Photonic crystals (PCs) are nano-structured materials in which a periodic variation of the dielectric constant of the material results in a photonic band gap. By introducing defects into PCs, it is possible to build waveguides that can channel light along certain paths. It is also possible to construct micro-cavities that can localize photons in extremely small volumes. In this dissertation, to begin with, we computed the photonic crystals dispersion relations and found the photonic band gap (PBG) by the plane wave expansion method (PWE) in the frequency domain. Then, the finite difference time domain method (FDTD) along with the perfectly matched layer boundary conditions was adopted to solve Maxwell¡¦s equations, equivalent to simulate the movement behavior of the Photonic crystals. By properly varying the size of the defect on the PCs, it could really drop the particular wavelengths and guide them to output channels by PCs waveguides. We proposed the structures that would function as Wavelength-Division-Multiplexer (WDM). Secondly, coupled cavity waveguide of PC was used to control group velocity that achieved the slow light property. By calculating dispersion curve with PWE, we obtained group velocity characteristics in PCs waveguide. Meanwhile, we designed a novel Time-Division-Multiplexer (TDM) system by controlling the group velocity characteristics. Finally, we designed cascade ring resonators and expected to obtain an extendable delay line. Conventional delay line devices are propagating in a long waveguide to obtain the delay line property. An excellent delay line and ultra-small size properties are expected in the proposed structure. Because nano-technology has been making great progress steadily, it surely can be used to demonstrate a practical breakthrough in which the devices based on the PC integrated circuits are realized. These devices will be a potential key component in the applications of ultra-high-speed and ultra-high-capacity optical communications and optical data processing systems.

The goal of the thesis is to fabricate the integrated asymmetric Mach-Zehnder Interferometer and Optical waveguide Ring Resonator with simple fabrication process. A 1.49

The prospect of finding life outside Earth has fascinated mankind for ages, and new technology continuously pushes the boundary of how remote and how obscure evidence we can find. Employing smaller, or completely new, types of landers and robots, and equipping them with miniature instruments would indeed revolutionize exploration of other planets and moons. In this thesis, microsystems technology is used to create a miniature high-precision isotope-resolving molecular spectrometer utilizing the optogalvanic effect. The heart of the instrument, as well as this thesis, is a microplasma source. The plasma source is a split-ring resonator, chosen for its simplicity, pressure range and easily accessible plasma, and modified to fit the challenging application, e.g., by the adding of an additional ground plane for improved electromagnetic shielding, and the integration of microscopic plasma probes to extract the pristine optogalvanic signal. Plasma sources of this kind have been manufactured in both printed circuit board and alumina, the latter for its chemical inertness and for compatibility with other devices in a total analysis system. From previous studies, classical optogalvanic spectroscopy (OGS), although being very sensitive, is known to suffer from stability and reproducibility issues. In this thesis several studies were conducted to investigate and improve these shortcomings, and to improve the signal-to-noise ratio. Moreover, extensive work was put into understanding the underlying physics of the technique. The plasma sources developed here, are the first ever miniature devices to be used in OGS, and exhibits several benefits compared to traditional solutions. Furthermore, it has been confirmed that OGS scales well with miniaturization. For example, the signal strength does not decrease as the volume is reduced like in regular absorption spectroscopy. Moreover, the stability and reproducibility are greatly increased, in some cases as much as by two orders of magnitude, compared with recent studies made on a classical OGS setup. The signal-to-noise ratio has also been greatly improved, e.g., by enclosing the sample cell and by biasing the plasma. Another benefit of a miniature sample cell is the miniscule amount of sample it requires, which can be important in many applications where only small amounts of sample are available. To conclude: With this work, an important step toward a miniature, yet highly performing, instrument for detection of extraterrestrial life, has been taken.

In this thesis, simulations of two novel features of a serially cascaded micro-ring resonator are presented. The thesis firstly describes the simulation of a novel, silicon on insulator (SOI) method to determine the refractive index change of a covering analyte by the extraction of the refractive index change information in the time domain. Secondly a novel arrangement of the serially cascaded micro-rings has the effect of producing a null instead of a peak in the Vernier enhanced resonant spectrum. The null feature, as well as the enhanced sensitivity of the sensor, allows the sensor to be used as an intensity interrogating device. The development of these applications using ring resonator physics is achievable, out-of-lab, by the application of photonic software. Finite difference time domain (FDTD), beam propagation method (BPM), finite element(FE) and eigenmode expansion (EME) methods were all used in the simulated development of the sensor. As a result of the dual ring resonator arrangement, the temporal output undergoes a wavelength (or frequency) shift from the micrometre (or TeraHertz) to the centimeter (or GigaHertz) range of frequencies. This allows the refractive index information to become available for transmission in the cm wavelength range over a standard wireless network. The latter could be realized by integration of a photo-detector and antenna into the final design. The sensor output is invariant to any structural or temperature changes applied to both rings. Two sensors based on the same design, but having different fabrication methods, are simulated. Models of the rib and ridge structures are realized by using optical simulation software. The data obtained from these simulations are then used to plot the ring resonator outputs in MATLAB. The design can be applied for either bulk (homogeneous) or surface sensing. Only homogeneous sensing, in the form of a uniform refractive index cover change, is simulated in this thesis. The spectral sensitivity of the rib based design, without Vernier enhancement, is 87.65nmRIU-1, while the spectral sensitivity of the ridge waveguide, without Vernier enhancement, is 422nmRIU-1. The Vernier enhanced spectral sensitivity of the rib design is 6415nmRIU-1 and the limit of detection is 12.47x10-6 RIU. The temporal sensitivity of the ridge is 1.9418μsec RIU-1. The rib temporal sensitivity was not calculated but it is expected to be ~ five times less sensitive than the non Vernier enhanced ridge design. Titanium Nitride (TiN) heaters were also included over the coupling regions of the dual ring resonators. The effect of the heaters on the dual ring resonant wavelength and on the single ring spectral shift were also simulated using a multi-physics utility of the applied FEM and BPM software. With the heater at 1.28μm above the resonator coupling waveguides, a single ring spectral shift of 717pm was exhibited by this simulation. For the heater positioned at 250nm above the coupling waveguides, a single ring spectral shift of 2.89nm was exhibited. Finally the fabricated designs, which are based on the models of the simulation data, were characterized and the results compared to the predicted outputs generated by the models of the Temperature Invariant Modulated Output Sensor (TIMOS).

Optical switchers can fulfill the same functions as all-electrical switching systems and are expected to play a key role in the near future. In this thesis an analysis if an optical system that can potentially behave as an optical switcher is discussed. This configuration consists of three microring resonators which are coupled and tangential to one another in a topology that is similar to the Leibniz packing or Apollonian gasket. The ray-transfer matrix approach is used in order to represent the whole system by a single matrix. The structure receives an initial input signal and gives an output signal, which is changed by only a scalar factor. This description is equal to an eigenvalue problem, where the matrix of the system operates over an initial vector and results a product of a scalar (the eigenvalue) times the initial vector. Due to its unique geometry each ring is divided into two unequal segments. We introduce the loss coefficients to express the attenuation along those segments. The relation between the loss coefficients is being examined and the results are verified by simulations.

This thesis presents a detailed study of complementary metal-oxide-semiconductor (CMOS) compatible silicon waveguide and ring resonator technologies. The project specifically focuses on a range of slotted ring resonator configurations comprised of rib-style waveguides. Single ring resonators and Mach-Zehnder interferometers with double rings and central drop port channels have been successfully characterised. Thermal tuning techniques using on-chip heaters were used to determine their sensitivities. A stringent signal cleaning method was also developed to remove systematic background noise. Analysing the transmission signals produced by the Mach-Zehnder interferometers with double rings and a central drop port, it was revealed that coupled resonator induced transparency (CRIT) is created along with Fano-type resonances when the resonant peaks of the two ring resonators are tuned to overlap. The tuning of these features revealed a 2.7 and 2-fold improvement in device sensitivity. A 3x3 transfer matrix model has been developed to simulate the behaviour of light travelling through this configuration. Modelling suggests that effective refractive index and relative phase are the key factors in determining this behaviour. When tuned to close proximity, a resonant ‘superstate’ is achieved in which a modified model is required. Applying the single ring resonators to biosensing applications, basic refractive index testing and a glucose sensing calibration were conducted. A polydimethylsiloxane (PDMS) based microfluidics system was also developed to improve the reliability of sensing and enable automation. Using silicon nitride ring resonators with inkjet-printed upconverting nanoparticles, it was found that the evanescent field of the rings could stimulate the upconversion process revealing visible spectrum emission around the rings.

Microwave near-field probes (MNPs) confine evanescent fields to regions that are substantially smaller than the wavelength at the operation frequency. Such probes are able to resolve subwavelength features, thus providing resolution much higher than the classical Abb?? limit. These abilities of MNPs are primarily due to the evanescent nature of the field generated at the tip of the probes. In the past, MNPs with ultra-high resolution were designed by tapering a resonant opening to provide high field concentration and high sensitivity. The limitations of these MNPs were subject to low surface roughness and practical realization challenges due to their geometrical features and vibration control constraints. Metamaterials with their ability to enhance evanescent fields, lead to the speculation that they could potentially increase the sensitivity of near-field probe. Periodically arranged metamaterial unit elements such as split-ring-resonators (SRRs) can create negative permeability media. Placing such material layer in the proximity of a probe leads to enhancement of the evanescent waves. Guided by this remarkable feature of metamaterials, I proposed an MNP consisting of a wire loop concentric with a single SRR. The evanescent field behavior of the probe is analyzed using Fourier analysis revealing substantial enhancement of the evanescent field consistent with metamaterial theory predictions. The resolution of the probe is studied to especially determine its ability for sub-surface detection of media buried in biological tissues. The underlying physics governing the probe is analyzed. Variations of the probe are developed by placement of lumped impedance loads. To further increase the field confinement to smaller region, a miniaturized probe design is proposed. This new probe consists of two printed loops whose resonance is tunable by a capacitor loaded in the inner loop. The sensing region is decreased from ??/20 to ??/55, where ?? is the wavelength of the probe???s unloaded frequency. The magnetic-sensitive nature of the new probe makes it suitable for sensing localized magnetostatic surface resonance (LMSR) occurring in electrically very small particles. Therefore, I proposed a sensing methodology for detecting localized magnetostatic surface (LMS) resonant particles. In this methodology, an LMS resonant sphere is placed concentrically with the loops. A circuit model is developed to predict the performance of the probe in the presence of a magnetic sphere having Lorentz dispersion. Full-wave simulations are carried out to verify the circuit model predictions, and preliminary experimental results are demonstrated. The Lorentzian fit in this work implies that the physical nature of LMSR may originate from spin movement of charged particle whose contribution to effective permeability may be analogous to that of bound electron movement to effective permittivity in electrostatic resonance. Detection of LMSR can have strong impact on marker-based sensing applications in biomedicine and bioengineering.

Microring resonators are a fundamental building block for integrated optical filters, and have both modulation and waveform generation applications. A hybrid chalcogenide (As2S3) on titanium diffused (Ti:LiNbO3) waveguide platform has been developed to realize tunable microring resonators on a lithium niobate (LiNbO3) substrate. The use of a LiNbO3 substrate allows for electro-optic tuning, which is demonstrated for the first time on an As2S3 guided optical mode. While optical modes confined in diffused waveguides are commonly electro-optically tuned, the use of a rib waveguide external to the substrate poses new design challenges. Simulation work to determine the optimum electrode design was carried out, while also taking into account the limitations of working with a low melting temperature chalcogenide material. The tuning of this hybrid As2S3 on Ti:LiNbO3 device structure is demonstrated with fabricated Mach-Zehnder interferometers and ring resonators. Electro-optic tuning of the TM polarization utilizing the r13 LiNbO3 tuning coefficient is shown, yielding results that show an improvement over previous tunable LiNbO3 microring resonators. Simulations are also carried out to show the waveform generating capabilities of this hybrid device platform.

Nous assistons aujourd'hui à une explosion des demandes de calcul, de stockage et de transfert de données. Dans ce contexte, le développement des ordinateurs à haute performance est crucial mais il est limité par le débit et la consommation des interconnexions électriques entre puces ou intra-puces. La photonique sur silicium propose de lever ce verrou technologique en utilisant la maturité des procédés de fabrication de microélectronique pour concevoir des interconnexions optiques à très haut débit et à faible énergie par bit. Dans ces travaux, nous nous proposons de dimensionner un lien optique intégré sur silicium pour par exemple adresser le défi technologique des interconnexions intra-puces entre un processeur et une mémoire DRAM de dernière génération. Le lien optique conçu est multiplexé en longueur d’onde et utilise des composants intégrés à faible empreinte appelés anneaux résonants pour les fonctions de modulation et de démultiplexage. Les sources laser dont seront munis ces interconnexions consomment une puissance importante : nous nous attachons à optimiser la performance des composants utilisés en termes de puissance optique. A partir d’une analyse système, nous proposons une architecture de lien et construisons un modèle pour évaluer les pénalités en puissance optique associées au transmetteur et au récepteur du lien de communication à l’aide de simulations statiques et dynamiques. Ce modèle comprend des contributions des modulateurs et des filtres du démultiplexeur considérés individuellement ainsi que des contributions liées au multiplexage en longueur d’onde à l’émission et à la réception. Des modulateurs optiques en anneau sont fabriqués en technologie PIC25G, caractérisés en statique et en dynamique puis comparés au modèle. Enfin, des démonstrateurs multiplexés en longueur d’onde sont conçus et mis en œuvre permettant de valider nos modèles prédictifs et d'en soulever de futurs perfectionnements. / The 21st century is characterized by the explosion of demand for computing power as well as data storage and transfer. In this context, the development of high-performance computers is crucial but it is limited by the bandwidth and the energy efficiency of chip-to-chip and intra-chip electrical interconnects. Silicon photonics is a promising solution that uses microelectronics manufacturing techniques to fabricate optical components dedicated to efficient and high-bit-rate optical communication links.This work aims at designing a silicon photonic intra-chip high-bandwidth interconnect based on the example of latest-generation DRAM specifications. Wavelength division multiplexing (WDM) is used with low-footprint components called optical ring resonators for modulation and filtering.Lasers sources are a non-negligible contributor to overall system power consumption. For this reason, this thesis focuses on the optimization of ring resonators in terms of optical power. We first carry out a system analysis and propose an architecture that consists of parallel WDM links. Then a system model that evaluates optical power penalties related to the transmitter and the receiver is built up using static and dynamic simulations. Individual contributions of modulators, filters as well as the impact of adjacent channels at the transmitter and receiver sides are taken into account. Optical ring modulators are fabricated in PIC25G technology and characterized through static and dynamic measurements in order to validate our model. Finally, wavelength division multiplexed prototypes are designed and demonstrations corresponding to different WDM configurations are carried out which allows for suggestions of future improvements from the comparison with our predictive model.

Cells are the smallest living units and together they form all living organisms on earth. The cells are not only the building blocks of all living things, they also possess the most important information about life. A deeper understanding of these units may reveal hidden secrets about difficultly cured diseases, memory and learning, among others. Today’s techniques have problems such as low sensitivity, lethal preparation steps for the cells and overlaps in result spectra. Microfluidics has shown to be a useful tool allowing improved dynamic control, high throughput and sensitivity in nanoliters. The aim with this project is to design a microfluidic system for future integration with photonic sensors. Three different designs were developed, one design with the aim to integrate with photonic sensors and two for cell trapping only. Simulations and analytical calculations were performed to verify the requirements of single cell trapping. Simulation and analytical calculation results consorted, except for the ladder design. Moreover, strength calculations were performed for the sensor, to verify that it could handle the high pressures. A fabrication process was developed and an OSTE polymer was chosen as a suitable material. The transparency of the OSTE for fluorescent signals was studied. Results from the fabrication show proper lithography and molding as well as flow through channels. However, bubbles tend to appear in the channels. A rough surface of the chip appeared to primarily come from defects and filth on mask and mold. Three different connector solutions were tested, but they could not stand the high pressures. The work in this project has taken the development one step closer to the final goal to integrate photonic biosensors with a microfluidic system enabling single cell sensing.