Détecter un ensemble de marqueurs biologiques dans un sérum de patient ou bien des molécules spécifiques d'un herbicide dans un échantillon prélevé dans l'eau d'une rivière ? Etre capable de transformer une interaction biologique en un signal électrique ou encore déposer des volumes infiniment faibles de molécules biologiques sur une surface solide à des fins de diagnostique ? Passer de la fabrication de microcapteurs inertiels pour la navigation à la conception et au développement de biocapteurs micromécaniques ? Nous démontrons que le fil conducteur permettant de faire le lien entre ces domaines en apparence disjoints est matérialisé par des micro- et nanosystèmes électromécaniques développés au sein du LAAS à partir de la feuille blanche jusqu'à l'intégration du système avec son électronique associée. Quel lendemain pour les bio- microsystèmes électromécaniques ? Faut-il encore miniaturiser ? Est-il pertinent d'entreprendre le contraire ? Comment poursuivre l'aventure transdisciplinaire en étant sûr du fait que la réussite est au bout de la route ? Nous tentons de répondre à l'ensemble de ces questions tout au long de ce manuscrit retraçant l'ensemble de nos travaux de recherche effectués au LAAS et ailleurs depuis l'an 2000.

Les avantages liés à la réduction de taille et la microfabrication, caractéristiques des microsystèmes électromécaniques (MEMS), sont favorables à l'utilisation de microstructures dans le domaine des biocapteurs. Dans ce contexte, nous avons développé des micromembranes résonantes à actionnement et détection intégrés, par l'intermédiaire d'une couche piézoélectrique (PZT), pour la transduction d'une reconnaissance biologique. Après la fabrication de matrices de micromembranes par les techniques de microfabrication, des travaux de caractérisation statique ont permis d'appréhender le comportement initial des structures et de déterminer les propriétés du matériau piézoélectrique. Ces optimisations ont ensuite servi de base pour la caractérisation dynamique des micromembranes, qui correspond à leur mode de fonctionnement en tant que capteur de masse. Ainsi, après la validation de l'actionnement intégré des structures et la détection des fréquences de résonance par les deux effets piézoélectriques, la génération optimisée de spectres a permis de développer une électronique spécifique aux structures et de les calibrer en masse pour la détermination de la sensibilité dans l'air : Sair=-15 pg/(mm².Hz). La caractérisation dynamique approfondie a permis enfin d'aborder l'utilisation des membranes en tant que biocapteur pour deux types d'application : une première orientée diagnostic par la détection spécifique en temps-réel et en milieu liquide d'anticorps alors que la seconde application concerne la combinaison des micromembranes avec des polymères à empreinte moléculaire (MIP). Cette seconde application, orientée analyse environnementale, permet de profiter des avantages liés aux MIP, tels que la stabilité et la structuration des polymères, avec ceux des micromembranes, tels que la sensibilité et le multiplexage intégré. Ces travaux correspondent à la démonstration des capacités de micromembranes résonantes pour la détection fiable, sensible, intégrée et multiplexée de biom olécules.

This thesis presents the design of an inertial measurement data acquisition system intended for use in sailboats. The variables of interest are 3-axis acceleration, 3-axis rotation, GPS position/velocity, magnetic compass bearing and wind speed/direction. The design focus is on low-cost micro-electromechanical systems (MEMS) based technology and demonstrating the validity of these technologies in a scientific application. A prototype is constructed and submitted to a series of tests to demonstrate functionality and soundness of the design. These tests range from bench tests to full scale application. Contributions of this thesis include the novel application of inertial measurement unit (IMU) technology to a sailboat racing application, the integration of all instrumentation, creative ruggedised packaging and emphasising the use of low-cost commercial off-the-shelf (COTS) technology.

<p>Carbon nanotubes (CNTs) have recently emerged as promising candidates for electron field emission (FE) cathodes in integrated FE devices. These nanostructured carbon materials possess exceptional properties and their synthesis can be thoroughly controlled. Their integration into advanced electronic devices, including not only FE cathodes, but sensors, energy storage devices, and circuit components, has seen rapid growth in recent years. The results of the studies presented here demonstrate that the CNT field emitter is an excellent candidate for next generation vacuum microelectronics and related electron emission devices in several advanced applications.</p><p> The work presented in this study addresses determining factors that currently confine the performance and application of CNT-FE devices. Characterization studies and improvements to the FE properties of CNTs, along with Micro-Electro-Mechanical Systems (MEMS) design and fabrication, were utilized in achieving these goals. Important performance limiting parameters, including emitter lifetime and failure from poor substrate adhesion, are examined. The compatibility and integration of CNT emitters with the governing MEMS substrate (i.e., polycrystalline silicon), and its impact on these performance limiting parameters, are reported. CNT growth mechanisms and kinetics were investigated and compared to silicon (100) to improve the design of CNT emitter integrated MEMS based electronic devices, specifically in vacuum microelectronic device (VMD) applications.</p><p> Improved growth allowed for design and development of novel cold-cathode FE devices utilizing CNT field emitters. A chemical ionization (CI) source based on a CNT-FE electron source was developed and evaluated in a commercial desktop mass spectrometer for explosives trace detection. This work demonstrated the first reported use of a CNT-based ion source capable of collecting CI mass spectra. The CNT-FE source demonstrated low power requirements, pulsing capabilities, and average lifetimes of over 320 hours when operated in constant emission mode under elevated pressures, without sacrificing performance. Additionally, a novel packaged ion source for miniature mass spectrometer applications using CNT emitters, a MEMS based Nier-type geometry, and a Low Temperature Cofired Ceramic (LTCC) 3D scaffold with integrated ion optics were developed and characterized. While previous research has shown other devices capable of collecting ion currents on chip, this LTCC packaged MEMS micro-ion source demonstrated improvements in energy and angular dispersion as well as the ability to direct the ions out of the packaged source and towards a mass analyzer. Simulations and experimental design, fabrication, and characterization were used to make these improvements.</p><p> Finally, novel CNT-FE devices were developed to investigate their potential to perform as active circuit elements in VMD circuits. Difficulty integrating devices at micron-scales has hindered the use of vacuum electronic devices in integrated circuits, despite the unique advantages they offer in select applications. Using a combination of particle trajectory simulation and experimental characterization, device performance in an integrated platform was investigated. Solutions to the difficulties in operating multiple devices in close proximity and enhancing electron transmission (i.e., reducing grid loss) are explored in detail. A systematic and iterative process was used to develop isolation structures that reduced crosstalk between neighboring devices from 15% on average, to nearly zero. Innovative geometries and a new operational mode reduced grid loss by nearly threefold, thereby improving transmission of the emitted cathode current to the anode from 25% in initial designs to 70% on average. These performance enhancements are important enablers for larger scale integration and for the realization of complex vacuum microelectronic circuits.</p> / Dissertation

In this thesis, nondestructive surface wave measurements are presented for characterization of dynamic modulus and layer thickness on different pavements and cement concrete slabs. Air-coupled microphones enable rapid data acquisition without physical contact with the pavement surface. Quality control of asphalt concrete pavements is crucial to verify the specified properties and to prevent premature failure. Testing today is primarily based on destructive testing and the evaluation of core samples to verify the degree of compaction through determination of density and air void content. However, mechanical properties are generally not evaluated since conventional testing is time-consuming, expensive, and complicated to perform. Recent developments demonstrate the ability to accurately determine the complex modulus as a function of loading time (frequency) and temperature using seismic laboratory testing. Therefore, there is an increasing interest for faster, continuous field data evaluation methods that can be linked to the results obtained in the laboratory, for future quality control of pavements based on mechanical properties. Surface wave data acquisition using accelerometers has successfully been used to determine dynamic modulus and thickness of the top asphalt concrete layer in the field. However, accelerometers require a new setup for each individual measurement and are therefore slow when testing is performed in multiple positions. Non-contact sensors, such as air-coupled microphones, are in this thesis established to enable faster surface wave testing performed on-the-fly. For this project, a new data acquisition system is designed and built to enable rapid surface wave measurements while rolling a data acquisition trolley. A series of 48 air-coupled micro-electro-mechanical sensor (MEMS) microphones are mounted on a straight array to realize instant collection of multichannel data records from a single impact. The data acquisition and evaluation is shown to provide robust, high resolution results comparable to conventional accelerometer measurements. The importance of a perfect alignment between the tested structure’s surface and the microphone array is investigated by numerical analyses. Evaluated multichannel measurements collected in the field are compared to resonance testing on core specimens extracted from the same positions, indicating small differences. Rolling surface wave measurements obtained in the field at different temperatures also demonstrate the strong temperature dependency of asphalt concrete. A new innovative method is also presented to determine the thickness of plate like structures. The Impact Echo (IE) method, commonly applied to determine thickness of cement concrete slabs using an accelerometer, is not ideal when air-coupled microphones are employed due to low signal-to-noise ratio. Instead, it is established how non-contact receivers are able to identify the frequency of propagating waves with counter-directed phase velocity and group velocity, directly linked to the IE thickness resonance frequency. The presented non-contact surface wave testing indicates good potential for future rolling quality control of asphalt concrete pavements. / <p>QC 20170209</p>

This thesis presents a unique design for an infrared spectrometer based on a MEMS Binary Fresnel Zone Plate for the purpose of assessing the health of oil-impregnated high voltage (HV) equipment. It does so by measuring dissolved gases within it. These gases include carbon monoxide, carbon dioxide, methane, ethane, ethylene, and acetylene. These gases are currently measured using numerous technologies such as gas combustion, gas chromatography, photoacoustic spectroscopy, and FTIR spectroscopy. Each of these technologies have their advantages and disadvantages. The design presented in this thesis consists of an analysis of how the various Binary Zone Plate parameters affect its spectral resolution and transmission efficiency. Simulations show that increasing the number of zones and the focal length, as well as decreasing the aperture diameter, increases the spectral resolution of the spectrometer. Simulations also show that transmission efficiency is proportional to the number of zones and the aperture diameter. This thesis presents a theoretical argument for how one zone plate lens can be used to measure all dissolved gases present in HV equipment. Lenses for the visible and infrared ranges were fabricated in the University of Manitoba NSFL Cleanroom. The lenses were then tested in an optical setup. The results show that the visible light experiments were successful in achieving appropriate spectral discrimination by changing the distance between the aperture and the lens. The results from the infrared experiment show that a detector was able to discriminate between full and no incident radiation. / May 2017

Micromirrors and diffraction gratings were developed for spectroscopy and magnetic field sensor in this thesis. MEMS blazed gratings were successfully fabricated in different grating periodicities to cover a wide infrared wavelength range. Lorentz force actuated micromirrors were investigated, and two types of mirrors were fabricated: rotating and pop-up micromirrors. The deflection angle of the mirrors was controllable by altering the driving current on the mirror. Deflection angle vs. driving current was studied for different mirror types and different spring dimensions. A Lorentz force based magnetic field sensor is also demonstrated. The sensor employs the rotating micromirror as a resonator. With an AC current flowing around the micromirror, a periodic Lorentz force is generated which drives the resonator. The rotational amplitude of the micromirror is measured with an optical positioning system and external circuits. The highest resolution of the magnetic field sensor is 0.4 nT at 50 mArms, and 53 mHz filter bandwidth. With appropriate current level, this sensor can measure a wide range of magnetic field, from nT to T. / October 2016

The clever designs of natural transducers are a great source of inspiration for man-made systems. At small length scales, there are many transducers in nature that we are now beginning to understand and learn from. Here, we present an example of such a transducer that is used by field crickets to produce their characteristic song. This transducer uses two distinct components—a file of discrete teeth and a plectrum that engages intermittently to produce a series of impulses forming the loading, and an approximately triangular membrane, called the harp, that acts as a resonator and vibrates in response to the impulse-train loading. The file-and-plectrum act as a frequency multiplier taking the low wing beat frequency as the input and converting it into an impulse-train of sufficiently high frequency close to the resonant frequency of the harp. The forced vibration response results in beats producing the characteristic sound of the cricket song. Based on various experimental observations reported in the literature, we model the sound production mechanism as consisting of three stages—actuator, frequency multiplier, and amplifier. We then examine how different features of the forewing govern the sound production. With careful experiments on the harp, we estimate the actual modulus of the harp cuticle and also measure the morphological features of the forewings of different field cricket species. Using this data, we construct a finite element model of the harp and carry out modal analysis to determine its natural frequency. We fine tune the model with appropriate elastic boundary conditions to match the natural frequency of the harp of a particular species—Gryllus bimaculatus. We model impulsive loading based on a loading scheme reported in the literature and predict the transient response of the harp. We show that the harp indeed produces beats and its frequency content matches closely that of the recorded song. Subsequently, we use our FEM model to show that the natural design is quite robust to structural perturbations in the file. The characteristic song frequency produced is unaffected by small variations in the spacing of file-teeth and even by larger gaps. We then attempt to predict a scaling law that crickets must use for spectrum allocation. We use our FEM model, with measurements and computations, to arrive at a predictive model that relates call frequencies of field crickets to the harp dimensions. We verify the validity of this model by using the measured dimensions of harps of nine field cricket species. We then use our model to provide possible explanations as to why the song frequency of various field crickets in our study is bounded between 3.1 kHz and 6.8 kHz. We also show that we are faced with similar challenges as crickets when designing miniature MEMS (Micro-Electro-Mechanical Systems) speakers. We present a design of MEMS speakers that is inspired by how the crickets actuate. We have been able to realize our first prototypes using simple fabrication processes. By electrostatically actuating the MEMS devices, we obtain a sound pressure of 70 dB SPL at a distance of 10 cm. We believe that with a few design and fabrication iterations, we will be able to achieve a much higher sound pressure output from the MEMS speakers.

Un important effort de recherche est nécessaire pour assurer la maîtrise du vol en espace restreint de drones miniatures. Cette recherche s’appuie sur une nouvelle génération de capteurs inertiels, les capteurs vibrants, qui offrent par leur principe et leur technologie de réalisation associée, des perspectives tout à fait intéressantes en terme de miniaturisation / performance / coût. Dans ce travail de thèse, nous avons notamment étudié la relation entre la performance et les dimensions de micro-accéléromètres vibrants en silicium. Pour cela, nous avons établi les limites de ce type de capteur en fonction de la taille du résonateur. En particulier, le facteur de qualité est apparu comme un paramètre déterminant et une étude expérimentale a été réalisée afin de valider les modèles théoriques. De nombreux résultats expérimentaux nous ont permis de dresser une estimation des performances attendues. Enfin, une première architecture d’accéléromètre vibrant en silicium est détaillée / A major research effort is necessary to ensure flight control for miniaturized UAV. This research is based on a new generation of inertial sensors, the vibrating sensors, which offer because of their principle and their associated technology achievement, interesting prospects in terms of miniaturization / performance / cost. The focus of this research was to study the relationship between performance and size of silicon vibrating accelerometers.We have established the boundaries of this type of sensor based on the size of the resonator. In particular, the quality factor has emerged as a determining factor and an experimental study was conducted to validate the theoretical models. Thus, many experimental results have enabled us to estimate the expected performances. Finally, a first architecture of silicon vibrating accelerometer is presented

Neste trabalho é proposto um sensor capacitivo do tipo eletrodos interdigitados para avaliação da qualidade de combustíveis automotivos. Os eletrodos interdigitados apresentam algumas características adequadas ao sensor em questão. Entre elas o fato de elevar significativamente a capacitância por apresentar grande quantidade de capacitores em paralelo e de ser uma estrutura possível de se fabricar por processos convencionais de microfabricação. Além disso, esses eletrodos permitem que o combustível preencha seus espaçamentos funcionando como seu dielétrico. Foram feitas modelagens e simulações do sensor para verificação da influência de diversos parâmetros de projeto. Protótipos foram fabricados em substratos de alumina com eletrodos de níquel eletrodepositado. Os eletrodos têm larguras entre 50m e 100m, com espaçamento entre eletrodos tendo valores dessa mesma ordem. O comprimento dos eletrodos é de 800m. A altura dos eletrodos varia entre 20m e 40m. O sensor como um todo tem área em torno de 4cm². Foram realizadas medições com misturas álcool e água, gasolina e álcool, gasolina e querosene entre outras. As caracterizações mostraram bons resultados comprovando a validade do princípio proposto. O sensor se mostrou capaz de detectar os tipos de adulteração mais comuns no Brasil, adição de água ao álcool combustível e adição solventes orgânicos ou de álcool além do permitido à gasolina. / This work proposes a capacitive sensor with interdigitated electrodes in order to evaluate the quality of automotive fuel. Interdigitated electrodes have some interesting features for this type of sensor. Among them, they increase the capacitance by having several capacitors in parallel, and by having a structure feasible to be manufactured by conventional microfabrication processes. In addition, automotive fuel, serving as the dielectric material, fills the gaps of the electrodes. Modeling and computational simulations of the sensor were carried out in order to realize the influence of several design parameters. Samples were manufactured using alumina substrates with electroplated nickel electrodes. The width of the electrodes was chosen to be between 50m and 100m, with gaps of similar size. The paired length of the electrodes was 800m. The height of the electrodes varied between 20m and 40m. The whole sensor was around 4cm² in area. Several measurements were carried out using mixtures of alcohol and water, gasoline and alcohol, gasoline and kerosene, and others. Characterizations showed good results, validating the method. The sensor was capable of detecting the main types of fuel adulteration used in Brazil: addition of water to alcohol, and addition of organic solvents or alcohol to gasoline beyond the acceptable limit.