L’imagerie photoacoustique est une nouvelle modalité couplant imagerie optique et échographie. Non invasive, elle permet d’imager des absorbeurs optiques à quelques centimètres de profondeur et avec la résolution de l’échographie. La réception des signaux photoacoustiques se faisant à l’aide d’un échographe clinique, cette modalité hybride vient compléter idéalement l’imagerie ultrasonore en apportant des informations fonctionnelles aux informations structurelles de l’échographie. Ces atouts en font une technique d’imagerie très prometteuse pour la clinique, notamment comme outil de diagnostic précoce. Ce travail de thèse a pour objectif principal la mise en place des outils nécessaires au développement de cette thématique de recherche d’un point de vue expérimental, à des fins cliniques. En particulier, l’apport de l’imagerie photoacoustique pour le diagnostic de plaques d’athérome vulnérables est investigué sur fantômes, grâce à un protocole original. Pour cela un système d’imagerie photoacoustique a été développé et caractérisé à l’aide de fantômes bimodalités élaborés spécifiquement pour les différentes études présentées. Gardant à l’esprit le transfert de cette technique en clinique, un échographe clinique de recherche est utilisé et différentes spécificités du banc nécessaires à l’imagerie in vivo et au diagnostic médical ont été investiguées. Cela implique une amélioration des performances de détection du signal photoacoustique, notamment en termes de sensibilité et de contraste. Pour cela, une nouvelle technologie de sondes ultrasonores est évaluée en la comparant aux sondes actuellement utilisées. De plus, une excitation multispectrale permet l’identification de différents éléments présents dans les tissus. L’aspect temps-réel de l’échographie fait de cette modalité une des plus utilisées pour le diagnostic clinique. Par conséquent, une imagerie photoacoustique voire bimodale en temps réel présente un réel atout pour son transfert clinique. Cette possibilité est investiguée sur le système mis en place au cours de la thèse grâce à un échographe de recherche et une étude sur fantômes. Enfin, une autre contribution de ce travail concerne l’apport de l’imagerie photoacoustique à la caractérisation de la vulnérabilité de la plaque d’athérome. Cette indication de vulnérabilité est obtenue en déterminant la composition de la plaque, en particulier en termes de lipides. L’imagerie photoacoustique, couplée à l’échographie, peut permettre cette identification. Pour étudier cette possibilité, nous nous sommes intéressés à l’artère carotide pour son accessibilité et la place qu’elle occupe dans le diagnostic de la plaque d’athérome en échographie et échographie Doppler. Un protocole original a été élaboré afin d’apporter l’excitation optique au plus près de la carotide. La faisabilité de cette approche est investiguée sur un fantôme conçu spécifiquement pour cette étude et les résultats préliminaires sont présentés. / Photoacoustic (PA) imaging is a new imaging modality coupling ultrasound and optical imaging. This non-invasive technique achieves a penetration depth up to several centimeters with optical contrast and ultrasound resolution. Moreover, since PA signals are detected with a US scanner, PA imaging ideally complete US imaging, adding functional information to the structural ones brought by echography. Therefore PA imaging looks very promising, specifically as a clinical early diagnosis tool. The main objective of this thesis is to set up the required tools to develop the experimental investigation for this research topic and, in particular, to apply it to the diagnosis of vulnerable atheroma plaques. A PA imaging system has been set up and characterized using specifically designed bimodal phantoms. Additional studies have been made to evaluate the suitability of this imaging platform for clinical imaging. For example, in vivo imaging requires better signal detection in terms of contrast and sensitivity, achieved thanks to a new probe technology, and the identification of tissue composition using a multispectral optical excitation. Finally, PA and even PAUS real time imaging is a real asset for medical diagnosis that has been investigated. Another contribution of this work is the use of PA imaging to characterized atheroma plaques vulnerability with the detection of lipids inside these plaques. PA imaging, coupled to echography, can address this need. To study this possibility, the carotid artery has been considered and a new protocol has been elaborated to bring the optical excitation very close to this artery. A feasibility study has been realized on a specific phantom and the preliminary results are presented.

In this paper we present an approach to the nonlinear model reduction based on representing the nonlinear system with a piecewise-linear system and then reducing each of the pieces with a Krylov projection. However, rather than approximating the individual components to make a system with exponentially many different linear regions, we instead generate a small set of linearizations about the state trajectory which is the response to a 'training input'. Computational results and performance data are presented for a nonlinear circuit and a micromachined fixed-fixed beam example. These examples demonstrate that the macromodels obtained with the proposed reduction algorithm are significantly more accurate than models obtained with linear or the recently developed quadratic reduction techniques. Finally, it is shown tat the proposed technique is computationally inexpensive, and that the models can be constructed 'on-the-fly', to accelerate simulation of the system response. / Singapore-MIT Alliance (SMA)

No description available.

This thesis presents the development and microfabrication of capacitive micromachined ultrasonic transducers (CMUT) with diamond membranes for the first time in the literature. Although silicon and silicon nitride (Si3N4) membranes have been generally used as the membrane material in CMUTs. These membrane materials have moderate properties that can cause damage during the operation of CMUTs. In this thesis, a new material for the membrane is introduced for CMUTs. Diamond has exceptional potential in the area of micro-nano technologies due to unrivalled stiffness and hardness, excellent tribological performance, highly tailorable and stable surface chemistry, high thermal conductivity and low thermal expansion, high acoustic velocity of propagating waves, and biocompatibility. Based on these excellent material properties, diamond is employed in the new generation CMUT structures for more robust and reliable operations. The microfabrication process of CMUT has been generally performed with either sacrificial release process or wafer bonding technique. High yield and low cost features of wafer bonding process makes it preferable for CMUT devices. In this thesis, plasma-activated direct wafer bonding process was developed for the microfabrication of 16-element 1-D CMUT arrays with diamond membranes. They were designed to operate at different resonance frequencies in the range of 1 MHz and 10 MHz with different cell diameters (120, 88, 72, 54, 44 &mu / m) and element spacing (250, 375 &mu / m). 1-D CMUT array devices can be used for focusing ultrasound applications. The electronic circuit for 1-D CMUT devices with diamond membranes was designed and implemented on PCB for the ultrasound focusing experiment. This electronic circuit generates continuous or burst AC signals of &plusmn / 15 V with different and adjustable phase shifting options at 3 MHz frequency. 16 elements of 72 &mu / m 1-D CMUT array were successfully tested. Fully functional 7 elements of 1-D CMUT array are focused at an axial distance of 5.81 mm on the normal to the CMUT center plane. The CMUT array was excited using 10 Vp&minus / p with 10 cycles sinusoidal signals at 3 MHz. The microfabrication process and focusing ultrasound of 1-D CMUT devices with diamond membranes are done successfully in this thesis.

No description available.

Capacitive micromachined ultrasonic transducers (CMUT:s) are often used in medical imaging and they show some promise as underwater transducers. This thesis collates the available information about how CMUT:s operate, their strengths and weaknesses and investigates their efficiency as an underwater transducer. The accumulated knowledge was channelled into a simulation of a CMUT as a dampened spring system done in MATLAB and Simulink. The simulation investigated the resonance frequency and bandwidth through simulation and compared the results to experimental results from literature.  CMUT:s have good acoustic matching with water making them sensitive, broadband transducers when used under water. Special care must be taken when choosing the CMUT so that materials and designs can fulfil the task for which it is intended, such as the radius of the membrane, the material of the membrane, the insulating layers in or around the CMUT and the height of the air gap inside. CMUT:s are, for the transmission of sound, less capable than existing lead zirconate-titanate-transducers (PZT-transducers). This problem can be somewhat alleviated through operating the CMUT in collapse-mode but care must be taken so that the CMUT is not damaged during this operation. Simulation results and results from literature show that it is possible to simulate CMUT:s with accuracy. By simulating 10 different CMUT:s, using the geometries and material properties of experimentally tested devices and testing for resonance frequency and bandwidth the results were as follows:The average relative error of resonance frequency was found to be -14 %, if outlier results are excluded and the average relative error of bandwidth proved inaccurate at -54 %

This PhD dissertation reports the development of miniature ion optics components of a mass spectrometer (MS) with the ultimate goal to lay the foundation for a compact low-power micromachined MS (µMS) for broad-range chemical analysis. Miniaturization of two specific components a) RF ion traps and b) an ion funnel have been investigated and miniature low-power versions of these components have been developed and demonstrated successfully in lab experiments. Power savings, simpler electronics and packaging schemes required to operate the micro-scale RF cylindrical ion traps have been the key motivation driving this research. Microfabricated cylindrical ion traps (µCITs) and arrays in silicon, silicon-on-insulator and stainless steel substrates have been demonstrated and average power of as low as 55 mW for a low mass range (28 to 136 amu) and mass spectra with better than a unit-mass-resolution have been recorded. For the ion funnel miniaturization effort, simple assembly, small form factor and ease of integration have been emphasized. A simplification of the conventional 3D ion funnel design, called the planar ion funnel, has been developed in a single plate and has been tested to demonstrate ion funneling at medium vacuum levels (1E-5 Torr) using DC voltages and power less than 0.5 W. Miniaturization of these components also enables use of other novel ion optics components, packaging and integration, which will allow a new class of µMS architectures amenable for radical miniaturization.

The focus of this Ph.D. thesis research is a new piezoelectrically driven micromachined ultrasonic atomizer concept that utilizes fluid cavity resonances in the 15 MHz range along with acoustic wave focusing to generate the pressure gradient required for droplet or jet ejection. This ejection technique exhibits low-power operation while addressing the key challenges associated with other atomization technologies including production of sub-5 um diameter droplets, low-temperature operation, the capacity to scale throughput up or down, and simple, low-cost fabrication. This thesis research includes device development and fabrication as well as experimental characterization and theoretical modeling of the acoustics and fluid mechanics underlying device operation. The main goal is to gain an understanding of the fundamental physics of these processes in order to achieve optimal design and controlled operation of the atomizer. Simulations of the acoustic response of the system for various device geometries and different ejection fluid properties predict the resonant frequencies of the device and confirm that pressure field focusing occurs. High-spatial-resolution stroboscopic visualization of fluid ejection under various operating conditions is used to investigate whether the proposed atomizer is capable of operating in either the discrete-droplet or continuous-jet mode. The results of the visualization experiments combined with a scaling analysis provide a basic understanding of the physics governing the ejection process and allow for the establishment of simple scaling laws that prescribe the mode (e.g., discrete-droplet vs. continuous-jet) of ejection. In parallel, a detailed computational fluid dynamics (CFD) analysis of the fluid interface evolution and droplet formation and transport during the ejection process provides in-depth insight into the physics of the ejection process and determines the limits of validity of the scaling laws. These characterization efforts performed in concert with device development lead to the optimal device design. The unique advantages enabled by the developed micromachined ultrasonic atomizer are illustrated for challenging fluid atomization examples from a variety of applications ranging from fuel processing on small scales to ultra-soft electrospray ionization of biomolecules for bioanalytical mass spectrometry.

This thesis reports the development of micromachined accelerometers and gyroscopes that can be used for micromachined inertial measurement units (IMUs). Micromachined IMUs started to appear in the market in the past decade as low cost, moderate performance alternative in many inertial applications including military, industrial, medical, and consumer applications. In the framework of this thesis, a number of accelerometers and gyroscopes have been developed in three different fabrication processes, and the operation of these fabricated devices is verified with extensive tests. In addition, the fabricated accelerometers were combined with external readout electronics to obtain hybrid accelerometer systems, which were tested in industrial test facilities. The accelerometers and gyroscopes are designed and optimized using the MATLAB analytical simulator and COVENTORWARE finite element simulation tool. First set of devices is fabricated using a commercial foundry process called SOIMUMPs, while the second set of devices is fabricated using the electroplating processes developed at METU-MET facilities. The third set of devices is designed for a new advanced process based on DRIE, which is under development. Mechanical and electrical test results of the fabricated accelerometers and gyroscopes are in close agreement with the designed values. The testing of the SOI and nickel accelerometers is also performed in industrial test environments. In order to perform these tests, accelerometers are hybrid connected to commercially available capacitive readout circuits. These accelerometer systems require only two DC supply voltages for operation and provide an analog output voltage related to the input acceleration. The industrial tests show that the SOI accelerometer system yields a 799 &micro / g/&amp / #8730 / Hz average noise floor, a 1.8 mg/&amp / #8730 / Hz peak noise floor, a 22.2 mV/g sensitivity, and a 0.1 % nonlinearity, while the nickel accelerometer system yields a 228 &micro / g/&amp / #8730 / Hz average noise floor, a 375 &micro / g/&amp / #8730 / Hz peak noise floor, a 1.02 V/g sensitivity, and a 0.23 % nonlinearity. Long-term drift components of the accelerometers are determined to be smaller than 20 mg. These systems are the highest performance micromachined accelerometer systems developed in Turkey, and they can be used in implementation of a national inertial measurement unit.

Several fabrication techniques for surface micromachined 3-D structures have been developed for RF components. The fabrication techniques all have in common the use of epoxy patterning and subsequent metallization. Techniques and structures such as embedded conductors, epoxy-core conductors, a reverse-side exposure technique, a multi-exposure scheme, and inclined patterning are presented. The epoxy-core conductor technique makes it easy to fabricate high-aspect-ratio (10-20:1), tall (~1mm) RF subelements as well as potentially very complex structures by taking advantage of advanced epoxy processes. To demonstrate feasibility and usefulness of the developed fabrication techniques for RF applications, two test vehicles are employed. One is a solenoid type RF inductor, and the other is a millimeter wave radiating structure such as a W-band quarter-wavelength monopole antenna. The embedded inductor approach provides mechanical robustness and package compatibility as well as good electrical performance. An inductor with a peak Q-factor of 21 and an inductance of 2.6nH at 4.5GHz has been fabricated on a silicon substrate. In addition, successful integration with a CMOS power amplifier has been demonstrated. A high-aspect-ratio inductor fabricated using epoxy core conductors shows a maximum Q-factor of 84 and an inductance of 1.17nH at 2.6GHz on a glass substrate with a height of 900um and a single turn. Successful W-band monopole antenna fabrication is demonstrated. A monopole with a height of 800um shows its radiating resonance at 85GHz with a return loss of 16dB. In addition to the epoxy-based devices, an advanced tunable ferroelectric device architecture is introduced. This architecture enables a low-loss conductor device; a reduced intermodulation distortion (IMD) device; and a compact tunable LC module. A single-finger capacitor having a low-loss conductor with an electrode gap of 1.2um and an electrode thickness of 2.2um has been fabricated using a reverse-side exposure technique, showing a tunability of 33% at 10V. It shows an improved Q-factor of 21.5. Reduced IMD capacitors consist of wide RF gaps and narrowly spaced high resistivity electrodes with a gap of 2um and a width of 2um within the wide gap. A 14um gap and a 20um gap capacitor show improved IMD performance compared to a 4um gap capacitor by 6dB and 15dB, respectively, while the tunability is approximately 21% at 30V for all three devices due to the narrowly spaced multi-pair high resistivity DC electrodes within the gap. Finally, a compact tunable LC module is implemented by forming the narrow gap capacitor in an inductor shape. The resonance frequency of this device is variable as a function of DC bias and a frequency tunability of 1.1%/V is achieved. The RF components developed in this thesis illustrate the usefulness of the application of micromachining technology to this application area, especially as frequencies of operation of RF systems continue to increase (and therefore wavelengths continue to shrink).