Le développement de l'internet des objets au service des " Smart Cities " requière des sources d'énergie miniaturisées. Ces travaux concernent la préparation de micro- supercondensateurs à hautes performances par voies sèches. Des films minces de carbure de titane ont été déposés sur wafer de silicium par pulvérisation, puis convertis par chloration partielle en films de carbone dérivé de carbure microporeux adhérents. 205 mF.cm-2 / 410 F.cm-3 ont été délivrés en milieu 1M H2SO4, et 170 F.cm-3 dans un mélange de liquide ionique et d'acétonitrile en contrôlant la taille des micropores. Les micro-supercondensateurs préparés sur wafer par cette voie, compatible avec les techniques de microfabrication utilisées dans l'industrie des semi-conducteurs, surpassent les performances des micro-supercondensateurs sur puce rapportées jusqu'alors. Enfin, l'écriture laser d'oxydes commerciaux sur polyimide s'est avérée prometteuse pour la préparation de micro-supercondensateurs flexibles. / The development of the internet of things, serving the concept of Smart Cities, demands miniaturized energy storage devices. Electrochemical double layer capacitors (or so called EDLCs) are a good candidate as they can handle fast charge and discharge over 1,000,000 cycles. This work focuses on the preparation of high performance micro- supercapacitors using non wet processing routes. Titanium carbide (TiC) thin films were first deposited on silicon wafer by non-reactive DC magnetron sputtering. The deposition parameters, such as pressure and temperature, were optimized to prepare dense and thick TiC films. Then, microporous carbide-derived carbon (CDC) films with sub-nanometer pore diameters were obtained by removing the metallic atoms of the TiC films under chlorine atmosphere. Partial chlorination led to strongly adherent TiC-CDC films which could be used as electrode in aqueous electrolyte. Capacitance values of 205 mF.cm-2 / 410 F.cm-3 were delivered in 1M H2SO4, and were stable over 10,000 cycles. In order to increase the energy density of the on-chip electrodes, the pore sizes were increased to accommodate the larger ions of organic electrolytes, by performing chlorination at higher temperatures. The 700°C chlorinated TiC-CDC electrodes delivered up to 72 mF.cm-2 within a 3 V potential window in an ionic liquid / acetonitrile mixture. Another strategy consisted in the grafting of anthraquinone (AQ) molecules, which brought additional faradic contribution to the capacitive current. Electrochemical grafting by pulsed chronoamperometry allowed to double the TiC-CDC capacitance in aqueous electrolyte (1M KOH). On-chip CDC-based micro-supercapacitors were successfully prepared via reactive ion etching/ inductive coupled plasma procedure followed by chlorination. This non-wet processing route is fully compatible with the microfabrication techniques used in the semi-conductor industry, and the as-prepared micro-devices outperforms the current state of art of on-chip micro-supercapacitors. Aside, the preparation of flexible micro-supercapacitors was achieved via direct laser-writing, which provided a facile and scalable engineering with low cost. Ruthenium oxide (RuO2)-based interdigitated electrodes were obtained from laser-writing of a commercial RuO2.xH2O / cellulose acetate mixture spin-coated onto KaptonTM. Capacitance values of ~30 mF.cm-2 were recorded in 1M H2SO4 for the flexible device. This work open the way for the design of high performance micro-devices at a large scale.

No description available.

No description available.

On‐chip micro‐supercapacitors (MSCs), as promising power candidates for microdevices, typically exhibit high power density, large charge/discharge rates, and long cycling lifetimes. However, as for most reported MSCs, the unsatisfactory areal energy density (<10 µWh cm−2) still hinders their practical applications. Herein, a new‐type Zn‐ion hybrid MSC with ultrahigh areal energy density and long‐term durability is demonstrated. Benefiting from fast ion adsorption/desorption on the capacitor‐type activated‐carbon cathode and reversible Zn stripping/plating on the battery‐type electrodeposited Zn‐nanosheet anode, the fabricated Zn‐ion hybrid MSCs exhibit remarkable areal capacitance of 1297 mF cm−2 at 0.16 mA cm−2 (259.4 F g−1 at a current density of 0.05 A g−1), landmark areal energy density (115.4 µWh cm−2 at 0.16 mW cm−2), and a superb cycling stability without noticeable decay after 10 000 cycles. This work will inspire the fabrication and development of new high‐performance microenergy devices based on novel device design.

Depuis une dizaine d'années, on observe un développement de l'électronique embarquée intégrée à la plupart des objets que nous utilisons au quotidien. Il s'agit maintenant de les interconnecter en créant des réseaux embarqués connectés tels que les réseaux de capteurs autonomes sans fils. La miniaturisation des composants permet d'envisager une autonomie énergétique de ces réseaux composés de capteurs, récupérateurs d'énergie et de micro-batteries. Cependant la faible durée de vie des batteries et leur puissance limitée sont problématiques pour de telles applications. Les micro-supercondensateurs représentent une alternative pertinente pour la gestion de l'énergie dans les systèmes embarqués, notamment grâce à leur durée de vie très élevée. L'objectif de cette thèse concerne l'optimisation des performances de ces dispositifs en termes de densité de puissance et d'énergie. La capacité du supercondensateur étant proportionnelle à la surface électrochimiquement active des électrodes, nous nous sommes donc intéressés à la structuration de collecteurs de courant en or pour optimiser les performances des micro-supercondensateurs à base d'oxyde de ruthénium. Nous avons sélectionné deux principales techniques pour fabriquer une structure tridimensionnelle de l'or. Dans un premier temps, le dépôt physique d'or par évaporation à angle oblique (OAD) nous a permis de réaliser un substrat colonnaire suivi d'un dépôt d'oxyde de ruthénium. Dans un deuxième temps, nous avons mis en place un dépôt électrochimique d'or avec un modèle dynamique à bulles d'hydrogène. Cette technique permet la fabrication d'une structure d'or en trois dimensions par le biais d'un dépôt d'or réalisé simultanément avec une évolution d'hydrogène. L'électrodéposition de l'oxyde de ruthénium sur cette structure poreuse a montré une très bonne compatibilité notamment en terme d'homogénéité du dépôt, une forte capacité à faible vitesse de balayage (> 3 F/cm2) et une bonne cyclabilité. Pour tester les performances de ces électrodes, nous avons réalisé un dispositif complet en configuration empilée présentant de bonnes caractéristiques. Cette technologie de fabrication a pu par ailleurs être transférée à la micro-échelle pour des dispositifs planaires à l'aide de procédés de photolithographie sur électrodes interdigitées. / The increasing importance of portable and wearable electronics as well as embedded wireless sensor networks has made energy autonomy a critical issue. Micro-energy autonomy solutions based on the combination of energy harvesting and storage may play a decisive role. However, the short lifetime of micro-batteries is problematic. Micro-supercapacitors are a promising solution in terms of energy storage for embedded systems on the account of their important lifetime. In this work we have focused on the optimization of the performances of micro-supercapacitors in terms of energy and power density. As the capacitance is directly related to the accessible surface area of the electrodes, we have investigated the structuration of the current collectors in order to improve the performances of ruthenium oxide-based micro-supercapacitors. Two mains technics have been studied to obtain three dimensional structures. In a first phase, the oblique angle physical vapor deposition (OAD) has been investigated to fabricate a columnar gold structure, subsequently covered by an electrochemical ruthenium oxide. In a second phase, a highly porous gold architecture has been studied using electrodeposition via a hydrogen bubbles dynamic template. The ruthenium oxide electrodeposited on the resulting mesoporous gold structure shows good compatibility, in terms of homogeneous deposition, with a significant capacitance at slow rate (> 3F.cm-2) and an important cyclability. As proof of concept, a device has been designed in a stack configuration with good performances. Moreover, the technology finalized for electrodes fabrication has been transferred to the micro-scale on planar interdigitated devices using a suitable photolithography process.

The great popularity of portable, wearable, and implantable smart electronics has intensively boosted the development of flexible miniaturized power supplies. Owing to the fast charge/discharge capability, high power delivery, long cycling lifetime, easy fabrication and integration, flexible in-plane micro-supercapacitors (FPMSCs) are of significance as the micropower sources for the next-generation flexible on-chip electronics. In this review, we provide a comprehensive overview about FPMSCs and discuss the recent advances in their fabrication and applications. Particular emphasis is put on the emergent device fabrication technologies of FPMSCs, including deposition techniques, coating strategies, etching methods, and printing technologies. Moreover, we highlight the unique applications of FPMSCs in constructing smart responses and self-powered integrated systems in terms of multifunctional operation modes. Finally, the remaining challenges regarding flexibility, performance improvement, smart response, and microdevice integration of FPMSCs are discussed, which will stimulate further research in this thriving field.

In-plane micro-supercapacitors (MSCs), as promising power candidates for micro-devices, typically exhibit high power densities, large charge/discharge rates, and long cycling lifetimes. The high areal/volumetric capacitances, high energy/power densities, high rate capability, as well as flexibility are the main scientific pursue in recent years. Among diverse electrode materials for MSCs, coordination polymer frameworks are emerging due to the designable porous structure and tunable functionality. However, the unsatisfied electrochemical performance still hinders their practical applications. In this work, we demonstrate the first time an efficient in-situ growth approach to precisely modify the vacancy of Prussian-blue nano-thin films with pyridine by coordination reaction for high energy-density MSCs. Confirmed by the experimental results and density functional theory calculation, the vacancy modification within Prussian-blue network improved the film-forming property, hydrophilicity, and electrochemical activity of the thin films. The resultant MSCs based on pyridine-modified Prussian-blue exhibited an ultrahigh energy density of up to 12.1 mWh cm⁻³ and an ultra-low time constant (t₀) of 0.038 ms, which are the best values among the state-of-the-art in-plane MSCs. This work provides an attractive solution for structural engineering of promising active materials on molecule level toward high-performance micro-energy devices.