Much of today's high performance computing engines and hand-held mobile devices are products of aggressive CMOS scaling. Technology scaling in semiconductor industry is mainly driven by corresponding improvements in optical lithography technology. Photolithography, the art used to create patterns on the wafer is at the heart of the semiconductor manufacturing process. Lately, improvements in optical technology have been difficult and slow. The transition to deep ultra-violet (DUV) light source (193nm) required changes in lens materials, mask blanks, light source and photoresist. It took more than ten years to develop a stable chemically amplified resist (CAR) for DUV. Consequently, as the industry moves towards manufacturing end-of-the-roadmap CMOS devices, lithography is still based on 193nm light source to print critical dimensions of 45nm, 32nm and likely 22nm. Sub-wavelength lithography creates a number of printability issues. The printed patterns are highly sensitive to topographic changes due to metal planarization, overlay errors, focus and dose variations, random particle defects to name a few. Design for Manufacturability methodologies came into being to help analyze and mitigate manufacturing impacts on the design. Although techniques such as Resolution Enhancement Techniques (RET) which involve optical proximity correction (OPC), phase shift masking (PSM), off-axis illumination (OAI) have been used to greatly improve the printability and better the manufacturing process window, they cannot perfectly compensate for these lithographic deficiencies. DFM methods were primarily devised to predict and correct systematic patterning problems that arise during manufacturing. Apart from systematic errors, random manufacturing variations may occur during photolithography. This is where a statistical approach to modeling of error behavior and its impact on different design parameters may prove to be effective. By incorporating statistical analysis to parameter variation, an effective, non-conservative design can be obtained. IC manufacturing yield is the foremost measure that determines the profitability of a given semiconductor manufacturing process. Thus early prediction of yield detractors is an important step in the design process. Such predictions are based on models, which in turn are rooted in manufacturing process. Success of yield prediction is based on quality of models. The models must capture physical phenomena and yet be efficient for computation. In this work, we present a lithography-based yield model that is computationally practical for use in the design process. The work also provides a methodology to perform statistical lithography rules check to identify hot spots in the design that can contribute to yield loss. Yield recovery methods aimed at minimally modifying the design ultimately produce more printable masks. Apart from IC manufacturing yield, ICs today are vulnerable to various reliability failures including electromigration (EM), negative bias temperature instability (NBTI), hot carrier injection (HCI) and electro-static discharge (ESD). Though such reliability issues have been examined since the beginning of CMOS, manufacturability impacts have created a renewed interest in analyzing them. In this dissertation, we introduce the concept of Design for reliable manufacturability (DFRM) to consider the effect of linewidth changes, gate oxide thickness variations and other manufacturing artifacts. A novel Litho-aware EM calibration and analysis has bee shown in this work. Results indicate that there is a significant difference in EM estimation when litho-predicted layouts are considered during analysis. DFM has always looked at linewidth and material thickness variation as detractors to the design. However, such variations are inevitable. In this work we also consider modeling sensitivity to variations to improve test pattern quality. Test structures sprinkled all over the wafer encounter varying process fluctuations. This can be harnessed to predict the current lithographic process corner which will later be used to choose the test pattern set that results in maximum fault coverage. In summary, the objective of this dissertation is to consider the impact of sub-wavelength lithography on printability and the overall impact on circuit reliability and manufacturing test development.

A key advantage of Additive Manufacturing (AM) is the opportunity to design and fabricate complex structures that cannot be made via traditional means. However, this potential is significantly constrained by the use of a facet-based geometry representation (e.g., the STL and the AMF file formats); which do not contain any volumetric information and often, designing/slicing/printing complex geometries exceeds the computational power available to the designer and the AM system itself. To enable efficient design and fabrication of complex/multi-material complex structures, several algorithms are presented that represent and process solid models as a set of voxels (three-dimensional pixels). Through this, one is able to efficiently realize parts featuring complex geometries and functionally graded materials. This thesis specifically aims to explore applications in three distinct fields namely, (i) Design for AM, (ii) Design for Manufacturing (DFM) education, and (iii) Reverse engineering from imaging data wherein voxel-based representations have proven to be superior to the traditional AM digital workflow. The advantages demonstrated in this study cannot be easily achieved using traditional AM workflows, and hence this work emphasizes the need for development of new voxel based frameworks and systems to fully utilize the capabilities of AM. / MS

Developing high-end aerospace components is a complex and highly competitive business. Hence methods for decreasing lead-time, while still providing the same quality and at a lower cost, has to be developed. This thesis is conducted at Research & Technology - GKN Aerospace in Trollhättan Sweden. A multidisciplinary analysis system known internally as Engineering Workbench, forms the base for implementation of the methods and tools developed in this thesis work. The system applies set-based engineering approach to develop new components. The evaluation of the design space is performed through parametric studies to find relations between the design parameters and performance metrics of the design. The engineering workbench allows GKN to define and evaluate a large design space within a limited timeframe. This thesis will look to improve the current producibility assessment system within the EWB by increasing the robustness and flexibility of the system. This is done by re-designing the producibility analysis part system and into a modular knowledge-based system that implements various techniques to increase the robustness and flexibility of the system. The re-designed system is automated, flexible and robust and is able to perform user defined weld assessments on a various designs and provides GKN with weld producibility data.

Hög produktkvalitet och låg tillverkningskostnad är avgörande för den ekonomiska framgången för en produkt, och för att uppnå en sådan framgång används metoden tillverkningsanpassad konstruktion (DFM). DFM är en väldigt integrativ metod och kräver ett tvärfunktionellt arbete mellan experter så som produktionstekniker, produktionsberedare och tillverkningspersonal (Ulrich & Eppinger, 2014). Volvo CE har ett kontinuerligt arbete med DFM och det utförs idag genom många iterationer och direkt kontakt mellan tillverknings- och utvecklingsavdelningen. Trots det kontinuerliga arbetet med DFM eftersöker nu avdelningen Driveline Systems Product Improvement en metod för detta arbete, eftersom att ingen metod används idag. Metoder för DFM finns beskrivna på flera olika sätt och av flera olika författare, och i detta arbete undersöks metoder av Ulrich & Eppinger (2014), Dalton et al. (2016) and O’Driscoll (2002). En standardiserad metod och ett överskådligt arbete med DFM kan skapa bättre förutsättningar för kunskapsåterföring för att se och lära från tidigare arbeten kopplat till tillverkning av produkterna. Samtidigt som en DFM-metod efterfrågas undersöks Volvos nuvarande produktutvecklingsprocess, DMAIC, på den aktuella avdelningen, som idag är anpassad till utveckling och förbättringar av befintliga artiklar. För det aktuella ärendet är orsaken att öka beläggningen och genomförandet föregås således inte av någon förbättring eller utveckling av artiklarna. Därför ska det aktuella insourcing-ärendet jämföras mot Volvos egna process. För att knyta an det aktuella ärendet till vedertagna produktutvecklingsprocesser används en teoretisk produktutvecklingsprocess, och ärendet jämförs även mot denna process. I arbetet utförs fältarbete, inklusive fallstudier och intervjuer, samt en kompletterande litteraturstudie runt metoden DFM och insourcing. I fältarbetet undersöks två externt tillverkade artiklar som två fall som väljs ut genom ett projektval, vari totalt sex artiklar ingår från början. För att genomföra projektvalet och vidare utveckling av artiklarna tillämpades i huvudsak Ullmans (2010) produktutvecklingsprocess med tillhörande metoder (relevanta för detta arbete), med något inslag av Ulrich & Eppingers (2014) process. Utifrån den eftersökta metoden för arbete med DFM, och aktuella fallstudier och processer ska följande frågor besvaras:   Hur korrelerar en insourcing-process med teoretiska produktutvecklingsprocesser och Volvos produktutvecklingsprocess? I vilka steg i insourcing-processen är det relevant att inkludera DFM?   Aspekter kopplat till tillverkningsanpassad konstruktion, och således DFM, är aspekter som påverkar tillverkningskostnaden. Vid insourcing är förädlingskostnaden och skiftgraden de mest relevanta och kanske viktigaste aspekterna, som bör adresseras redan i projektvalet. Både förädlingskostnaden och skiftgraden är aspekter som påverkar tillverkningskostnaden. Vid insourcing är det dessutom viktigt att beakta orsaker till outsourcing, som inte framgår i varken processen DMAIC eller Ullmans (2010) process. Kopplat till processerna jämfört med insourcing-ärendet så förekommer vissa skillnader mellan både Ullmans (2010) produktutvecklingsprocessen och Volvos process DMAIC, även om en del likheter också finns. / High product quality together with low manufacturing cost are vital aspects of the economic success of a product. To achieve such success the method Design for Manufacturing (DFM) is used. DFM is a highly integrative method and demands a cross-functional team consisting of experts such as production engineers, pre-process engineers and manufacturing personnel (Ulrich & Eppinger, 2014). Volvo CE has a continuous work with DFM and it is done through many iterations and direct contact between the manufacturing- and design department. Although the overall work with DFM is continuous the department Driveline Systems Product Improvement is requesting a method for this work, due to the lack of any methods used today. It is discovered that there are many different methods for DFM described by many authors, and in this thesis methods by Ulrich & Eppinger (2014), Dalton et al. (2016) and O’Driscoll (2002) are investigated. A standardized way may increase the quality of the DFM work and may help create a more holistic view. A holistic view over the work with DFM can help create better conditions for re-use of previous knowledge related to manufacturing of the parts. In addition of the requested method for DFM the current product development process used, DMAIC, is investigated. The process is today mainly used and adapted for the development and improvement of existing products. The reason of the current case studies is to increase the utilization level at the current manufacturing department, and thus no improvement or development is initially present. Therefore, the current insourcing case studies are compared to the Volvo process DMAIC. To connect the current case to established product development processes the case studies are also compared to a theoretical product development process.   Methods used within this thesis are field work, with interviews and case studies, and a complementary literature study to investigate methods and to increase the understanding of DFM and insourcing. In the field work two parts for insourcing are investigated as two case studies. The parts are initially selected through a project selection, where a total of six parts are included. To perform the selection and further development of the current case studies Ullmans (2010) design process were applied, with use of relevant methods and tools for this work. Also, some elements of the product development process according to Ulrich & Eppinger (2014) were applied. Based on the requested method for DFM and the current case studies the following research questions were raised:   How does an insourcing process correlate with theoretical design processes and with Volvo’s product development process? Where in the insourcing process is it relevant to include DFM?   Aspects of DFM are aspects that affect the manufacturing cost. When insourcing processing of parts and labour shift rate are the most relevant and important aspects and should be addressed when selecting and evaluating project. Both processing of parts and labour shift rate are aspects that affect the manufacturing cost. When insourcing it is also important to include aspects connected to outsourcing, and this fact cannot be identified in the DMAIC process nor the design process of Ullman (2010). Compared to the current insourcing case studies there are some differences between both the design process of Ullman (2010) and the Volvo process DMAIC, even if there also are some similarities.

This thesis relates to a conceptual design of a light aircraft considering its easy manufacturability in non-professional workshop, for example at home. It is divided into three main parts. At the beginning there is mentioned a summary of existing light airplanes which determines the conceptual frame of the designed aircraft. The next part describes more detailed draft of different functional units, taking into consideration the constructional and manufacturing issues. The final part then contains basic equations to verify and define the most important characteristics of the designed aircraft.

The emergence of multi-band communications standards, and the fast pace of the consumer electronics markets for wireless/cellular applications emphasize the need for fast design closure. In addition, there is a need for electronic product designers to collaborate with manufacturers, gain essential knowledge regarding the manufacturing facilities and the processes, and apply this knowledge during the design process. In this dissertation, efficient layout-level circuit sizing techniques, and methodologies for design-for-manufacturability have been investigated. For cost-effective fabrication of RF modules on emerging technologies, there is a clear need for design cycle time reduction of passive and active RF modules. This is important since new technologies lack extensive design libraries and layout-level electromagnetic (EM) optimization of RF circuits become the major bottleneck for reduced design time. In addition, the design of multi-band RF circuits requires precise control of design specifications that are partially satisfied due to manufacturing variations, resulting in yield loss. In this work, a broadband modeling and a layout-level sizing technique for embedded inductors/capacitors in multilayer substrate has been presented. The methodology employs artificial neural networks to develop a neuro-model for the embedded passives. Secondly, a layout-level sizing technique for RF passive circuits with quasi-lumped embedded inductors and capacitors has been demonstrated. The sizing technique is based on the circuit augmentation technique and a linear optimization framework. In addition, this dissertation presents a layout-level, multi-domain DFM methodology and yield optimization technique for RF circuits for SOP-based wireless applications. The proposed statistical analysis framework is based on layout segmentation, lumped element modeling, sensitivity analysis, and extraction of probability density functions using convolution methods. The statistical analysis takes into account the effect of thermo-mechanical stress and process variations that are incurred in batch fabrication. Yield enhancement and optimization methods based on joint probability functions and constraint-based convex programming has also been presented. The results in this work have been demonstrated to show good correlation with measurement data.

As the semiconductor technology roadmap further extends, the development of next generation silicon systems becomes critically challenged. On the one hand, design and manufacturing closures become much more difficult due to the widening gap between the increasing integration density and the limited manufacturing capability. As a result, manufacturability issues become more and more critically challenged in the design of reliable silicon systems. On the other hand, the continuous scaling of feature size imposes critical issues on traditional interconnect materials (Cu/Low-K dielectrics) due to power, delay and bandwidth concerns. As a result, multiple classes of new materials are under research and development for future generation technologies. In this dissertation, we investigate several critical Computer-Aided Design (CAD) challenges under advanced nanolithography and nanophotonics technologies. In addressing these challenges, we propose systematic CAD methodologies and optimization techniques to assist the design of high-yield and high-performance integrated circuits (IC) with low power consumption. In Very Large Scale Integration (VLSI) CAD for nanolithography, we study the manufacturing variability under resolution enhancement techniques (RETs) and explore two important topics: (1) fast and high fidelity lithography hotspot detection; (2) generic and efficient manufacturability aware physical design. For the first topic, we propose a number of CAD optimization and integration techniques to achieve the following goals in detecting lithography hotspots: (a) high hotspot detection accuracy; (b) low false-positive rate (hotspot false-alarms); (c) good capability to trade-off between detection accuracy and false-alarms; (d) fast CPU run-time; and (e) excellent layout coverage and computation scalability as design gets more complex. For the second topic, we explore the routing stage by incorporating post-RET manufacturability models into the mathematical formulation of a detailed router to achieve: (a) significantly reduced lithography-unfriendly patterns; (b) small CPU run-time overhead; and (c) formulation generality and compatibility to all types of RETs and evoling manufacturing conditions. In VLSI CAD for nanophotonics, we focus on three topics: (1) characterization and evaluation of standard on-chip nanophotonics devices; (2) low power planar routing for on-chip opto-electrically interconnected systems; (3) power-efficient and thermal-reliable design of nanophotonics Wavelength Division Multiplexing for ultra-high bandwidth on-chip communication. With simulations and experiments, we demonstrate the critical role and effectiveness of Computer-Aided Design techniques as the semiconductor industry marches forward in the deeper sub-micron (45nm and below) domain. / text

Intensive competition on the global market puts great pressure on manufacturing companies to develop and produce products that meet requirements from customers and investors. One key factor in meeting these requirements is the efficiency of the product development and the production preparation processes. Design automation is a powerful tool to increase efficiency in these two processes. The benefits of automating the manufacturability analysis process, a part of the production preparation process, are shortened lead-time, improved product performance, quality assurance, and, ultimately, decreased costs. Further, automation is beneficial as it increases the ability to adapt products to new product specifications with production preparations done in a few or in a single step. During the automation process, knowledge about the manufacturability analysis process is collected and stored in central systems, thus allowing full control over the design of production equipments. Topics addressed in this thesis include the flexibility of design automation systems, knowledge-bases containing alternative design rules, the automation of the finite element analysis process, manufacturability analysis over several productions steps, and the determination of production limits by looping the automated manufacturability analysis process. These topics are discussed in connection with the rotary draw bending of aluminum profiles. It is concluded that the concept of design automation can be applied to the manufacturability analysis process at different levels of automation depending on the characteristics of the implemented knowledge. The concept of object orientation should be adapted when implementing a knowledge-base and when developing the geometrical representations of the products. This makes a design automation system flexible enough to edit underlying knowledge and to extend the targeted design space. It is possible to automate the process of setting up, running, and interpreting finite element analyses to a great extent, enabling the design automation system to evaluate its own design proposals. It is also possible to enable such systems to consider sequences of manufacturing steps and loop them to develop decision support guiding engineers early in the design process, saving time and money while still assuring high product quality.

Abstract The target of this dissertation is to propose a new qualification tool (QT) for component package (CP) feasibility qualification in telecommunication infrastructure products. The primary reason for the introduction of the QT is the Electrical and Electronic Equipment (EEE) manufacturers’ continuing development of new products with tighter product requirements, e.g. compact size, environmental friendliness and cost-efficiency. CP’s need to match these requirements and thus they need to be developed further and qualified/re-qualified continuously. This qualification process with the new component package needs to be done in as early phase as possible, enabling EEE manufacturers to implement component packages into use with minimal risk. Qualification of a CP to match with these requirements is usually done with the qualification expert’s possessed know-how. However, this process takes a lot of time as all the possible data must be collected or even created. Thus a new method needs to be introduced for early phase qualification. The QT proposed here contains eight qualification sub-areas for feasibility qualification of the CP and it uses three qualification principles. Including all these sub-areas to the feasibility qualification clearly enables more reliable and trustworthy conclusions. The QT is required as an assisting qualification tool for specialists and as a preliminary qualification tool, e.g. for hardware (HW) designers or component engineers. It could be used also as a requirement communication tool between customers and component package manufacturers. After the QT’s sub-areas and functionality were developed, functionality and approval limits were set-up with 44 different widely used commercial CPs. This historical data is recorded for future use in its own database. The QT is a unique tool as there are no competing open-source tools available in the market that can be tailored to match with the user’s own requirements. / Tiivistelmä Työn tarkoituksena oli esittää uusi kvalifiointityökalu (QT) infrastruktuurituotteiden komponenttikoteloiden käytettävyyden arviointiin. Laitevalmistajien kehittäessä uusia pienempiä, ympäristöystävällisempiä ja kustannustehokkaampia laitteita asettavat he samalla vastaavia vaatimuksia myös komponenttikoteloille. Vastaavasti komponenttien valmistajat joutuvat kehittämään komponentteja ottamalla käyttöön uusia materiaaleja ja kotelorakenteita ja kvalifioimaan niiden ominaisuuksia asiakkaiden vaatimuksien mukaisesti. Laitevalmistajien riski uusien komponenttikoteloiden käyttöönotossa pystytään minimoimaan, kun komponenttikoteloiden kvalifiointi tehdään mahdollisimman aikaisessa vaiheessa. Kvalifioinnit tehdään yleensä kvalifiointiasiantuntijoiden tietotaidon perusteella. Tämä prosessi on kuitenkin perinteisesti hidas, joten nopeammalle arviointimenetelmälle on selkeä tarve. Työssä kehitettyyn kvalifiointityökaluun määritettiin kahdeksan arviointialuetta. Lisäksi sitä voidaan käyttää kolmella eri kvalifiontiperiaatteella. Näiden arviointialueiden huomioiminen kvalifiointiprosessin aikana parantaa selkeästi tuloksen luotettavuutta ja todenmukaisuutta. Työkalu on määritetty siten, että sitä voivat käyttää asiantuntijat avustavana kvalifiointityökaluna sekä suunnittelijat / komponentti-insinöörit alustavana kvalifiointityökaluna. Lisäksi sitä voidaan myös käyttää asiakasvaatimusten määrityksessä ja tiedonvälityksessä asiakkaan ja toimittajan välillä. QT:n kvalifiointialueiden määrittelyn ja toiminnallisuuden rakentamisen jälkeen, hyväksyntäkriteerit tutkittiin ja arvioitiin käyttäen 44 erilaista kaupallista komponenttikoteloa työkalun lopullisen hienosäädön tekemiseksi. Koska kvalifioinnin tiedot tallennetaan QT:n tietokantaan, pystyy laitevalmistajat hyödyntämään aikaisemmat historiatiedot tulevissa kvalifioinneissa. QT on ennen näkemätön työkalu, sillä markkinoilla ei ole vastaavia avoimen lähdekoodin kvalifiointityökaluja tarjolla, jota voidaan räätälöidä asiakkaan omien tarpeiden mukaisesti.

Nickel-based superalloys, an alloy system bases on nickel as the matrix element with the addition of up to 10 more alloying elements including chromium, aluminum, cobalt, tungsten, molybdenum, titanium, and so on. Through the development and improvement of nickel-based superalloys in the past century, they are well proved to show excellent performance at the elevated service temperature. Owing to the combination of extraordinary high-temperature mechanical properties, such as monotonic and cyclic deformation resistance, fatigue crack propagation resistance; and high-temperature chemical properties, such as corrosion and oxidation resistance, phase stability, nickel-based superalloys are widely used in the critical hot-section components in aerospace and energy generation industries. The success of nickel-based superalloy systems attributes to both the well-tailored microstructures with the assistance of carefully doped alloying elements, and the intently developed manufacturing processes. The microstructure of the modern nickel-based superalloys consists of a two-phase configuration: the intermetallic precipitates (Ni,Co)3(Al,Ti,Ta) known as γ′ phase dispersed into the austenite γ matrix, which is firstly introduced in the 1940s.  The recently developed additive manufacturing (AM) techniques, acting as the disruptive manufacturing process, offers a new avenue for producing the nickel-based superalloy components with complicated geometries. However, γ′ strengthened nickel-based superalloys always suffer from the micro-cracking during the AM process, which is barely eliminated by the process optimization. On this basis, the new compositions of γ′ strengthened nickel-based superalloy adapted to the AM process are of great interest and significance. This study sought to design novel γ′ strengthened nickel-based superalloys readily for AM process with limited cracking susceptibility, based on the understanding of the cracking mechanisms. A two-parameter model is developed to predict the additive manufacturability for any given composition of a nickel-based superalloy. One materials index is derived from the comparison of the deformation-resistant capacity between dendritic and interdendritic regions, while another index is derived from the difference of heat resistant capacity of these two spaces. By plotting the additive manufacturability diagram, the superalloys family can be categorized into the easy-to-weld, fairly-weldable, and non-weldable regime with the good agreement of the existed knowledge. To design a novel superalloy, a Cr-Co-Mo-W-Al-Ti-Ta-Nb-Fe-Ni alloy family is proposed containing 921,600 composition recipes in total. Through the examination of additive manufacturability, undesired phase formation propensity, and the precipitation fraction, one composition of superalloy, MAD542, out of the 921,600 candidates is selected. Validation of additive manufacturability of MAD542 is carried out by laser powder bed fusion (LPBF). By optimizing the LPBF process parameters, the crack-free MAD542 part is achieved. In addition, the MAD542 superalloy shows great resistance to the post-processing treatment-induced cracking. During the post-processing treatment, extensive annealing twins are promoted to achieve the recrystallization microstructure, ensuring the rapid reduction of stored energy. After ageing treatment, up to 60-65% volume fraction of γ′ precipitates are developed, indicating the huge potential of γ′ formation. Examined by the high-temperature slow strain rate tensile and constant loading creep testing, the MAD542 superalloy shows superior strength than the LPBF processed and hot isostatic pressed plus heat-treated IN738LC superalloy. While the low ductility of MAD542 is existed, which is expected to be improved by modifying the post-processing treatment scenarios and by the adjusting building direction in the following stages of the Ph.D. research. MAD542 superalloy so far shows both good additive manufacturability and mechanical potentials. Additionally, the results in this study will contribute to a novel paradigm for alloy design and encourage more γ′-strengthened nickel-based superalloys tailored for AM processes in the future. / <p>Additional funding agencies: Agora Materiae Graduate School for multidisiplinary PhD students at Linköping University, and Stiftelsen Axel Hultgren.</p>