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The main goal of this work is to introduce with the basic technologies of manufacturing MEMS (Micro-electro-mechanical-systems). Further there is mentioned properties and manufacturing of CNT (Carbon nanotubes), used in manufacturing of capacitance pressure sensor.

The master’s thesis deals with the theory of thin film technology, especially creating these layers. The work includes the distribution of vacuum deposition techniques for physical (PVD) and chemical (CVD). The main aim is to create a theme in different ways of implementation by using magnetron sputtering device, and these motives evaluated in terms of the quality of sputtering.

Dehnungssensoren werden zur Überwachung von sicherheitsrelevanten Bauteilen, besonders in Bauteilen aus faserverstärkten Polymermatrixverbundwerkstoffen eingesetzt. Durch deren Integration in das Bauteilinnere werden sie vor schädigenden mechanischen sowie korrosiven Einwirkungen geschützt. Dies gewährleistet eine zuverlässige sowie dauerhafte Funktion. Verschiedene Ansätze zur Weiterentwicklung integrierbarer Dehnungssensoren werden international untersucht. Die Verringerung des Sensordurchmessers auf Abmaße im Bereich des Durchmessers von Verstärkungsfasern ist dabei ein bedeutendes Entwicklungsziel. Insbesondere bei der Integration in Bauteile aus faserverstärkten Kunststoffen sorgen zum Durchmesser von Fasern vergleichbare Sensordurchmesser für eine optimale Sensoranbindung. Die Bildung von Harznestern sowie schwächender Unstetigkeiten kann mittels dünner Sensoren verhindert werden. Dies gewährleistet eine artefaktefreie Dehnungsmessung. Drei verschiedene Ansätze für neuartige Dehnungssensoren mit kleinem Querschnitt wurden in dieser Arbeit untersucht. / Strain sensors are used for structural health monitoring issues, certainly in parts with high safety requirements made of fibre-reinforced plastic composites. The integration of these sensors inside the parts protects them against any mechanical and corrosive impact. The sensor functionality can be enhanced by integration. There is a lot of international research effort to further develop integratable strain sensors. Different approaches are currently pursued. This thesis presents the results of investigations on three different approaches for novel strain sensors. The main goal of these investigations was to minimise the sensor diameter down to the diameter of reinforcing fibres. The small diameter allows for an optimum and artefact free integration of the sensors. The formation of resin nests and notches to the material structure can be prevented by integrating sensor with a smaller diameter. The strain measurement and monitoring is enhanced and more reliable then.

Dehnungssensoren werden zur Überwachung von sicherheitsrelevanten Bauteilen, besonders in Bauteilen aus faserverstärkten Polymermatrixverbundwerkstoffen eingesetzt. Durch deren Integration in das Bauteilinnere werden sie vor schädigenden mechanischen sowie korrosiven Einwirkungen geschützt. Dies gewährleistet eine zuverlässige sowie dauerhafte Funktion. Verschiedene Ansätze zur Weiterentwicklung integrierbarer Dehnungssensoren werden international untersucht. Die Verringerung des Sensordurchmessers auf Abmaße im Bereich des Durchmessers von Verstärkungsfasern ist dabei ein bedeutendes Entwicklungsziel. Insbesondere bei der Integration in Bauteile aus faserverstärkten Kunststoffen sorgen zum Durchmesser von Fasern vergleichbare Sensordurchmesser für eine optimale Sensoranbindung. Die Bildung von Harznestern sowie schwächender Unstetigkeiten kann mittels dünner Sensoren verhindert werden. Dies gewährleistet eine artefaktefreie Dehnungsmessung. Drei verschiedene Ansätze für neuartige Dehnungssensoren mit kleinem Querschnitt wurden in dieser Arbeit untersucht. / Strain sensors are used for structural health monitoring issues, certainly in parts with high safety requirements made of fibre-reinforced plastic composites. The integration of these sensors inside the parts protects them against any mechanical and corrosive impact. The sensor functionality can be enhanced by integration. There is a lot of international research effort to further develop integratable strain sensors. Different approaches are currently pursued. This thesis presents the results of investigations on three different approaches for novel strain sensors. The main goal of these investigations was to minimise the sensor diameter down to the diameter of reinforcing fibres. The small diameter allows for an optimum and artefact free integration of the sensors. The formation of resin nests and notches to the material structure can be prevented by integrating sensor with a smaller diameter. The strain measurement and monitoring is enhanced and more reliable then.

High-performance materials such as stainless steels and nickel based super alloys are widely used in demanding applications where high mechanical and thermal properties are required. The applications of super alloys are mainly found in jet engines, power plants and gas turbines demanding high fatigue strength, corrosion and oxidation resistance as well as wear resistant properties. In order to use them, they go through various machining processes such as milling, turning, cutting, polishing etc. until the final product is achieved. Modern manufacturing industries employs various machining tools and technologies to improve the machining process of heat resistant super alloys. However, there are still challenges which needs to be addressed. Among them, adhesive wear of the machining tools is one of the main wear mechanism during the tribological interaction of tool and workpiece, preventing them to achieve the desired quality and surface finish of the end product. Moreover, it damages the tool reducing its lifecycle and in return, increasing the production cost. Among the cutting tools tungsten carbide (WC/Co) tools coated with TiAlN coating due to their good high temperature performance are extensively used. Nonetheless, these coatings still face issue like adhesive wear, abrasion, oxidation at higher temperature damaging the tools and subsequent machining. Therefore, it is imperative to understand the initiation mechanism of adhesive wear during the tribological interaction of super alloys and coated cutting tool material. In this research work, the tribological response of two coatings deposited by physical vapour deposition (PVD), having the composition Ti60Al40N and Ti40Al60N have been studied against two super alloys material, i.e. Inconel 718 and stainless steel 316L. A high temperature SRV (Schwingung (Oscillating), Reibung (Friction), Verschleiß (Wear)) reciprocation friction and wear test set up was employed to investigate the friction behaviour, wear rate and dominant wear mechanisms.  For Ti60Al40N coating, the experimental results revealed that generally, friction increases in case of sliding against Inconel 718 up to 400 °C and drops at 760 °C. A high wear volume at room temperature and a decrease to a minimum at 760 °C has been observed for Inconel 718. On the other side, Stainless steel 316L (SS 316L) faces a continuous rise in friction coefficient with highest value at 760 °C during sliding against Ti60Al40N coating. Wear is highest at 400 °C for SS 316L pin. The worn surfaces shows that both workpiece materials experience increase in material transfer due to adhesive wear with rise in temperature. At 400 °C, adhesion is the primary wear mechanism for both workpiece materials. A further rise in temperature to 760 °C promotes the adhesive wear through oxides formation on both material surfaces.  Similarly, Ti40Al60N coating shows the same friction behaviour with change in average steady state friction values for both material of Inconel 718 and SS 316L. Both workpiece materials responds in a similar way to wear volume loss, i.e. lowest at room temperature and highest at 760 °C. For Inconel 718, transfer of coating constituents on to the Inconel 718 pin surface was detected and associated with coating rupture and peeling, exacerbating with rise in temperature. Adhesion, abrasion, and oxidation are primary wear mechanisms at 400 °C and 760 °C. For SS 316L, coating transfer only happen at 400 °C. No damage of coating at 40 °C, a complete damage at 400 °C, and formation of dense porous oxides layers at 760 °C have been noticed. At 400 °C, adhesion, abrasion, and chipping while at 760 °C, adhesion, three body abrasion, ploughing and oxidation are the main wear mechanisms.

No presente trabalho foi avaliado o efeito da microestrutura e da capacidade de suportar carregamento de camadas nitretadas produzidas em aços ferramenta AISI H13 e AISI D2 sobre a aderência e a resistência ao desgaste microabrasivo de revestimentos de TiN-PVD. Em cada um desses aços, foram produzidas camadas nitretadas de diferentes estruturas e espessuras, e foram determinadas experimentalmente as curvas potencial início de formação de camada branca, para a nitretação a 520oC. Para o aço ferramenta AISI H13, o emprego de tempos de pré-tratamento de nitretação mais prolongados ( aproximadamente 11 h) foi necessário para aprofundar a camada nitretada e, conseqüentemente, aumentar a capacidade de suportar carregamento dos revestimentos, evitando a formação de bordas que provocam o lascamento e a escamação das camadas de TiN. Observou-se que esse tipo de falha persiste se a zona de endurecimento for pouco profunda, uma vez que a transição de propriedades mecânicas da camada de TiN para o núcleo não nitretado continua abrupta e a capacidade de suportar carregamento da camada nitretada ainda é baixa. Por outro lado, curtos tempos de nitretação (aproximadamente 42 min.) foram suficientes para aumentar a aderência das camadas de TiN ao aço ferramenta D2, pois o núcleo não nitretado desse aço possui uma capacidade de suportar carregamento razoável. Observou-se que a resistência ao desgaste microabrasivo e a aderência dos revestimentos são prejudicadas com a presença de uma camada preta na interface camada de TiN/camada nitretada. Quando a superfície dos revestimentos é carregada, falhas do tipo “casca de ovo" facilmente ocorrem. / In this work, the influence of both the microstructure and the load-bearing capacity of nitrided layers, formed on top of AISI D2 and AISI H13 tool steels, on adhesion and wear resistance of PVD-TiN coatings was studied. The threshold nitriding potential curves for the above mentioned steels and the optimum conditions of the pre-treatments which increased the adhesion as well as the wear resistance of the PVD-TiN were determined experimentally. By using longer nitriding times (about 11 h) and lower nitrogen contents in the gas mixture (about N2-5%vol.), it was possible to minimize the pile-up degree of the TiN/H13 nitrided substrates and, consequently, the occurrence of coatings chipping. This flaw persists when the nitrided layer is thin, due to an abrupt transition of mechanical properties at the TiN coating / steel core interface. Shorter nitriding times (about 42 min.) and lower nitrogen contents (about N2-5%vol.), on the other hand, are sufficient to guarantee a better adhesion of TiN coatings on AISI D2 tool steel, as the core of such steel possesses relatively better load-bearing capacity than the AISI H13 tool steel. The presence of a black layer at the TiN/nitrided layer interface was observed in all coatings deposited over nitrided layers produced above the threshold nitriding potential curves. This layer affects adversely the wear resistance and the adhesion of the TiN coatings. When higher loads are applied on the coated surface, “egg shell" type flaws easily occur.

No presente trabalho foi avaliado o efeito da microestrutura e da capacidade de suportar carregamento de camadas nitretadas produzidas em aços ferramenta AISI H13 e AISI D2 sobre a aderência e a resistência ao desgaste microabrasivo de revestimentos de TiN-PVD. Em cada um desses aços, foram produzidas camadas nitretadas de diferentes estruturas e espessuras, e foram determinadas experimentalmente as curvas potencial início de formação de camada branca, para a nitretação a 520oC. Para o aço ferramenta AISI H13, o emprego de tempos de pré-tratamento de nitretação mais prolongados ( aproximadamente 11 h) foi necessário para aprofundar a camada nitretada e, conseqüentemente, aumentar a capacidade de suportar carregamento dos revestimentos, evitando a formação de bordas que provocam o lascamento e a escamação das camadas de TiN. Observou-se que esse tipo de falha persiste se a zona de endurecimento for pouco profunda, uma vez que a transição de propriedades mecânicas da camada de TiN para o núcleo não nitretado continua abrupta e a capacidade de suportar carregamento da camada nitretada ainda é baixa. Por outro lado, curtos tempos de nitretação (aproximadamente 42 min.) foram suficientes para aumentar a aderência das camadas de TiN ao aço ferramenta D2, pois o núcleo não nitretado desse aço possui uma capacidade de suportar carregamento razoável. Observou-se que a resistência ao desgaste microabrasivo e a aderência dos revestimentos são prejudicadas com a presença de uma camada preta na interface camada de TiN/camada nitretada. Quando a superfície dos revestimentos é carregada, falhas do tipo “casca de ovo” facilmente ocorrem. / In this work, the influence of both the microstructure and the load-bearing capacity of nitrided layers, formed on top of AISI D2 and AISI H13 tool steels, on adhesion and wear resistance of PVD-TiN coatings was studied. The threshold nitriding potential curves for the above mentioned steels and the optimum conditions of the pre-treatments which increased the adhesion as well as the wear resistance of the PVD-TiN were determined experimentally. By using longer nitriding times (about 11 h) and lower nitrogen contents in the gas mixture (about N2-5%vol.), it was possible to minimize the pile-up degree of the TiN/H13 nitrided substrates and, consequently, the occurrence of coatings chipping. This flaw persists when the nitrided layer is thin, due to an abrupt transition of mechanical properties at the TiN coating / steel core interface. Shorter nitriding times (about 42 min.) and lower nitrogen contents (about N2-5%vol.), on the other hand, are sufficient to guarantee a better adhesion of TiN coatings on AISI D2 tool steel, as the core of such steel possesses relatively better load-bearing capacity than the AISI H13 tool steel. The presence of a black layer at the TiN/nitrided layer interface was observed in all coatings deposited over nitrided layers produced above the threshold nitriding potential curves. This layer affects adversely the wear resistance and the adhesion of the TiN coatings. When higher loads are applied on the coated surface, “egg shell” type flaws easily occur.