Prédiction théorique des structures localisées à une et à deux dimensions dans des cavité passives soumis à une injection optique. / Doctorat en Sciences / info:eu-repo/semantics/nonPublished

In line with the rising demand for smarter solutions and embedded systems, Microelectromechanical systems (MEMS) have gained increasing importance for digital computing devices and Internet-of-Things (IoT) applications, most notably for mobile wearable devices. This achievement is driven by MEMS resonators' inherent properties such as simplicity, sensitivity, reliability, and low power consumption. Hence, they are being explored for ultra-low-power computing machines. Several fundamental digital logic gates, switching, and memory devices have been demonstrated based on MEMS microstructures' static and dynamic behavior. The interest of researchers in using MEMS resonators is due to seeking an alternative approach to circumvent the notable current leakage and power density problems of complementary metal-oxide-semiconductor (CMOS) technology. The continuous miniaturization of CMOS has increased the operating speed and reduces the size of the device. However, this has led to a relative increase in the leakage energy. This drawback in CMOS has renewed the interest of researchers in mechanical digital computations, which can be traced back to the work of Charles Babbage in 1822 on calculating engines. This dissertation presents axially-loaded and coupled-MEMS resonators investigations to demonstrate memory elements and different logic functions. The studies in this dissertation can be categorized majorly into three parts based on the implementation of logic functions using three techniques: electrothermal frequency tunability, electrostatic frequency modulations, and activation/deactivation of the resonant frequency. Firstly, the influence of the competing effects of initial curvature and axial loads on the mechanical behavior of MEMS resonator arches are investigated theoretically to predict the tunability of arches under axial loads. Then, the concept of electrothermal frequency tunability is used to demonstrate fundamental 2-bit logic gates. However, this concept consumes a considerable amount of energy due to the electrothermal technique. Next, the dynamic memory element and combinational logic functions are demonstrated using the concept of electrostatic frequency modulation. Though this approach is energy efficient compared to the electrothermal technique, it does not support the cascadability of MEMS resonator-based logic devices. Lastly, complex multifunctional logic gates are implemented based on selective modes activation and deactivation, resulting in significant improvement in energy efficiency and enabling cascadability of MEMS resonator-based logic devices.

This thesis presents the design, modeling, and experiment of a novel pressure sensor using a dual-mode AT-cut quartz crystal resonator with beat frequency analysis based temperature compensation technique. The proposed sensor can measure pressure and temperature simultaneously by a single AT-cut quartz resonator. Apart from AT-cut quartz crystal, a newly developed Langasite (LGS) crystal resonator is also considered in the proposed pressure sensor design, since LGS can operate in a higher temperature environment than AT-cut quartz crystal. The pressure sensor is designed using CAD (computer aided design) software and CAE software - COMSOL Multiphysics. Finite element analysis (FEA) of the pressure sensor is performed to analyze the stress- strain of the sensor's mechanical structure. A 3D printing prototype of the sensor is fabricated and the proposed sensing principle is verified using a force-frequency analysis apparatus. Next to the 3D printing model verification, the pressure sensor with stainless steel housing has been fabricated with inbuilt crystal oscillator circuit. The oscillator circuit is used to excite the piezo crystal resonator at its fundamental vibrational mode and give the frequency as an output signal. Based on the FEA and experimental results, it has been concluded that the maximum pressure that the sensor can measure is 45 (psi). The pressure test results performed on the stainless steel product shows a highly linear relationship between the input (pressure) and the output (frequency).

The notion of mechanical computation has been revived in the past few years, with the advances of nanofabrication techniques. Although electromechanical devices are inherently slow, they offer zero or very low off-state current, which reduces the overall power consumption compared to the fast complementary-metal-oxide-semiconductor (CMOS) counterparts. This energy efficiency feature is the most crucial requirement for most of the stand-alone battery-operated gadgets, biomedical devices, and the internet of things (IoT) applications, which do not require the fast processing speeds offered by the mainstream CMOS technology. In particular, using Micro-Electro-Mechanical (MEM) resonators in mechanical computing has drawn the attention of the research community and the industry in the last decade as this technology offers low power consumption, reduced circuit complexity compared to conventional CMOS designs, run-time re- programmability and high reliability due to the contactless mode of operation compared to other MEM switches such as micro-relays. In this thesis, we introduce digital circuit design techniques tailored for clamped-clamped beam MEM resonators. The main operation mechanism of these circuit blocks is based on fine-tuning of the resonance frequency of the micro-resonator beam, and the logic function performed by the devices is mainly determined by factors such as input/output terminal arrangement, signal type, resonator operation regime (linear/non-linear), and the operation frequency. These proposed circuits include the major building blocks of any microprocessor such as logic gates, a full adder which is a key block in any arithmetic and logic operation units (ALU), and I/O interface units, including digital to analog (DAC) and analog to digital (ADC) data converters. All proposed designs were first simulated using a finite element software and then the results were experimentally verified. Important aspects such as energy per operation, speed, and circuit complexity are evaluated and compared to CMOS counterparts. In all applications, we show that by proper scaling of the resonator’s dimensions, MHz operation speeds and energy consumption in the range of femto-joules per logic operation are attainable. Finally, we discuss some of the challenges in using MEM resonators in digital circuit design at the device level and circuit level and propose solutions to tackle some of them.

京都大学 / 0048 / 新制・課程博士 / 博士(工学) / 甲第18990号 / 工博第4032号 / 新制||工||1621(附属図書館) / 31941 / 京都大学大学院工学研究科電気工学専攻 / (主査)教授 引原 隆士, 教授 北野 正雄, 准教授 山田 啓文 / 学位規則第4条第1項該当 / Doctor of Philosophy (Engineering) / Kyoto University / DFAM

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Silicon (Si) and silicon nitride (Si3N4) have become the dominant photonic integrated circuit (PIC) material platforms, due to their low-cost, wafer-scale production of high-performance circuits. However, novel materials can offer additional functionalities that cannot be easily accessed in Si and Si3N4, such as light emission. Tellurium oxide (TeO2) is a novel material of interest because of its large linear and non-linear refractive indices, low material losses and large rare-earth dopant solubility, with applications including compact low-loss waveguides and on-chip light sources and amplifiers. This thesis investigates the post-processing integration of TeO2 devices onto standardized Si and Si3N4 chips to incorporate TeO2 material advantages into high-performance PICs. Chapter 1 introduces the state-of-the-art functionality for various integrated photonic materials as well as methods for integrating multiple materials onto single chips. Chapter 2 presents the development of a high-quality TeO2 thin film fabrication process by reactive RF sputtering, with material refractive indices of 2.07 and optical propagation losses of <0.1 dB/cm at 1550 nm. Chapter 3 investigates a conformally coated TeO2-Si3N4 waveguide platform capable of large TeO2 optical confinement and tight bending radii, characterizing fiber-chip edge couplers down to ~5 dB/facet, waveguide propagation losses of <0.5 dB/cm, directional couplers with 100% cross-over ratio, and microresonators with internal Q factors of 7.3 × 105. In Chapter 4 a spectroscopic study of TeO2:Er3+-coated Si3N4 waveguide amplifiers was undertaken, with internal net gains of up to 1.4 dB/cm in a 2.2-cm-long waveguide and 5 dB total in a 6.7-cm-long sample demonstrated, predicted to reach >10 dB could 150 mW of pump power be launched based on a developed rate-equation model. Chapter 5 demonstrates TeO2-coated microtrench resonators coupled to silicon waveguides, with internal Q factors of up to 2.1×105 and investigates environmental sensing metrics of devices. Chapter 6 summarizes the thesis and provides avenues for future work. / Thesis / Doctor of Philosophy (PhD)

<p>In this Thesis I report on my work done in replicating the Pound-Drever-Hall (PDH) laser stabilization technique as well as applications of PDH to microring resonators and generated Optical Frequency Combs (OFC). These works have been broken down into three sections. First, I replicated the PDH method with a continuous wave (CW) laser along with a Fabry-Pérot Cavity (FPC). Second, I applied the same technique to a 25 GHz Free Spectral Range (FSR) microring resonator fabricated in Silicon Nitride. Third, I applied the PDH technique to a high Quality Factor (Q) high Free Spectral Range (FSR) microring resonator in preparation to lock the repetition rate of two soliton combs beat together. The last experiment was for an application towards a compact optical clock system; such systems will have a wide impact on the infrastructure of our navigation and communication structures in use today.</p>