The most accurate method for performing analog signal processing in MOS (metal-oxide-semiconductor) integrated circuits is through the use of switched-capacitor circuits. A switched-capacitor circuit operates as a discrete-time signal processor. These circuits have been used in a variety of applications, such as filters, gain stages, voltage-controlled oscillators, and modulators. A switched-capacitor circuit contains operational amplifiers (opamps), capacitators, switches, and a clock generator. Capacitors are used to define the state variables of a system. They store charges for a defined time interval, and determine the state variables as voltage differences. Switches are used to direct the flow of charges and to enable the charging and discharging of capacitors. Nonoverlapping clock signals control the switches and allow charge transfer between the capacitors. Opamps are used in order to perform high-accuracy charge transfer from one capacitor to another. The goal of this research is to design and explore future low-voltage switched-capacitor circuits, which are crucial for portable devices. Low-voltage operation is needed for two reasons: making reliable and accurate systems compatible with the submicron CMOS technology and reducing power consumption of the digital circuits. To this end, three different switched-capacitor integrators are proposed, which function with very low supply voltages. One of these configurations is used to design a lowpass ����� modulator for digital-audio applications. This modulator is fabricated and tested demonstrating 80 dB dynamic range with a 1-V supply voltage. The second part of this research is to show that these low-voltage circuits are suitable for modern wireless communication applications, where the clock and signal frequencies are very high. This part of the research has focused on bandpass analog-to-digital converters. Bandpass analog-to-digital converters are among the key components in wireless communication systems. They are used to digitize the received analog signal at an intermediate center frequency. Such converters are used for digital FM or AM radio applications and for portable communication devices, such as cellular phones. The main block, in these converters, is the resonator, which is tuned to a particular center frequency. A resonator must be designed such that it has a sharp peak at a specific center frequency. However, because of circuit imperfections, the resonant peak gain and/or the center frequency are degraded in existing architectures. Two novel switched-capacitor resonators were invented during the second part of this research. These resonators demonstrate superior performance as compared to previous architectures. A fourth-order low-voltage bandpass ����� modulator, using one of these resonators, has been designed. / Graduation date: 2002

The main topic of this thesis is the performance improvement of microresonators as mass-sensitive biochemical sensors in a liquid environment. Resonant microstructures fabricated on silicon substrates with CMOS-compatible micromachining techniques are mainly investigated. Two particular approaches have been chosen to improve the resolution of resonant chemical/biochemical sensors. The first approach is based on designing a microresonator with high Q-factor in air and in liquid, thus, improving its frequency resolution. The second approach is based on minimizing the frequency drift of microresonators by compensating for temperature-induced frequency variations. A disk-shape resonant microstructure vibrating in a rotational in-plane mode has been designed, fabricated and extensively characterized both in air and in water. The designed resonators have typical resonance frequencies between 300 and 1,000kHz and feature on-chip electrothermal excitation elements and a piezoresistive Wheatstone-bridge for vibration detection. By shearing the surrounding fluid instead of compressing it, damping is reduced and quality factors up to 5800 in air and 94 in water have been achieved. Short-term frequency stabilities obtained from Allan-variance measurements with 1-sec gate time are as low as 1.1 10-8 in air and 2.3 10-6 in water. The performance of the designed resonator as a biological sensor in liquid environment has been demonstrated experimentally using the specific binding of anti-beta-galactosidase antibody to beta-galactosidase enzyme covalently immobilized on the resonator surface. An analytical model of the disk resonator, represented by a simple harmonic oscillator, has been derived and compared with experimental results. The resonance frequency and the Q-factor of the disk resonator are determined from analytical expressions for the rotational spring constant, rotational moment of inertia, and energy loss by viscous damping. The developed analytical models show a good agreement with FEM simulation and experimental results and facilitate the geometrical optimization of the disk-type resonators. Finally, a new strategy to compensate for temperature-induced frequency drifts of resonant microstructures has been developed based on a controlled stiffness modulation by an electronic feedback loop. The developed method is experimentally verified by compensating for temperature-induced frequency fluctuations of a microresonator. In principle, the proposed method is applicable to all resonant microstructures featuring excitation and detection elements.

Understanding the mechanisms for fatigue crack initiation and propagation in micron-scale silicon (Si) is of great importance to assess and improve the reliability of Si based microelectromechanical systems (MEMS) in harsh environments. Accordingly, this investigation studies the fatigue properties of 10-micron-thick single-crystal Si (SCSi) films using kHz-frequency resonating structures under fully-reversed loading. Overall, the stress plays a major role on the fatigue properties: decreasing the stress amplitude from ~3-3.5 GPa to ~1.5-2 GPa results in an increase in lifetime from 10² to 10¹⁰ cycles, and a decrease in degradation rate by 4-5 orders of magnitude. In addition to stress, the influences of resonant frequency (4 vs. 40 kHz) and environment (30°C, 50%RH vs. 80°C, 30%RH and 80°C, 90%RH) on the resulting S-N curves and resonant frequency evolution are thoroughly investigated. In the high- to very high-cycle fatigue (HCF/VHCF) regime, both the frequency and environment strongly affect the fatigue properties. Damage accumulation rates are significantly higher in harsh environments. In 80°C, 90%RH the rates exceed by one to two orders of magnitude the values at 30°C, 50%RH for similar stress amplitudes. The separate influence of humidity, affecting the adsorbed water layer thickness, is also highlighted at 80°C: the decrease rates are measured up to one order of magnitude lower at 30%RH than at 90%RH. Moreover, a strong influence of frequency is detected. These observations bring further evidence supporting reaction-layer fatigue as a viable description of the HCF/VHCF behavior of micron-scale Si.

Processing of high-speed data using optical signals is a promising approach for tackling the bandwidth and speed challenges of today's electronics. Realization of complex optical signal processing functionalities seems more possible than any time before, thanks to the recent achievements in silicon photonics towards large-scale photonic integration. In this Ph.D. work, a novel thermal reconfiguration technology is proposed and experimentally demonstrated for silicon photonics that is compact, low-loss, low-power, fast, with a large tuning-range. These properties are all required for large-scale optical signal processing and had not been simultaneously achieved in a single device technology prior to this work. This device technology is applied to a new class of resonator-based devices for reconfigurable nonlinear optical signal processing. For the first time, we have demonstrated the possibility of resonance wavelength tuning of individual resonances and their coupling coefficients. Using this new device concept, we have demonstrated tunable wavelength-conversion through four-wave mixing in a resonator-based silicon device for the first time.

Copper vapour laser (CVL) pumped high repetition rate narrow bandwidth dye laser is an important source of tunable radiation. It finds numerous applications in spectroscopic investigations and selective material processing like atomic vapour laser isotope separation (AVLIS). Being wavelength selective in these applications stability of the output wavelength and bandwidth are extremely important. The stability of these parameters depend upon the refractive index fluctuation of the dye medium, due to pump beam induced temperature gradients, dye solution flow, and mechanical stability of optical components. Precise measurement of wavelength and bandwidth of a dye laser and control over parameters governing the variations are important for any stable dye laser system. In this thesis, details of investigations carried out on a Rhodamine 6G dye laser for obtaining stable wavelength and output power are presented. Parameters that affect the stability were identified, monitored and put on close loop control to achieve the desired stability. Pump beam i.e. CVL optical power, dye flow rate and dye solution temperature are mainly these parameters. CVL power is mainly a function of input electrical power and pressure of the buffer gas inside the tube. To monitor and regulate these parameters, different sensors and actuators were selected and interfaced with a master slave topology based data acquisition and control system. The DAQ and control system is designed around a micro controller card based on advanced CPU P80552 and has on chip 8 channel 10 bit multiplexed analog input, 16 TTL digital inputs and 16 digital outputs. It works as slave and PC as master. Following closed loops were designed and incorporated to maintain a stable output: a. Average output of CVL was maintained constant by regulating the electric input power through closed loop control. b. The buffer gas pressure was monitored with a semiconductor pressure sensor and was regulated using pulse width modulation. c. Temperature of the dye solution was monitored with PT100 and was controlled using proportional controller. d. Flow rate of dye solution was controlled using a variable frequency drive (VFD) for the dye circulation pump. e. The dye laser wavelength was monitored by using a high resolution spectrograph and pixel position of the peak from CCD image obtained from spectrograph is used for feedback correction using a pico motor. In the present work with application of the above-mentioned input power and pressure loops, a stable output of CVL, is achieved. Variations in power and pulse width of CVL are got limited to within 2%, from 10% when CVL system was working unregulated. This control system does the line regulations and corrects the input electrical power if variations in discharge current occur due to pressure variation. Every dye cell has limits on flow rate because of its geometry. With flow and temperature control dye cell was characterized to work with lower linewidth. VFD (variable frequency drive) is used for flow regulation. Finally active control on set wavelength was also achieved with resolution of 0.01nm accuracy. Measurement of wavelength was done with 0.3 m, 0.054 nm resolution spectrograph. Closed loop pico motor with 30 nm per step linear resolution was used for wavelength control. The thesis is organized in four chapters. First chapter presents a brief introduction to high repetition rate CVL pumped dye laser, operation of a CVL and parameters affecting the dye laser stability and their control schemes. Literature survey in this chapter is focused on different control mechanisms used with such lasers. Second chapter describes the laser system and interfacing of data acquisition system used for experimental setup. Closed loop controls for different parameters are described in this chapter. It also describes the software algorithms developed for this work. Third chapter presents experimental results and analysis with discussion on performance of the control loops. Finally the conclusion is given and few suggestions are made for further work.

Manipulation of light at the nanoscale has the promise to enable numerous technological advances in biomedical sensing, optical communications, nano-mechanics and quantum optics. As photons have vanishingly small interaction cross sections, their interactions have to be mitigated by matters (i.e. quantum emitters, molecules, electrons etc.). Waveguides and cavities are the fundamental building blocks of the optical circuits, which control or confine light to specific matters of interest. The first half of the thesis (Chapters 2 & 3) focuses on how to design various photonic nanostructures to manipulate light on nano- to micro- scale, especially to modify the light-matter interaction properties. Chapter 2 discusses how nano-slot waveguides and photonic crystal nanobeam waveguides are able to modify the emission of quantum emitters, in a different way that normal ridge waveguides are not able to. Chapter 3 focuses on a more complicated and powerful structure: the photonic crystal nanobeam cavity. The design, fabrication and characterization of the photonic crystal nanobeam cavities are described and demonstrated in detail, which lays out the foundation of the biomedical sensing applications in the second half of the thesis. The second half of the thesis (Chapters 4 & 5) focuses on the application of photonic crystal nanobeam cavities in the label-free sensing of biomedical substances. Chapter 4 demonstrates detection of solutions with different refractive index (aceton, methanol, IPA etc.), glucose concentration, single polystyrene nanoparticles and single streptavidin bio-molecules. Chapter 4 proposes a novel nonlinear optical method to further enhance the sensitivity. Chapter 4 also demonstrates high quality nanobeam cavities fabricated in polymers, that open up a new route to decrease the cost, as well as to achieve novel applications with functional polymers. The broader impact of this technology lies in its potential of commercialization of a new generation of biosensors with high sensitivity and high integration. Chapter 5 discusses progresses towards instrumentation of the nanobeam cavity sensing technology for research & development apparatus, as well as point-of-care diagnostic tools. / Engineering and Applied Sciences

No description available.

A new class of micromachined devices called thin-film piezoelectric-on-substrate (TPoS) resonators is introduced, and the performance of these devices in RF and sensor applications is studied. TPoS resonators benefit from high electromechanical coupling of piezoelectric transduction mechanism and superior acoustic properties of a substrate such as single crystal silicon. Therefore, the motional impedance of these resonators are significantly smaller compared to typical capacitively-transduced counterparts while they exhibit relatively high quality factor and power handling and can be operated in air. The combination of all these features suggests TPoS resonators as a viable alternative for current acoustic devices. In this thesis, design and fabrication methods to realize dispersed-frequency lateral-extensional TPoS resonators are discussed. TPoS devices are fabricated on both silicon-on-insulator and thin-film nanocrystalline diamond substrates. The performance of these resonators in simple and low-power oscillators is measured and compared. Furthermore, a unique coupling technique for implementation of high frequency filters is introduced in which dual resonance modes of a single resonant structure are coupled. The measured results of this work show that these filters are suitable candidates for single-chip implementation of multiple-frequency narrow-band filters with high out-of-band rejection in a small footprint.

Thesis (Ph. D.)--Electrical and Computer Engineering, Georgia Institute of Technology, 2005. / Madhavan Swaminathan, Committee Chair ; Sung Kyu Lim, Committee Member ; Abhijit Chatterjee, Committee Member ; David C. Keezer, Committee Member ; C. P. Wong, Committee Member. Vita. Includes bibliographical references.

L’essor considérable de la RFID s’accompagne actuellement par le développement de nombreuses technologies qui viennent compléter l’offre déjà présente tout en cherchant à répondre à de nouvelles problématiques. La RFID sans puce (ou chipless) en est un exemple ; l’objectif affiché est de réduire considérablement le prix du tag ainsi que d’augmenter significativement la quantité d’information qu’il contient de manière à pouvoir concurrencer le code à barres tout en conservant les bénéfices d’une approche de lecture flexible basée sur une communication par ondes radio. Pour répondre à la problématique de la quantité d’information d’un tag, ce travail de thèse propose une nouvelle méthode de codage basée sur la forme globale du RCS du tag. Pour ce faire, il faut être capable de réaliser des tags dont le RCS est donné, ce qui consiste à résoudre un problème inverse. Une méthode de conception basée sur l’assemblage de motifs résonants est proposée. Les principales caractéristiques de ces éléments de base (amplitude, fréquence, coefficient de qualités) sont contrôlées par des paramètres géométriques. / The important growth of RFID goes along with the development of many technologies which complement the current offer by adding new possibilities. The chipless RFID is a perfect example of such technology. The purpose of the approach is to considerably reduce the price of the tag while increasing the data encoding capacity in order to compete with the barcode. The RF link between the tag and the reader also permit a flexible reading. In order to increase the coding capacity of a chipless tag, this PHD work proposes a new coding method based on the overall shape of the electromagnetic signature. To do this, we must be able design tags for which the RCS is given in advance, which amounts to the resolution of an inverse problem. A method based on the decomposition of the RCS on a base of resonators is proposed. The main characteristics of these base elements (amplitude, frequency, quality factor) are controlled by geometric parameters.