Thesis (Ph. D.)--Duke University, 2008. / Includes bibliographical references.

This thesis describes several techniques for the optimization of the manufacturing of relief diffractive structures used as optical elements by Electron beam lithograph BS600 in the Electron beam laboratory of the Institute of Scientific Instruments of the Academy of Sciences of the Czech Republic. The Electron beam lithograph BS600 was originally developed and constructed in the Institute of Scientific Instruments of the Academy of Sciences of the Czech Republic for Tesla in 1983, but is still developing, which was published. The Electron been lithograph BS600 is specific in these days because of its accelerating potential and is unique in the world because of the possibility to shape the beam. The optimization of manufacturing of relief diffractive structures, used as optical elements, was mostly reached by analysis, bringing optimal solution for the required effect. Moreover, an algorithm was developed for driving the electron beam position, shape, size and the time of each elementary exposition. The analysis showed that is convenient to use mathematical description of separate lines of diffractive structures. A separate subject was carried out for the calibration of the exposition field of the Electron beam lithograph BS600.

Afin de développer des capteurs ultrasensibles des substrats fiables pour la diffusion Raman exaltée de surface (SERS) ont été fabriqués. Les deux meilleurs candidats de matériaux constituant les nanoparticules pour des substrats SERS sont l’argent et l’or. L’argent présente un meilleur facteur d’exaltation de l'intensité Raman et l’or est stable dans les milieux biologiques. C’est pourquoi la combinaison de ces deux métaux dans des nanostructures bimétalliques semble être une approche prometteuse qui combine les propriétés de surface de l’or et d’exaltation de l’argent. Le recuit thermique des couches métalliques minces est utilisé comme une technique simple et peu coûteuse. Cette dernière permet d’élaborer des substrats homogènes et reproductibles de nanoparticules bimétalliques or-argent ayant un facteur d’exaltation importante. Ces nanoparticules gardent leurs propriétés d’exaltation même après une année de fabrication. En jouant sur la composition de nanoparticules bimétalliques il est possible d’avoir une résonance de plasmons de surface localisés (LSPR) sur tout le spectre visible. Ces substrats sont caractérisés par une exaltation SERS supérieure lorsque la résonance plasmon est plus proche de la longueur d'onde d'excitation Raman. En outre, les nanoparticules bimétalliques de différentes tailles, compositions ont été réalisés par lithographie électronique. L’étude systématique de leurs propriétés plasmoniques et de leur exaltation SERS a révélé une conservation du lien entre résonance plasmon et signal SERS / Driven by the interest in finding ultrasensitive sensors devices, reliable surface enhanced Raman scattering (SERS) based substrates are fabricated. Silver and gold nanoparticles are two of the best candidates for SERS substrates where Ag nanoparticles exhibit large enhancing ability in Raman intensity while Au nanostructures are stable in biological systems. Hence, combining the two metals in bimetallic nanostructures appeared to be a promising approach in order to sum the merits of Au surface properties and Ag enhancing ability. Thermal annealing of thin metallic films is used as a simple and relatively inexpensive technique to elaborate homogenous and reproducible Ag/Au bimetallic nanoparticles SERS substrates with high enhancing ability. The fabricated nanoparticles proved their enhancing stability even after one year of fabrication. Manipulating the composition of Ag/Au bimetallic NPs resulted in tuning the Localized Surface Plasmon Resonance (LSPR) over the whole visible spectrum, where the substrates are characterized with higher SERS enhancement when they exhibit LSPR closer to the Raman excitation wavelength. Additionally, bimetallic nanoparticles patterns with different size, composition and lattice constants have been conducted by electron beam lithography. The systematic study of their interesting plasmonic and SERS enhancing properties revealed maintenance in the LSPR-SERS relation by changing the nanoparticle size

Le présent travail de thèse a été effectué dans le cadre du projet CPER-FEDER MATISSE, projet coordonné par l’UTT regroupant deux autres partenaires : Nanovation et l’URCA. Le projet avait pour ambition la croissance des couches minces de ZnO de haute qualité et leur valorisation.Le ZnO cristallin est un semiconducteur à grand gap avec d’excellentes propriétés optiques. Son énergie de liaison excitonique de 60meV est l’une des caractéristiques qui lui valent tant d’attention malgré sa difficile gravure physique qui hypothèque la réalisation de composants photoniques compacts. En effet, la longueur d’onde d’émission du ZnO est de l’ordre de 375nm, impliquant l’utilisation de structures de petite taille dont la réalisation relève des nanotechnologies.Trois objectifs scientifiques ont été poursuivis : l’amélioration de l’extraction de l’émission excitonique dans les couches minces de ZnO par ingénierie de gap en utilisant les cristaux photoniques, l’émission laser et son contrôle et enfin, le transfert d’énergie du ZnO vers les QDots comme couche de phosphores pour la conversion de l’émission UV en lumière blanche. Pour y parvenir, deux technologies ont été utilisées : la croissance PLD (Nanovation) et la structuration par approche top-down délaissée par la communauté scientifique.La thèse traite de la structuration par lithographie électronique combinée à la gravure RIE-ICP et les études scientifiques associées. Les résultats obtenus sont concluants avec parfois des records comme pour le gain (>1000cm-1) et les pertes optiques (<10cm-1). Nous avons également procédé à la réalisation des premiers composants optoélectroniques : laser MIS et photodétecteur MSM / This work was conducted in the framework of the MATISSE project supported by the CPER-FEDER. Coordinated by UTT and including two other partners: Nanovation and URCA, the main project objective was the growth of high quality ZnO thin films and their valorization.ZnO is a wide band gap semiconductor with excellent optical properties. Its exciton binding energy (60meV) is one of the most important characteristics that earned to ZnO more attention despite its physical etching which is difficult to perform. Indeed, the excitonic emission of ZnO occurs approximately at 375nm, which involves the use of small structures whose achievement leads to the use of nanotechnology.Three scientific objectives were pursued: improving the extraction of the excitonic emission in ZnO thin films by engineering the photonic band gap by using photonic crystals, laser emission and control and finally, energy transfer from ZnO to QDots used as phosphors for down conversion of the UV emission to white emission. To achieve this, two technologies were used: PLD growth (Nanovation) and top-down structuring approach neglected by the scientific community.The thesis mainly deals with the structuring by electron beam lithography combined with ICP - RIE and related scientific studies. Conclusive results have been obtained such as high optical gain (>1000 cm-1) and low optical losses (<10 cm-1). We also carried out first optoelectronic components: MIS laser and MSM photodetector

The aim of this project was to produce an integrate-able free space optical transceiver for Specks. Specks are tiny computing units that together can form a powerful network called a SpeckNet. The SpeckNet platform is developed by the SpeckNet consortium, which consists of five Scottish Universities and combines computer science, electrical engineering and digital signal processing groups. The principal goal of creating an optical transceiver was achieved by integrating in-house fabricated VCSELs (with lasing thresholds below 400 uA) and custom designed detectors on the SpeckNet platform. The transceiver has a very low power consumption (approximately 100 uW), which removes the need for synchronous communication through the SpeckNet thus making the network more efficient. I describe both static and dynamic beam control techniques. For static control, I used micro-lenses. I fabricated the lenses by greyscale electron beam lithography and integrated them directly on VCSEL arrays. I achieved a steering angle of 10 degrees with this design. I also looked at integrated gratings etched straight into a VCSEL and observed beam steering with an efficiency of 60% For dynamic control, I implemented a liquid crystal (LC) design. I built a LC cell with 30 individually controlled pixels, but I only achieved a steering angle of 1 degree. Furthermore, I investigated two different techniques for achieving beam steering by interference, using coupled VCSELs (a phased array approach). Firstly, using photonic crystals etched into the surface of the VCSEL, I built coupled laser cavities. Secondly, I designed and built bow-tie type VCSELs that were optically coupled but electrically isolated. These designs work by differential current injection causing an interference effect in the VCSELs far field. This technique is the first stepping stone towards realising a phased optical array. Finally, I considered signal detection. Using the same VCSEL material, I built a resonant-cavity detector. This detector had a better background rejection ratio than commercially available silicon devices.