforms. The grating structure is simulated based on the sidewall-etching geometry in an AlGaAs platform. The inverse scattering employin the Gel'fan-Levithan-Marchenko theorem and the layer peeling method provides a tool to determine grating structures from a desired spectral reflection response. Simulations of pulse shaping considered flat-top and triangular pulses as well as one-to-one and one-to-many pulse shaping. The suggested grating profiles revealed a compromise between performance and grating length. The integrated grating, a few hundred microns in length, could generate flat-top pulses with pulse durations as short as 500 fs with rise/fall times of 200 fs; the results are comparable to previous work in free-space optics and fiber optics. The theories and the devised algorithms could serve as a design station for advanced grating devices for, but not restricted to, optical pulse shaping.

Temporal pulse shaping based on integrated Bragg gratings is investigated in this work to achieve arbitrary output waveforms. The grating structure is simulated based on the sidewall-etching geometry in an AlGaAs platform. The inverse scattering employin the Gel'fan-Levithan-Marchenko theorem and the layer peeling method provides a tool to determine grating structures from a desired spectral reflection response. Simulations of pulse shaping considered flat-top and triangular pulses as well as one-to-one and one-to-many pulse shaping. The suggested grating profiles revealed a compromise between performance and grating length. The integrated grating, a few hundred microns in length, could generate flat-top pulses with pulse durations as short as 500 fs with rise/fall times of 200 fs; the results are comparable to previous work in free-space optics and fiber optics. The theories and the devised algorithms could serve as a design station for advanced grating devices for, but not restricted to, optical pulse shaping.

Le développement des sources supercontinuum a engendré des avancées majeures dans de nombreux domaines tels que la spectroscopie, la métrologie ou encore la biologie avec la tomographie optique cohérente. Récemment, l'arrivée des fibres à cristaux photoniques (FCPs) a permis la fabrication de telles sources avec des lasers impulsionnels de pompe moins puissants. Ainsi, de par leur compatibilité avec les fibres optiques, les lasers impulsionnels réalisés en optique intégrée sur verre semblent une alternative intéressante pour la réalisation d'une source supercontinuum intégrée. Notre travail a donc eu pour objectif l'étude et la réalisation d'un laser impulsionnel déclenché par modulation passive des pertes assez puissant et compatible avec les fibres à cristaux photoniques dans le but de générer un supercontinuum. Nous avons alors conçu et fabriqué ce laser constitué d'un guide d'onde amplificateur réalisé par échange d'ions dans un verre dopé au néodyme et d'une cavité Fabry-Perot fermée par un miroir diélectrique en entrée et sans miroir de sortie ce qui permet un couplage direct avec une fibre optique. L'hybridation de l'absorbant saturable sous la forme d'une couche mince d'acétate de cellulose dopée au BDN sur le guide d'onde a permis la génération d'impulsions ayant une puissance crête de (2,8 ± 0,6) kW. La source supercontinuum réalisé avec une FCP pompée par le laser préalablement étudié présente un spectre allant de 440 nm à 1600 nm. Les perspectives de cette étude portent sur le changement de matériau absorbant saturable pour permettre l'émission d'impulsions plus puissantes, ainsi que sur l'intégration monolithique de la FCP pour réaliser un dispositif encore plus compact. Elles portent aussi sur la réalisation de lasers intégrés à modes bloqués utilisant cette technologie. Nous avons démontré sa faisabilité ainsi que son régime de fonctionnement en soliton dissipatif. Des caractérisations préliminaires ont également été effectuées. / Supercontinuum sources made possible major break through in spectroscopy metrology and biology like the development of optical coherent tomography. Photonics crystal fiber have been useful for supercontinuum generation allowing the use of relatively low peak power pulsed laser sources. Regarding this kind of devices, pulsed lasers made by integrated optics on glass seemed to be a good candidate. The aims of this work were hence to develop and realize Q-switched lasers for photonic crystal fiber pumping. We demonstrated the possibility to realize a supercontinuum source pumped by an integrated Q-switched laser made by ion exchange on Neodymium doped glass. The Fabry-Perot cavity used is closed by a dielectric mirror on one hand and by the waveguide facet on the other side allowing direct coupling with optical fiber. The saturable absorber has been hybridized on the amplifying waveguide to interact with the evanescent wave. (2.8 ± 0.6) kW peak-power pulses have been generated, which coupled in a photonic crystal fiber, generated a 440 nm to 1600 nm large supercontinuum. As a perspective, a mode-locked laser realized with the same technology has been demonstrated. We show that this laser operates in dissipative soliton regime. This laser is then preliminary characterized.