Energy science is becoming an increasingly important multi-disciplinary area, for not only addressing the worldwide energy crisis, but also realizing desired power sources with advanced features for portable electronic devices and sensor networks. Very recently, based on triboelectric effect and electrostatic induction, a fundamentally new technology, triboelectric nanogenerator, has been demonstrated which shows unique merits. But so far, the main limitation for continuing optimizing their output performance is a lack of fundamental understanding of their core working mechanism. In this thesis research, we first unveil the fundamental theory and output characteristics of triboelectric nanogenerators. Then, we apply the developed theory to the TENG-based self-powered system design. We have developed the first genuine self-powered system to meet mW requirement of personal electronics. The system includes a multilayered TENG, a power management circuit with 60% total efficiency, and a low leakage energy storage device. Our power management circuit provides the total efficiency that is about two magnitudes higher than the traditional direct charging. And the total system performance is 330 times higher than the state-of-art designs. Driven by palm tapping, this power unit can provide a continuous DC electricity of 1.044 mW on average power in a regulated and managed manner that can be universally applied as a standard power source for continuously driving numerous conventional electronics, such as a thermometer, a heart rate monitor (electrocardiograph/ECG system), a pedometer, a wearable electronic watch, a scientific calculator, and a wireless radio-frequency communication system. Our study demonstrates the first power unit that utilizes widely accessible biomechanical energy source to sustainably drive a broad range of commercial mobile and wearable electronic devices. This self-charging unit is a paradigm shift towards infinite-lifetime energy sources that can never be achieved solely by batteries.

Les nanomatériaux et nanotechnologies sont devenus un élément incontournable dans l'électronique de faible puissance, la production énergétique / gestion et les réseaux sans fil, offrant la possibilité de construire une vision pour les capteurs autonomes. Cette thèse s’intéresse au concept de systèmes basse température utilisant des structures de matériaux hybrides organique/inorganique pour la réalisation de dispositifs électroniques faible coût, dont les transistors à effet de champ (FET) et les nanogénérateurs piézoélectriques (nommés PENGs) et ce, sur divers substrats en particulier plastiques. Pour atteindre ces objectifs, ce travail décrit d'abord la croissance contrôlée de nanostructures monocristallines de ZnO en utilisant des approches vapeur-liquide-solide (VLS) et hydrothermales à haute et basse température respectivement. Pour les dispositifs FET, les nanostructures ZnO obtenues par VLS sont utilisées en raison de leur haute qualité structurale et optique. Les sections suivantes présentent des différentes études menées pour optimiser les prototypes FET, comprenant (i) les contacts métal-semiconducteur, (ii) la qualité de l'interface semi-conducteur/isolant et (iii) l'épaisseur de diélectrique organique. La dernière section examine la possibilité de fabriquer des systèmes hybrides organiques/inorganiques pour PENGs utilisant l'approche hydrothermale. Certaines des questions clés, ce qui limitent les performances PENG sont abordés : (i) l'effet de porteurs libres et (ii) l'encapsulation polymère. Ce travail démontre le fort potentiel des ZnO nanostructures pour l'avenir de l'électronique. / Nanomaterials and nanotechnology has become a crucial feature in low-power electronics, energy generation/management and wireless networks, providing the opportunity to build a vision for autonomous sensors. The present thesis delivers the concept of low-temperature processable organic / inorganic hybrid systems for the realization of inexpensive electronic devices including field-effect transistors (FETs) and piezoelectric nanogenerators (PENGs) on various substrates including plastics. To achieve these objectives, this work first describes the controlled growth of single-crystalline ZnO nanostructures using high-temperature vapor-liquid-solid (VLS) and low-temperature hydrothermal approaches. For the FET devices, VLS grown ZnO nanostructures are used, owing to their high structural and optical quality. Later sections present different studies conducted to optimize the FET prototypes, includes: (i) metal-semiconductor contacts, (ii) semiconductor/insulator interface quality and (iii) organic dielectric thickness. The last section investigates the possibility to fabricate organic / inorganic hybrid systems for PENGs using hydrothermal approach. Some of the key issues, restricting the PENG performances are addressed: (i) screening effect from free charge carriers and (ii) polymer encapsulation. This work demonstrates the high potential of ZnO nanostructure for the future of electronics.

We are surrounded by enormous amounts of ambient mechanical energy that goes to waste such as rain drops, human footfalls, air flow, ocean waves, just to name a few. If such otherwise wasted mechanical energy can be effective converted into electricity, self-powered electronics are very likely to be realized, which can address the limitations of traditional power supplies in many cases, such as wireless sensor networks. Here in this work, two types of energy-harvesting nanogenerators (NGs) based were studied. For piezoelectric nanogenerators, zinc oxide (ZnO) nanowires (NWs) were used as building blocks to develop integrated NGs based on a number of ZnO NWs instead of a single NW. Two types of integrated NGs were developed, which consist of lateral NW arrays and vertical NW arrays. The electric output power was substantially enhanced compared to the design with a single NW. For triboelectric nanogenerators, triboelectric effect was innovatively used as an effective means of harvesting mechanical energy. The operating principle can be explained by the coupling between triboelectric and electrostatic effect. Two types of operating modes were invented, i.e. contact mode and sliding mode. Triggered by commonly available ambient mechanical energy such as footfalls, the maximum output power reached up to 1.2 W. More importantly, self-powered systems were built by using the NG as a power source. It can provide real time power for up to 600 commercial LED bulbs. This research not only provides the fundamentals for NGs but also demonstrates the practicability of using the self-powered technology in our daily life.

This study presents a new way for new 3D energy harvesting energy with vertically aligned nanorods arrays. ZnO nanoparticles array on Au/Cr/Si substrate are directly patterned by electrospray. First, gel solutions with zinc acetate, monoethanolamine and 2-methoxyethanol as the precursor by sol-gel technology were formulated. Then, the solutions were stirred to become clear and homogeneous liquid. Second, the precursor solutions were prepared by electrospray, where a Taylor cone was formed to produce ZnO nanoparticles. Then the ZnO nanoparticles were annealed as seed layers for nanorods. By varying the property of the ZnO solution, needle with collector distance, applied voltage, annealing temperature and molar ratio were discussed. After annealing, the orientation of the ZnO nanorods depend on the crystalline orientation of ZnO nanoparticles. The ZnO nanorods were obtained at a temperature of 90 ¢XC by aqueous solution method. The experimental parameters of lengths, diameters, and pH level of the reaction medium of the Zno nanorod were observed and controlled. The physical structures of ZnO were characterized by X-ray diffraction (XRD) and Field Emission Scanning Electron Microscopy (FESEM) analyses. The results show that the ZnO nanoparticles become more intensity with increasing in annealing temperature. The SEM analysis reveals that the ZnO nanorods have diameters about 100-400 nm and length about 200-1200 nm. Finally, Pt electrode atop as Schottky contacts were packed to fabricate nanogenerator with ZnO nanorods. Then the nanogenerator was driven by ultrasonic wave vibration. The wave drives the electrode up and down to vibrate the nanorods, and its voltage and current were also characterized. The measurement results show the maximum power is 0.004х10-8 W during the operation frequency of 42 kHz.

Recently, efforts have been made for self-powering the batteries and portable electronic devices by piezoelectric nanogenerators. The piezoelectric nanogenerators can work as a power source for nano-systems and also as an active sensor. The piezoelectric nanogenerator is a device that converts random mechanical energy into electrical energy by utilizing the semiconducting and piezoelectric properties. Also, the mechanical energy is always available in and around us for powering these nano devices. The aim of the present thesis work is to explore 1D and 2D ZnO nanostructures (nanorods and nanosheets) on metal alloy substrates for the development of piezoelectric nanogenerators in energy harvesting and sensors applications. Hydrothermal synthesis method was adopted for the growth of ZnO nanostructures. The nanogenerators were fabricated by using the optimized synthesis parameters and subsequently studied their performance for power generation and as an active speed sensor. These 1D and 2D nanostructures based nanogenerators have opened up a new window for the energy harvesting applications and sensors development. The thesis is divided into following six chapters. Chapter 1: This chapter gives a general introduction about energy harvesting devices such as nanogenerators, available energy sources, mechanical energy harvesting, ZnO material and the details on hydrothermal synthesis process. A brief literature survey on different applications of piezoelectric nanogenerators is also included. Chapter 2: A novel flexible metal alloy (Phynox) and its properties along with its applications are discussed in this chapter. Details on the synthesis of 1D ZnO nanorods on Phynox alloy substrate by hydrothermal method are presented. Further, the optimization of parameters such as growth temperature, seed layer annealing and substrate temperature effects on the synthesis of ZnO nanorods are discussed in detail. As-synthesized ZnO nanorods have been characterized using XRD, FE-SEM, TEM and XPS. Chapter 3: It reports on the fabrication of piezoelectric nanogenerator on Phynox alloy substrate as power generating device by harvesting the mechanical energy. Initially, the performance of the nanogenerator for power generation due to finger tip impacts was studied and subsequently its switching polarity test was also carried out. Output voltage measurements were carried out using the in-house developed experimental setup. Stability test was also carried out to see the robustness of the nanogenerator. Finally, the output voltage response of the nanogenerator was studied for its use as an active speed sensor. Chapter 4: Synthesis of Al doped 2D ZnO nanorsheets on Aluminum alloy (AA-6061) substrate by hydrothermal method is reported in this chapter. The optimized parameters such as growth temperature and growth time effects on the synthesis of ZnO nanosheets are discussed. As-synthesized ZnO nanosheets were characterized using XRD, FE-SEM, TEM and XPS. The Al doping in ZnO is confirmed by EDXS and XPS analysis. Chapter 5: Cost effective fabrication of Al doped 2D ZnO nanosheets based nanogenerator for direct current (DC) power generation is reported in this chapter. The performance of the nanogenerator for DC power generation due to finger tip impacts was studied and subsequently its switching polarity test was also carried out. Output voltage measurements were carried out using the in-house developed experimental setup. Stability test was also carried out to see the robustness of the nanogenerator. Finally, the DC output voltage response of the nanogenerator was studied for its use as an active speed sensor. Chapter 6: The first section summarizes the significant features of the work presented in this thesis. In the second section the scope for carrying out the further work is given.

Recently, efforts have been made for self-powering the batteries and portable electronic devices by piezoelectric nanogenerators. The piezoelectric nanogenerators can work as a power source for nano-systems and also as an active sensor. The piezoelectric nanogenerator is a device that converts random mechanical energy into electrical energy by utilizing the semiconducting and piezoelectric properties. Also, the mechanical energy is always available in and around us for powering these nano devices. The aim of the present thesis work is to explore 1D and 2D ZnO nanostructures (nanorods and nanosheets) on metal alloy substrates for the development of piezoelectric nanogenerators in energy harvesting and sensors applications. Hydrothermal synthesis method was adopted for the growth of ZnO nanostructures. The nanogenerators were fabricated by using the optimized synthesis parameters and subsequently studied their performance for power generation and as an active speed sensor. These 1D and 2D nanostructures based nanogenerators have opened up a new window for the energy harvesting applications and sensors development. The thesis is divided into following six chapters. Chapter 1: This chapter gives a general introduction about energy harvesting devices such as nanogenerators, available energy sources, mechanical energy harvesting, ZnO material and the details on hydrothermal synthesis process. A brief literature survey on different applications of piezoelectric nanogenerators is also included. Chapter 2: A novel flexible metal alloy (Phynox) and its properties along with its applications are discussed in this chapter. Details on the synthesis of 1D ZnO nanorods on Phynox alloy substrate by hydrothermal method are presented. Further, the optimization of parameters such as growth temperature, seed layer annealing and substrate temperature effects on the synthesis of ZnO nanorods are discussed in detail. As-synthesized ZnO nanorods have been characterized using XRD, FE-SEM, TEM and XPS. Chapter 3: It reports on the fabrication of piezoelectric nanogenerator on Phynox alloy substrate as power generating device by harvesting the mechanical energy. Initially, the performance of the nanogenerator for power generation due to finger tip impacts was studied and subsequently its switching polarity test was also carried out. Output voltage measurements were carried out using the in-house developed experimental setup. Stability test was also carried out to see the robustness of the nanogenerator. Finally, the output voltage response of the nanogenerator was studied for its use as an active speed sensor. Chapter 4: Synthesis of Al doped 2D ZnO nanorsheets on Aluminum alloy (AA-6061) substrate by hydrothermal method is reported in this chapter. The optimized parameters such as growth temperature and growth time effects on the synthesis of ZnO nanosheets are discussed. As-synthesized ZnO nanosheets were characterized using XRD, FE-SEM, TEM and XPS. The Al doping in ZnO is confirmed by EDXS and XPS analysis. Chapter 5: Cost effective fabrication of Al doped 2D ZnO nanosheets based nanogenerator for direct current (DC) power generation is reported in this chapter. The performance of the nanogenerator for DC power generation due to finger tip impacts was studied and subsequently its switching polarity test was also carried out. Output voltage measurements were carried out using the in-house developed experimental setup. Stability test was also carried out to see the robustness of the nanogenerator. Finally, the DC output voltage response of the nanogenerator was studied for its use as an active speed sensor. Chapter 6: The first section summarizes the significant features of the work presented in this thesis. In the second section the scope for carrying out the further work is given.

<div>Recently, energy crisis and environment pollution has become global issues and there is a great demand for developing green and renewable energy system. At the same time, advancements in materials production, device fabrication, and flexible circuit has led to the huge prosperity of wearable devices, which also requires facile and efficient approaches to power these ubiquitous electronics. Piezoelectric nanogenerators and triboelectric nanogenerators have attracted enormous interest in recent years due to their capacity of transferring the ambient mechanical energy into desired electricity, and also the potential of working as self-powered sensors. However, there still exists some obstacles in the aspect of materials synthesis, device fabrication, and also the sensor performance optimization as well as their application exploration.</div><div>Here in this research, several different materials possessing the piezoelectric and triboelectric properties (selenium nanowires, tellurium nanowires, natural polymer hydrogel) have been successfully synthesized, and also a few novel manufacturing techniques (additive manufacturing) have been implemented for the fabrication of wearable sensors. The piezoelectric and triboelectric nanogenerators developed could effectively convert the mechanical energy into electricity for an energy conversion purpose, and also their application as self-powered human-integrated sensors have also been demonstrated, like achieving a real-time monitoring of radial artery pulses. Other applications of the developed sensors, such as serving as electric heaters and infrared cloaking devices are also presented here. This research is expected to have a positive impact and immediate relevance to many societally pervasive areas, e.g. energy and environment, biomedical electronics, and human-machine interface.</div><div><br></div>

L’alimentation en énergie des réseaux de capteurs miniaturisés pose une question fondamentale, dans la mesure où leur autonomie est un critère de qualité de plus en plus important pour l’utilisateur. C’est même une question cruciale lorsque ces réseaux visent à assurer une surveillance d’infrastructure (avionique, machines, bâtiments…) ou une surveillance médicale ou environnementale. Les matériaux piézoélectriques permettent d’exploiter l’énergie mécanique inutilisée présente en abondance dans l’environnement (vibrations, déformations liées à des mouvements ou à des flux d’air…). Ils peuvent ainsi contribuer à rendre ces capteurs autonomes en énergie. Sous la forme de nanofils (NF), les matériaux piézoélectriques offrent une sensibilité qui permet d’exploiter des sollicitations mécaniques très faibles. Ils sont également intégrables, éventuellement sur substrat souple.Dans cette thèse nous nous intéressons au potentiel des nanofils de matériaux semi-conducteurs piézoélectriques, tels que ZnO ou les composés III-V, pour la conversion d’énergie mécanique en énergie électrique. Depuis peu, ceux-ci ont fait l’objet d’études relativement nombreuses, avec la réalisation de nanogénérateurs (NG) prometteurs. De nombreuses questions subsistent toutefois avec, par exemple, des contradictions notables entre prédictions théoriques et observations expérimentales.Notre objectif est d’approfondir la compréhension des mécanismes physiques qui définissent la réponse piézoélectrique des NF semi-conducteurs et des NG associés. Le travail expérimental s’appuie sur la fabrication de générateurs de type VING (Vertical Integrated Nano Generators) et sur leur caractérisation. Pour cela, un système de caractérisation électromécanique a été construit pour évaluer les performances des NG réalisés et les effets thermiques sous une force compressive contrôlée. Le module d’Young et les coefficients piézoélectriques effectifs de NF de GaN; GaAs et ZnO et de NF à structure cœur/coquille à base de ZnO ont été évalués également dans un microscope à force atomique (AFM). Les nanofils de ZnO sont obtenus par croissance chimique en milieu liquide sur des substrats rigides (Si) ou flexibles (inox) puis sont intégrés pour former un générateur. La conception du dispositif VING s’est appuyée sur des simulations négligeant l’influence des porteurs libres, comme dans la plupart des études publiées. Nous avons ensuite approfondi le travail théorique en simulant le couplage complet entre les effets mécaniques, piézoélectriques et semi-conducteurs, et en tenant compte cette fois des porteurs libres. La prise en compte du piégeage du niveau de Fermi en surface nous permet de réconcilier observations théoriques et expérimentales. Nous proposons notamment une explication au fait que des effets de taille apparaissent expérimentalement pour des diamètres au moins 10 fois plus grands que les valeurs prévues par simulation ab-initio ou au fait que la réponse du VING est dissymétrique selon que le substrat sur lequel il est intégré est en flexion convexe ou concave. / Energy autonomy in small sensors networks is one of the key quality parameter for end-users. It’s even critical when addressing applications in structures health monitoring (avionics, machines, building…), or in medical or environmental monitoring applications. Piezoelectric materials make it possible to exploit the otherwise wasted mechanical energy which is abundant in our environment (e. g. from vibrations, deformations related to movements or air fluxes). Thus, they can contribute to the energy autonomy of those small sensors. In the form of nanowires (NWs), piezoelectric materials offer a high sensibility allowing very small mechanical deformations to be exploited. They are also easy to integrate, even on flexible substrates.In this PhD thesis, we studied the potential of semiconducting piezoelectric NWs, of ZnO or III-V compounds, for the conversion from mechanical to electrical energy. An increasing number of publications have recently bloomed about these nanostructures and promising nanogenerators (NGs) have been reported. However, many questions are still open with, for instance, contradictions that remain between theoretical predictions and experimental observations.Our objective is to better understand the physical mechanisms which rule the piezoelectric response of semiconducting NWs and of the associated NGs. The experimental work was based on the fabrication of VING (Vertical Integrated Nano Generators) devices and their characterization. An electromechanical characterization set-up was built to evaluate the performance and thermal effects of the fabricated NGs under controlled compressive forces. Atomic Force Microscopy (AFM) was also used to evaluate the Young modulus and the effective piezoelectric coefficients of GaN, GaAs and ZnO NWs, as well as of ZnO-based core/shell NWs. Among them, ZnO NWs were grown using chemical bath deposition over rigid (Si) or flexible (stainless steel) substrates and further integrated to build VING piezoelectric generators. The VING design was based on simulations which neglected the effect of free carriers, as done in most publications to date. This theoretical work was further improved by considering the complete coupling between mechanical, piezoelectric and semiconducting effects, including free carriers. By taking into account the surface Fermi level pinning, we were able to reconcile theoretical and experimental observations. In particular, we propose an explanation to the fact that size effects are experimentally observed for NWs with diameters 10 times higher than expected from ab-initio simulations, or the fact that VING response is non-symmetrical according to whether the substrate on which it is integrated is actuated with a convex or concave bending.

Polymer nanofibers used for the construction of triboelectric nanogenerator (TENG) and piezoelectric nanogenerator (PENG) are new and promising technologies for energy recovery. Thanks to the generation of electrical energy based on mechanical movement (deformation), these fibers can find application in the field of self-powered electronic devices. In this work, three nanofibrous structures of materials were prepared by electrostatic spinning: pure polyvinylidene fluoride (PVDF), pure polyamide-6 (PA6) and their mixed combination PVDF / PA6. Non-destructive analyzes such as Raman spectroscopy, FTIR, XPS and electron microscopy were used to study the properties of nanofibers. Analyzes confirmed the positive effect of electrostatic spinning of polymers on the support of the formation of highly polar crystalline -phase in PVDF and , -phase in PA6. The structure arrangement of the nanofibrous material and their defects were observed by scanning electron microscopy (SEM). Furthermore, the contact angle of the wettability of the liquid on the surface was measured for the materials, and the permittivity was measured to monitor the dielectric properties. The described results make the mixed material PVDF / PA6 very promising for further research in the field of nanogenerators and functional textiles.