Computation model is presented for mass spring systems of one and two dimensional phononic band gap crystals and micro-electro-mechanical systems. The computation model is veri ed with existing work, and phononic band gap microelectro- mechanical systems are analyzed. Phononic band gap in the scienti c and industrial community is discussed. The motivation and the recent popular methods are discussed. The computation models are highlighted with their pros and cons and adequate computational applications. The one dimensional mass spring model is developed and the simulator operation is validated through comparison with the published simulation data in the original paper by J.S. Jensen et al.. Additionally, the one dimensional mass spring simulator is validated for a micro-electro-mechanical system band structure. The two dimensional mass spring model is developed, as well, the simulator operation is validated through comparison with the published simulation data in the original paper by J.S. Jensen et al.. The two-dimensional simulator is utilized to analyze solid square-shaped, hollow square-shaped, solid diamond-shaped, and hollow diamond-shaped inclusion micro-electro-mechanical band gap structures. The solid inclusion-based micro-electro-mechanical band gap results are compared with hollow inclusion-based micro-electro-mechanical structures.

An analog controller has been analyzed and built for an electrostatic micro-cantilever beam. The closed loop MEMS device can be used as both actuator and sensor. As an actuator it will have the advantage of large stable travel range up to 90% of the gap. As a sensor the beam is to be driven into chaotic motion which is very sensitive changes in the system parameters. Two versions of the controller have been analyzed and implemented, one for the actuator and one for the sensor. For the actuator, preliminary experiments show good matching with the model. As for the sensor, the dynamic behavior have been studied and the best operating regions have been determined.

Micro-Electro-Mechanical Systems (MEMS) micromirrors have been developed for more than two decades along with the development of MEMS technology. They have been used into many application fields: optical switches, digital light projector (DLP), adoptive optics (AO), high definition (HD) display, barcode reader, endoscopic optical coherence tomography (OCT) and confocal microscope, and so on. Especially, MEMS mirrors applied into endoscopic OCT and confocal microscope are the intensive research field. Various actuation mechanisms, such as electrostatic, electromagnetic, electro bimorph thermal, electrowetting, piezoelectric (PZT) and hybrid actuators, are adopted by different types of micromirrors. Among these actuators, the electrostatic is easily understood and simple to realize, therefore, it is broadly adopted by a large number of micromirrors. This thesis reports the design, fabrication, and characterization of a 2-D Silicon-on-insulation (SOI) MEMS micromirror with sidewall (SW) electrodes for endoscopic OCT or confocal microscope imaging. The biaxial MEMS mirror with SW electrodes is actuated by electrostatic actuators. The dimension of mirror plate is 1000micron×1000micron, with a thickness of a 35micron. The analytical modeling of SW electrodes, fabrication process, and performance characteristics are described. In comparison to traditional electrostatic actuators, parallel-plate and comb-drive, SW electrodes combined with bottom electrodes achieve a large tilt angle under a low drive voltage that the comb-drive does and possess fairly simple fabrication process same as that of the parallel-plate. A new fabrication process based on SOI wafer, hybrid bulk/surface micromachined technology, and a high-aspect-ratio shadow mask is presented. Moreover, the fabrication process is successfully extended to fabricate 2×2 and 4×4 micromirror arrays. Finally, a biaxial MEMS mirror with SW electrodes was used into Confocal MACROscope for imaging. Studied optical requirements in terms of two optical configurations and frequency optimization of the micromirror, the biaxial MEMS mirror replaces the galvo-scanner and improves the MACROscope. Meanwhile, a new Micromirror-based Laser Scanning Microscope system is presented and allows 2D images to be acquired and displayed.

The in-vivo observation of the neural activities generated by a large number of closely located neurons is believed to be crucial for understanding the nervous system. Moreover, the functional electrical stimulation of the central nervous system is an effective method to restore physiological functions such as limb control, sound sensation, and light perception. The Deep Brain Stimulation (DBS) is being successfully used in the treatment of tremor and rigidity associated with advanced Parkinson's disease. Cochlear implants have also been employed as an effective treatment for sensorineural deafness by means of delivering the electrical stimulation directly to the auditory nerve. The most significant contribution of this PhD study is the development of next-generation microprobes for the simultaneous stimulation and recording of the cortex and deep brain structures. For intracortical applications, millimetre length multisite microprobes that are rigid enough to penetrate into the cortex while integrated with flexible interconnection cables are demanded. In chronic applications, the flexibility of the cable minimizes the tissue damage caused by the relative micro-motion between the brain and the microprobe. Although hybrid approaches have been reported to construct such neural microprobes, these devices are brittle and may impose severe complications if they break inside the tissue. In this project, MEMS fabrication processes were employed to produce non-breakable intracortical microprobes with an improved structural design. These 32 channel devices are integrated with flexible interconnection cables and provide enough mechanical strength for penetration into the tissue. Polyimide-based flexible implants were successfully fabricated and locally reinforced at the tip with embedded 15 µm-thick gold micro-needles. In DBS applications, centimetre long microprobes capable of stimulating and recording the neural activity are required. The currently available DBS probes, manufactured by Medtronic, provide only four cylindrical shaped electrode sites, each 1.5 mm in height and 1.27 mm in diameter. Although suitable for the stimulation of a large brain volume, to measure the activity of a single neuron but to avoid measuring the average response of adjacent cells, recording sites with dimensions in the range of 10 - 20 µm are required. In this work, novel Three Dimensional (3D) multi channel microprobes were fabricated offering 32 independent stimulation and recording electrodes around the shaft of the implant. These microprobes can control the spatial distribution of the charge injected into the tissue to enhance the efficacy and minimize the adverse effects of the DBS treatment. Furthermore, the device volume has been reduced to one third the volume of a conventional Medtronic DBS lead to significantly decrease the tissue damage induced by implantation of the microprobe. For both DBS and intracortical microprobes, the impedance characteristics of the electrodes were studied in acidic and saline solutions. To reduce the channel impedance and enhance the signal to noise ratio, iridium (Ir) was electroplated on gold electrode sites. Stable electrical characteristics were demonstrated for the Ir and gold electrodes over the course of a prolonged pulse stress test for 100 million cycles. The functionality and application potential of the fabricated microprobes were confirmed by the in-vitro measurements of the neural activity in the mouse hippocampus. In order to reduce the number of channels and simplify the signal processing circuitry, multiport electrostatic-actuated switch matrices were successfully developed, fabricated, and characterized for possible integration with neural microprobes to construct a site selection matrix. Magnetic-actuated switches have been also investigated to improve the operation reliability of the MEMS switching devices.

The use of electrostatic transduction has enabled high-Q miniaturized mechanical resonators made of non-piezoelectric material that vibrate at high and ultra high frequencies. However, this transduction technique suffers from large values of motional resistance associated with the technique, limiting its use for interfacing to standard 50 RF circuits. Piezoelectric transduction has advantages over the electrostatic method because of its comparable to 50 motional resistance. However, the technique requires use of thin film piezoelectric materials with the demonstrated Qs that are much lower than their corresponding non-piezoelectric resonators. This research proposes use of electrodynamic transduction, reports analytic and experimental studies on electrodynamic transduction for RF application, highlights the method’s advantages, and lists the contributions. The use of Lorentz-force transduction for RF micromechanical filters proposed in this work is pursued by experimentally evaluating the transduction technique implemented for microfabricated designs. By fabricating single and coupled microresonators in a few different fabrication technologies, including CMOS35, the performance of the Lorentz-force driven microresonators is studied. Using a laser vibrometer, the actual performance, including the displacement and velocity of the moving points of the microstructures’ surfaces, are measured. The mode shapes and resonance specifications of the microstructures in air and vacuum derived by laser vibrometer provide data for characterizing the employed Lorentz-force transduction technique. Furthermore, the results from the electrical measurements are compared to the micromechanical resonators’ frequency response obtained from the mechanical measurements by laser vibrometer. The significantly low values of motional resistance computed for the differently fabricated designs demonstrate the advantage of Lorentz-force transduction for RF filter applications. Should a device similar in size be driven electrostatically, the motional resistance would be multiple orders of magnitude higher. This research reports the experimental results obtained by examining a Lorentz- force transduction application for developing RF micromechanical filters. The results demonstrate the Lorentz-force transduction’s advantages over other transduction methods used for RF μ-mechanical filters. Compared to electrostatic transduction, the Lorentz-force method provides greater electromechanical coupling, multiple orders of magnitude lower motional resistance, the independence of the filter center frequency from the bias voltage, higher power handling, and no requirement for bias lines, which decreases the work in microfabrication. Unlike piezoelectric transduction, the electrodynamic technique requires no piezoelectric material. Use of non-piezoelectric materials provides more flexibility for resonator material in the IC-compatible fabrications. Power handling in electrodynamic transduction has fewer limitations than other transduction techniques because the higher power needed in electrostatic or piezoelectric methods requires a higher voltage, which is limited by the breakdown voltage. The higher power in Lorentz-force-based transduction demands a larger current. The larger current produces heat that is removable by applying an appropriate cooling technique.

<p>The primary goals of this study were to demonstrate and fully characterize a microscale ionization source (i.e. micro-ion source) and to determine the validity of impact ionization theory for microscale devices and pressures up to 100 mTorr. The field emission properties of carbon nanotubes (CNTs) along with Micro-Electro-Mechanical Systems (MEMS) design processes were used to achieve these goals. Microwave Plasma-enhanced CVD was used to grow vertically aligned Multi-Walled Carbon Nanotubes (MWNTs) on the microscale devices. A 4-dimensional parametric study focusing on CNT growth parameters confirmed that Fe catalyst thickness had a strong effect on MWNT diameter. The MWNT growth rate was seen to be a strong function of the methane-to-ammonia gas ratio during MWNT growth. A high methane-to-ammonia gas ratio was selected for MWNT growth on the MEMS devices in order to minimize growth time and ensure that the thermal budget of those devices was met. </p><p>A CNT-enabled microtriode device was fabricated and characterized. A new aspect of this device was the inclusion of a 10 micron-thick silicon dioxide electrical isolation layer. This thick oxide layer enabled anode current saturation and performance improvements such as an increase in dc amplification factor from 27 to 600. The same 3-panel device was also used as an ionization source. Ion currents were measured in the 3-panel micro-ion source for helium, argon, nitrogen and xenon in the 0.1 to 100 mTorr pressure range. A linear increase in ion current was observed for an increase in pressure. However, simulations indicated that the 3-panel design could be modified to improve performance as well as better understand device behavior. Thus, simulations and literature reports on electron impact ionization sources were used to design a new 4-panel micro-ion source. The 4-panel micro-ion source showed an approximate 10-fold performance improvement compared to the 3-panel ion source device. The improvement was attributed to the increased electron current and improved ion collection efficiency of the 4-panel device. Further, the same device was also operated in a 3-panel mode and showed superior performance compared to the original 3-panel device, mainly because of increased ion collection efficiency. </p><p>The effect of voltages applied to the different electrodes in the 4-panel micro-ion source on ion source performance was studied to better understand device behavior. The validity of the ion current equation (which was developed for macroscale ion sources operating at low pressures) in the 4-panel micro-ion source was studied. Experimental ion currents were measured for helium, argon and xenon in the 3 to 100 mTorr pressure range. For comparison, theoretical ion currents were calculated using the ion current equation for the 4-panel micro-ion source utilizing values calculated from SIMION simulations and measured electron currents. The measured ion current values in the 3 to 20 mTorr pressure range followed the calculated ion currents quite closely. A significant deviation was observed in the 20-100 mTorr pressure range. The experimental ion current values were used to develop a corrected empirical model for the 4-panel micro-ion source in this high pressure range (i.e., 3 to 100 mTorr). The role of secondary electrons and electron path lengths at higher pressures is discussed.</p> / Dissertation

<p>Since the mid-1990s there has been an active effort to develop hydrocarbon-fueled power generation and propulsion systems on the scale of centimeters or smaller. This effort led to the creation and expansion of a field of research focused around the design and reduction to practice of Power MEMS (microelectromechanical systems) devices, beginning first with microscale jet engines and a generation later more broadly encompassing MEMS devices which generate power or pump heat. Due to small device scale and fabrication techniques, design constraints are highly coupled and conventional solutions for device requirements may not be practicable. </p><p>This thesis describes the experimental investigation, modeling and potential applications for two classes of microscale jet pumps: jet ejectors and jet injectors. These components pump fluids with no moving parts and can be integrated into Power MEMS devices to satisfy pumping requirements by supplementing or replacing existing solutions. This thesis presents models developed from first principles which predict losses experienced at small length scales and agree well with experimental results. The models further predict maximum achievable power densities at the onset of detrimental viscous losses.</p> / Dissertation

This dissertation presents work involving the manufacture and analytic modeling of microcantilever parts (length-width-thickness of roughly 500-100-10 microns). The manufacturing goals were to devise a means for and demonstrate repeatable production of microcantilevers from techniques not used in the integrated-circuit field, which are the exclusive means of current microcantilever production. The production of microcantilevers was achieved via a solvent casting approach and with injection molding, which produced parts from various thermoplastic polymeric materials (amorphous, semi-crystalline, fiber- and nanoclay-filled) in a repeatable fashion. Limits of the injection molding process in terms of the thinnest cantilevers possible were examined with 2 microns being the lower bound. Subsets of the injection-molded parts were used in a variety of sensing applications, some results were successful (e.g., vapor-phase, resonance- and deflection-based sensing), while others showed poor results, likely due to experimental shortcomings (e.g., fluid-phase, deflection-based sensing). Additionally, microcantilever parts with integrated tips were injection-molded and showed to function at the same level as commercial, tipped, silicon-nitride parts when imaging an optical grating; this experimental work was the first demonstration of injection-molded parts for chemical sensing and force spectroscopy. The scientific results were (i) the derivation of a length scale dependent bending stiffness and experimental evidence showing that such an effect was observed, (ii) the development of a new microcantilever experimental mode (surface stress monitoring via microcantilever bending resonant frequencies) and experimental validation of the technique, and (iii) a new method for determining microcantilever geometry based upon measurement of a bending, lateral, and torsional mode and experimental validation of the procedure.

This research contributes to worldwide efforts to miniaturize one of the most powerful and versatile analytical tools, gas chromatography (GC). If a rapid, sensitive and selective hand-held GC system is realized, it would have a wide range of applications in many industries and research areas. As a part of developing a hand-held GC system, this research focuses on the separation column, which is the most important component of a GC system. This thesis describes the development of a miniature separation column that has low thermal mass and an embedded heating element for rapid thermal cycling. The worlds first thin polymer film (parylene) GC column has been successfully developed. This thesis includes: first, a study of theoretical column performance of rectangular GC column; second, the design optimization of parylene column and embedded heating element; third, the development of new processes such as parylene micromolding and stationary phase coating technique for parylene column; fourth, the fabrication of parylene GC column with an embedded heating element; and lastly, the testing and evaluation of parylene GC column through GC analysis.

This dissertation reports, for the first time, on the electrical coupling of microelectromechanical (MEM) resonators for high order bandpass filter synthesis. Electrical coupling of MEM resonators has a strong potential for extension of the operating frequency of MEM bandpass filters into the ultra high frequency (UHF) range and provides higher tunability and design flexibility compared to the mechanical coupling approach. Various schemes of electrical coupling are presented in this dissertation. Electromechanical models of clamped-clamped beam resonators, and various types of electrically coupled filters are presented. Lower frequency prototypes of electrically coupled filters with operating frequencies in the hundreds of kHz are implemented using micromechanical single crystal silicon clamped-clamped beam resonators. Measurement results are in good agreement with the developed electrical equivalent models of the filters. It is demonstrated that the characteristics of electrically coupled filters can be widely tuned by changing the DC polarization voltages.