Dans cette thèse, une étude des microstructures périodiques et de leurs applications à la modulation optique par ondes acoustiques est présentée. Plus spécifiquement, le sujet traite du couplage opto-mécanique dans les cavités des cristaux phoXoniques. Cette étude montre comment la théorie des perturbations fournit un outil efficace d’analyse et de prédiction du comportement de la modulation dans de telles structures. Cette méthode permet également d’économiser du temps de calcul en comparaison aux calculs numériques purs. L'étude théorique de la propagation des ondes dans les milieux périodiques est d'abord introduite, puis les paramètres de l'existence simultanée des bandes interdites photoniques et phononiques sont déduites. Le développement d’une méthode semi-analytique ayant pour but d’analyser l'efficacité du couplage acousto-optique dans les structures périodiques artificielles est ensuite réalisé. La théorie des perturbations est développée jusqu'au 2ème ordre. Celle-ci, associée à des considérations de symétrie, est utilisée pour l'interprétation des résultats. Une illustration de la versatilité de la méthode, basée d'une cavité ponctuelle L1 sur substrat silicium, est présentée. Les résultats obtenus sont en accord avec ceux donnés par une méthode purement numérique. / In this thesis, a study of periodic microstructures and their applications to optical modulation by acoustical waves is presented. More specifically, it deals with opto-mechanical coupling in phoXonic crystal cavities. This study shows how the perturbation theory provides an efficient tool to analyse and predict the behaviour of modulation in such structures. Moreover, when compared to pure numerical ones, this method leads to calculation time saving. The theory of periodic media is first introduced and then we derive the parameters for the simultaneous existence of photonic and phononic bandgaps. We end up by the development of a semi-analytical method to analyze acousto-optical coupling efficiency in artificial periodic structures. The perturbation theory is developed up to 2nd order and is used together with symmetry considerations for interpretations. An illustration of the versatility of the developed method is presented using an L1 point defect cavity on silicon substrate and validated with classical numerical results.

The Metro Ethernet network (MEN) expands the advantages of Ethernet to cover areas wider than LAN. MENs running Ethernet Services as specified by the Metro Ethernet Forum (MEF) are known as Carrier Ethernet Networks (CENs). CENs can cover not only metro areas, but it can expand to cover global areas by connecting multiple MENs. Next-generation CENs are expected to support 100 GbE. With arising technologies for Ultra Long-haul (ULH) networks the bandwidth bottleneck of CENs is shifting to other areas like the transport layer protocol (such as the Transport Control Protocol or TCP) and the chip-to-chip channel capacity found at the network edge, which in general has an electrical backplane. Traditional TCP is well known to have difficulties reaching the full available bandwidth, due to its inefficient AIMD mechanisms under a high-delay-bandwidth-product environment. At the network edge, network equipment with electrical backplanes poses many problems including inductive-capacitive effects that limit its bandwidth. These are the two main issues addressed in this work. To resolve the transport layer issue, this work proposes a transport protocol that fully utilizes the available bandwidth while preserving TCP-friendliness and providing QoS support that is compatible with Ethernet Services. It can guarantee throughputs above the Committed Information Rate (CIR), which is specified in the Service Level Agreement (SLA). To resolve the physical layer limitations, a novel optical coupling technique is examined to encourage the use of optical backplanes for network-edge and core technology. The proposed technique consists of aligning the normal of the laser emission plane, waveguide plane and the normal of the photodetector active region plane with the purpose of reducing optical power loss caused by common methods of light manipulation. By addressing the shortcomings of both Traditional TCP and electrical backplane technology the overall throughput can be significantly increased.

Ce travail de thèse concerne la réalisation et l'analyse des propriétés optiques de nanocristaux de silicium. Ces objets de taille nanométrique possèdent des propriétés optiques remarquables, en particulier de photoluminescence. Les propriétés de confinement quantique qui les caractérisent permettent d'obtenir un signal de luminescence intense dans le domaine du visible. Des composants optoélectroniques et photoniques ont été envisagés à base de nanocristaux de silicium. Les raisons physiques du fort signal de luminescence en revanche sont encore mal comprises. Les nanocristaux de silicium sont élaborés par évaporation. L'élaboration et le recuit thermique de multicouches SiO/SiO2 permet d'obtenir des nanocristaux de silicium de diamètre moyen bien contrôlé. Ceux-ci sont issus de la démixtion de la couche de SiO selon la réaction SiOx --> Si + SiO2. Le contrôle du diamètre des nanocristaux de silicium permet de maîtriser la région spectrale de luminescence dans la région du visible.La première partie de ce travail de thèse vise à isoler un ou quelques nanocristaux de silicium. L'objectif est de remonter à la largeur homogène de ces nano-objets. Dans un premier temps, une étude centrée sur le matériau SiOx est réalisée afin de réduire la densité surfacique de nanocristaux de silicium. Dans un deuxième temps, des moyens de lithographie ultime sont mis en oeuvre afin de réaliser des masques percés de trous de diamètres de l'ordre de la centaine de nanomètre. Des expériences de spectroscopie optique sont réalisées sur ces systèmes.La deuxième partie de ce travail vise à contrôler l'émission spontanée de lumière issue des nanocristaux de silicium. Ceci se fait en couplant les modes électroniques aux modes optiques confinés d'une microcavité optique. Le manuscrit détaille les moyens développés afin d'obtenir une microcavité optique dont les modes optiques puissent se coupler efficacement aux nanocristaux de silicium. Les propriétés optiques de ces systèmes sont finalement analysées. / This work concerns the implementation and analysis of optical properties of silicon nanocrystals. These nanoscaled objects have remarkable optical properties, especially in photoluminescence. The properties of quantum confinement that characterize them allow obtaining an intense luminescence signal in the visible range. Optoelectronic and photonic devices have been proposed based on silicon nanocrystals. The physical reasons of the strong luminescence signal, however, are still poorly understood. The silicon nanocrystals are prepared by evaporation. The preparation and thermal annealing of multilayers SiO/SiO2 leads to silicon nanocrystals with a well controlled average diameter. They are created during the demixing of the SiO layer by the reaction SiO ? Si + SiO2. The control the diameter of the silicon nanocrystals influences directly the spectral region of luminescence in the visible region.The aim of first part of this work is to isolate one or a few silicon nanocrystals. The intent is to trace the homogeneous width of these nano-objects. Initially, a study focusing on the SiOx material is conducted to reduce the surface density of silicon nanocrystals. In a second step, lithography is implemented to make masks with holes with diameters of about one hundred nanometers. Optical spectroscopy experiments were performed on these systems.The second part of this work aims controlling the spontaneous emission of light from silicon nanocrystals. This is done by coupling the electronic transmission to optical modes confined in an optical microcavity. The manuscript describes the methods developed to obtain an optical microcavity whose optical modes can be coupled effectively to the silicon nanocrystals. The optical properties of these systems are finally analyzed

Coupled whispering-gallery-mode (WGM) optical microcavities have been extensively explored to tune the resonant eigenfrequencies and spatial distributions of the optical modes, finding many unique photonic applications in a variety of fields, such as nonlinear optics, laser physics, and non-Hermitian photonics. As one type of WGM microcavities, microtube cavities with axial potential wells support 3D confined resonances by circulating light along the microtube cross-section and axis simultaneously, which offers a promising possibility to explore multidimensional and multichannel optical coupling. In this thesis, the optical coupling of 3D confined resonant modes is investigated in coupled microtube cavities fabricated by self-rolling of prestrained nanomembranes. In the first coupling system, multiple sets of 3D optical modes are generated in a single microtube cavity owing to nanogap induced resonant trajectory splitting. The large overlap of optical fields in the split resonant trajectories triggers strong optical coupling of the 3D confined resonant modes. The spectra anticrossing feature and changing-over of one group of coupled fundamental modes are demonstrated as direct evidence of strong coupling. The spatial optical field distribution of 3D coupling modes was experimentally mapped upon the strong coupling regime, which allows direct observation of the energy transfer process between two hybrid states. Numerical calculations based on a quasi-potential model and the mode detuning process are in excellent agreement with the experimental results. On this basis, monolithically integrated twin microtube cavities are proposed to achieve the collective coupling of two sets of 3D optical modes. Owing to the aligned twin geometries, two sets of 3D optical modes in twin microtubes are spectrally and spatially matched, by which both the fundamental and higher-order axial modes are respectively coupled with each other. Multiple groups of the coupling modes provide multiple effective channels for energy exchange between coupled microcavities, which are illustrated by the measured spatial optical field distributions. The spectral anticrossing and changing-over features of each group of coupled modes are revealed in experiments and calculations, indicating the occurrence of strong coupling. In addition, the simulated 3D mode profiles of twin microcavities confirm the collective strong coupling behavior, which is in good agreement with the experimental results. Our work provides a compact and robust scheme for realizing 3D optical coupling, which is of high interest for promising applications such as 3D non-Hermitian systems and multi-channel optical signal processing.

Current trends in electronic industry, such as Internet of Things (IoT) and Cloud Computing call for high interconnect bandwidth, increased number of active devices and high IO count. Hence the integration of on silicon optical waveguides becomes an alternative approach to cope with the performance demands. The application and fabrication of horizontal (planar) and vertical (Through Silicon Vias - TSVs) optical waveguides are discussed here. Coupling elements are used to connect both waveguide structures. Two micro-structuring technologies for integration of coupling elements are investigated: μ-mirror fabrication by nanoimprint (i) and dicing technique (ii). Nanoimprint technology creates highly precise horizontal waveguides with polymer (refractive index nC = 1.56 at 650 nm) as core. The waveguide ends in reflecting facets aligned to the optical TSVs. To achieve Total Internal Reflection (TIR), SiO2 (nCl = 1.46) is used as cladding. TSVs (diameter 20-40μm in 200-380μm interposer) are realized by BOSCH process1, oxidation and SU-8 filling techniques. To carry out the imprint, first a silicon structure is etched using a special plasma etching process. A polymer stamp is then created from the silicon template. Using this polymer stamp, SU-8 is imprinted aligned to vertical TSVs over Si surface.Waveguide dicing is presented as a second technology to create coupling elements on polymer waveguides. The reflecting mirror is created by 45° V-shaped dicing blade. The goal of this work is to develop coupling elements to aid 3D optical interconnect network on silicon interposer, to facilitate the realization of the emerging technologies for the upcoming years.

The absorptance in vertical nanowire (nw) arrays is typically dominated by three optical phenomena: radial mode resonances, near-field evanescent wave coupling, and Fabry–Perot (F-P) mode resonances. The contribution of these optical phenomena to GaAs, InP and InAs nw absorptance was simulated using the finite element method. The study compared the absorptance between finite and semi-infinite nws with varying geometrical parameters, including the nw diameter (D), array period (P), and nw length (L). Simulation results showed that the resonance peak wavelength of the HE1n radial modes linearly red-shifted with increasing D. The absorptance and spectral width of the resonance peaks increased as L increased, with an absorptance plateau for very long nws that depended on D and P. Near-field coupling between neighbouring nanowires (nws) was observed to increase with increasing diameter to period ratio (D/P). The effect of F-P modes was more pronounced for shorter nws and weakly coupled light. Based on the collective observation of the correlation between nw geometry and optical phenomena in GaAs, InP, and InAs nw arrays, a periodic array of vertical InSb nws was designed for photodetectors in the low-atmospheric absorption window (λ = 3-5 μm) within the mid-wavelength infrared (MWIR) spectrum (λ = 3-8 μm). Simulations, using the finite element method, were implemented to optimize the nw array geometrical parameters (D, P, and L) for high optical absorptance (~0.8), which exceeded that of a thin film of equal thickness. The results further showed that the HE1n resonance wavelengths in InSb nw arrays can be tuned by adjusting D and P, thus enabling multispectral absorption throughout the near infrared (NIR) to MWIR region. Optical absorptance was investigated for a practical photodetector consisting of a vertical InSb nw array embedded in bisbenzocyclobutene (BCB) as a support layer for an ultrathin Ni contact layer. Polarization sensitivity of the photodetector was examined. Lastly, how light flux enters the nw top and sidewalls on HE11 resonance was investigated. / Dissertation / Doctor of Philosophy (PhD)

Ultra-thin solar cells that incorporate earth-abundant and non-toxic materials are promising candidates in the endeavor toward sustainable energy harvesting. Methods to counteract the inevitable low absorption of thinner semiconductor layers are of high interest and have raised considerable attention in the research society. In an attempt to increase the absorption of these types of assemblies, optical coupling effects between the localized surface plasmon resonances (LSPR) of disordered Au nanostructures and a Fabry-Pérot cavity were studied using a previously established absorber/spacer/reflector stack. The disordered Au array was fabricated by evaporating a thin Au film on a substrate with a 55 nm SiO2 dielectric spacer and a 100 nm Al reflecting film, followed by thermal annealing. Nominal Au film thicknesses in the range of 5-25 Å and annealing temperatures of 200-500 oC were investigated. In situ spectroscopic ellipsometry measurements during the subsequent atomic layer deposition (ALD) of tin monosulfide (SnS) allowed analysis of how the optical properties of the SnS/Au absorber layer changed as a function of the growing SnS layer thickness. By employing the Transfer Matrix Method with the estimated optical properties from the in situ analysis, the absorptance of the absorber/spacer/reflector stacks was simulated as a function of the spacer thickness, revealing any signs of the characteristic anti-crossing behavior. It was discovered that a nominal Au film thickness of 25 Å, annealed at 450 oC, and coated with a SnS film of ∼13 nm primed toward the π-phase, resulted in strong optical coupling between the cavity mode and the LSPR. The energy difference at the avoided crossing in the specular reflectance measurement gave an estimated Rabi-splitting energy of 537 meV. This corresponded to about 40% of the original LSPR energy, placing itself within the ultra-strong coupling regime. To evaluate the relevance of the thin-layered structure in photovoltaic applications, more advanced computational methods are required to estimate the useful absorption that occurs in the SnS layer. Nevertheless, these results elucidate the realization of strong optical coupling effects between disordered Au nanostructures and a Fabry-Pérot cavity, and further the possibility of using scalable fabrication methods for this type of ultra-thin absorber/spacer/reflector stack.