A stainless steel, high temperature, phase change micro actuator has been demonstrated using the solid-liquid phase transition of mannitol at 168°C and In-Ag transient liquid phase diffusion bonding. Joints created with this bonding technique can sustain temperatures up to 695°C, while being bonded at only 180°C, and have thicknesses between 1.4 to 6.0 μm. Physical vapour deposition, inkjet printing and electroplating have been evaluated as deposition methods for bond layers. For actuation, cavities were filled with mannitol and when heated, the expansion was used to deflect a 10 μm thick stainless steel membrane. Bond strengths of the joints are found to be in the region of 0.51 to 2.53 MPa and pressurised cavities sustained pressures of up to 30 bar. Bond strength is limited by the bond contact area and the surface roughness of the bonding layers.

This work presents the modeling, design, and testing of an underwater microactuation system. It is composed of several thermomechanical in-plane microactuators (TIM) integrated with a ratchet system to provide long displacements and high forces to underwater microelectromechanical systems (MEMS). It is capable of actuating a 200µN load 110µm. It is a two-layer silicon MEMS device fabricated with a MEMS fabrication process, PolyMUMPS. This work also shows the development of an elliptic integral model to analyze the compliant fixed-guided beams in the TIM and gives new insight into the buckling behavior, reaction forces, and displacement of the beams. The derivation, verification, and practical use of the model are shown in detail. It compares the reaction force predictions from the elliptic integral model with finite element modeling results over a wide range of non-dimensional displacements and slenderness ratios. The elliptic integral model was used to design a TIM that can operate in an aqueous environment. It was designed to achieve 9µm of displacement to drive a linear ratcheting mechanism. The thermal analysis was done in ANSYS using a 3D conduction model to predict the temperature of the heated beams. The TIM was designed to operate with a peak beam temperature of 100 ° C to prevent damage to the device due to vapor bubble formation. The main actuator showed significant electrolysis due to the high voltages used to drive the system, but otherwise functioned as predicted. Through the development and testing of the actuation system, quantitative voltage limits were discovered for underwater actuation systems under which electrolysis and boiling can be eliminated using alternating current.

In this paper, some critical issues and problems in the development of TiNi thin films were discussed, including preparation and characterization considerations, residual stress and adhesion, frequency improvement, fatigue and stability, as well as functionally graded or composite thin film design. Different types of MEMS applications were reviewed and the prospects for future advances in fabrication process and device development were discussed. / Singapore-MIT Alliance (SMA)

No description available.

abstract: Intracellular voltage recordings from single neurons in vitro and in vivo have been fundamental to our understanding of neuronal function. Conventional electrodes and associated positioning systems for intracellular recording in vivo are large and bulky, which has largely restricted their use to single-channel recording from anesthetized animals. Further, intracellular recordings are very cumbersome, requiring a high degree of skill not readily achieved in a typical laboratory. This dissertation presents a robotic, head-mountable, MEMS (Micro-Electro-Mechanical Systems) based intracellular recording system to overcome the above limitations associated with form-factor, scalability and highly skilled and tedious manual operations required for intracellular recordings. This system combines three distinct technologies: 1) novel microscale, polycrystalline silicon-based electrode for intracellular recording, 2) electrothermal microactuators for precise microscale navigation of the electrode and 3) closed-loop control algorithm for autonomous movement and positioning of electrode inside single neurons. First, two distinct designs of polysilicon-based microscale electrodes were fabricated and tested for intracellular recordings. In the first approach, tips of polysilicon microelectrodes were milled to nanoscale dimensions (<300 nm) using focused ion beam (FIB) to develop polysilicon nanoelectrodes. Polysilicon nanoelectrodes recorded >1.5 mV amplitude, positive-going action potentials and synaptic potentials from neurons in the abdominal ganglion of Aplysia Californica. In the second approach, polysilicon microelectrodes were integrated with miniaturized glass micropipettes filled with electrolyte to fabricate glass-polysilicon microelectrodes. These electrodes consistently recorded high fidelity intracellular potentials from neurons in the abdominal ganglion of Aplysia Californica (Resting Potentials < -35 mV, Action Potentials > 60 mV) as well as the rat motor cortex (Resting Potentials < -50 mV). Next, glass-polysilicon microelectrodes were coupled with microscale electrothermal actuators and controller for autonomous intracellular recordings from single neurons in the abdominal ganglion. Consistent resting potentials (< -35 mV) and action potentials (> 60 mV) were recorded after each successful penetration attempt with the controller and microactuated glass-polysilicon microelectrodes. The success rate of penetration and quality of recordings achieved using electrothermal microactuators were comparable to that of conventional positioning systems. Finally, the feasibility of this miniaturized system to obtain intracellular recordings from single neurons in the motor cortex of rats in vivo is also demonstrated. The MEMS-based system offers significant advantages: 1) reduction in overall size for potential use in behaving animals, 2) scalable approach to potentially realize multi-channel recordings and 3) a viable method to fully automate measurement of intracellular recordings. / Dissertation/Thesis / Doctoral Dissertation Biomedical Engineering 2018

In this thesis two kinds of phase change i.e., solid state phase transformation in steels and solid-to-liquid phase transformation in paraffin, have been modeled and numerically simulated. The solid state phase transformation is modeled using the phase field theory while the solid-to-liquid phase transformation is modeled using the Stokes equation and exploiting the viscous nature of the paraffin, by treating it as a liquid in both states.The theoretical base of the solid state, diffusionless phase transformation or the martensitic transformation comes from the Khachaturyan's phase field microelasticity theory. The time evolution of the variable describing the phase transformation is computed using the time dependent Ginzburg-Landau equation. Plasticity is also incorporated into the model by solving another time dependent equation. Simulations are performed both in 2D and 3D, for a single crystal and a polycrystal. Although the model is valid for most iron-carbon alloys, in this research an Fe-0.3\%C alloy is chosen.In order to simulate martensitic transformation in a polycrystal, it is necessary to include the effect of the grain boundary to correctly capture the morphology of the microstructure. One of the important achievements of this research is the incorporation of the grain boundary effect in the Khachaturyan's phase field model. The developed model is also employed to analyze the effect of external stresses on the martensitic transformation, both in 2D and 3D. Results obtained from the numerical simulations show good qualitative agreement with the empirical observations found in the literature.The microactuators are generally used as a micropump or microvalve in various miniaturized industrial and engineering applications. The phase transformation in a paraffin based thermohydraulic membrane microactuator is modeled by treating paraffin as a highly viscous liquid, instead of a solid, below its melting point.  The fluid-solid interaction between paraffin and the enclosing membrane is governed by the ALE technique. The thing which sets apart the presented model from the previous models, is the use of geometry independent and realistic thermal and mechanical properties. Numerical results obtained by treating paraffin as a liquid in both states show better conformity with the experiments, performed on a similar microactuator. The developed model is further employed to analyze the time response of the system, for different input powers and geometries of the microactuator. / <p>QC 20130219</p>

Single molecule force spectroscopy is an important technique to determine the interaction forces between biomolecules. Atomic force microscopy (AFM) is one of the tools used for this purpose. So far, AFMs usually use cantilevers as the force sensors and piezoelectrics as the actuators which may have some drawbacks in terms of speed and noise. In this research, a micromachined membrane actuator was used in two important types of experiments, namely the single molecule pulling and force-clamp based force spectroscopy. These two methods permit a more direct way of probing the forces of biomolecules, giving a detailed insight into binding potentials, and allowing the detection of discrete unbinding forces. To improve the quality of the experiments there is a need for high force resolution, high time resolution and increase in the throughput. This research focuses on using the combination of AFM and membrane based probe structures that have electrostatic actuation capability. The membrane actuators are characterized for range, dynamics, and noise to illustrate their adequacy for these experiments and to show that the complexity they introduce does not affect the noise level in the system. The control system described in this thesis utilizes the novel membrane actuator structures and integrates it into the current AFM setup. This is a very useful tool which can be implemented on any AFM without changing its mechanical architecture. To perform an experiment, all that is needed is to place the membrane actuator on the AFM stage, under the imagining head, and run the control system, which was implemented using LabVIEW. The system allows the user to maintain a precise and continuous control of the force. This was demonstrated by performing a life time experiment using biomolecules. Moreover, by slightly modifying the control scheme, the system allows us to linearize the membrane motion, which is inherently non-linear. The feasibility of using this control system for a variety of loading rate experiments are also demonstrated.

No description available.

MEMS (MicroElectroMechanical Systems) sensors are used in acceleration, flow, pressure and force sensing applications on the micro and macro levels. Much research has focused on improving sensor precision, range, reliability, and ease of manufacture and operation. One exciting possibility for improving the capability of micro sensors lies in exploiting the piezoresistive properties of silicon, the material of choice in many MEMS fabrication processes. Piezoresistivity—the change of electrical resistance due to an applied strain—is a valuable material property of silicon due to its potential for high signal output and on-chip and feedback-control possibilities. However, successful design of piezoresistive micro sensors requires a more accurate model of the piezoresistive behavior of polycrystalline silicon. This study sought to improve the existing piezoresistive model by investigating the piezoresistive behavior of compliant polysilicon structures subjected to tensile, bending and combined loads. Experimental characterization data showed that piezoresistive sensitivity is greatest and mostly linear for silicon members subject to tensile stresses and nonlinear for beams in bending and combined stress states. The data also illustrated the failure of existing piezoresistance models to accurately account for bending and combined loads. Two MEMS force and displacement sensors, the integral piezoresistive micro-Force And Displacement Sensor (FADS) and Closed-LOop sensor (CLOO-FADS), were designed and fabricated. Although limited in its piezoresistive sensitivity and out-of-plane stability, the FADS design showed promise of future application in microactuator characterization. Similarly, the CLOO-FADS exhibited possible feedback control capability, but was limited by control circuit complexity and implementation challenges. The piezoresistive behavior exhibited by the Thermomechanical In-plane Microactuator (TIM) led to a focused effort to characterize the TIM's behavior in terms of force, displacement, actuation current and mechanism resistance. The gathered data facilitated the creation of an empirical, temperature-dependent model for the specific TIM. Based on the assumption of a nearly constant temperature for each current level, the model predicted the force and displacement for a given fractional change in resistance. Despite the success of the empirical model for the test TIM device, further investigation revealed the necessity of a calibration method to enable the model's application to other TIM devices.

As technology advances and engineering capabilities improve, more research has focused on microscopic possibilities. Microelectromechanical systems (MEMS) is one area that has received much attention recently. Within MEMS much research has focused on sensing and actuation. This thesis presents work on a particular actuator of interest, the thermomechanical in-plane microactuator (TIM). Recent work has shown the possibility of a novel approach of sensing mechanical outputs of the TIM without ancillary sensors. This sensing approach exploits the piezoresistive property of silicon. However, to implement this approach a full model of the TIM would need to be obtained to describe the physics of the TIM, as well as development of a calibration approach to account for variations between devices. This thesis develops a multi-physics model of the TIM to realize this sensing approach. This model determines the mechanical state of the TIM using the same electrical signal that actuates the TIM. In this way the TIM is able to operate as a self-sensing actuator. To allow this multi-physics model to be tractable, work was done to simplify the thermal modeling of the TIM. A preliminary calibration approach was developed to adequately compensate for variations between devices. Thermal modeling and calibration were coupled with mechanical modeling and a developed sensing approach to form the full multi-physics model of the TIM. Validation testing of the model was performed with a modified calibration approach which showed good correlation with experimental data.