This thesis presents the development and microfabrication of capacitive micromachined ultrasonic transducers (CMUT) with diamond membranes for the first time in the literature. Although silicon and silicon nitride (Si3N4) membranes have been generally used as the membrane material in CMUTs. These membrane materials have moderate properties that can cause damage during the operation of CMUTs. In this thesis, a new material for the membrane is introduced for CMUTs. Diamond has exceptional potential in the area of micro-nano technologies due to unrivalled stiffness and hardness, excellent tribological performance, highly tailorable and stable surface chemistry, high thermal conductivity and low thermal expansion, high acoustic velocity of propagating waves, and biocompatibility. Based on these excellent material properties, diamond is employed in the new generation CMUT structures for more robust and reliable operations. The microfabrication process of CMUT has been generally performed with either sacrificial release process or wafer bonding technique. High yield and low cost features of wafer bonding process makes it preferable for CMUT devices. In this thesis, plasma-activated direct wafer bonding process was developed for the microfabrication of 16-element 1-D CMUT arrays with diamond membranes. They were designed to operate at different resonance frequencies in the range of 1 MHz and 10 MHz with different cell diameters (120, 88, 72, 54, 44 &mu / m) and element spacing (250, 375 &mu / m). 1-D CMUT array devices can be used for focusing ultrasound applications. The electronic circuit for 1-D CMUT devices with diamond membranes was designed and implemented on PCB for the ultrasound focusing experiment. This electronic circuit generates continuous or burst AC signals of &plusmn / 15 V with different and adjustable phase shifting options at 3 MHz frequency. 16 elements of 72 &mu / m 1-D CMUT array were successfully tested. Fully functional 7 elements of 1-D CMUT array are focused at an axial distance of 5.81 mm on the normal to the CMUT center plane. The CMUT array was excited using 10 Vp&minus / p with 10 cycles sinusoidal signals at 3 MHz. The microfabrication process and focusing ultrasound of 1-D CMUT devices with diamond membranes are done successfully in this thesis.

The purpose of the work is to employ molecular simulation to further extend the understanding of Self-Assembled Monolayers (SAMs), especially as it relates to three particular applications: organic-inorganic composite membranes, surface treatments in Micro-Electro-Mechanical Systems (MEMS) and organic-surface-modified Ordered Mesoporous Materials (OMMs). The first focus area for the work is the use of SAMS in organic-inorganic composite membranes for gas separations. These composite membranes, recently proposed in the literature, are based on the chemical derivatization of porous inorganic surfaces with organic oligomers. Our simulations achieve good qualitative agreement with experiment in several respects, including the improvement in the overall selectivity of the membrane and decrease in the permeance when increasing the chain length. The best improvement in the overall solubility selectivity is reached when the chains span throughout the pore. The second application focus is on the use of SAMs as coatings in MEMS devices. The work focuses on the modeling of adhesion issues for SAM coatings at the molecular level. It is shown that as the chain length is increased from 4 to 18 carbon atoms, the adhesion forces between two monolayers at the same separations decreases. The third application focus is on the use of SAMs for tailoring surface and structural properties of OMMs, in particular, porous silicas. A molecular study of structural and surface properties of a silica material with a 5 nm pore size, modified via chemical bonding of organosilanes with a range of sizes (C4, C8 and C18) is presented. Grand canonical MC simulations are employed to obtain nitrogen adsorption isotherms for unmodified and modified MCM-41 material models. Furthermore, the density profiles of alkyl chains and nitrogen molecules are analyzed to clarify the differences in the adsorption mechanisms in unmodified and modified materials. The position of the capillary condensation steps gradually shifted to lower pressure values with the increase in size of the bonded ligands, and this shift was accompanied by a gradual disappearance of the hysteresis loop. As the length of the bonded ligands is increased, a systematic decrease in the pore diameter is observed and the multi-layer adsorption mechanism in modified model materials diminishes.

To achieve the miniaturization and high performance of the mobile phone, notebook, hearing aid and personal digital assistant (PDA), many researchers focus on the developing a new-type microphone with very small dimension, high quality and low manufacturing cost utilizing MEMS technology. By using the surface and bulk micromachining technologies, this thesis designed and fabricated a capacitive MEMS microphone with a polyimide bcakplate microstructure. The main processing steps adopted in this study include five photolithoghaphies and seven thin-film depositions. A MEMS-based microphone with an only 2¡Ñ2 mm2 sensing area of the floating Si3N4/Poly-Si/Si3N4 membrane and a 2 £gm-height gap distance between the top and bottom electrodes was implemented and characterized. Measured in a special isolated-box and under 1 kHz audio frequency, a -60.3 dB/Pa sensitivity (deducted the 22.6 dB output gain of the pre-amplifier) and a 51 dB signal to noise ratio (SNR) of the implemented MEMS microphone can be obtained as the biasing voltage only about 3 volts. The very low driving voltage, moderate SNR and sensitivity demonstrated in this work keep abreast with the results of many outstanding research laboratories in the world.

The focus of this study is the optoelectronic integration of a micro-optical displacement detection architecture with a biomimetic MEMS microphone membrane based on the directional hearing mechanism of the parasitic fly Ormia Ochracea. The micromachined microphones feature optical interferometric displacement detection achieved using a commercially available Vertical Cavity Surface Emitting Laser (VCSEL) coupled with a custom designed silicon photodiode array. This design is shown to have significant advantages over conventional hearing aid microphones, which employ capacitive detection. A Multi-Chip Module (MCM) optoelectronic package is designed to integrate the biomimetic membrane with the optical displacement detection electronics in order to produce a fully integrated acoustic sensor. The modular package components, which are fabricated using high resolution stereolithography apparatus (SLA) equipment, provide accurate optical alignment of the optoelectronic components and allow complete device integration in a package with a total volume under 0.5cc. Characterization of the integrated microphones is described in detail, including measurements of sensitivity, noise floor and directivity. A displacement resolution of 3.5x10⁻¹³ m/√Hz was measured between 4kHz and 16kHz in an anechoic test chamber, corresponding to a dynamic range of 115dB for the optical detection architecture. The total noise SPL of the device is 35.9dBA. Unlike capacitive microphones with similar noise levels, the device developed in this work exhibits first order dipole directivity patterns between 250Hz-1kHz, with an ideal Directivity Index of 4.8dB @ 1kHz and directional attenuation exceeding 25dB. With these results the optoelectronic package presented in this work demonstrates the viability of the integrated optical biomimetic microphones in compact, low power applications, specifically directional hearing aids.

Previous studies on very high-cycle fatigue behavior of thin silicon films suggest a strong environmental dependence of the degradation mechanism, the precise nature of which is still subject to debate. In the present study, 2-micron-thick polycrystalline Si notched cantilever beam structures were used to investigate fatigue degradation in a high-temperature (80°C), high-humidity (90%RH) environment. The specimens were subjected to fully reversed sinusoidal loading at resonance (~40kHz) with stress amplitudes ranging from 1.46 to 1.6GPa, resulting in life-spans between 10⁶ and 10⁹ cycles. Comparison to a reference set of S-N data obtained at moderate environmental conditions (30°C and 50%RH) reveals a strong tendency for faster degradation with increasing temperature and humidity. The obtained damage accumulation rates in the 80°C, 90%RH environment exceed the reference by two orders of magnitude. Transmission electron microscopy (TEM) on vertical through-thickness slices reveals oxide thickening after cycling. The influence of ~20nm Al[subscript2]O₃ deposited on the surface of the fatigue specimens using Atomic Layer Deposition (ALD) technique was also studied. The presence of the alumina coating results in a higher fatigue resistance at 30°C and 50%RH, as well as a drastically different frequency evolution behavior. No oxide thickening was observed in the TEM for coated run-out specimens. A model is proposed to explain the different degradation behavior of the ALD-alumina coated samples. Thickened oxides after cycling appear consistent with the reaction-layer fatigue mechanism. Finite element modal analysis incorporating surface oxide layers and cracking was employed to relate the damage observed in TEM to the experimentally measured changes in resonant frequency. In conclusion, the reaction-layer mechanism seems capable of describing micron-scale polysilicon fatigue, even though the critical processes such as room-temperature, stress-assisted oxidation remain elusive.

An array of electret-biased frequency-selective resonant microelectromechanical system (MEMS) acoustic sensors was proposed to perform analysis of stress pulses created during an impact between two materials. This analysis allowed classification of the stiffness of the materials involved in the impact without applying post-impact signal processing. Arrays of resonant MEMS sensors provided filtering of the incident stress pulse and subsequent binning of time-domain waveforms into frequency-based spectra. Results indicated that different impact conditions and materials yielded different spectral characteristics. These characteristics, as well as the resulting sensor array responses, are discussed and applied to impact classification. Each individual sensor element in the array was biased by an in situ charged electret film. A microplasma discharge apparatus embedded within the microsensor allowed charging of the electret film after all device fabrication was complete. This enabled electret film integration using high-temperature surface micromachining processes that would typically lead to discharge of traditionally formed electret materials. This also eliminated the traditional wafer-bonding and post-fabrication assembly processes required in conventional electret integration approaches. The microplasma discharge process and resulting electret performance are discussed within the context of the MEMS acoustic sensor array.

Traumatic brain injury (TBI) affects 1.4 million people a year in the United States alone and despite the fact that 96% of people survive a TBI, the health and socioeconomic consequences can be grave, partially due to the fact that very few clinical treatments are available to reduce the damage and subsequent dysfunction following TBI. To better understand the various mechanical, electrical, and chemical events during neural injury, and to elucidate specific cellular events and mechanisms that result in cell dysfunction and death, new high-throughput models are needed to recreate the environmental conditions during injury. This thesis project focuses on the creation of a novel and clinically relevant single-cell injury model of traumatic brain injury (TBI). The implementation of the model requires the development of a novel injury device that allows specialized micro-interfacing functionality with neural micro environments, which includes the induction of prescribed strains and strain rates onto neural tissue, such as groups of cells, individual cells, and cell processes. The device consists of a high-resolution micro-electro-mechanical-system (MEMS) microtweezer microactuator tool that is introducible into both biological and aqueous environments and can be proximally positioned to specific targets in neural tissue and neural culture systems. This microtweezer, which is constructed using traditional photolithography and micromachining processes, is controllable by a custom developed software-automated controller that incorporates a high precision linear actuator and utilizes a luer-based microtool docking interface. The injury studies will include examination of intracellular calcium concentration over the injury time course to evaluate neuronal plasma membrane permeability, which is a significant contributor to secondary injury cascades following initial mechanical insult. Mechanical strain and strain rate input tolerance criteria will also be used to determined thresholds for cellular dysfunction and death.

This dissertation presents the application of MEMS-based approaches for the construction of engineered tissue substitutes. MEMS technology can offer the physical scale, resolution, and organization necessary for mimicking native tissue architecture. Micromachined nozzles and templates were explored for the fabrication of acellular, biomimetic collagenous fibrous scaffolds, microvascular tissue structures, and the combination of these structures with cell-based therapeutics. The influence of the microstructure of the tissue constructs on their macro-scale characteristics was investigated.

Design and analysis of polysilicon and single crystal silicon gyroscopes have been carried out. Variations in suspension design have been explored. Designs that utilize in-plane and out-of-plane sensing are studied. Damping plays an important role in determining the sense response. Reduction in damping directly affects sensor performance. The various damping mechanisms that are prevalent in gyroscopes are studied. Perforations on the proof mass are observed to significantly reduce the damping in the device when operated in air. The effects of perforation geometry and density have been analyzed. The analysis results show that there is a two orders of magnitude reduction in damping of thick gyroscope structures with optimized perforation design. Equivalent circuit lumped parameter models have been developed to analyze gyroscope performance. The simulation results of these models have been compared with results obtained from SABER, a MEMS specific system level design tool from Coventorware. The lumped parameter models are observed to produce faster simulation results with an accuracy comparable to that of Coventorware Three gyroscopes specific to the PolyMUMPS fabrication process have been designed and their performance analyzed. Two of the designs sense motion out-of-plane and the other senses motion in-plane. Results of the simulation show that for a given damping, the gyro design with in-plane modes gives a resolution of 4º/s. The out-of-plane gyroscopes have two variations in suspension. The hammock suspension resolves a rate of 25º/s in a 200 Hz bandwidth while the design with folded beam suspension resolves a rate of 2º/s in a 12 Hz bandwidth. A single crystal silicon in-plane gyroscope has been designed with vertical electrodes to sense Coriolis motion. This design gives an order of magnitude higher Capacitance change for a given rotation in comparison to conventional comb-finger design. The effects of process induced residual stress on the characteristic frequencies of the polysilicon gyroscopes are also studied. The in-plane gyroscope is found to be robust to stress variations. Analysis results indicate that the tuning fork gyroscope with the hammock suspension is the most susceptible to compressive residual stress, with a significant drop in sensitivity at high stress values.

<p>In order to detect movements and vibrations on different appliance, especially robots and self-going devices are used different sensors. One of the most used movement sensors are accelerometers. They are three different types of accelerometers one-axes, two-axes and three-axes. They can be analogue or digital. Husqvarna AB uses an accelerometer to detect movements of their self-going lawnmower Automower. Since it begins to turn up others sensors on the market and the sensor which today uses in Husqvarna’s lawnmower don’t fulfils all functions there is a need to find other solutions. What sensors can be found on a market and which new has come? How can they be used best and which difference is between them? How can they use to detect movements in x, y and z direction and how can they read different movements to detect collision, inclination and lift? Sensor analysis will be done to find out how they can be used in this matter and an big analysis will be done to find out how a sensor witch already is in a lawnmower can be use on the better ways?</p> / <p>För att kunna detektera rörelse och vibrationer på olika anordningar och framförallt robotar och självgående maskiner används olika sensorer. En av de mest använda rörelsesensorer är accelerometer. Det finns en uppsjö av olika utföringar som kan vara med en axel, två axlar eller tre axlar. Accelerometrar finns som digitala eller analoga. Husqvarna AB använder en sådan sensor för att detektera rörelse på sin självgående gräsklippare Automower. Eftersom det börjar dyka upp andra sensorer på marknaden och den sensor som används idag uppfyller inte alla funktioner finns det behov av att lägga tid på att se vad kan åstadkommas med en sådan sensor. Vilka sensorer kan hittas på marknaden och vilka nya har dykt upp? Hur kan de användas på bästa sätt och vad skiljer de åt? Hur kan de användas för att detektera rörelse i x, y, z-led och hur kan de läsa av olika rörelse för att detektera krock, lutning och lyft? Det skall göras analys för att se hur olika sensorer reagerar och hur kan de användas på bästa sätt. Det skall utforskas hur den sensor som redan sitter kan användas på ett bättre sätt.</p>