The use of a patterned resistive sheet as an infrared-selective absorber, including the effects of a mechanical support dielectric layer is discussed. Also, modified dielectric coated Salisbury Screen can improve both the wavelength selectivity and the speed of thermal response for microbolometers. These patterned resistive sheets and Modified dielectric coated Salisbury Screen are a modified form of classical Salisbury Screens that utilize a resistive absorber layer placed a quarter-wavelength in front of a mirror. These structures can show a narrower detection bandwidth when compared to conventional microbolometers. For a Modified dielectric coated Salisbury Screen for multi-spectral system, wavelength selectivity can be varied by changing the distance to the mirror, and for patterned resistive sheet, wavelength selectivity can be varied by changing the lithographically drawn parameters of the array. Hence, different pixels in a focal plane array can be designed to produce a “multi-color” infrared imaging system. Also, the thermal mass of microbolometer is reduced using patterned resistive structure. / text

Electrical systems have become ubiquitous, and with them come the need to accurately monitor electric current. The aerospace industry is no exception. Modern aircraft may contain more than one hundred current sensors, each one critical to a properly functioning vehicle. While these sensors function acceptably, several areas have been identified for improvement: size, weight, and cost. Each sensor is bulky, taking up valuable space. They are also costly to manufacture. The existing design is based on the Hall effect, and has remained fundamentally unchanged for decades. With the recent progress in manufacturing techniques and materials, it would be beneficial to reexamine these sensors and determine if improvements can be made using the accomplishments of recent years. Of particular interest are microelectromechanical systems, also known as MEMS. Using a sensor based on MEMS technologies in which design, function, and fabrication are closely intertwined would automatically meet two of the three goals: reducing size and weight. MEMS additionally have the potential to allow existing systems to be miniaturized. Also of interest are advanced materials, some of which can behave as transducers, linking different physical phenomenon. The goal of this dissertation is to use advances in manufacturing techniques and materials, specifically those discussed above, to design a better current sensor. As part of this goal, several potential solutions were studied and optimized. Finally, proof-of-concept prototypes were fabricated and tested to validate the feasibility of the designs and offer insight into continued sensor development.

An analog controller has been analyzed and built for an electrostatic micro-cantilever beam. The closed loop MEMS device can be used as both actuator and sensor. As an actuator it will have the advantage of large stable travel range up to 90% of the gap. As a sensor the beam is to be driven into chaotic motion which is very sensitive changes in the system parameters. Two versions of the controller have been analyzed and implemented, one for the actuator and one for the sensor. For the actuator, preliminary experiments show good matching with the model. As for the sensor, the dynamic behavior have been studied and the best operating regions have been determined.

Micro-Electro-Mechanical Systems (MEMS) micromirrors have been developed for more than two decades along with the development of MEMS technology. They have been used into many application fields: optical switches, digital light projector (DLP), adoptive optics (AO), high definition (HD) display, barcode reader, endoscopic optical coherence tomography (OCT) and confocal microscope, and so on. Especially, MEMS mirrors applied into endoscopic OCT and confocal microscope are the intensive research field. Various actuation mechanisms, such as electrostatic, electromagnetic, electro bimorph thermal, electrowetting, piezoelectric (PZT) and hybrid actuators, are adopted by different types of micromirrors. Among these actuators, the electrostatic is easily understood and simple to realize, therefore, it is broadly adopted by a large number of micromirrors. This thesis reports the design, fabrication, and characterization of a 2-D Silicon-on-insulation (SOI) MEMS micromirror with sidewall (SW) electrodes for endoscopic OCT or confocal microscope imaging. The biaxial MEMS mirror with SW electrodes is actuated by electrostatic actuators. The dimension of mirror plate is 1000micron×1000micron, with a thickness of a 35micron. The analytical modeling of SW electrodes, fabrication process, and performance characteristics are described. In comparison to traditional electrostatic actuators, parallel-plate and comb-drive, SW electrodes combined with bottom electrodes achieve a large tilt angle under a low drive voltage that the comb-drive does and possess fairly simple fabrication process same as that of the parallel-plate. A new fabrication process based on SOI wafer, hybrid bulk/surface micromachined technology, and a high-aspect-ratio shadow mask is presented. Moreover, the fabrication process is successfully extended to fabricate 2×2 and 4×4 micromirror arrays. Finally, a biaxial MEMS mirror with SW electrodes was used into Confocal MACROscope for imaging. Studied optical requirements in terms of two optical configurations and frequency optimization of the micromirror, the biaxial MEMS mirror replaces the galvo-scanner and improves the MACROscope. Meanwhile, a new Micromirror-based Laser Scanning Microscope system is presented and allows 2D images to be acquired and displayed.

Vehicle navigation systems incorporate on-board sensors/signal receivers and provide necessary positioning and guidance information for land, marine, airborne and space vehicles. Among different navigation solutions, the Global Positioning System (GPS) and an Inertial Navigation System (INS) are two basic navigation systems. Due to their complementary characters in many aspects, a GPS/INS integrated navigation system has been a hot research topic in recent decades. Both advantages and disadvantages of each individual system and their combination are analysed in this thesis. The Micro Electrical Mechanical Sensors (MEMS) successfully solved the problems of price, size and weight with traditional INS, and hence are widely applied in GPS/INS integrated systems. The main problem of MEMS is the large sensor errors, which rapidly degrade the navigation performance in an exponential speed. By means of different methods, such as autoregressive model, Gauss-Markov process, Power Spectral Density and Allan Variance, we analyse the stochastic errors within the MEMS sensors. The test results show that different methods give similar estimates of stochastic error sources. An equivalent model of coloured noise components (random walk, bias instability and ramp noise) is given. Three levels of GPS/IMU integration structures, i.e. loose, tight and ultra-tight GPS/IMU navigation, are introduced with a brief analysis of each character. The loose integration principles are presented with detailed equations as well as the INS navigation principles. The Extended Kalman Filter (EKF) is introduced as the data fusion algorithm, which is the core of the whole navigation system. Based on the system model, we show the propagation of position standard errors with the tight integration structure under different scenarios. Even less than 4 observable GNSS satellites can contribute to the integrated system, especially for the orientation errors. A real test with loose integration is carried out, and the EKF performance is analysed in detail. Since the GPS receivers are normally working with a digital map, the map matching principle and its link-choosing problem are briefly introduced. This problem is proposed to be solved by the lane detection from real-time images. The procedures for the lane detection based on image processing are presented. The test on high ways, city streets and pathways are successfully carried out, and analyses with possible solutions are given for some special failure situations. To solve the large error drift of the IMU, we propose to support the IMU orientation with camera motion estimation from image pairs. First the estimation theory and computer vision principles are briefly introduced. Then both point and line matches algorithms are given. Finally the L1-norm estimator with balanced adjustment is proposed to deal with possible mismatches (outliers). Tests and comparisons with the RANSAC algorithm are also presented. For the latest trend of MEMS chip sensors, their industry and market are introduced. To evaluate the MEMS navigation performance, we augment the EKF with an equivalent coloured noise model, and the basic observability analysis is given. A realistic simulated navigation test is carried out with single and multiple MEMS sensors, and a sensor array of 5-10 sensors are recommended according to the test results and analysis. Finally some suggestions for future research are proposed. / <p>QC 20131016</p>

The recent breakthroughs in genomics and molecular diagnostics will not be reflected in health-care systems unless the biogenetic or other nucleic acid-based tests are transferred from the laboratory to clinical market. Developments in microfabrication techniques brought lab-on-a-chip (LOC) into being the best candidate for conducting sample preparation for such clinical devices, or point-of-care testing set-ups. Sample preparation procedure consists of several stages including cell transportation, separation, cell lysis and nucleic acid purification and detection. LOC, as a subset of Microelectromechanical systems (MEMS), refers to a tiny, compact, portable, automated and easy-to-use microchip capable of performing the sample-preparation stages together. Complexity in micro-fabrications and inconsistency of the stages oppose integration of them into one chip. Among the variety of mechanisms utilized in LOC for cell lysis, electrical methods have the highest potential to be integrated with other microchip-based mechanisms. There are, however, major limitations in electrical cell lysis methods: the difficulty and high-cost fabrication of microfluidic chips and the high voltage requirements for cell lysis. Addressing these limitations, the focus of this thesis is on realization of cell lysis microchips suitable for LOC applications. We have developed a new methodology of fabricating microfluidic chips with electrical functionality. Traditional lithography of microchannel with electrode, needed for making electro-microfluidic chips, is considerably complicated. We have combined several easy-to-implement techniques to realize electro-microchannel with laser-ablated polyimide. The current techniques for etching polyimide are by excimer lasers in bulky set-ups and with involvement of toxic gas. We present a method of ablating microfluidic channels in polyimide using a 30W CO2 laser. Although this technique has poorer resolution, this approach is more cost effective, safer and easier to handle. We have verified the performance of the fabricated electro-microfluidic chips on electroporation of mammalian cells. Electrical cell lysis mechanisms need an operational voltage that is relatively high compared to other cell manipulation techniques, especially for lysing bacteria. Microelectro-devices have dealt with this limitation mostly by reducing the inter-distance of electrodes. The technique has been realized in tiny flow-through microchips with built-in electrodes in a distance of a few micrometers which is in the scale of cell size. In addition to the low throughput of such devices, high probability of blocking cells in such tiny channels is a serious challenge. We have developed a cell lysis device featured with aligned carbon nanotube (CNT) to reduce the high voltage requirement and to improve the throughput. The vertically aligned CNT on an electrode inside a MEMS device provides highly strengthened electric field near the tip. The concept of strengthened electric field by means of CNT has been applied in field electron emission but not in cell lysis. The results show that the incorporation of CNT in lysing bacteria reduces the required operational voltage and improves throughput. This achievement is a significant progress toward integration of cell lysis in a low-voltage, high-throughput LOC. We further developed the proposed fabrication methodology of micro-electro-fluidic chips, described earlier, to perform electroporation of single mammalian cell. We have advanced the method of embedding CNT in microchannel so that on-chip fluorescent microscopy is also feasible. The results verify the enhancement of electroporation by incorporating CNT into electrical cell lysis. In addition, a novel methodology of making CNT-embedded microfluidic devices has been presented. The embedding methodology is an opening toward fabrication of a CNT-featured LOC for other applications.

This thesis presents a method for dynamic characterization of MEMS structures and discuses parameters that affect its measurements and techniques to improve them. Current methods of non-contact, laser based vibration measurement require special and expensive instruments. The method used in this thesis on the other hand, relies on Fast Fourier Transform analysis of blurred images captured using conventional cameras. The Fourier series analysis and transformation are introduced. Basic concepts of blur image analysis and associated technical terms are described. Step by step data extraction process for Fourier analysis of blurred images and results such as amplitude, attenuation, signal to noise ratio and Bessel curve are explained. Macro and micro scale experiments are designed and used to determine the effect and significance of different parameters on signal-to-noise ratio of extracted results. For this purpose geometrical parameters of macro scale combs such as length, width and duty cycle are varied across a considerable range and tests results are examined. In addition to the experiments, MATLAB code is used to model environmental effects such as addition of noise or changes of brightness. In micro scale experiments, extra patterns are created using Focused Ion Beam and etching process. Test and comparison of modified micro structures with unpatterned structures show improvement in signal to noise ratio especially in environments with high level of noise.

No description available.

This thesis studies the application of a multi-objective niched Pareto genetic algorithm on the design optimization of an electric field mill sensor. The original sensor requires resonant operation. The objective of the algorithm presented is to optimize the geometry eliminating the need for resonant operation which can be difficult to maintain in the presence of an unpredictable changing environment. The algorithm evaluates each design using finite element simulations. A population of sensor designs is evolved towards an optimal Pareto frontier of solutions. Several candidate solutions are selected that offer superior displacement, frequency, and stress concentrations. These designs were modified for fabrication using the PolyMUMPs abrication process but failed to operate due to the process. In order to fabricate the sensors in-house with a silicon-on-glass process, an anodic bonding apparatus has been designed, built, and tested.

Le sujet de thèse porte sur des micro/nanorésonateurs ainsi que leurs électroniques de lecture. Les composants mécaniques sont utilisés pour mesurer des masses inférieures à l'attogramme (10-18 g) ou de très faibles concentrations de gaz. Ces composants peuvent ensuite être mis en réseau afin de réaliser des spectromètres de masse ou des détecteurs de gaz. Afin d'atteindre les résolutions nécessaires, il a été choisi d'utiliser une détection harmonique de résonance détectant les variations de la fréquence de résonance d'une nanostructure mécanique. Les dimensions du résonateur sont réduites afin d'augmenter sensibilité en masse, cependant le niveau du signal électrique en sortie du composant est également réduit. Ce faible signal nécessite donc de concevoir de nouvelles transductions électromécaniques ainsi que des architectures électroniques qui minimisent le bruit, les couplages parasites et qui peuvent être mise en réseau.