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Materials, design and processing of air encapsulated MEMS packagingFritz, Nathan Tyler 16 December 2011 (has links)
Air-gap structures are of particular interest for packaging of microelectromechanical systems (MEMS). In this work, an overcoat material is used to cover a sacrificial polymer, which protects the MEMS device during packaging. Once the overcoat is in place, the sacrificial polymer is thermally decomposed freeing the MEMS structure while the overcoat dielectric provides mechanical protection from the environment. An epoxy POSS dielectric was used as a high-selectivity etch mask for the PPC and a rigid overcoat for the structure leading to the process improvements.
The packaging structures can be designed for a range of MEMS device sizes and operating environments. However, the air-cavity structures need additional rigidity to withstand chip-level packaging conditions. Metalized air cavity packages were molded under traditional lead frame molding pressures and tested for mechanical integrity. The experimental molding tests and mechanical models were used to establish processing conditions and physical designs for the cavities as a function of cavity size. A semi-hermetic package was created using an in-situ sacrificial decomposition/epoxy cure molding step for creating large cavity chip packages.
Through the optimization of the air cavity, new materials and processes were tested for general microfabrication. The epoxy POSS dielectric provides a resilient, strong inorganic/organic hybrid dielectric for use in microfabrication and packaging applications. Polycarbonates can be used for low cost temporary adhesives in wafer-wafer bonding. An improved electroless deposition process for silver and copper was developed. The Sn/Pd activation was replaced by a cost efficient Sn/Ag catalyst. The process was shown to be able to deposit adherent copper on smooth POSS and silicon dioxide surfaces. Electroless copper was demonstrated on untreated silicon oxide wafers for TSV sidewall deposition.
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Investigation and analysis on the solder ball shear strength of plastic ball grid array, chip scale, and flip chip packages with eutectic Pb-Sn and Pb-free solders /Huang, Xingjia. January 2003 (has links)
Thesis (Ph. D.)--Hong Kong University of Science and Technology, 2003. / Includes bibliographical references. Also available in electronic version. Access restricted to campus users.
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An investigation of BGA electronic packaging using Moiré interferometryRivers, Norman. January 2003 (has links)
Thesis (M.S.M.E.)--University of South Florida, 2003. / Title from PDF of title page. Document formatted into pages; contains 87 pages. Includes bibliographical references.
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Modeling of package and board power distribution networks using transmission matrix and macro-modeling methodsKim, Joong-Ho 12 1900 (has links)
No description available.
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Thermomechanical characterization of materials formicrominiaturized system board requirementsBansal, Shubhra 08 1900 (has links)
No description available.
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Study on metal adhesion mechanisms in high density interconnect printed circuit boardsMartin, Lara J. 05 1900 (has links)
No description available.
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Design and implementation of an automated solder joint inspection systemErdahl, Dathan S. (Dathan Shane) 12 1900 (has links)
No description available.
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System-in-package a system level investigation for package reliability /Saiyed, Mohammed Shafi. January 2005 (has links)
Thesis (Ph. D.)--State University of New York at Binghamton, Department of System Science and Industrial Engineering, 2005. / Includes bibliographical references.
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An investigation into the effect of the PCB motion on the dynamic response of MEMS devices under mechanical shock loadsAlsaleem, Fadi M. January 2007 (has links)
Thesis (M.S.M.E.)--State University of New York at Binghamton, Watson School of Engineering and Applied Science, 2007. / Includes bibliographical references.
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Die stress analysis in plastic encapsulated electronic packages an experimental and numerical approach /Chaparala, Satish Chandra. January 2006 (has links)
Thesis (Ph. D.)--State University of New York at Binghamton, Department of Mechanical Engineering, 2006. / Includes bibliographical references (leaves 121-136).
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