With the rapid increase in miniaturization of mechanical components, the need for a hard, protective coatings is of great importance. In this study we investigate some of the mechanical, chemical and physical properties of the SiCN thin films. Thin films of amorphous silicon carbide nitride (a-SiCxNy) were deposited in a RF magnetron sputtering system using a powder pressed SiC target. Films with various compositions were deposited on to silicon substrate by changing the N2/Ar gas ratios during sputtering. Nano-indentation studies were performed to investigate the mechanical properties such as hardness and reduced modulus of the SiCN films. Surface morphology of the films was characterized by using atomic force microscopy (AFM). X-ray photoelectron spectroscopy (XPS) data indicated that the chemical status is highly sensitive to the nitrogen ratios during sputtering. Further, the films were annealed in dry oxygen ambient in the temperature range of 400 – 900°C and characterized using XPS to investigate the chemical composition and oxidation kinetics at each annealing temperature. The surface roughness of these films was studied as a function of annealing temperature and film composition with the help of a "Veeco" optical profilometer. Nano-indentation studies indicated that the hardness and the reduced modulus of the film are sensitive to the N2/Ar ratio of gas flow during sputtering. AFM studies revealed that the films become smoother as the N2/Ar ratio is increased. XPS data indicated the existence of C-N phases in the as-deposited films. The study of oxidation kinetics of RF sputter deposited SiCN thin films, using XPS, suggest that N2 co-sputtering helps to suppress the formation of a surface oxide, by allowing un-bonded Si to bond with N and C inside the vacuum chamber as opposed to bonding with O in atmosphere.

Les films à base de Si, C et N sont des matériaux multifonctionnels aux propriétés optiques, électroniques et mécaniques attractives pour des applications dans le domaine du photovoltaïque et de la microélectronique entre autres. Il existe une forte dépendance de ces propriétés par rapport à la structure. Ce travail de thèse a plusieurs objectifs. Le premier objectif est la mise au point d’un procédé de dépôt de films minces de SiCxNy:H dans un réacteur CVD assistée par plasma micro-ondes ECR avec les précurseurs organosiliciés héxaméthyldisilazane (HMDSN) et tétraméthylsilane (TMS). Le second objectif est la caractérisation des dépôts synthétisés dans ce nouveau réacteur et le développement d’outils de diagnostic afin d’étudier le dépôt en cours de croissance. Deux techniques de caractérisation in situ ont été développées. Un procédé d’extraction de la ligne de base interférentielle des spectres FT-IR permet la détermination des paramètres optiques dans l’infrarouge (indice de réfraction et épaisseur) du film sondé. Ce diagnostic est adapté aussi bien à une analyse post-dépôt qu’au contrôle de procédé in situ en temps réel. De plus, la mise au point de la technique de réflectométrie a permis le suivi et le contrôle des dépôts lors de leur croissance dans le domaine visible. L’influence de la température de dépôt, du flux de précurseur et de la puissance injectée dans le plasma ainsi que le vieillissement des films à l’air ont été étudiés dans un premier temps. Ces études ont permis l’établissement des paramètres de dépôts optimaux et la détermination des conditions menant aux dépôts les plus denses avec la meilleure résistance à l’oxydation. Dans un second temps, l’étude de l’influence du taux d’azote dans le mélange gazeux a permis la synthèse de films avec une composition variée allant d’un type SiC:H à un type SiN:H et ainsi d’obtenir une large gamme d’indices de réfraction. Enfin, l’utilisation d’un procédé de dépôt hybride couplant le plasma ECR micro-ondes dans un mélange gazeux contenant TMS à la pulvérisation d’une cible de Si, a mené à la synthèse de films plus riches en silicium améliorant la densité de liaisons Si-C et entraînant la hausse de l’indice de réfraction des films / Si, C and N based thin films are multifunctional materials with optical, electronical and mechanical properties showing great potential for photovoltaic and microelectronic applications and more. Those properties exhibit a strong dependency upon the structure of the thin film. Several goals were set for this thesis work: the development of a ECR microwave plasma assisted CVD deposition reactor using organosilicon precursors (hexamethyldisilazane or HMDSN and tetramethylsilane or TMS), the characterization of SiCN thin films deposited in this reactor, and the development of diagnosis tools suited for the analysis of the growing film. Two in situ characterization techniques have been developed. The interferential baseline extraction from FT-IR spectra enables the determination of thin film optical parameters (refractive index and thickness) in the infrared range. This diagnosis is applied as well with post-deposition analysis as with real time in situ control of the deposition process. Moreover, the development of a reflectometry diagnosis has allowed to monitor and control the deposition process in the visible range. Influence of substrate temperature, precursor flow and plasma power as well as thin film ageing has been studied. Those analyses have enabled the derivation of optimal deposition conditions leading to denser films with better oxidation resistance. Then, the variation of nitrogen concentration in the gaseous mixture has led to the synthesis of a wide variety of thin film compositions ranging from SiC to SiN like thin films with a large range of refractive index. Finally, using an innovative hybrid system coupling an ECR microwave plasma with the pulverization of a Si target, Si-richer thin films have been synthesized allowing for denser thin films with higher refractive indices owing to an increase in Si-C bonding.

Technical challenges for developing micro sensors for Ultra High Temperature and turbine applications lie in that the sensors have to survive extremely harsh working conditions that exist when converting fuel to energy. These conditions include high temperatures (500-1500°C), elevated pressures (200-400 psi), pressure oscillations, corrosive environments (oxidizing conditions, gaseous alkali, and water vapors), surface coating or fouling, and high particulate loading. Several technologies are currently underdeveloped for measuring these parameters in turbine engines. One of them is an optical-based non-contact technology. However, these nondirective measuring technologies lack the necessary accuracy, at least at present state. An alternative way to measure these parameters without disturbing the working environments is using MEMS type sensors. Currently, the techniques under development for such harsh environment applications are silicon carbide (SiC) and silicon nitrite (Si3N4) –based ceramic MEMS sensors. But those technologies present some limitation such as narrow processing method, high cost (materials and processing cost), and limited using temperatures (typically < 800 C). In this research we propose to develop two sensors based on recently developed polymer-derived ceramics (PDCs): Constant Temperature Hot wire Anemometer, temperature/heat-flux sensor for turbine applications. PDC is a new class of high temperature ceramics. As we shall describe below, many unique features of PDCs make them particularly suitable for the proposed sensors, including: excellent thermo-mechanical properties at high temperatures, enable high temperature operation of the devices; various well-developed processing technologies, such as injection molding,photolithography, embossing, DRIE etching and precise machining, can be used for the fabrication of the devices; and tunable electric conductivity, enable the proposed sensors fabricated from similar materials, thus reliability considerations associated with thermal mismatch, which is a big concern when using MEMS-based sensors at elevated temperatures, will be minimized.

Polymer-derived ceramics (PDCs) are exceptional ultra-high temperature and stable multifunctional class of materials that can be synthesized from a polymer precursor through thermal decomposition. The presented research focuses on 1-D nanofibers, 2-D films and 3-D bulk, carbon-rich silicon carbon nitride (SiCN) ceramics. 1-D nanofibers were prepared via electrospinning for light weight, flame retardant and conductive applications. The commercially available CerasetTM VL20, a liquid cyclosilazane pre-ceramic precursor, was mixed with polyacrylonitrile (PAN) in order to make the cyclosilazane electrospinnable. Carbon-rich PDC nanofibers were fabricated by electrospinning various ratios of PAN/cyclosilazane solutions followed by pyrolysis. Surface morphology of the electro spun nanofibers characterized by SEM show PDC nano?bers with diameters ranging from 100-300 nm. Also, thermal stability towards oxidation showed a 10% mass loss at 623°C. 2-D carbon/SiCN films were produced by drop-casting a mixture of PAN/cyclosilazane onto a glass slide followed by pyrolysis of the film. Samples ranging from 10:1 to 1:10 PAN:cyclosilazane were made by dissolving the solutes into DMF to produce solutions ranging from 1% to 12% by weight. Green, heat-stabilized, and pyrolyzed 8% films were examined with FTIR to monitor the change in chemical structure at each step of the ceramization. SEM shows that high PAN samples produced films with ceramic embedded spheroid components in a carbon matrix, while high cyclosilazane samples produced carbon embedded spheroid. Finally, this research focuses on the challenge of making fully dense, 3-D bulk PDCs materials. Here we present a composite of SiCN with reduced graphene oxide (rGO) aerogels as a route for fully dense bulk PDCs. Incorporation of the rGO aerogel matrix into the SiCN has its pros and cons. While it lowers the strength of the composite, it allows for fabrication of large bulk samples and an increase in the electrical conductivity of the PDC. The morphology, mechanical, electrical properties and thermal conductivity of graphene-SiCN composite with varying rGO aerogel loading (0.3-2.4%) is presented. The high temperature stability, high electrical conductivity and low thermal conductivity of these composites make them excellent candidates for thermoelectric applications. Generally, carbon-rich SiCN composites with improved thermal and electrical properties are of great importance to the aerospace and electronics industries due to their expected harsh operating environments.

Polymer-derived ceramics (PDCs) are a new class of high-temperature materials synthesized by thermal decomposition of polymeric precursors. These materials possess many unique features as compared with conventional ceramics synthesized by powder metallurgy based processing. For example, PDCs are neither amorphous nor crystalline. Instead, they possess nano-domain structures. Due to the direct chemical-to-ceramic processing, PDCs can be used for making components and devices with complex shapes. Thus, understanding the properties and structures of these materials are of both fundamental and practical interest. In this work, the structures and electronic behavior of polymer-derived amorphous silicon carbonitrides (SiCNs) were investigated. The materials were synthesized by pyrolysis of a commercially available liquid precursor. Ceramic materials with varied structures/properties were successfully synthesized by modifying the precursor and using different pyrolysis temperatures. The structures of the obtained materials were studied using XRD, solid state NMR, EPR, FTIR and Raman Spectroscope. The electronic behavior of the materials was investigated by measuring I-V curves, Hall effects, temperature dependent conductivity. The experiments were also performed to measure UV-Visible absorption and dielectric properties of the materials. This work leads to the following significant progresses: (i) developed quantitative technique for measuring free carbon concentration; (ii) achieved better understanding of the electronic conduction mechanisms and measured electronic structures of the materials for the first time; and (iii) demonstrated that these materials possess unusual dielectric behavior and provide qualitative explanations.

A tutorial review on cellular as well as nanoporous carbides covering their structure, synthesis and potential applications. Especially new carbide materials with a hierarchical pore structure are in focus. As a central theme silicon carbide based materials are picked out, but also titanium, tungsten and boron carbides, as well as carbide-derived carbons, are part of this review. / Dieser Beitrag ist mit Zustimmung des Rechteinhabers aufgrund einer (DFG-geförderten) Allianz- bzw. Nationallizenz frei zugänglich.

Silicon was selectively removed from a silicon carbonitride (SiCN) aerogel by hot chlorine gas treatment, leading to a N-doped carbon aerogel (N-CDC aerogel). The combined effects of pyrolysis and etching temperature were studied with regard to the change in the composition of the material after etching as well as the microstructure of the produced hierarchically porous material. Upon removal of Si from amorphous SiCN, carbon and nitrogen, which are not bonded together in the starting material, react, creating new C–N bonds. The removal of silicon also gives rise to a high amount of micropores and hence a high specific surface area, which can be beneficial for the functionality of the carbonaceous material produced. The mesoporous structure of the aerogel allows us to complete the etching at low temperature, which was found to be a crucial parameter to maintain a high amount of nitrogen in the material. The combination of a high amount of micropores and the mesopore transport system is beneficial for adsorption processes due to the combination of a high amount of adsorption sites and effective transport properties of the material. The N-CDC aerogels were characterized by nitrogen physisorption, X-ray photoelectron spectroscopy (XPS), thermogravimetry (TG/DTA), and infrared spectroscopy (DRIFT) and they were evaluated as CO2 absorbers and as electrodes for electric double-layer capacitors (EDLCs).

Silicon was selectively removed from a silicon carbonitride (SiCN) aerogel by hot chlorine gas treatment, leading to a N-doped carbon aerogel (N-CDC aerogel). The combined effects of pyrolysis and etching temperature were studied with regard to the change in the composition of the material after etching as well as the microstructure of the produced hierarchically porous material. Upon removal of Si from amorphous SiCN, carbon and nitrogen, which are not bonded together in the starting material, react, creating new C–N bonds. The removal of silicon also gives rise to a high amount of micropores and hence a high specific surface area, which can be beneficial for the functionality of the carbonaceous material produced. The mesoporous structure of the aerogel allows us to complete the etching at low temperature, which was found to be a crucial parameter to maintain a high amount of nitrogen in the material. The combination of a high amount of micropores and the mesopore transport system is beneficial for adsorption processes due to the combination of a high amount of adsorption sites and effective transport properties of the material. The N-CDC aerogels were characterized by nitrogen physisorption, X-ray photoelectron spectroscopy (XPS), thermogravimetry (TG/DTA), and infrared spectroscopy (DRIFT) and they were evaluated as CO2 absorbers and as electrodes for electric double-layer capacitors (EDLCs).

A tutorial review on cellular as well as nanoporous carbides covering their structure, synthesis and potential applications. Especially new carbide materials with a hierarchical pore structure are in focus. As a central theme silicon carbide based materials are picked out, but also titanium, tungsten and boron carbides, as well as carbide-derived carbons, are part of this review. / Dieser Beitrag ist mit Zustimmung des Rechteinhabers aufgrund einer (DFG-geförderten) Allianz- bzw. Nationallizenz frei zugänglich.