The piezoelectric energy harvester has become a new powering option for some low-power electronic devices such as MEMS (Micro Electrical Mechanical System) sensors. Piezoelectric materials can collect the ambient vibrations energy and convert it to electrical energy. This thesis is intended to demonstrate the behavior of a piezoelectric energy harvester system at elevated temperature from room temperature up to 82°C, and compares the system’s performance using different piezoelectric materials. The systems are structured with a Lead Magnesium Niobate-Lead Titanate (PMN-PT) single crystal patch bonded to an aluminum cantilever beam, Lead Indium Niobate-Lead Magnesium Niobate-Lead Titanate (PIN-PMN-PT) single crystal patch bonded to an aluminum cantilever beam and a bimorph cantilever beam which is made of Lead Zirconate Titanate (PZT). The results of this experimental study show the effects of the temperature on the operation frequency and output power of the piezoelectric energy harvesting system. The harvested electrical energy has been stored in storage circuits including a battery. Then, the stored energy has been used to power up the other part of the system, a wireless resonator force sensor, which uses frequency conversion techniques to convert the sensor’s ultrasonic signal to a microwave signal in order to transmit the signal wirelessly.

The word piezo in greek means \to compress". Piezoelectric sensors work on the principle of direct piezoelectric effect, where a mechanical input generates a corresponding electric charge. The advantages of these sensors are wide fre-quency range of operation, high stiffness and small size. The main limitation of a piezoelectric sensor is that it cannot be used in measurements that are truly static. When a piezoelectric sensor is subjected to a static force, a fixed amount of charge is developed which would eventually decay at a rate dependent on the external impedance of the sensor circuitry. Operating sensors at resonance have been one of the methods to overcome the limitation of using piezoelectric sensors for static measurements. However, since both actuation and sensing are done by the same piezoelectric element, this results in a cross-talk of input and output signals. The drawback of using single piezoelectric element for actuation and sensing is overcome in this work by using two identical elements|one for actuation and one for sensing. The operating frequency is about 10 % of the natural frequency of the sensor, thus enabling to operate the sensor in non resonant mode. Since the actuation and sensing mechanisms are separated, static measurement can be carried out. The output signal from the sensing element is monitored by a Lock-in amplifier which works on the principle of phase sensitive detection. The advantage of this sensor design is high sensitivity along with narrow band detection. It can be shown that the voltage output of the sensor Vout / a1 + m(b1 + b2F + b3K) + c1F + d1K, where m and K are the external mass and interaction stiffness, respectively, F is the force acting on it. By maintaining any two of these three quantities constant, the remaining one can be measured without any difficulty. The non resonant mode of operation makes it possible to explore the potential of this sensor in investigating mechanics of solid-liquid (viscous), solid-solid (inelastic) and solid-tissue(viscoelastic) interactions. High sensitivity, wide range of measurement (1 g{1 g) and high resolutio(0.1 g) of the non resonant mass sensor makes it possible to use it in measure-ment of very small masses of the order 1 g. Typically, resonant sensors such as quartz crystal microbalance (QCM) are used for mass measurements at that range. However, since the performance of resonant sensors is controlled by damp-ing, a phenomenon known as `missing mass effect' arises. Operating a sensor in non resonant mode (stiffness controlled mode) is a way to overcome this problem, especially when the mass is viscous and/or viscoelastic in nature. Drosophila fly, egg and larvae are the viscoelastic masses that are measured using this non res-onant sensor. Evaporating sessile drops of water and Cetyl trimethylammonium bromide (CTAB) surfactant solution from nominally flat surfaces are monitored to characterize the sensor for viscous mass measurement. Evaporation rate per unit surface area remains more or less constant, during the initial stages of evap-oration. When the surfactant concentration is varied, evaporation rate per unit surface area is highest for solutions around critical miscelle concentration (CMC). A study is carried out to understand the effect of concentrations on spreading of ink over inkjet printing paper. It is found that the spreading is least around CMC, since spreading is dependent on the rate of evaporation. The non resonant piezoelectric sensor which has high stiffness and quick re-sponse is also capable of measuring very small frictional forces. This sensor is configured to work as an inertial slider. Friction measurement at micro scales is important for designing microsystems such as stick-slip actuators. At such length scales, experiments have to performed at low loads and high excitation frequencies. The support stiffness of such systems should be high and the force of friction generated during slipping, when displacements are smaller than the contact radius, are of the order of few N. The displacement during slipping (S) is dependent on the amplitude of the input voltage to the actuation element. The frictional force measured during slipping by the sensor element indicates that the co-efficient of friction ( ) is independent of the sliding velocity. The developed non resonant sensor in this work under small amplitude exci-tation, can measure force gradient (i.e. stiffness). The total force generated when a needle is inserted into a viscoelastic material is a sum of force due to stiffness of the material, friction and the cutting force at the tip. The force due to stiffness is dominant when the needle is bending the tissue before the puncture occurs. Use of the non resonant sensor in tandem with strain gauge force sensor enables distinguishing the three components of the total force. The slope of the force-displacement (F -d) curve during the initial stages of needle penetration into the viscoelastic material, before puncture, is indicative of the stiffness of the mate-rial. The peak force measured during penetration is higher for needles with larger diameters and lower insertion velocities. The viscoelastic response (relaxation) of the material remains independent of the insertion velocity, for a given thickness of the material and a constant needle diameter. In summary, the sensor designed and developed in this work operates in stiffness controlled mode to eliminate the `missing mass effect' encountered dur-ing resonant mode of operation, has been clearly highlighted. Mass, force and stiffness measurements are possible over a wide range just by varying the ampli-tude of the input signal to the actuator element. The advantages such as high stiffness, small size and high response makes it advantageous to carry out in-situ micro scale studies in scanning electron microscopy (SEM) and transmission electron microscopy (TEM).

In order to address the challenges of capacitive sensing in harsh environment, self resonant passive wireless sensors are studied. The capacitive sensing elements based on interdigitated capacitor (IDC) sensor are used. A semi-empirical model providing accurate capacitance calculation for IDCs over a wide range of dimensions and dielectric constants is developed. An equivalent circuit model based on electric field distribution is proposed, leading to a closed form approximation for IDC capacitance calculation. The conductivity of the material under test is also considered and a model is proposed to calculate effective capacitance as a function of conductivity and measurement frequency. The model is used to study the design optimization of IDC sensor and suggested design procedure is proposed. To wirelessly interrogate the capacitive sensor, it is connected to an inductive element to form a resonant circuit, while the measurement is made at remote reader coil. Advantages and disadvantages of different type of resonant structure design are analyzed. In order to assist the design process, a SPICE circuit model is developed to estimate the resonant frequency of the self resonant sensor. Miniaturized sensors with different dimensions are designed, fabricated and tested. The sensor is integrated with silicon nanowire fabric coated with polymer. Measurements are made to illustrate the enhancement in sensing capability by integrating chemical selective material. / text

A new torque transfer standard using metallic TBTF resonant sensor was developed to overcome the overload capability problem which occurs with conventional metallic resistance strain gauges. Previous research work, however, has shown that the first prototype of the metallic TBTF resonant sensor was not suitable for use in a torque transfer standard due to its size and subsequent sensitivity to parasitic lateral forces. To maximize the benefits from this sensor, particularly overload capability and long-term stability, in the high accuracy torque measurement application area, there is a need to develop significantly smaller devices. The aim of this thesis is to research through FEA modelling and experimental characterisation the key performance parameters required to produce a miniaturised metallic TBTF resonant sensor that provides better performance when applied in a torque measurement system. For high accuracy any torque transducer using these sensors ought to have low sensitivity to parasitic influences such as bending moments and lateral forces, which can only be achieved with reduced size. The problems with the existing design, key design issues, possible configuration and packaging solutions of the metallic TBTF resonant sensor that could be used for achieving a higher accuracy torque transfer standard are considered. Two designs of miniaturised metallic TBTF resonant sensors, SL20 and SL12, are considered and experimentally investigated. The lateral forces are reduced by 52% for SL20 design and by 80% for SL12 design when compared to the original SL40 design. A torque transducer using the SL20 design was calibrated falling into the Torque Transfer Standard class of accuracy 1 category, uncertainty 0.8%. A torque transducer using the SL12 design was made and calibration showed a class of accuracy 0.5 category, uncertainty 0.2%. The results from this research indicate that the SL12 design is suitable for use in a torque transfer standard. The SL12 design is optimal and the smallest size possible based on the overload capability design criteria requiring the tine cross sectional area to remain constant.

The main topic of this thesis is the performance improvement of microresonators as mass-sensitive biochemical sensors in a liquid environment. Resonant microstructures fabricated on silicon substrates with CMOS-compatible micromachining techniques are mainly investigated. Two particular approaches have been chosen to improve the resolution of resonant chemical/biochemical sensors. The first approach is based on designing a microresonator with high Q-factor in air and in liquid, thus, improving its frequency resolution. The second approach is based on minimizing the frequency drift of microresonators by compensating for temperature-induced frequency variations. A disk-shape resonant microstructure vibrating in a rotational in-plane mode has been designed, fabricated and extensively characterized both in air and in water. The designed resonators have typical resonance frequencies between 300 and 1,000kHz and feature on-chip electrothermal excitation elements and a piezoresistive Wheatstone-bridge for vibration detection. By shearing the surrounding fluid instead of compressing it, damping is reduced and quality factors up to 5800 in air and 94 in water have been achieved. Short-term frequency stabilities obtained from Allan-variance measurements with 1-sec gate time are as low as 1.1 10-8 in air and 2.3 10-6 in water. The performance of the designed resonator as a biological sensor in liquid environment has been demonstrated experimentally using the specific binding of anti-beta-galactosidase antibody to beta-galactosidase enzyme covalently immobilized on the resonator surface. An analytical model of the disk resonator, represented by a simple harmonic oscillator, has been derived and compared with experimental results. The resonance frequency and the Q-factor of the disk resonator are determined from analytical expressions for the rotational spring constant, rotational moment of inertia, and energy loss by viscous damping. The developed analytical models show a good agreement with FEM simulation and experimental results and facilitate the geometrical optimization of the disk-type resonators. Finally, a new strategy to compensate for temperature-induced frequency drifts of resonant microstructures has been developed based on a controlled stiffness modulation by an electronic feedback loop. The developed method is experimentally verified by compensating for temperature-induced frequency fluctuations of a microresonator. In principle, the proposed method is applicable to all resonant microstructures featuring excitation and detection elements.