For the past decade, the epoxy based photoresist SU-8 has been used commercially and in the lab for fabricating micro- and nano-structures. Investigators have studied how processing parameters such as pre- and post-exposure bake temperatures affect the resolution and quality of SU-8 structures patterned using ultraviolet or x-ray lithography. Despite the advances in understanding the phenomena, not all of them have been explored, especially those that are specific to multi-photon direct laser writing (mpDLW). Unlike conventional exposure techniques, mpDLW is an inherently three-dimensional (3D) process that is activated by nonlinear absorption of light. This dissertation reports how several key processing parameters affect mpDLW using SU-8 including pre-exposure bake duration, focal depth, incident laser power, focal-point scan speed, and excitation wavelength. An examination of solvent content of films at various stages in the mpDLW by 1H-NMR shows that even moderate solvent content (over 1 wt-%) affects film viscosity and photoacid diffusion lengths, and can greatly affect the overall fidelity of small features. A study of micro-fabricated feature size versus writing depth in the material shows that even slight refractive index mismatch between SU-8 and the medium between it and the focusing objective introduces spherical aberration that distorts the focus, causing feature size to decrease or even increase in size with writing depth, depending on the average exposure power used. Proper adjustment of the average exposure power was demonstrated as a means to fabricate more uniform features with writing depth. Third, when varying the power and scan speed, it was observed that the feature-size scales with these two parameters in a manner that is consistent with a three-photon absorption mechanism at an excitation wavelength of 800 nm. When an iii excitation wavelength of 725 nm is used, the feature-size scaling becomes consistent with that of two photon absorption. This shows that the photoinitiators in the SU-8 can be activated by either two- or three-photon absorption over this wavelength range. Using an irradiance of ~2 TW cm-2 and elongated femtosecond pulses resulted in an observed fourth order power dependence. This observation is in agreement with the literature and suggests that the effective absorptive nonlinearity is also sensitive to pulse duration. These findings will be useful for creating accurate models of the process of mpDLW in SU-8. These models could be used to optimize the processing parameters and develop new processing methods and materials for high-resolution fabrication of robust 3D microstructures. Some of the findings were used to develop a method for fabricating functional microlenses on the tip of optical fibers. This approach opens a new route to functional integrated photonic devices.

This report presents evidence that in-situ reduction of metal ions bound to a cross-linked polymer surface does not always result in nanoparticle formation solely at the interface, as is commonly assumed, but also as much as 40 nm deep within the polymer matrix. Tetrachloroaurate ions were bound using a variety of multi-functional amines to cured films of SU-8 -- a cross-linkable epoxide frequently used for micro- and nanofabrication -- and then treated using one of several reducing agents. The resulting gold-nanoparticle decorated films were examined by X-ray photoelectron spectroscopy and by plan-view and cross-sectional transmission electron microscopy. Reduction using sodium borohydride or sodium citrate generates bands of interspersed particles as much as 40 nm deep within the polymer, suggesting both the Au(III) complex and the reducing agent are capable of penetrating the surface and affecting reduction and formation of nanoparticles within the polymer matrix. It is shown that nanoparticle formation can be confined nearer to the polymer interface by using hydroquinone, a sterically bulkier and less flexible reducing agent, or by reacting the surface in aqueous media with high molecular-weight multifunctional amines, that presumably confine Au(III) nearer to the true interface. These finding have important implications for technologies that apply surface bound nanoparticles, including electroless metallization, catalysis, nano-structure synthesis, and surface enhanced spectroscopy.

O projeto de novos materiais para aplicações tecnológicas em biomateriais e bioengenharia é altamente dependente de como as células aderem à superfície de um material. A adesão e crescimento em biomateriais depende de propriedades do substrato, tais como molhabilidade da superfície, a topografia e a composição química de superfície. O objetivo deste estudo foi investigar as interações de diversos materiais com culturas celulares de células epitelial CHO (Ovário de Hamster Chinês). Os materiais utilizados foram SU-8 2005 (elétron-resiste, Microchem), PDMS (Poli (dimetil siloxano), Down Corning), DLC (Diamond-like Carbon) e vidro foi utilizado como referência. Superfícies de vidro, SU-8, PDMS e DLC lisas (planas) e isentas de modificação ou tratamento específico foram avaliadas quanto ao cultivo de células CHO. Valores médios dos fatores de forma (Ff) de 450 células foram calculados para cada uma das culturas realizadas sobre os 4 substratos. Foram obtidos Ff próximos a 0,52 para o vidro, o SU-8 liso e o DLC, demonstrando um bom espraiamento das células nessas superfícies. A superfície de PDMS apresentou valor unitário para o fator de forma (Ff), que está relacionado a um baixo espraiamento das células. A energia de superfície (ES) obtida para o PDMS é compatível com o resultado de fator de forma (Ff), uma vez que o menor valor para ES é coerente com a baixa adesão celular, o que gerou células com elevado fator de forma (Ff). O SU-8 foi modificado por implantação iônica com uma dose de 1,2x1016 átomos/cm2 e a energia de implantação foi de 8 keV, como referência foi utilizada uma superfície lisa de SU-8 sem implantação. Os resultados mostraram que o número de células vivas por unidade de área foi superior na superfície de SU-8 com prata implantada, mostrando o bom desempenho da cultura nesse substrato. As superfícies de DLC modificadas por tratamento com plasma de oxigênio (DLC-O) e com plasma de hexafluoreto de enxofre (DLC-F) foram utilizadas para cultura celular, os resultados de três experimentos independentes de contagem de número de núcleos (marcados com DAPI) por unidade de área confirmaram os resultados obtidos através do teste de viabilidade (marcados com trypan blue). A superfície de DLC-O, apresentou um maior número de núcleos por unidade de área, quando comparado à superfície DLC-F, da mesma forma que nos resultados obtidos pelo teste de viabilidade. As energias de superfície para as amostras de DLC-F e DLC-O indicaram que a superfície DLC-O é mais hidrofílica do que a superfície DLC-F, que está coerente com o que é conhecido da literatura e com os resultados obtidos em nosso trabalho. Cultura de células CHO foram realizadas em superfícies litografadas com estruturas hexagonais periódicas com o parâmetro 2R (diâmetro do círculo inscrito) sendo 12 µm, 30 µm, 80 µm, 280 µm, 560 µm e também em SU-8 liso. Estas superfícies foram caracterizadas por microscopia óptica de fluorescência com relação ao número de núcleos (marcados com o fluoróforo DAPI) por unidade de área, isto é, núcleos/mm2. Obteve-se histogramas com o número médio de núcleos por mm2 em três experimentos independentes, onde o número núcleos/mm2 foi consideravelmente maior para 80 µm. As superfícies contendo cavidades periódicas de 12 µm e 30 µm apresentaram dificuldade para as células CHO aderirem à superfície. Em uma outra etapa realizou-se culturas celulares em triplicata dos substratos com as superfícies 12 µm, 80 µm, 280 µm, 560 µm e também em SU-8 liso. As células em cada uma das superfícies foram analisadas por microscopia óptica (MO) para avaliação da viabilidade celular, utilizando marcador trypan blue. Obteve-se histogramas com os valores médios para o número de células vivas/mm2 para as culturas celulares que corrobora os resultados obtidos no histograma da cultura celular que tiveram os núcleos marcados pelo fluoróforo DAPI. Assim, fica confirmado o melhor desempenho da cultura celular no substrato 80 µm que apresentou o maior número de células vivas/mm2 As micrografias obtidas através de marcação por DAPI foram analisadas através da função de correlação com intuito de se entender como as células estavam organizadas. Isso foi feito para cada uma das superfícies litografadas, 12 µm, 30 µm, 80 µm, 280 µm, 560 µm e também em SU-8 liso. As superfícies dos substratos 80 µm apresentaram os menores valores de distâncias para primeiros e segundos vizinhos, ou seja, as células estão mais próximas umas das outras. As demais superfícies tendem a separar mais as células. Obteve-se também os valores de raio de aglomerado (rc), distância entre os aglomerados (dc) e o número de primeiros vizinhos (Np) através do ajuste da função de correlação. A análise de correlação mostrou com clareza o que não era evidenciado apenas visualizando-se as imagens. Ela mostra que as células, mesmo em SU-8 liso tem a forte tendência de formar aglomerados de células com raio de aproximadamente 45 µm. No caso de substratos lisos, células CHO apresentaram a melhor adesão na superfície do SU-8, seguido do DLC, enquanto que o PDMS foi a pior situação, devido à baixa molhabilidade do material. No caso de superfícies com microestrutura, SU-8 contendo microcavidades hexagonais de 12 e 30 µm mostraram ser as situações mais adversas para o crescimento de células CHO, provavelmente por causa da topografia das cavidades serem de menor tamanho quando comparadas ao tamanho das células CHO. Em vez disso, SU-8, contendo microcavidades hexagonais de 80 µm foi a superfície mais favorável para o crescimento de células CHO. / The design of new materials for technological applications in biomaterials and bioengineering is highly dependent on how the cells adhere to the material surface. The cells adhesion and growth on biomaterials depends on substrate properties such as surface wettability, topography and the chemical composition. The aim of this study was to investigate the interactions of various materials with cell cultures of epithelial cells CHO (Chinese Hamster Ovary). The materials used were SU-8 2005 (electron resists, Microchem), PDMS (poly (dimethyl siloxane), Dow Corning), DLC (Diamond-like Carbon) and glass was used as reference. Unmodified and flat surfaces of glass, SU-8, PDMS and DLC were evaluated for the culture of CHO cells. Form factor (Ff) values were calculated as average of 450 cells for each of the cultures performed on the four substrates. Ff close to 0.52 was obtained for flat surfaces of glass, SU-8 and DLC, showing a good cell spreading on these surfaces. The surface of PDMS presented a form factor (Ff) near unity, which is related to low spreading cell. The surface energy (ES) obtained for the PDMS is coherent with the Ff result, since the smallest value of ES is consistent with the low cell adhesion, which resulted in cells with a high Ff. The SU-8 was modified by ion implantation using a dose of 1.2x1016 atoms/cm2 and an implantation energy of 8 keV, unmodified flat SU-8 was used as a reference. The cell culture results showed that the number of live cells per unit area was greater in the SU-8 surface implanted with silver, showing a good performance in the culture substrate. The DLC surfaces modified by plasma treatment with oxygen (DLC-O) and sulfur hexafluoride (DLC-F) were used for cell culture. The results of three independent experiments, counting the number of nuclei (marked with DAPI) per unit area, confirmed the results obtained by the viability test (marked with trypan-blue). The surface of the DLC-O had higher number of nuclei per unit area when compared to the surface of the DLC-F, similarly to the results obtained for the viability test. The surface energies of the DLC-F and DLC-O samples indicated that the DLC-O surface is more hydrophilic than the DLC-F surface, which is consistent with results obtained with our work and with the literature. CHO cell culture were performed on surfaces with periodic hexagonal structures with the diameter of inscribed circle (2R) given by 12 µm, 30 µm, 80 µm, 280 µm, 560 µm and also on flat SU-8. These surfaces were characterized by fluorescence optical microscopy with respect to the number of nuclei (marked with fluorophore DAPI) per unit area, i.e. nuclei/mm2. Histograms were obtained for the average number of nuclei per mm2 in three independent experiments, where the substrate with periodic hexagonal structures with 2R = 80 µm presented considerably higher nuclei/mm2. Surfaces containing periodic cavities of 2R =12 µm and 30 µm were adverse for CHO cells adhesion. In another approach, cell culture were analyzed by light microscopy (LM) for evaluation of cell viability using trypan-blue marker. This was carried out in triplicate cell culture on substrates with surfaces 12 µm, 80 µm, 280 µm, 560 µm and also on flat SU-8. Histograms were generated for average number of living cells/mm2 for each substrate, which corroborates with the results obtained for the cell culture marked with fluorophore DAPI. Thus, it is confirmed the better performance of the cell culture on substrates with 2R = 80 µm, presenting the highest number of living cells/mm2. The micrographs obtained with cells marked with DAPI were analyzed through the correlation function with the aim of understanding how the cells were organized. This was performed for each of the lithographed surfaces 12 µm, 30 µm, 80 µm, 280 µm, 560 µm and also flat SU-8. The surfaces of the substrates with 2R = 80 µm had the lowest values for length between its neighbors, that is, the cells are closer to each other. The remaining surfaces tend to separate the cells. Also were obtained the cluster radius values (rc), the distance between the clusters (dc) and the number of nearest neighbors (Np) through the correlation function fitting. The correlation analysis clearly showed what was not possible to observe by viewing the images. It shows that the cells, even in flat SU-8, have a strong tendency to form clusters of cells within about 45 micrometers. In the case of flat substrates, CHO cells exhibited better adhesion to the surface of SU-8, followed by the DLC, while the PDMS was worse due to low wettability of the material. In the case of surfaces with microstructures, SU-8 containing hexagonal microstructures of 12 and 30 µm showed to be the most adverse conditions for the CHO cell growth, probably because of the topography of the cavities being smaller in size compared to the size of CHO cells. SU-8 with 80 µm hexagonal microstructures was more favorable surface for the growth of CHO cells.

O projeto de novos materiais para aplicações tecnológicas em biomateriais e bioengenharia é altamente dependente de como as células aderem à superfície de um material. A adesão e crescimento em biomateriais depende de propriedades do substrato, tais como molhabilidade da superfície, a topografia e a composição química de superfície. O objetivo deste estudo foi investigar as interações de diversos materiais com culturas celulares de células epitelial CHO (Ovário de Hamster Chinês). Os materiais utilizados foram SU-8 2005 (elétron-resiste, Microchem), PDMS (Poli (dimetil siloxano), Down Corning), DLC (Diamond-like Carbon) e vidro foi utilizado como referência. Superfícies de vidro, SU-8, PDMS e DLC lisas (planas) e isentas de modificação ou tratamento específico foram avaliadas quanto ao cultivo de células CHO. Valores médios dos fatores de forma (Ff) de 450 células foram calculados para cada uma das culturas realizadas sobre os 4 substratos. Foram obtidos Ff próximos a 0,52 para o vidro, o SU-8 liso e o DLC, demonstrando um bom espraiamento das células nessas superfícies. A superfície de PDMS apresentou valor unitário para o fator de forma (Ff), que está relacionado a um baixo espraiamento das células. A energia de superfície (ES) obtida para o PDMS é compatível com o resultado de fator de forma (Ff), uma vez que o menor valor para ES é coerente com a baixa adesão celular, o que gerou células com elevado fator de forma (Ff). O SU-8 foi modificado por implantação iônica com uma dose de 1,2x1016 átomos/cm2 e a energia de implantação foi de 8 keV, como referência foi utilizada uma superfície lisa de SU-8 sem implantação. Os resultados mostraram que o número de células vivas por unidade de área foi superior na superfície de SU-8 com prata implantada, mostrando o bom desempenho da cultura nesse substrato. As superfícies de DLC modificadas por tratamento com plasma de oxigênio (DLC-O) e com plasma de hexafluoreto de enxofre (DLC-F) foram utilizadas para cultura celular, os resultados de três experimentos independentes de contagem de número de núcleos (marcados com DAPI) por unidade de área confirmaram os resultados obtidos através do teste de viabilidade (marcados com trypan blue). A superfície de DLC-O, apresentou um maior número de núcleos por unidade de área, quando comparado à superfície DLC-F, da mesma forma que nos resultados obtidos pelo teste de viabilidade. As energias de superfície para as amostras de DLC-F e DLC-O indicaram que a superfície DLC-O é mais hidrofílica do que a superfície DLC-F, que está coerente com o que é conhecido da literatura e com os resultados obtidos em nosso trabalho. Cultura de células CHO foram realizadas em superfícies litografadas com estruturas hexagonais periódicas com o parâmetro 2R (diâmetro do círculo inscrito) sendo 12 µm, 30 µm, 80 µm, 280 µm, 560 µm e também em SU-8 liso. Estas superfícies foram caracterizadas por microscopia óptica de fluorescência com relação ao número de núcleos (marcados com o fluoróforo DAPI) por unidade de área, isto é, núcleos/mm2. Obteve-se histogramas com o número médio de núcleos por mm2 em três experimentos independentes, onde o número núcleos/mm2 foi consideravelmente maior para 80 µm. As superfícies contendo cavidades periódicas de 12 µm e 30 µm apresentaram dificuldade para as células CHO aderirem à superfície. Em uma outra etapa realizou-se culturas celulares em triplicata dos substratos com as superfícies 12 µm, 80 µm, 280 µm, 560 µm e também em SU-8 liso. As células em cada uma das superfícies foram analisadas por microscopia óptica (MO) para avaliação da viabilidade celular, utilizando marcador trypan blue. Obteve-se histogramas com os valores médios para o número de células vivas/mm2 para as culturas celulares que corrobora os resultados obtidos no histograma da cultura celular que tiveram os núcleos marcados pelo fluoróforo DAPI. Assim, fica confirmado o melhor desempenho da cultura celular no substrato 80 µm que apresentou o maior número de células vivas/mm2 As micrografias obtidas através de marcação por DAPI foram analisadas através da função de correlação com intuito de se entender como as células estavam organizadas. Isso foi feito para cada uma das superfícies litografadas, 12 µm, 30 µm, 80 µm, 280 µm, 560 µm e também em SU-8 liso. As superfícies dos substratos 80 µm apresentaram os menores valores de distâncias para primeiros e segundos vizinhos, ou seja, as células estão mais próximas umas das outras. As demais superfícies tendem a separar mais as células. Obteve-se também os valores de raio de aglomerado (rc), distância entre os aglomerados (dc) e o número de primeiros vizinhos (Np) através do ajuste da função de correlação. A análise de correlação mostrou com clareza o que não era evidenciado apenas visualizando-se as imagens. Ela mostra que as células, mesmo em SU-8 liso tem a forte tendência de formar aglomerados de células com raio de aproximadamente 45 µm. No caso de substratos lisos, células CHO apresentaram a melhor adesão na superfície do SU-8, seguido do DLC, enquanto que o PDMS foi a pior situação, devido à baixa molhabilidade do material. No caso de superfícies com microestrutura, SU-8 contendo microcavidades hexagonais de 12 e 30 µm mostraram ser as situações mais adversas para o crescimento de células CHO, provavelmente por causa da topografia das cavidades serem de menor tamanho quando comparadas ao tamanho das células CHO. Em vez disso, SU-8, contendo microcavidades hexagonais de 80 µm foi a superfície mais favorável para o crescimento de células CHO. / The design of new materials for technological applications in biomaterials and bioengineering is highly dependent on how the cells adhere to the material surface. The cells adhesion and growth on biomaterials depends on substrate properties such as surface wettability, topography and the chemical composition. The aim of this study was to investigate the interactions of various materials with cell cultures of epithelial cells CHO (Chinese Hamster Ovary). The materials used were SU-8 2005 (electron resists, Microchem), PDMS (poly (dimethyl siloxane), Dow Corning), DLC (Diamond-like Carbon) and glass was used as reference. Unmodified and flat surfaces of glass, SU-8, PDMS and DLC were evaluated for the culture of CHO cells. Form factor (Ff) values were calculated as average of 450 cells for each of the cultures performed on the four substrates. Ff close to 0.52 was obtained for flat surfaces of glass, SU-8 and DLC, showing a good cell spreading on these surfaces. The surface of PDMS presented a form factor (Ff) near unity, which is related to low spreading cell. The surface energy (ES) obtained for the PDMS is coherent with the Ff result, since the smallest value of ES is consistent with the low cell adhesion, which resulted in cells with a high Ff. The SU-8 was modified by ion implantation using a dose of 1.2x1016 atoms/cm2 and an implantation energy of 8 keV, unmodified flat SU-8 was used as a reference. The cell culture results showed that the number of live cells per unit area was greater in the SU-8 surface implanted with silver, showing a good performance in the culture substrate. The DLC surfaces modified by plasma treatment with oxygen (DLC-O) and sulfur hexafluoride (DLC-F) were used for cell culture. The results of three independent experiments, counting the number of nuclei (marked with DAPI) per unit area, confirmed the results obtained by the viability test (marked with trypan-blue). The surface of the DLC-O had higher number of nuclei per unit area when compared to the surface of the DLC-F, similarly to the results obtained for the viability test. The surface energies of the DLC-F and DLC-O samples indicated that the DLC-O surface is more hydrophilic than the DLC-F surface, which is consistent with results obtained with our work and with the literature. CHO cell culture were performed on surfaces with periodic hexagonal structures with the diameter of inscribed circle (2R) given by 12 µm, 30 µm, 80 µm, 280 µm, 560 µm and also on flat SU-8. These surfaces were characterized by fluorescence optical microscopy with respect to the number of nuclei (marked with fluorophore DAPI) per unit area, i.e. nuclei/mm2. Histograms were obtained for the average number of nuclei per mm2 in three independent experiments, where the substrate with periodic hexagonal structures with 2R = 80 µm presented considerably higher nuclei/mm2. Surfaces containing periodic cavities of 2R =12 µm and 30 µm were adverse for CHO cells adhesion. In another approach, cell culture were analyzed by light microscopy (LM) for evaluation of cell viability using trypan-blue marker. This was carried out in triplicate cell culture on substrates with surfaces 12 µm, 80 µm, 280 µm, 560 µm and also on flat SU-8. Histograms were generated for average number of living cells/mm2 for each substrate, which corroborates with the results obtained for the cell culture marked with fluorophore DAPI. Thus, it is confirmed the better performance of the cell culture on substrates with 2R = 80 µm, presenting the highest number of living cells/mm2. The micrographs obtained with cells marked with DAPI were analyzed through the correlation function with the aim of understanding how the cells were organized. This was performed for each of the lithographed surfaces 12 µm, 30 µm, 80 µm, 280 µm, 560 µm and also flat SU-8. The surfaces of the substrates with 2R = 80 µm had the lowest values for length between its neighbors, that is, the cells are closer to each other. The remaining surfaces tend to separate the cells. Also were obtained the cluster radius values (rc), the distance between the clusters (dc) and the number of nearest neighbors (Np) through the correlation function fitting. The correlation analysis clearly showed what was not possible to observe by viewing the images. It shows that the cells, even in flat SU-8, have a strong tendency to form clusters of cells within about 45 micrometers. In the case of flat substrates, CHO cells exhibited better adhesion to the surface of SU-8, followed by the DLC, while the PDMS was worse due to low wettability of the material. In the case of surfaces with microstructures, SU-8 containing hexagonal microstructures of 12 and 30 µm showed to be the most adverse conditions for the CHO cell growth, probably because of the topography of the cavities being smaller in size compared to the size of CHO cells. SU-8 with 80 µm hexagonal microstructures was more favorable surface for the growth of CHO cells.

Les composants passifs hyperfréquences deviennent de plus en plus commercialisés et employés dans les systèmes de télécommunications. La croissance technologique et l’augmentation de la demande des nouvelles applications requièrent de meilleures performances et de moindres coûts. Dans les applications sans fil et notamment dans les modules « émission/réception », les circulateurs sont utilisés pour l’émission et la réception des signaux simultanément à l’aide d’une seule antenne. Les couches magnétiques traditionnellement déposées et intégrées exigent une cristallisation à haute température ainsi que l’application d’un champ magnétique externe pour garder l’orientation des moments magnétiques. Cette orientation est cependant obtenue par des aimants lourds et volumineux. Devant ces limitations technologiques ainsi que la demande de miniaturisation, l’emploi de l’hexaferrite de baryum sous sa forme particulaire devrait permettre le développement de circulateurs auto-polarisés et miniaturisés à matériaux magnétiques composites. Les travaux présentés dans ce manuscrit ont pour objectif d’étudier et de réaliser un circulateur hyperfréquence à nano particules magnétiques orientées dans la bande 40-60 GHz. L’état de l’art expose les différentes topologies de circulateurs dont la topologie coplanaire est choisie pour notre application. L’étude analytique est basée sur les travaux de Bosma permettant de modéliser le circulateur triplaque. Les principales dimensions géométriques obtenues sont ensuite transposées vers la structure coplanaire en 3D à l’aide de l’outil de simulation HFSS. Devant les limitations de cet outil, différentes structures ont été étudiées et simulées numériquement pour présenter au mieux le matériau composite. Plusieurs séries de prototypes sont ensuite fabriquées à partir des structures optimisées en simulation numérique. Le matériau magnétique composite déposé a des épaisseurs de 40 et 100 μm. Les caractérisations hyperfréquences montrent la performance des dispositifs réalisés. Des pistes de recherche sont proposées pour l’amélioration des performances de nos prototypes / Microwave passive components become increasingly commercialized and used in telecommunications systems. Technological growth and the increased demand for new applications require higher performance and lower costs. In wireless applications, especially in "transceivers", circulators are used for transmitting and receiving signals simultaneously using a single antenna. Magnetic layers traditionally deposited and integrated require a high crystallization temperature and the application of an external magnetic field to keep the orientation of magnetic moments. This orientation is however obtained by heavy and bulky magnets. Given these technological limitations and the need to miniaturize, the use of barium hexaferrite particles envisages the development of self-biased and miniaturized circulators having magnetic composite materials. The ambition of this work is to study and to fabricate a microwave circulator with magnetic nanoparticles oriented in the 40 - 60 GHz range. The state of the art describes various topologies coplanar circulators from which the coplanar topology is chosen for our application. The analytical study is based on Bosma’s work to model the stripline circulator. The main geometric dimensions obtained are then transposed to the coplanar structure using the 3D simulation tool HFSS. Faced with this tool’s limitations, different structures were studied and simulated numerically to shape the best the composite material. Several series of prototypes are then manufactured. The magnetic composite material was deposited in layers having thicknesses of 40 and 100 μm. The microwave characterizations show the performance of the fabricated device. Research tracks are proposed to improve the performance of our prototypes

Organické elektronické zariadenia sú vyvíjané ako vhodné riešenia senzorov pre bioelektroniku, a to najmä kvôli dobrej biokompatibilite organických polovodičov v nich použitých. Takzvané biosenzory dokážu premeniť elektrochemické procesy na elektronický signál. Matrica takýchto biosenzorov môže simultánne skenovať množstvo biologických vzoriek, alebo rôznych tkanív v živých systémoch. Aktívnou súčasťou zariadenia je organický elektrochemický tranzistor (OECT). V tejto práci je diskutovaný teoretický rámec fungovania takéhoto zariadenia, jeho elektrická charakterizácia, aplikácia v biosenzoroch na báze buniek, spôsoby výroby a aktuálnym stavom techniky v oblasti organickej elektroniky. Experimentálna časť obsahuje konkrétne výrobné postupy vývoja OECT zariadení, ktoré boli použité v našom laboratóriu. Hlavný dôraz sa kladie na schopnosť vyrobených zariadení detekovať reakciu a monitorovať stimuláciu elektrogenných buniek. Za týmto účelom boli vyvinuté matice mikroelektródových OECT zariadení založených na polovodivom polyméri PEDOT:PSS. Tieto boli vyrobené s využitím bežnými tlačiarenských techník (atramentová tlač a sieťotlač) spolu so štandardnými litografickými postupmi. Najnovšie nami vyvinuté zariadenia dosahujú najväčšieho zosílením signálu, g = 2,5 mS a časovú konštantu t = 0,15 s. Tieto zariadenia sú porovnateľné, často dokonca lepšie ako niektoré iné najmodernejšie a plne litograficky pripravené senzory.

Ce travail de thèse s'inscrit dans le contexte des drones vise à réaliser à terme un Nano-dispositif volant (Nano Aerial Vehicle) capable d'imiter le vol des insectes. Ce mode de locomotion est privilégié car il présente des caractéristiques très adaptées au vol en milieu confiné. La solution proposée consiste à développer un drone de la taille d'un insecte s'appuyant sur des ailes vibrantes pour se mouvoir et à utiliser les technologies MEMS pour répondre aux problématiques de fabrication et de réduction d'échelle. La réussite d'un tel projet soulève néanmoins de nombreux défis scientifiques et technologiques, en particulier, les aspects aéro-élastiques des ailes et l'autonomie du drone. Pour répondre à ces défis, nous proposons dans un premier temps de mettre en œuvre des concepts comme la résonance et la torsion passive sur des prototypes en polymère (SU-8) réalisés par photolithographie. Dans un second temps, les différents composants de la chaîne de puissance sont optimisés, notamment l'actionneur électromagnétique, la liaison et les ailes de manière à maximiser la force de portance générée. Suite à ces améliorations, nous démontrons de façon expérimentale que le prototype était capable non seulement de reproduire une cinématique complexe mais également de compenser 75% de son poids. / This manuscript reports a work which aims to develop a tiny flying robots inspired by natural flyers. Our main objective is to devise a flying robot mimicking insects in terms of kinematics and scale using MEMS technologies in order to answer the scale challenges: the large-scale manufacturing and the system's small scale. The success this project faces different challenges such as aeroelastic aspects of wings and drone autonomy.In this work we propose the use of original concepts like resonance and passive torsion of the wings which are implemented on all-polymer prototypes obtained using a micromachining SU-8 photoresist process. In order to achieve a better efficiency of the prototype, each element of the energy transduction has been carefully examined and optimized. Especially, the actuation, the transmission and the wings in order to increase the lift. These improvements demonstrate experimentally that the prototype is able to produce a complex kinematic and compensate 75 % of its weight.

Ce document présente les étapes de fabrication ainsi que la caractérisation d'un coupleur optique composé de deux guides d'ondes d'indice de réfraction éloigné. Le guide d'ondes avec le plus fort indice de réfraction est en Silicium (Si) d'indice de réfraction de 3,44 et celui de plus faible indice est fait de SU-8(TM) dont l'indice de réfraction est de 1,565. La principale caractéristique du coupleur est sa géométrie. Le couplage se fait par une approche progressive des deux guides d'ondes. Le guide d'onde de SU-8(TM) progresse vers le guide de Si en empruntant un rayon de courbure constant dans la zone de couplage pour finalement superposer le guide de Si lorsque les parcours optiques sont parallèles. Par l'approche progressive, le transfert optique se fera de façon adiabatique. Une étude numérique a montré qu'il était possible d'atteindre un coefficient de couplage de plus de 30%. Bien que les résultats expérimentaux ne soient pas aussi encourageants, ils montrent la présence non négligeable de couplage.

Actuellement, plusieurs types de photodétecteurs sont disponibles sur le marché. Leurs performances se caractérisent notamment par la réponse spectrale, le courant d'obscurité, le rapport signal sur bruit, le rendement quantique et le temps de réponse. L'émergence de nouvelles applications nécessite des photodétecteurs de plus en plus sensibles, afin de pouvoir détecter de très faibles niveaux de radiation, voire de pouvoir compter des photons un par un. Ce travail de thèse s'intéresse aux moyens de réalisation de nanopixels pour la détection de faibles niveaux de lumière visible, en utilisant l'absorption dans des nanocristaux de silicium. Après avoir discuté de l'influence de la réduction des dimensions sur les propriétés électroniques et optiques du silicium, ainsi que de l'utilisation du blocage de Coulomb pour la photodétection, nous présentons un procédé de fabrication et d'isolation de nanopiliers contenant des nanocristaux de silicium dans une matrice d'oxyde de silicium. Les caractéristiques électriques des nanopixels intégrant ces nanocristaux ont permis de mettre en évidence les phénomènes de piégeage de charges dans les îlots, ainsi que leur contribution aux mécanismes de transport. Nous présentons finalement une première étude des propriétés électro-optiques des nanopixels qui ont été caractérisés par des mesures de photocourant.

Ce travail de thèse s'inscrit dans une thématique pluridisciplinaire qui regroupe des domaines comme la dynamique des structures, le biomimétisme, les technologies de réalisation de microsystème et l'aérodynamique. Le but de ce travail est de progresser dans la conception et la réalisation d'un microsystème à ailes résonantes à l'échelle de l'insecte en utilisant des technologies issues des microsystèmes. Des concepts sont développés dans cette thèse. En particulier, l'obtention d'un battement de grande amplitude par l'utilisation de la résonance de l'aile et la rotation de l'aile de façon passive. Des prototypes ont été réalisés en utilisant le polymère SU-8 dont les caractéristiques mécaniques sont proches de celles d'une aile d'insecte. Cette structure a été mise en vibration an de génerer de la portance mais n'a pour l'instant pas été capable de se propulser dans les airs. Les concepts d'aile résonante et de torsion passive ont toutefois pu être validés. Une étude plus spécique de simulation de vibration en grands déplacements a été menée et un premier modèle élément ni est proposé. Les questions d'amortissement des ailes dans l'air sont également traitées en vu de pouvoir poursuivre l'étude et différencier les efforts aérodynamiques de l'amortissement propre à la structure. Nous disposons d'un outil expérimental pour étudier à l'échelle de l'insecte la cinématique des ailes et les effets aérodynamiques.