京都大学 / 0048 / 新制・課程博士 / 博士(工学) / 甲第21270号 / 工博第4498号 / 新制||工||1700(附属図書館) / 京都大学大学院工学研究科電子工学専攻 / (主査)教授 野田 進, 教授 藤田 静雄, 教授 川上 養一 / 学位規則第4条第1項該当 / Doctor of Philosophy (Engineering) / Kyoto University / DGAM

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Long-wavelength (1.3-μm) vertical-cavity surface-emitting lasers (VCSELs) are of great interest as low-cost, high performance light sources for fiber-optic metro and access networks. During recent years the main development effort in this field has been directed towards all epitaxial GaAs-based structures by employing novel active materials. Different active region candidates for GaAs-based 1.3-μm VCSELs such as GaInNAs/GaAs QWs, GaAsSb QWs or InAs/InGaAs QDs have been investigated. However, the difficult growth and materials properties of these systems have so far hampered any real deployment of the technology. More recently, a new variety of VCSELs have been developed at KTH as based on highly strained InGaAs QWs and negative gain cavity detuning to reach the 1.3-μm wavelength window. The great benefit of this approach is that it is fully compatible with standard materials and processing methods. The aim of this thesis is to investigate long-wavelength (1.3-μm) VCSELs using ~1.2-μm In0.4GaAs/GaAs Multiple Quantum Wells (MQWs). A series of QW structures, DBR structures and laser structures, including VCSELs and Broad Area lasers (BALs) were grown by metal-organic vapor phase epitaxy (MOVPE) and characterized by various techniques: Photoluminescence (PL), high-resolution x-ray diffraction (XRD), atomic force microscopy (AFM), high accuracy reflectance measurements as well as static and dynamic device characterization. The work can be divided into three parts. The first part is dedicated to the optimization and characterization of InGaAs/GaAs QWs growth for long wavelength and strong luminescence. A strong sensitivity to the detailed growth conditions, such as V/III ratio and substrate misorientation is noted. Dislocations in highly strained InGaAs QW structure and Sb as surfactant assisted in InGaAs QW growth are also discussed here. The second part is related to the AlGaAs/GaAs DBR structures. It is shown that the InGaAs VCSELs with doped bottom DBRs have significantly lower slope efficiency, output power and higher threshold current. By a direct study of buried AlGaAs/GaAs interfaces, this is suggested to be due to doping-enhanced Al-Ga hetero-interdiffusion. In the third part, singlemode, high-performance 1.3-μm VCSELs based on highly strained InGaAs QWs are demonstrated. Temperature stable singlemode performance, including mW-range output power and 10 Gbps data transmission, is obtained by an inverted surface relief technique. / QC 20101126

As the switching rates in electronic and optoelectronic devices are pushed to even higher frequencies, it is crucial to probe carrier dynamics in semiconductors on femtosecond timescales. Time resolved spectroscopy is an excellent tool to probe the relaxation dynamics of photoexcited carriers; where after the initial photoexcitation, the nonequilibrium population of electrons and holes relax by a series of scattering processes including carrier-carrier and carrier-phonon scattering. Probing carrier and spin relaxation dynamics in InAs and InSb based narrow-gap semiconductors is crucial to understand the different scattering mechanisms related to the systems. Similar studies in InSb quantum wells are also intriguing, especially for their scientifically unique features (such as small effective mass, large g-factor etc). Our time resolved techniques demonstrated tunability of carrier and spin dynamics which might be important for charge and spin based devices. The samples studied in this work were provided by the groups of Prof. Wessels (Northwestern University) and Prof. Santos (University of Oklahoma). Theoretical calculations were performed by the group of Prof. Stanton (University of Florida). The THz measurements were performed at Wright State University in collaboration with Prof. Jason Deibel. This work has been supported by the National Science Foundation through grants Career Award DMR-0846834, AFOSR Young Investigator Program 06NE231. A portion of this work was performed at the National High Magnetic Field Laboratory (in collaboration with Dr. Stephen McGill), which is supported by National Science Foundation Cooperative Agreement No. DMR-0654118, the State of Florida, and the U.S. Department of Energy. / Ph. D.

The effect of hot phonons and the influence of macroscopic polarization-induced built-in fields on the performance of III-V nitride devices are investigated. Self-heating due to hot phonons is analyzed in AlGaN/GaN high electron mobility transistors (HEMTs). Thermal transport by acoustic phonons in the diffusive limit is modeled using a two-dimensional lattice heat equation. The effect of macroscopic polarization charges on the operation of blue and green InGaN-based quantum well structures is presented. To characterize these structures, the electronic part of the two-dimensional quantum well laser simulator MINILASE is extended to include nitride bandstructure and material models. A six-band k.p theory for strained wurtzite materials is used to compute the valence subbands. Spontaneous and piezoelectric polarization charges at the interfaces are included in the calculations, and their effects on the device performance are described. Additionally, k.p Hamiltonian for crystal growth directions that minimize the polarization-induced built-in fields are modeled, and valence band dispersion for the non-polar and semi-polar planes are also calculated. Finally, a design parameter subspace is explored to suggest epitaxial layer structures which maximize gain spectral density at a target wavelength for green InxGa1-xN-based single quantum well active regions. The dependence of the fundamental optical transition energy on the thickness and composition of barriers and wells is discussed, and the sensitivity of gain spectral density to design parameters, including the choice of buffer layer material, is investigated.

L’oxyde de zinc est un matériau prometteur pour la réalisation de composants optoélectroniques dans la gamme des émetteurs UV. Pour cela il faut développer des hétéro-structures tel que des puits quantiques ZnO/(Zn, Mg)O afin de mieux contrôler les propriétés d’émissions. Ce travail porte sur la caractérisation de telles structures crûes sur le plan A, surface non polaire, de ZnO massif. A partir de mesures de spectroscopie optiques (réflectivité, photoluminescence en excitation continue et photoluminescence résolue en temps) nous avons déterminé les différents phénomènes physiques mis en jeux lors de la recombinaison radiative des porteurs dans ces puits quantiques. Dans un premier temps, nous avons étudié en détail l’émission des photons par les barrières de (Zn, Mg)O. Grace à l’étude en température nous avons montré que l’émission optique de la barrière correspond à la recombinaison de paires électron trou en interactions (excitons) qui sont à basses températures localisées dans des fluctuations de potentiel. Sous l’effet de la température ils se délocalisent et se recombinent comme des exciton libres. L’étude détaillée des déclins temporels de photoluminescence nous à permis de démontrer que nous avions affaire à deux états excitoniques différents qui présentent des dynamiques de recombinaisons différentes. Un modèle est proposé pour rendre compte des différentes observations. La partie principale de ce travail porte sur le comportement des excitons dans le puits quantique. Le résultat majeur de cette étude est la démonstration expérimentale que dans ce cas des complexes excitoniques, ici des trions chargé négativement (exciton en interaction avec un électron libre), se forment à basse température et sont responsable de la luminescence observée. De plus, en variant la densité d’excitation nous avons montré que se former également des bi-excitons (pseudo particule formée de deux exciton en interactions). Le comportement en température de la photoluminescence obtenue dans différente conditions d’excitation à permis de démontrer que sous l’effet de l’énergie thermique les complexes excitoniques se dissociés pour créer des excitons libres. Des mesures en fonction de la polarisation de la lumière émise et de la température ont permis également d’étudier l’état C de l’exciton dans le puits. Les dynamiques de recombinaison des différents complexes excitoniques sont examinées en fonction de la température. / The zinc oxide is a promising material for the realization of optoelectronic devices in the blue-UV range. For this, it is necessary to develop hetero-structures such as ZnO / (Zn, Mg) O quantum wells in order to have better control of the properties of emissions. This work concerns the characterization of such structures grown on the A-plane (non-polar surface) of bulk ZnO. From optical spectroscopies measurements (reflectivity, continuous wave and time-resolved photoluminescence) we determined the various physical phenomena involve during the radiative recombination of the carriers in these quantum wells. At first, we studied in detail the emission of photons by the barriers of (Zn, Mg) O. Thanks to the study in temperature we showed that the optical emission of the barrier corresponds to the recombination of electron hole pairs in interactions (excitons), which are at low temperatures localized in the fluctuations of the potential. Under the influence of the temperature they delocalize and recombine as free exciton. From the detailed study of the temporal decays of photoluminescence we can demonstrate that we deal with two different excitonic states, which present different dynamics of recombination. A model is proposed that explain the various observations. The main part of this work concerns the behavior of the excitons in the quantum well. The major result is the experimental demonstration that excitonics complexes are formed at low temperature, negatively charged trion (exciton in interaction with a free electron), in this system and they are responsible for the observed luminescence. Furthermore, by varying the density of excitation we showed that biexcitons are also form (pseudo-particles formed by two excitons in interactions). The behavior in temperature of the photoluminescence obtained in different conditions of excitation demonstrates that under the influence of the thermal energy the exitonic complexes are broken to create free excitons. Measures according to the polarization of the emitted light and the temperature also allowed studying the C state of the exciton in the quantum well. The dynamics of recombination of the various excitonics complexes are examined according to the temperature.

Since a decade, spintronics and related physics have attracted considerable attention due to the massive research conducted in these areas. The main reason for growing interest in these fields is the expectation to use the electrons spin instead of or in addition to the charge for the applications in spin-based electronics, quantum information, and quantum computation. A prime concern for these spins to be possible candidates for carrying information is the ability to coherently control them on the time scales much faster than the decoherence times. This thesis reports on the spin dynamics in two-dimensional electron gases hosted in artificially grown III-V semiconductor quantum wells. Here we present a series of experiments utilizing the techniques to optically control the spin polarization triggered by either optical or electrical methods i.e. well known pump-probe technique and current-induced spin polarization. We investigated the spin coherence in high mobility dense two-dimensional electron gas confined in GaAs/AlGaAs double and triple quantum wells, and, it\'s dephasing on the experimental parameters like applied magnetic field, optical power, pump-probe delay and excitation wavelength. We have also studied the large spin relaxation anisotropy and the influence of sample temperature on the long-lived spin coherence in triple quantum well structure. The anisotropy was studied as a function sample temperature, pump-probe delay time, and excitation power, where, the coherent spin dynamics was measured in a broad range of temperature from 5 K up to 250 K using time-resolved Kerr rotation and resonant spin amplification. Additionally, the influence of Al concentration on the spin dynamics of AlGaAs/AlAs QWs was studied. Where, the composition engineering in the studied structures allows tuning of the spin dephasing time and electron g-factor. Finally, we studied the macroscopic transverse drift of long current-induced spin coherence using non-local Kerr rotation measurements, based on the optical resonant amplification of the electrically-induced polarization. Significant spatial variation of the electron g-factor and the coherence times in the nanosecond scale transported away half-millimeter distances in a direction transverse to the applied electric field was observed. / Há uma década, a spintrônica e outras áreas relacionadas vêm atraindo considerável atenção, devido a enorme quantidade de pesquisa conduzidas por elas. A principal razão para o crescente interesse neste campo é a expectativa da aplicação do controle do spin do elétron no lugar ou em adição à carga, em dispositivos eletrônicos e informação e computação quânticas. A possibilidade destes spins carregarem informação depende, primeiramente, da habilidade de controlá-los coerentemente, em uma escala de tempo muito mais rápida do que o tempo de decoerência. Esta tese trata da dinâmica de spins em gases de elétrons bidimensionais, em poços quânticos de semicondutores III-V, crescidos artificialmente. Nós apresentamos uma série de experimentos, utilizando técnicas para o controle ótico da polarização de spin, desencadeadas por métodos óticos ou eletrônicos, ou seja, técnicas conhecidas de bombeio e prova e polarização de spin induzida por corrente. Nós investigamos a coerência de spin em gases bidimensionais, confinados em poços quânticos duplos e triplos de GaAs/AlGaAs e a dependência da defasagem com parâmetros experimentais, como campo magnético externo, potência ótica, tempo entre os pulsos de bombeio e prova e comprimento de onda da excitação. Também estudamos a grande anisotropia de relaxação de spin como função da temperatura da amostra, potência de excitação e defasagem entre bombeio e prova, medidos para uma vasta gama de temperatura, entre 5K e 250K, usando Rotação de Kerr com Resolução Temporal (TRKR) e Amplificação Ressonante de Spin (RSA). Além disso estudamos a influência da concentração de Al na dinâmica dos poços de AlGaAs/AlAs, para o qual a engenharia da composição da estrutura permite sintonizar o tempo de defasagem de spin e o fator $ g $ do elétron. Por fim, estudamos a deriva transversal macroscópica da longa coerência de spin induzida por corrente, através de medidas de Rotação de Kerr não-locais, baseadas na amplificação ressonante ótica da polarização eletricamente induzida. Observamos uma variação espacial significante do fator $ g $ e do tempo de vida da coerência, na escala de nanosegundos, deslocada distâncias de meio milímetro na direção transversa ao campo magnético aplicado.

In this dissertation I present advances in the studies of artificial lattices with honeycomb topology, called artificial graphene (AG), in nano-patterned GaAs quantum wells (QWs). AG lattices with very small lattice constants as low as 40 nm are achieved for the first time in GaAs. The high quality AG lattices are created by optimized electron-beam (E-beam) lithography followed by inductively coupled plasma reactive-ion etching (ICP-RIE) process. E-beam lithography is used to define a honeycomb lattice etch mask on the surface of the GaAs QW sample and the optimized anisotropic ICP-RIE process is developed to transfer the pattern into the sample and create the AG lattices. Such high-resolution AG lattices with small lattice constants are essential to form AG miniband structures and create well-developed Dirac cones. Characterization of electron states in the nanofabricated artificial lattices is by optical experiments. Optical emission (photoluminescence) yields a determination of the Fermi energy of the electrons. A significant reduction of the Fermi energy is due to the nano-patterning process. Resonant inelastic light scattering (RILS) spectra reveal novel transitions related to the electron band structures of the AG lattices. These transitions exhibit a remarkable agreement with the predicted joint density of states (JDOS) based on the band structure calculation for the honeycomb topology. I calculate the electron band structures of AG lattices in nano-patterned GaAs QWs using a periodic muffin-tin potential model. The evaluations predict linear energy-momentum dispersion and Dirac cones, where the massless Dirac fermions (MDFs) appear, occur in the band structures. Requirements of the parameters of the AG potential to achieve isolated and well-developed Dirac cones are discussed. Density of states (DOS) and JDOS from AG band structures are calculated, which provide a basis to interpret quantitatively observed transitions of electrons involving AG bands. RILS of intersubband transitions reveal intriguing satellite peaks that are not present in the as-grown QWs. These additional peaks are interpreted as combined intersubband transitions with simultaneous change of QW subband and AG band index. The calculated JDOS for the electron transitions within the AG lattice model provide a remarkably accurate description of the combined intersubband excitations. Novel low-lying excitation peaks in RILS spectra, interpreted as direct transitions between AG bands without change in QW subband, provide a more direct insight on the AG band structures. We discovered that RILS transitions around the Dirac cones are resonantly enhanced by varying the incident photon energies. The spectral lineshape of these transitions provides insights into the formation of Dirac cones that are characteristic of the honeycomb symmetry of the AG lattices. The results confirm the formation of AG miniband structures and well-developed Dirac cones. The realization of AG lattices in a nanofabricated high mobility semiconductor offers the advantage of tunability through methods suitable for device scalability and integration. The last part of this thesis describes the growth of nanocrystalline single layer and bilayer graphene on sapphire substrates by molecular beam epitaxy (MBE) with a solid carbon source. Raman spectroscopy reveals that fabrication of single layer, bilayer or multilayer graphene crucially depends on MBE growth conditions. Etch pits revealed by atomic force microscopy indicate a removal mechanism of carbon by reduction of sapphire. Tuning the interplay between carbon deposition and its removal, by varying the incident carbon flux and substrate temperature, should enable the growth of high quality graphene layers on large area sapphire substrates.

Estruturas semicondutoras com dopagem planar são sistemas de considerável interesse tanto para a a pesquisa básica como para a aplicação em dispositivos. Neste trabalho caracterizamos estruturas semicondutoras com dopagem planar tipo n ou p, utilizando técnicas de espectroscopia ótica tais como fotoluminescencência (PL) e fotoluminescência-excitação (PLE). As amostras foram crescidas com a técnica de Epitaxia por Feixe Molecular (BEM, Molecular Beam Epitaxy) no Laboratório de Novos Materiais Semicondutores (LNMS) do IFUSP, com exceção das amostras com dopagem planar tipo p que foram crescidas nos laboratórios do Departamento de Física da Universidade Federal de Minas Gerais. Investigamos as propriedades eletrônicas de super-redes de GaAs com dopagem planar de silício, em função da concentração dos átomos dopantes, mantendo-se fixa a distância entre os planos de dopagem. Através da comparação de nossos resultados experimentais com os de cálculos autoconsistentes da estrutura eletrônica das super-redes, identificamos a origem de todas as emissões observadas nos espectros de PL. As emissões principais (denominada bandas B) foram identificadas como oriundas do processo de recombinação radiativa dos portadores do gás bidimensional de elétrons (2DEG) com buracos fotogerados na banda de valência. Outras emissões (denominadas bandas A) foram associadas com o processo de recombinação dos elétrons do 2DEG com impurezas de Carbono. Analisamos também amostras de poços quânticos de InGaAs/GaAs com dopagem planar de Silício. Nestes sistemas, devido à presença de impurezas (que atuam como centros de espalhamento) e variações na composição da liga de InGaAs (que dão origem à localização de buracos), transições com e /ou sem conservação de quase-momento envolvendo estados de buraco estendidos e/ou localizados constituem os possíveis processos de recombinação radiativa entre os elétrons do 2DEG e os buracos fotogerados. Neste trabalho, investigamos os processos de recombinação dos elétrons do 2DEG com os buracos gerados por excitação ótica comparando a forma de linha dos espectros experimentais e teóricos de PL. Estruturas semicondutoras de GaAs contendos um único plano de átomos de Berílio (dopagem tipo p ) também foram analisadas neste trabalho. Os resultados de nossas investigações evidenciam a existência de um potencial fotoinduzido, que confina os elétrons fotogerados. O processo de formação deste potencial é discutido neste trabalho. / Delta-doped semiconductor structures are systems of considerable interest for basic research and device applications. In this work, we performed the characterization of n or p-type semiconductor structures, using spectroscopic tecniques as photoluminescence (PL), photoluminescence-excitation (PLE) and selective photoluminescence (SPL). The samples were grown by Molecular Beam Epitaxy (BEM) at LNMS (Laboratório de Novos Materias Semicondutores) of IFUSP anda t Physical Department of UFMG. The electronic structure of Silicon delta-doped GaAs super-lattices with different donor concentrations in the delta-doped layer and a fixed distance between adjacent Si-doped layers was investigated. Though the comparison o four experimental results with the superlattices electronic structure calculated self-consistently we identified the origino f all observed in PL spectra structures. The principal emissions (denominated as bands B) are due to recombination of two-dimensional electron gás (due to delta doping) with photocreated holes in Valence band. Other spectral features (denominated as bands A) were associated with recombination of two dimensional electron gás and Carbon impurity. We analyzed PL spectra of InGaAs/GaAs quantum well samples with Silicon delta doping. In this systems recombination of electrons from two-dimensional gas with photocreated holes through the transitions with or without quase-momentum conservation were observed in PL spectra. Comparing experimental and theoretical lineshape, we are able to determine optical transitions in which holes in localize dor extended states took part. Localization of holes in Valence band is due to fluctuations in dopant distribution in the delta-doped layer. Moreover, GaAs with Beryllium delta doping (p-type) were analyzed in this work . Results o four investigation shown the existence of a photoinduced potential, which confine photocreated electrons in strutures of this type. Formation processo f this potential is discussed in this work.