In this thesis, the design, fabrication and characterisation of graphene electromechanical resonators have been presented. Graphene features ultrahigh Young’s modulus and large surface to volume ratio that make it ideal for radio frequency (RF) components, sensors and other micro/nano-electromechanical systems (MEMS/NEMS). A novel batch fabrication process for graphene electromechanical resonators has been developed by using poly-Si film as sacrificial layer. Previously reported fabrication processes of graphene resonators use SiO2 as sacrificial layer only because graphene is visible on 300nm SiO2/Si substrate. However, the wet etching of SiO2 involves HF, which is not compatible with metal connections or SiO2 serving as dielectric or passivation layer in graphene NEMS devices. Moreover, the liquid surface tension during drying after wet etching could damage graphene bridges even critical point drying is used. Therefore, in this work, poly-Si is adopted as the sacrificial material. To facilitate the fabrication of graphene resonators, a poly-Si/SiO2/Si substrate has been designed and optimised to make graphene visible under optical microscope for the first time to the author’s knowledge. Chemical vapour deposition (CVD)-grown monolayer graphene sheet has been transferred onto the optimised poly-Si/SiO2/Si substrate and patterned into strips. Metal electrodes have been deposited by lift-off process to make electrical connections, which is prerequisite for integrating graphene resonator into practical devices. The graphene bridges have been released by etching the poly-Si layer with XeF2 in vapour phase, which completely avoids the capillary force induced damage to the graphene bridges. De-fluorination process has been performed by hydrazine reduction to recover graphene’s conductivity. This fabrication process is scalable for massive production of graphene electromechanical resonators, thus furthering their practical application. One-source current mixing characterisation setup has been constructed to test the graphene resonators. Besides the fundamental peak, the activation and enhancement of the second mode of doubly clamped resonator by electrostatic actuation have been observed for the first time. The second mode amplitude reaches 95% of the fundamental mode, whereas only odd higher modes of small intensity have been reported before in other MEMS/NEMS resonators actuated by electrostatic force or magnetomotive force. The findings in this thesis could lead to substantial increase of the sensitivity of sensors based on the graphene resonators. Modal analysis based on Euler-Bernoulli equation has been performed to understand the mechanism behind the activation and enhancement of the second mode. Finite element analysis agrees very well with experimental results and complies with the theoretical model. Finally, a set of novel alignment marks has been designed, which can be incorporated to process mechanically exfoliated 2D material flakes of micron size and irregular shape with conventional photolithography tools, as have been demonstrated by the successful fabrication of a graphene transistor. This optical alignment technique provides an alternative for prototype device development besides electron beam lithography to prevent electron-induced damage to fragile 2D materials.

No description available.

The scanning tunneling microscope (STM) based on quantum tunneling can attain atomic-scale spatial resolution and help elucidate a wealth of phenomena in the microscopic world. However a limitation in scanning tunneling microscopy is the low temporal resolution due to readout circuit frequency rolloff at a few kHz. This limitation can be overcome by using downmixing directly in the tunneling junction. With this technology we measure the high frequency vibrational modes (~ 1 MHz) of MEMS doubly-clamped beams and explore the implication of STM downmixing for nanomechanics.

The aim of the thesis is to study mechanical properties of nanomaterials (multi-layer graphene, silicon, mica) suitable to be used as novel pressure sensors in laser photoacoustic spectroscopy. Membranes (diameter ~ 4 mm, thickness ~ 100 nm) were prepared by mechanical exfoliation method and then attached to a glass window in several slightly different designs. Movement of these membranes was detected using HeNe laser beam reflected from the membrane's surface onto a position sensitive detector. Methanol was used as a model gas and the signal was collected from studied element and microphone simultaneously. Acoustic wave, induced inside a measuring cell by periodic thermal variations, causes the membranes to move. The movement of a membrane is influenced by its mechanical properties, which is possible to determine by fitting the measured data into a mathematical model. Comparison of the output data of all membranes' measurements shows, that the signal intensity is influenced by the method of attaching membrane to a glass window and by volume of free space on a side of a membrane. Metallization of the membrane's surface (~ 70 nm) decreases its springiness thus decreases the sensitivity. Several membranes reached sensitivity comparable with top class microphone.

Οι τεχνικές Μικροσκοπίας Ατομικής Δύναμης που χρησιμοποιούν ακίδες σάρωσης έχουν την ικανότητα όχι μόνο να παρατηρούν επιφάνειες σε ατομικό επίπεδο αλλά και να τις τροποποιούν σε πολύ μικρή κλίμακα. Αυτό αποτελεί και το κίνητρο για τη χρησιμοποίηση των τεχνικών αυτών στη δημιουργία συσκευών αποθήκευσης με πολύ μεγαλύτερη πυκνότητα από τις συμβατικές συσκευές. Σε διάφορα ερευνητικά προγράμματα αποθήκευσης δεδομένων τεχνολογίας MEMS/NEMS με ακίδες, η σχετική τροχιά κίνησης της ακίδας ως προς το αποθηκευτικό μέσο ακολουθεί ένα μοτίβο raster. Παρά την απλή υλοποίησή της, η προαναφερθείσα κίνηση σάρωσης έχει σημαντικά μειονεκτήματα. Στο πλαίσιο της εργασίας αυτής προτείνεται μια εναλλακτική τοπολογία σπειροειδούς κίνησης. Η προτεινόμενη μέθοδος μπορεί να εφαρμοσθεί σε οποιοδήποτε σύστημα που βασίζεται σε διαδικασίες σάρωσης, όπως συστήματα αποθήκευσης και AFM συστήματα απεικόνισης. Στην εργασία αυτή μελετάται η περίπτωση των συσκευών αποθήκευσης με ακίδες, όπου η τροχιά που διαγράφει η ακίδα σε σχέση με το επίπεδο x/y που ορίζεται από το μέσο αποθήκευσης, είναι η σπειροειδής καμπύλη του Αρχιμήδη. Η χρήση μιας τέτοιας σπειροειδούς τροχιάς οδηγεί σε σήμα θέσης αναφοράς με εξαιρετικά στενό συχνοτικό περιεχόμενο, το οποίο ολισθαίνει πολύ αργά στον χρόνο. Για πειραματική επιβεβαίωση, ο προτεινόμενος τρόπος σπειροειδούς κίνησης εφαρμόστηκε σε σύστημα αποθήκευσης πληροφορίας με ακίδες με δυνατότητες θερμομηχανικής εγγραφής και ανάγνωσης δεδομένων σε φιλμ πολυμερούς. Επιπλέον, μελετήθηκε η αξιοποίηση των ιδιοτήτων του νέου τύπου κίνησης από αρχιτεκτονικές ελέγχου ειδικά σχεδιασμένες και βελτιστοποιημένες για τη συγκεκριμένη οικογένεια τροχιών αναφοράς, με στόχο την επίτευξη πολύ υψηλότερων συχνοτήτων σάρωσης για την ίδια ακρίβεια θέσης. Προς επιβεβαίωση των θεωρητικών αναλύσεων, παρουσιάζονται αποτελέσματα εξομοιώσεων καθώς και πειραματικά αποτελέσματα από πειραματική διάταξη. Στο πλαίσιο της διατριβής πραγματοποιήθηκε και η μοντελοποίηση του καναλιού θερμομηχανικής αποθήκευσης με ακίδες σε μεμβράνες πολυμερούς υλικού. Ενώ η θεωρητική μορφή των θερμομηχανικά εγγεγραμμένων κοιλωμάτων είναι κωνική, στην πράξη η μορφή του απέχει πολύ από το θεωρητικό μοντέλο. Για τον λόγο αυτό, αναπτύχθηκε μοντέλο του συμβόλου ως προς την ταχύτητα σάρωσης κατά τη διαδικασία εγγραφής, με βάση πειραματικά δεδομένα. Στο πλαίσιο της διατριβής μελετήθηκε επίσης η δυνατότητα ανάπτυξης συνδυασμένων αρχιτεκτονικών ελέγχου παρακολούθησης και ανάκτησης χρονισμού συμβόλου, όπου η πληροφορία για τη στιγμιαία ταχύτητα του σαρωτή παρέχεται από το μέσο αποθήκευσης μέσω των κυκλωμάτων συγχρονισμού. Τα αποτελέσματα των εξομοιώσεων επιβεβαιώνουν την δυνατότητα αυτή, και επιπλέον δείχνουν ότι υπό προϋποθέσεις η ακρίβεια παρακολούθησης του συστήματος βελτιώνεται. Τέλος, διερευνήθηκε η απόδοση των προτεινόμενων μεθόδων στην περίπτωση φορητών συσκευών, τα οποία υπόκεινται σε εξωτερικές διαταραχές. Στο πλαίσιο της διερεύνησης αυτής, συλλέχθηκαν πειραματικά αποτελέσματα και αναλύθηκαν μετρήσεις τυπικών εξωτερικών διαταραχών. / The AFM techniques using scanning probes have the capacity not only to observe surfaces in atomic level but also to modify them at a very small scale. This feature motivates the use of these techniques to create storage devices capable of storing data in a much higher density than conventional devices. In various MEMS/NEMS-based data storage technology research projects with probes, the relative trajectory follows a raster pattern or similar. Despite its simple implementation, the aforementioned scanning pattern has significant disadvantages. In this work, an alternative spiral motion topology is proposed. The proposed method can be applied to any system based on scanning probes, such as storage systems and AFM imaging systems. In this work, the case of storage devices with probes is studied, in which the trajectory of the probe with respect to the x/y plane of the storage medium, is the spiral curve of Archimedes. The use of such a spiral trajectory leads to a reference position signal with extremely narrowband frequency content, which slides very slowly in time. For experimental verification, the proposed method of spiral motion was applied on a single probe experimental setup, with read and writes data thermomechanical capabilities on very thin polymer films. The aforementioned inherent properties of the proposed approach enable system designs with improved tracking performance and with non-intermittent, high-speed storage capabilities. Thus, the exploitation of these properties by architectures specifically designed and optimized for the particular reference trajectory is studied, in order to achieve much higher scanning frequencies for the same positioning accuracy. To verify the theoretical analysis, simulation results are presented as well as experimental results from the application of the proposed techniques and architectures in experimental AFM systems with a single probe. In this dissertation the modeling of the thermomechanical storage channel with probes in thin polymer films was also carried out. While the theoretical form of thermomechanically engraved indentations is conical, in practice its form is far from this theoretical model. Hence, a symbol model was developed in respect to the scanning speed during the write process, based on experimental data. This model can be used to properly design the equalization circuits depending on the motion speed of operation. Moreover, the possibility of developing combined architectures of tracking control and symbol timing recovery was also investigated, where the information regarding the scanner speed is provided from the storage medium via symbol timing synchronization circuits. The simulation results confirm this approach and, furthermore, show that, under certain conditions, the system’s tracking accuracy is improved. Finally, the performance of the proposed methods in the case of portable storage devices was investigated, where the systems are subjected to external disturbances. As part of this investigation, experimental results were collected and measurements of external disturbances, typical for such devices, were analyzed.

Different methods for the determination of cantilever properties in non-contact atomic force microscopy (NC-AFM) are under investigation. A key aspect is the determination of the cantilever stiffness being essential for a quantitative NC-AFM data analysis including the extraction of the tip-surface interaction force and potential. Furthermore, a systematic analysis of the displacement noise in the cantilever oscillation detection is performed with a special focus on the thermally excited cantilever oscillation. The propagation from displacement noise to frequency shift noise is studied under consideration of the frequency response of the PLL demodulator. The effective Q-factor of cantilevers depends on the internal damping of the cantilever as well as external influences like the ambient pressure and the quality of the cantilever fixation. While the Q-factor has a strong dependence on the ambient pressure between vacuum and ambient pressure yielding a decrease by several orders of magnitude, the pressure dependence of the resonance frequency is smaller than 1% for the same pressure range. On the other hand, the resonance frequency highly depends on the mass of the tip at the end of the cantilever making its reliable prediction from known cantilever dimensions difficult. The cantilever stiffness is determined with a high-precision static measurement method and compared to dimensional and dynamic methods. Dimensional methods suffer from the uncertainty of the measured cantilever dimensions and require a precise knowledge its material properties. A dynamic method utilising the measurement of the thermally excited cantilever displacement noise to obtain cantilever properties allows to characterise unknown cantilevers but requires an elaborative measurement equipment for spectral displacement noise analysis. Having the noise propagation in the NC-AFM system fully characterised, a proposed method allows for spring constant determination from the frequency shift noise at the output of the PLL demodulator with equipment already being available in most NC-AFM setups.