Due to aggressive scaling in semiconductor industry, the traditional optical lithography system is facing great challenges printing 32nm and below circuit layouts. Various promising nanolithography techniques have been developed as alternative solutions for patterning sub-32nm feature size. This dissertation studies physical design related optimization problem for these emerging methodologies, mainly focusing on double patterning and electronic beam lithography. Double Patterning Lithography (DPL) decomposes a single layout into two masks, and patterns the chip in two exposure steps. As a benefit, the pitch size is doubled, which enhances the resolution. However, the decomposition process is not a trivial task. Conflict and stitch are its two main manufacturing challenges. First of all, a post-routing layout decomposer has been developed to perform simultaneous conflict and stitch minimization, making use of the integer linear programming and efficient graph reduction techniques. Compared to the previous work which optimizes conflict and stitch separately, the proposed method produces significantly better result. Redundant via insertion, another key yield improvement technique, may increase the complexity in DPL-compliance. It could easily introduce unmanufacturable conflict, while not carefully planned and inserted. Two algo- rithms have been developed to take care of this redundant via DPL-compliance problem in the design side. While design itself is not DPL-friendly, post-routing decomposition may not achieve satisfactory solution quality. An efficient framework of WISDOM has been further proposed to perform wire spreading for better conflict and stitch elimination. The solution quality has been improved in great extent, with a little extra layout perturbations. As another promising solution for sub-22nm, Electronic Beam Lithography (EBL) is a maskless technology which shoots desired patterns directly into a silicon wafer, with charged particle beam. EBL overcomes the diffraction limit of light in current optical lithography system, however, the low throughput becomes its key technical hurdle. The last work of my dissertation formulates and investigates a bin-packing problem for reducing the processing time of EBL. / text

For the microprocessor technology of today and the foreseeable future, multi-core is a key engine that drives performance growth under very tight power dissipation constraints. While previous research has been mostly focused on individual processor cores, there is a compelling need for studying how to efficiently manage shared resources among cores, including physical space, on-chip communication and on-chip storage. In managing physical space, floorplanning is the first and most critical step that largely affects communication efficiency and cost-effectiveness of chip designs. We consider floorplanning with regularity constraints that requires identical processing/memory cores to form an array. Such regularity can greatly facilitate design modularity and therefore shorten design turn-around time. Very little attention has been paid to automatic floorplanning considering regularity constraints because manual floorplanning has difficulty handling the complexity as chip core count increases. In this dissertation work, we investigate the regularity constraints in a simulated-annealing based floorplanner for multi/many core processor designs. A simple and effective technique is proposed to encode the regularity constraints in sequence-pair, which is a classic format of data representation in automatic floorplanning. To the best of our knowledge, this is the first work on regularity-constrained floorplanning in the context of multi/many core processor designs. On-chip communication and shared last level cache (LLC) play a role that is at least as equally important as processor cores in terms of chip performance and power. This dissertation research studies dynamic voltage and frequency scaling for on-chip network and LLC, which forms a single uncore domain of voltage and frequency. This is in contrast to most previous works where the network and LLC are partitioned and associated with processor cores based on physical proximity. The single shared domain can largely avoid the interfacing overhead across domain boundaries and is practical and very useful for industrial products. Our goal is to minimize uncore energy dissipation with little, e.g., 5% or less, performance degradation. The first part of this study is to identify a metric that can reflect the chip performance determined by uncore voltage/frequency. The second part is about how to monitor this metric with low overhead and high fidelity. The last part is the control policy that decides uncore voltage/frequency based on monitoring results. Our approach is validated through full system simulations on public architecture benchmarks.

In this thesis, we proposed an intermediate sub-process between placement and routing stage in physical design. The algorithm is for generating layer guidance for post-placement optimization technique especially buffer insertion. This issue becomes critical in nowadays VLSI chip design due to the factor of timing, congestion, and increasingly non-uniform parasitic among different metal layers. Besides, as a step before routing, this layer planning algorithm accounts for routability by considering minimized overlap area between different nets. Moreover, layer directive information which is a crucial concern in industrial design is also considered in the algorithm. The core problem is formulated as nonlinear programming problem which is composed of objective function and constraints. The problem is further solved by conjugate gradient method. The whole algorithm is implemented by C++ under Linux operating system and tested on ISPD2008 Global Routing Contest Benchmarks. The experiment results are shown in the end of this thesis and confirm the effectiveness of our approach especially in routability aspect.

Indiana University-Purdue University Indianapolis (IUPUI) / In this thesis, we investigated the 7 nm FinFET technology for its delay-power product performance. In our study, we explored the ASAP7 library from Arizona State University, developed in collaboration with ARM Holdings. The FinFET technology was chosen since it has a subthreshold slope of 60mV/decade that enables cells to function at 0.7V supply voltage at the nominal corner. An emphasis was focused on characterizing the Non-Ideal effects, delay variation, and power for the FinFET device. An exhaustive analysis of the INVx1 delay variation for different operating conditions was also included, to assess the robustness. The 7nm FinFET device was then employed into 6T SRAM cells and 16 function ALU. The SRAM cells were approached with advanced multi-corner stability evaluation. The system-level architecture of the ALU has demonstrated an ultra-low power system operating at 1 GHz clock frequency.

O tempo de propagação dos sinais nas interconexões é um fator dominante para atingir a frequência de operação desejada em circuitos nanoCMOS. Durante a síntese física, o posicionamento visa espalhar as células na área disponível enquanto otimiza uma função custo obedecendo aos requisitos do projeto. Portanto, o posicionamento é uma etapa chave na determinação do comprimento total dos fios e, consequentemente, na obtenção da frequência de operação desejada. Técnicas de posicionamento incremental visam melhorar a qualidade de uma dada solução. Neste trabalho, são propostas duas abordagens para o posicionamento incremental guiado à tempos de propagação através de suavização de caminhos e balanceamento de redes. Ao contrário dos trabalhos existentes na literatura, a formulação proposta inclui um modelo de atraso na função quadrática. Além disso, o posicionamento quadrático é aplicado incrementalmente através de uma operação, chamada de neutralização, que ajuda a manter as qualidades da solução inicial. Em ambas as técnicas, o comprimento quadrático de fios é ponderado pelo drive strength das células e a criticalidade dos pinos. Os resultados obtidos superam o estado-da-arte em média 9,4% e 7,6% com relação ao WNS e TNS, respectivamente. / The interconnection delay is a dominant factor for achieving timing closure in nanoCMOS circuits. During physical synthesis, placement aims to spread cells in the available area while optimizing an objective function w.r.t. the design constraints. Therefore, it is a key step to determine the total wirelength and hence to achieve timing closure. Incremental placement techniques aim to improve the quality of a given solution. Two quadratic approaches for incremental timing driven placement to mitigate late violations through path smoothing and net load balancing are proposed in this work. Unlike previous works, the proposed formulations include a delay model into the quadratic function. Quadratic placement is applied incrementally through an operation called neutralization which helps to keep the qualities of the initial placement solution. In both techniques, the quadratic wirelength is pondered by cell’s drive strengths and pin criticalities. The final results outperform the state-of-art by 9.4% and 7.6% on average for WNS and TNS, respectively.

The main goal of this thesis will be the design and implementation of a 2048-point FFT on an FPGA through the use of VHDL code.The FFT will use a butterfly Radix-2 architecture with focus on the comparison of the parameters between the system with different Worlengths, Coefficient Wordlengths and Symbol Error rates as well as different modulation types, comparing 64QAM and 256QAM for the 5Gsystem.This implementation will replace an FFT function block in a Matlab based open source 5G NR simulator based on the 3GPP 15 standard and simulate spectrum, MSE payload,and SER performance.

This dissertation reports on studies of the application of lexicographic graph searches to solve problems in FPGA detailed routing. Our contributions include the derivation of iteration limits for scalar implementations of negotiation congestion for standard floating point types and the identification of pathological cases for path choice. In the study of the routability-driven detailed FPGA routing problem, we show universal detailed routability is NP-complete based on a related proof by Lee and Wong. We describe the design of a lexicographic composition operator of totally-ordered monoids as path cost metrics and show its optimality under an adapted A* search. Our new router, CornNC, based on lexicographic composition of congestion and wirelength, established a new minimum track count for the FPGA Place and Route Challenge. For the problem of long-path timing-driven FPGA detailed routing, we show that long-path budgeted detailed routability is NP-complete by reduction to universal detailed routability. We generalise the lexicographic composition to any finite length and verify its optimality under A* search. The application of the timing budget solution of Ghiasi et al. is used to solve the long-path timing budget problem for FPGA connections. Our delay-clamped spiral lexicographic composition design, SpiralRoute, ensures connection based budgets are always met, thus achieves timing closure when it successfully routes. For 113 test routing instances derived from standard benchmarks, SpiralRoute found 13 routable instances with timing closure that were unroutable by a scalar negotiated congestion router and achieved timing closure in another 27 cases when the scalar router did not, at the expense of increased runtime. We also study techniques to improve SpiralRoute runtimes, including a data structure of a trie augmented by data stacks for minimum element retrieval, and the technique of step tomonoid elimination in reducing the retrieval depth in a trie of stacks structure.

The main objective of this dissertation is to explore and develop computer-aided-design (CAD) methodologies and optimization techniques for reliability, timing performance, and power consumption of through-silicon-via(TSV)-based and monolithic 3D IC designs. The 3D IC technology is a promising answer to the device scaling and interconnect problems that industry faces today. Yet, since multiple dies are stacked vertically in 3D ICs, new problems arise such as thermal, power delivery, and so on. New physical design methodologies and optimization techniques should be developed to address the problems and exploit the design freedom in 3D ICs. Towards the objective, this dissertation includes four research projects. The first project is on the co-optimization of traditional design metrics and reliability metrics for 3D ICs. It is well known that heat removal and power delivery are two major reliability concerns in 3D ICs. To alleviate thermal problem, two possible solutions have been proposed: thermal-through-silicon-vias (T-TSVs) and micro-fluidic-channel (MFC) based cooling. For power delivery, a complex power distribution network is required to deliver currents reliably to all parts of the 3D IC while suppressing the power supply noise to an acceptable level. However, these thermal and power networks pose major challenges in signal routability and congestion. In this project, a co-optimization methodology for signal, power, and thermal interconnects in 3D ICs is presented. The goal of the proposed approach is to improve signal, thermal, and power noise metrics and to provide fast and accurate design space explorations for early design stages. The second project is a study on 3D IC partition. For a 3D IC, the target circuit needs to be partitioned into multiple parts then mapped onto the dies. The partition style impacts design quality such as footprint, wirelength, timing, and so on. In this project, the design methodologies of 3D ICs with different partition styles are demonstrated. For the LEON3 multi-core microprocessor, three partitioning styles are compared: core-level, block-level, and gate-level. The design methodologies for such partitioning styles and their implications on the physical layout are discussed. Then, to perform timing optimizations for 3D ICs, two timing constraint generation methods are demonstrated that lead to different design quality. The third project is on the buffer insertion for timing optimization of 3D ICs. For high performance 3D ICs, it is crucial to perform thorough timing optimizations. Among timing optimization techniques, buffer insertion is known to be the most effective way. The TSVs have a large parasitic capacitance that increases the signal slew and the delay on the downstream. In this project, a slew-aware buffer insertion algorithm is developed that handles full 3D nets and considers TSV parasitics and slew effects on delay. Compared with the well-known van Ginneken algorithm and a commercial tool, the proposed algorithm finds buffering solutions with lower delay values and acceptable runtime overhead. The last project is on the ultra-high-density logic designs for monolithic 3D ICs. The nano-scale 3D interconnects available in monolithic 3D IC technology enable ultra-high-density device integration at the individual transistor-level. The benefits and challenges of monolithic 3D integration technology for logic designs are investigated. First, a 3D standard cell library for transistor-level monolithic 3D ICs is built and their timing and power behavior are characterized. Then, various interconnect options for monolithic 3D ICs that improve design quality are explored. Next, timing-closed, full-chip GDSII layouts are built and iso-performance power comparisons with 2D IC designs are performed. Important design metrics such as area, wirelength, timing, and power consumption are compared among transistor-level monolithic 3D, gate-level monolithic 3D, TSV-based 3D, and traditional 2D designs.

A VLSI chip can today contain hundreds of millions transistors and is expected to contain more than 1 billion transistors in the next decade. In order to handle this rapid growth in integration technology, the design procedure is therefore divided into a sequence of design steps. Circuit layout is the design step in which a physical realization of a circuit is obtained from its functional description. Global routing is one of the key subproblems of the circuit layout which involves finding an approximate path for the wires connecting the elements of the circuit without violating resource constraints. The global routing problem is NP-hard, therefore, heuristics capable of producing high quality routes with little computational effort are required as we move into the Deep Sub-Micron (DSM) regime. In this thesis, different approaches for global routing problem are first reviewed. The advantages and disadvantages of these approaches are also summarized. According to this literature review, several mathematical programming based global routing models are fully investigated. Quality of solution obtained by these models are then compared with traditional Maze routing technique. The experimental results show that the proposed model can optimize several global routing objectives simultaneously and effectively. Also, it is easy to incorporate new objectives into the proposed global routing model. To speedup the computation time of the proposed ILP based global router, several hierarchical methods are combined with the flat ILP based global routing approach. The experimental results indicate that the bottom-up global routing method can reduce the computation time effectively with a slight increase of maximum routing density. In addition to wire area, routability, and vias, performance and low power are also important goals in global routing, especially in deep submicron designs. Previous efforts that focused on power optimization for global routing are hindered by excessively long run times or the routing of a subset of the nets. Accordingly, a power efficient multi-pin global routing technique (PIRT) is proposed in this thesis. This integer linear programming based techniques strives to find a power efficient global routing solution. The results indicate that an average power savings as high as 32\% for the 130-nm technology can be achieved with no impact on the maximum chip frequency.

A VLSI chip can today contain hundreds of millions transistors and is expected to contain more than 1 billion transistors in the next decade. In order to handle this rapid growth in integration technology, the design procedure is therefore divided into a sequence of design steps. Circuit layout is the design step in which a physical realization of a circuit is obtained from its functional description. Global routing is one of the key subproblems of the circuit layout which involves finding an approximate path for the wires connecting the elements of the circuit without violating resource constraints. The global routing problem is NP-hard, therefore, heuristics capable of producing high quality routes with little computational effort are required as we move into the Deep Sub-Micron (DSM) regime. In this thesis, different approaches for global routing problem are first reviewed. The advantages and disadvantages of these approaches are also summarized. According to this literature review, several mathematical programming based global routing models are fully investigated. Quality of solution obtained by these models are then compared with traditional Maze routing technique. The experimental results show that the proposed model can optimize several global routing objectives simultaneously and effectively. Also, it is easy to incorporate new objectives into the proposed global routing model. To speedup the computation time of the proposed ILP based global router, several hierarchical methods are combined with the flat ILP based global routing approach. The experimental results indicate that the bottom-up global routing method can reduce the computation time effectively with a slight increase of maximum routing density. In addition to wire area, routability, and vias, performance and low power are also important goals in global routing, especially in deep submicron designs. Previous efforts that focused on power optimization for global routing are hindered by excessively long run times or the routing of a subset of the nets. Accordingly, a power efficient multi-pin global routing technique (PIRT) is proposed in this thesis. This integer linear programming based techniques strives to find a power efficient global routing solution. The results indicate that an average power savings as high as 32\% for the 130-nm technology can be achieved with no impact on the maximum chip frequency.