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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
1

Espectrômetro de plásmons de superfície no infravermelho para o desenvolvimento de biosensores

Ferreira da Ponte, Daniel January 2003 (has links)
Made available in DSpace on 2014-06-12T17:40:26Z (GMT). No. of bitstreams: 2 arquivo7017_1.pdf: 8557814 bytes, checksum: f273241c889420c477620777fb04415b (MD5) license.txt: 1748 bytes, checksum: 8a4605be74aa9ea9d79846c1fba20a33 (MD5) Previous issue date: 2003 / O desenvolvimento de sensores baseados em oscilações de plásmons de superfície (PS) em metais, fundamenta-se na alta sensibilidade dessas oscilações à pequenas flutuações nas propriedades ópticas do meio adjacente à superfície metálica. É também possível através da caracterização dessas oscilações determinar propriedades ópticas e espessuras de filmes finos depositados sobre o metal, bem como a topografia da superfície metálica em escala sub-micrométrica. Além dessas aplicações, essa técnica tem sido empregada no desenvolvimento de sensores biológicos capazes de detectar, quantificar e monitorar em tempo real a interação entre moléculas de antígenos e anticorpos nas proximidades de uma superfície metálica. Neste trabalho, foi montado inicialmente um reflectômetro piloto no visível usando um laser de HeNe adaptado para monitoração e caracterização da cinética de reações biológicas em meios aquosos. Com base em resultados publicados na literatura, onde mostrou-se teoricamente que um ganho na sensibilidade da ressonância de plásmons de superfície (RPS) de um fator de 10 poderia ser obtido através da utilização de luz no infravermelho (λ ≈ 1 μm), foi implementado um sistema de monitoração de reações biológicas em tempo real, operando em λ = 0,9751 μm, que permite monitorar um conjunto de 25 células de reação. Com esse sistema foi possível obter as primeiras medidas registradas na literatura de RPS em λ = 0,9751μm e estabelecer a metodologia de utilização do sistema para o desenvolvimento de biosensores de alta sensibilidade
2

Reflectômetro controlado por computador e sua aplicação na detecção de hidrogênio com filmes finos de paládio e ouro/paládio

CAVALCANTI, Gustavo Oliveira 31 January 2008 (has links)
Made available in DSpace on 2014-06-12T17:37:40Z (GMT). No. of bitstreams: 2 arquivo5330_1.pdf: 2622523 bytes, checksum: 1fd33ee2d7efc0b89f12f6b999ac61af (MD5) license.txt: 1748 bytes, checksum: 8a4605be74aa9ea9d79846c1fba20a33 (MD5) Previous issue date: 2008 / Coordenação de Aperfeiçoamento de Pessoal de Nível Superior / O presente trabalho relata o desenvolvimento e a implementação de um reflectômetro óptico controlado por computador e sua aplicação na caracterização de filmes de ouro, de paládio e de ouro/paládio, com os dois últimos utilizados como transdutores para detecção de hidrogênio. O sistema é constituído por diversos componentes acionados por motores de passo, interface eletrônica e software de controle, que permite a construção e execução automática de experimentos. O reflectômetro, quando utilizado na configuração de prisma de acoplamento de Kretschmann, tem como característica principal a manutenção do ponto de reflexão na superfície estacionário, independentemente do ângulo de incidência do feixe de luz. Na detecção de hidrogênio foi utilizada a propriedade de absorção específica desse gás em Pd, para testar a sensibilidade da técnica de ressonância de plásmon de superfície na detecção de hidrogênio com filmes de paládio e filmes compostos com uma bicamada de ouro/paládio. Os resultados obtidos com o reflectômetro mostraram detecção específica de hidrogênio a uma concentração de 4%
3

Sensor óptico em fibra multimodo baseado em ressonância de plásmons de superfície

OLIVEIRA, Sérgio Campello January 2004 (has links)
Made available in DSpace on 2014-06-12T17:40:00Z (GMT). No. of bitstreams: 1 license.txt: 1748 bytes, checksum: 8a4605be74aa9ea9d79846c1fba20a33 (MD5) Previous issue date: 2004 / Universidade Federal de Pernambuco / Este trabalho tem como objetivo o estudo teórico e experimental do fenômeno de ressonância de plásmons de superfície (RPS) em fibras ópticas multimodo e sua aplicação no desenvolvimento de sensores a fibra. Apresenta-se inicialmente uma revisão da teoria de oscilações de plásmons de superfície, que inclui as condições necessárias e as configurações experimentais clássicas para observação dessas oscilações. Em seguida são apresentadas configurações descritas na literatura para a excitação de plásmons de superfície fazendo uso de fibras ópticas. Um modelo teórico para a distribuição de luz irradiada por uma fibra óptica multimodo parcialmente metalizada é revisado e comentado. Na parte experimental do trabalho, foi montado um sistema de iluminação e detecção óptica para medição precisa da distribuição de luz irradiada por uma fibra óptica. Um programa desenvolvido com interface gráfica compatível com o ambiente Windows© permite o tratamento automatizado das imagens gravadas e extração de parâmetros característicos da fibra sob teste. Com esse sistema foi possível realizar a observação experimental inédita do efeito de ressonância de plásmons de superfície na luz irradiada de fibras multimodo parcialmente metalizadas. A aplicabilidade do efeito no desenvolvimento de sensores foi testada na medição da concentração de sal de soluções aquosas, quando ficou demonstrado que a estratégia de detecção proposta pode atingir um aumento de sensibilidade de até dez vezes aquela obtida por meio de esquemas convencionais de detecção do efeito de RPS em fibras multimodo
4

Path Dependence in Colorado's Renewable Portfolio Standards

Rivera, Alex M. 03 June 2022 (has links)
Renewable Portfolio Standards (RPS) have been a staple energy policy in the state of Colorado since 2004. While there has been a steady increase to the RPS percentages over the years, there have been several points where this policy has been significantly contested. This paper explores the political decision making of the two largest electricity producers in the state, Xcel Energy and Tri-State Generation and Transmission Association, to determine at what points that the costs of legislation exceeded the costs of opposition for those two organizations. Using this information, the paper explores the implications these political battles have on characterizing Colorado as a state with renewable path dependency and renewable policy feedback. / Master of Arts / Since 2004, Colorado has enacted several successful laws to increase renewable energy use within the state. However, in recent years these laws have failed to achieve their goals. By analyzing the two largest producers of electricity in the state, Xcel Energy and Tri-State Generation and Transmission Association, this paper tries to answer what parts of the policies were too costly for the organizations to accept. Using this information, this project concludes that the current renewable energy policies are unlikely to be repealed in the future, but there is some evidence to suggest that the rate of renewable energy policy enactment may decrease.
5

Resursplaneringsstöd för tågtrafik : Analys av SJ AB.s operativa hantering av lok och vagn / Enterprise Resource Systems for Railway : Analysis of SJ ABs operational management for carriers and locomotives

Lidberg, My January 2012 (has links)
Examensarbetet har utförts i samarbete med SJ AB i Stockholm. SJ AB är ett statligt aktiebolag som levererar persontrafik på järnväg. Planering av transportsystem är komplext eftersom det ingår många resurslag och planeringen dessutom begränsas av den mängd spårkapacitet som finns att tillgå. Det finns hjälpmedel tillgängliga för produktionsplanering för järnvägssystem i form av systemstöd. SJ AB beslutade för en tid sedan att byta ut ett flertal föråldrade systemstöd mot ett nytt med målsättningen att få en mer integrerad produktionsplanering. 2011 produktionssattes RPS (Resurs Planerings Stöd) för resursslaget fordon. Se bilaga 1 för definition av fordon och RPS. 2012, ett år efter implementeringen, fanns det fortfarande en mängd användare som inte var nöjda med det nya systemstödet RPS, vilket föranledde idén till examensarbetet. SJ AB har en fordonsflotta som förenklat kan delas upp i två huvudtyper; motorvagnar och ”lok och vagn”. RPS är utvecklat för företag som har en produktion som arbetar med tågsätt, den arbetsmetod som SJ AB tillämpar för motorvagnar. SJ AB har anpassat RPS så att det även ska fungera för deras arbetsmetod avseende ”lok och vagn”, men det har visat sig att användarna inte är nöjda med hur RPS är uppbyggt. Examensuppgiften var att utföra en nulägesanalys av hur användarna upplever hanteringen av ”lok och vagn” i RPS och utreda om den är komplex och/eller svår att ta till sig. Uppgiften angreps från två olika håll. Det ena angreppsättet var att utreda och beskriva hur valet av systemstöd gick till och varför valet blev RPS. Det syftade till att undersöka om användarnas upplevelser av RPS var relaterat till anskaffning och implementering av systemstödet och/eller om det var systemtekniskt relaterat. Det andra var att intervjua användarna för att konkretisera och identifiera de faktiska problem som de upplever med hanteringen av RPS.  Utredningen om av valet av RPS som utfördes i examensarbetet resulterade i att det framkom att SJ AB hade underskattat det förändringsarbete och de processer som måste hanteras i samband med implementering av ett nytt systemstöd. RPS är ett standardsystem som är tänkt att implementeras i sin helhet utan större förändringar i programvaran. När SJ AB istället beslutade att skräddarsy RPS efter redan befintliga arbetsmetoder, utan att ha gjort en större konsekvensanalys om vilka effekter det skulle få på utlovad prestanda, resulterade det i att RPS blev väldigt trögt att arbeta i. Utredningen visade också att en del av den frustration som idag finns hos användarna handlar om att de inte upplever att de är med på den förändringsresa som SJ AB genomgår. Intervjuerna resulterade i att fem olika problemområden identifierades som anledning till användarnas frustration. Som resultat presenterades för SJ AB förslag om hur problemen inom respektive område skulle kunna åtgärdas. Genom att grunden till dagens situation identifierades så blev det enklare att förstå användarna. En slutsats är således att det är av största vikt för SJ AB att arbeta aktivt för att användarna fortsättningsvis ska vara delaktiga i förändringsarbetet, vilket de presenterade rekommendationer leder fram till. / The thesis has been conducted at and in cooperation with SJ AB in Stockholm. SJ is a state owned limited company supplying passenger railway services. It is a complex process to design a transport system since there are many resources to be scheduled. When it comes to railway transport systems an additional constraint that makes it more difficult to plan the production is the limited track capacity available. There are tools available on the market in terms of enterprise resource planning systems. A while back SJ decided to replace several of their support systems with a new one with the aim of achieving a more integrated production planning process. RPS was implemented during 2011 and one year later the users were still not satisfied with the new support system. Their expression of dissatisfaction initiated the idea for the thesis. SJ AB’s fleet of vehicles can be divided into two main types; railcars and “locomotives with carriages”. RPS is designed to support companies with a railcar fleet. SJ AB customized RPS so that it was usable as a support system for “locomotives with carriages” but it has been highlighted that users are not completely satisfied with the customization. The task for this tehesis work was to conduct an analysis of why the users were dissatisfied and why the customization was perceived as complex. The task was addressed in two ways; the first was to look at and describe how SJ AB came to the decision that RPS should be implemented. The aim was to examine whether the users attitude to RPS could be related to the implementation process and/or to the organizational change. The second approach was interviews with the users in order to identify the actual perceived problems. The study revealed that SJ AB had underestimated the process of change that comes with the implementation of a new enterprise resource planning system. RPS is a system intended to be implemented without any major changes in the software. When SJ AB decided to alter RPS in order to customize it to their processes they did it without investigating what effects it might have on the performance measures. It showed that the alterations did have a negative impact on RPS performance measures. The study also showed that a part of the user’s frustration can most likely be related to the lack of knowledge related to a changeover process. Five main problem areas could be identified from the interviews. These areas amongst other minor issues are the reasons behind the user’s frustration. This thesis presents recommendations for each problem area on how SJ AB can go from here. By identifying the roots causing the current situation it became easier to understand the users. The conclusion is that the most important thing for SJ AB in this matter is to work actively with making sure the users feel that they are part of the changeover.
6

Lantano oksidinių junginių gamyba zolis – gelis metodu ir jų Rentgeno fotoelektronų spektrų tyrimas / Synthesis of Lanthanum oxide compounds by using sol - gel method and their X-ray study of photoelectron spectra

Momkus, Audrius 06 August 2012 (has links)
Darbo tikslas yra pagaminti La2O3 sluoksnius, atkaitinant prie aukštų temperatūrų nenaudojant vakuumo ir ištirti gautų sluoksnių Rentgeno fotoelektronų spektrus. Darbe aprašyti Rentgeno fotoelektronų spektroskopijos (RFS) (XPS - X-ray photoelectron spectroscopy) metodo, naudojamo įvairių medžiagų paviršių cheminei sudėčiai nustatyti, pagrindai. Pirmajame skyriuje aprašytas Rentgeno fotoelektroninės spektroskopijos metodas, pagrindinė RFS aparatūra bei teorinė dalis. Antrajame skyriuje aprašyti: La2O3 oksidiniai junginiai ir jų tyrimų metodika, plonų nanostruktūrizuotų medžiagų sluoksnių nusodinimo iš dujų fazės (plazmos) metodas- magnetroninis dulkinimas (magnetron sputtering), aparatūra ir zolis – gelis metodas. Trečiasis skyrius yra skirtas Rentgeno fotoelektroninių spektrų matavimų, naudojant spektrometrą XSAM 800 (Kratos Analytical, Didžioji Britanija) ypatumams ir bandinių gamybos metodikai aptarti. Pateiktas išsamus La2O3 sintezės zolių-gelių metodu technologijos aprašymas. Ketvirtajame skyriuje pateikiami eksperimentiniai rezultatai gauti, matuojant La2O3 Rentgeno fotoelektronų spektrus. Darbo pabaigoje yra pateikiamos išvados, kurios galėtų būti naudingos, tobulinant La2O3 bandinių gamybos technologiją. Gautas rezultatas: nustatyta, kad zolių – gelių technologija leidžia paprastais metodais, nenaudojant sudėtingos aparatūros,bei vakuuminės įrangos susintetinti La2O3. / The aim of presented work was to synthesis by using sol-gel technology and investigate the X- ray photoelectron spectra (XPS) of La2O3 thin films in the annealed high temperature and without using vacuum installation. In the present work we described the essentials of the method of X-ray photoelectron spectroscopy, used to determine chemical composition of various materials. In the first part describes the X- ray photo-electronic spectroscopy method, basic XPS equipment and theoretical part. The second part are described: La2O3 oxide compounds and the methods of their production from the gas phase – magnetron sputtering and sol – gel method. In the third part we discussed the peculiarities and methodology of spectrometer XSAM 800 (Kratos Analytical, Great Britain) samples production while measuring X-ray photoelectron spectra. The thorough description of the technology by synthesis of La2O3 sol-gel method was provided. The fourth part presents the experimental results obtained by measuring the La2O3X-ray photoelectron spectra. In the end of the work conclusions are produced that could be useful in improving production technology of La2O3 samples. Obtained results: we identified that sol-gel technology allows synthesizing La2O3 by simple methods, without using sophisticated equipment and vacuum installation.
7

Relationship of Solar Energy Installation Permits to Renewable Portfolio Standards and Insolation

Butler, Kirt Gordon 01 January 2015 (has links)
Legislated renewable portfolio standards (RPSs) may not be the key to ensure forecast energy demands are met. States without a legislated RPS and with efficient permitting procedures were found to have approved and issued 28.57% more permits on average than those with a legislated RPS. Assessment models to make informed decisions about the need and effect of legislated RPSs do not exist. Decision makers and policy creators need to use empirical data and a viable model to resolve the debate over a nationally legislated RPS. The purpose of this cross-sectional study was to determine if relationships between the independent variables of RPS and insolation levels and the dependent variable of the percentage of permits approved would prove to be a viable model. The research population was 68 cities in the United States, of which 55 were used in this study. The return on investment economic decision model provided the theoretical framework for this study and the model generated. The output of multiple regression analysis indicated a weak to medium positive relationship among the variables. None of these relationships were statistically significant at the 0.05 level. A model using site specific data might yield significant results and be useful for determining which solar energy projects to pursue and where to implement them without Federal or State mandated RPSs. A viable model would bring about efficiency gains in the permitting process and effectiveness gains in promoting installations of solar energy-based systems. Research leading to the development of a viable model would benefit society by encouraging the development of sustainable energy sources and helping to meet forecast energy demands.
8

Renewable Portfolio Standards and Environmental Goals

Smith, Josh T. 01 December 2018 (has links)
Renewable portfolio standards (RPS) are one of the most common state policies meant to encourage clean energy use. They require that utilities purchase electricity from certain qualifying electricity generators, usually with no reference to the cost of that electricity. AlthoughRPS are meant to clean up electricity generation through using clean energy sources instead of fossil fuels, they may not do so effectively. Further, some energy companies may lobby state legislators to include their energy sources regardless of their actual environmental benefit. The actual relationship between enacting an RPS and a state’s emissions from energy production is unclear. I explore RPS associations with carbon emissions. I collect data from 1960 to 2017 on factors related to environmental quality, energy production, and state economic factors. The data availability varies, however, so the most expansive variables are from 1960 to 2017 while many others fall into a shorter timeframe.The dataset relies heavily on the State Energy Data System (SEDS) that the Department of Energy’s Energy Information Administration (EIA) maintains, but also draws from a variety of other academic sources. Other variables, such as the dates of electricity market restructuring, I collect myself from primary sources.After accounting for existing linear trends in the data there appears to be no statistically significant relationship with RPS and carbon emissions.
9

Network Infiltration: Gaining Utility Acceptance of Alternative Energy Systems

Jurotich, Theresa M. 13 June 2003 (has links)
Our American electric system doggedly follows the central station model developed in the late 1800s. Thomas Hughes says the system gained momentum by adding more alliances with educators, politicians, and other industries until the social network was so intertwined with the technology that deviating from the central station model would be extremely difficult. However, change can occur if a variety of components change, but Hughes does not specify which components. Another network model, actor-network theory, proposes that social relationships (the same ones that maintain system momentum) are actually dynamic relationships that either actively maintain or change the system configuration. But which relationships need to change in order for utilities to accept and interconnect renewable energy with their grid? This thesis focuses on the social relationships created around renewable technologies and the idea that they can be successfully integrated into the network. In each case, customers, utility executives, institutions, and technology worked together to bring about utility acceptance. Individuals, working within these institutions, can bring about change. In New York City, an urban windmill was installed atop an apartment building. In Sacramento, CA, the municipal utility, SMUD, broke from the system model to become a leader in energy efficiency and renewable energy programs. In Texas, their renewables portfolio standard has become a standard for others to follow. / Master of Science
10

Ätzen von Titannitrid mit Halogenverbindungen / Kammerreinigung mit externer Plasmaquelle / Dry etch of Titanium Nitride TiN with halogenides in remote plasma source for chamber clean applications

Hellriegel, Ronald 19 June 2009 (has links) (PDF)
Mit zunehmender Miniaturisierung mikroelektronischer Bauelemente steigen die Anforderungen an reproduzierbare qualitätskonforme Schichten. Um die zur Herstellung notwendigen ALD/PVD/CVD-Schichtabscheideanlagen in einen zuverlässigen Zustand zu versetzen, ist eine regelmäßige Kammerreinigung notwendig. Während des Abscheideprozesses werden nicht nur das Substrat, sondern auch die umliegenden Kammerteile beschichtet. Diese Schichten wachsen mit jedem Beschichtungszyklus weiter an. Der Stress zwischen Schicht und Kammerwand steigt beständig, und es besteht das Risiko das Teile abplatzen und auf die Waferoberfläche fallen und damit die Struktur unbrauchbar machen. Um das zu verhindern, muss die Kammerwand in einen regelmäßigen Zustand versetzt werden, in dem sichergestellt ist, daß keine Schichtreste abplatzen können. In der vorliegenden Arbeit wird ein neues Verfahren zur Trockenreinigung von ALD-Titannitrid Kammern vorgestellt. Dazu wurden TiN-Stücke (hergestellt im ALD, CVD, PVD-Verfahren) auf einem temperaturgeregelten Probenhalter platziert. Eine Argon/NF3 Gasmischung wurde in einer externen Plasmaquelle (RPS) zerlegt und in die Reaktionskammer geschleust. Die Ätzung wurde mit in-situ Reflexionsmessung beobachtet. Experimente mit Chlorzugabe wurden unternommen und ein starker Einfluss auf den Ätzmechanismus beobachtet. Die Ätzraten des TiN sind exponentiell abhängig von der Temperatur und proportional abhängig von der Verfügbarkeit atomaren Fluors. Dieses wird bei der Zerlegung von NF3 frei gesetzt und steht der Reaktion zur Verfügung. Die NF3-Zerlegung in Fluor und Stickstoff wurde mit Hilfe der Massenspektrometrie (QMS) untersucht, Zerlegungsgrade größer 96% wurden erreicht. Mit Hilfe dieser Messung kann der Einfluss der Kammerreinigung auf den Treibhausgasausstoß (GWP) bestimmt werden. Mit dem Ar/NF3-Verfahren können die GWP-Emissionen um 90% im Vergleich zur RIE-Ätzung mit SF6 reduziert werden. Mit Argon/Chlor-Plasmen konnte kein Titannitrid geätzt werden, da die physikalische Sputterkomponente fehlte. Durch Hinzufügen von Chlor zu einer Ar/NF3-Gasmischung konnte die Ätzrate um bis zu 270% im Bereich niedrige Temperaturen/niedriger Druck gesteigert werden. Bei höheren Temperaturen/höherem Druck fielen die Ar/NF3/Chlor Ätzraten allerdings deutlich hinter die des Ar/NF3 zurück. Die dazu führenden Effekte werden untersucht und ausgeführt. Die Nutzung von externen Plasmaquellen bietet eine vielversprechende Alternative um Abscheideanlagen von TiN-Rückständen reinigen zu können. Bei hohen Temperaturen werden deutlich höhere Ätzraten als bei anderen Schichten (SiN, SiO2, W) erreicht. Für Anwendungen im niedrigen Temperaturbereich erlaubt die Zugabe von Chlor interessante Anwendungsmöglichkeiten. / Demands on state of the art deposition technologies for semiconductor production focus on uniformity, repeatability and low defectivity. The chamber condition is a key parameter to achieve these high demands in chemical vapour deposition (CVD) processes and are even more critical to the atomic layer deposition processes (ALD). During the deposition process not only the wafer surface but other chamber parts as well are covered with a thin film. This film accumulates during the deposition cycles and is prone to fall off the walls and pollute the wafer surface. The chamber parts that are exposed to the deposition must be set back to a steady state so that no deposits fall off the walls. The chamber condition also changes uncontrolled with varying film condition on the wall. A new approach for cleaning of ALD-titanium nitride (TiN) deposition chambers was investigated. To determine etch rates TiN-samples (created by ALD, CVD and PVD) were placed on a temperature controlled sample holder. An argon/NF3 mixture was excited in an upstream remote plasma source (RPS) and then routed through the reaction chamber. No further plasma activation inside the reaction chamber was done. The etching was monitored by in-situ reflectometry and etch rates were calculated. The effect of chlorine addition was also studied and strong influence on etch rates was found. The etch rate of TiN is dependent exponentially on temperature and very low etch rates were achieved below 70◦C at a chamber pressure ranging from 20-300 Pa. It was found that this correlates very well with the vapour pressure of the reaction product TiF4. At temperatures of 300◦C etch rates up to 800 nm/min were achieved. The optimum pressure for etching was found at 100 Pa while the pressure effect was small. The etch rate was mainly dependent on the availability of activated fluorine to create TiF4 by the reaction 2 NF3 → N2 + 6 F* 2 TiN + 8 F* → 2 TiF4 + N2 The NF3 decomposition to nitrogen and fluorine was monitored by quadrupole mass spectrometry (QMS) and was found to be greater than 96%. This figure allows an estimation of the amount of Global warm potential (GWP) gas emmited by the process for environmental considerations. Using argon/NF3 or argon/fluorine mixtures in RPS devices reduces the GWP emissions by more than 90% compared to RIE plasma cleaning with SF6. No etching occurred by using argon/chlorine only mixtures as no physical etch component was involved in RPS etch. However adding chlorine to the argon/NF3 mixture accelerated the etching process. Chlorine addition to the argon/NF3 mixture increased the etch rates up to 270% in the low pressure/low temperature regime. At higher temperatures or higher pressures the etch rates dropped below the etch rates achieved solely with fluorine chemistry. It must be emphasized that there is no physical acceleration of the ionized molecules toward the etched sample in this remote plasma setup. The usage of a remote plasma offers an alternative way to remove residues from chambers running TiN deposition processes. At high temperatures the Ar/NF3 offers remarkably high etching rates for TiN compared to other films (silicon nitride, -oxide, tungsten) usually cleaned by remote plasma. For low temperature applications the chlorine enhancement offers an interesting alternative to accelerate the etch process.

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