Depuis les années 70, la synthèse de carbonates organiques a rencontré un grand intérêt dans diverses applications de l’industrie chimique. Parmi ces composés, le carbonate de diméthyle, qui est à la base de la fabrication de certains polycarbonates, est particulièrement intéressant. C’est un excellent solvant, et plus récemment, il s’est révélé être un additif potentiel pour les essences grâce à son contenu élevé en oxygène. Encore aujourd’hui, au niveau industriel, la synthèse de carbonate de diméthyle est basée sur l’utilisation de réactifs dangereux tels que le phosgène ou le monoxyde de carbone. Pour s’aligner sur les demandes de la chimie verte, une recherche assidue a été développée afin de trouver une voie de synthèse plus propre mais efficace qui pourrait être appliquée au niveau industriel. Parmi celles-ci, la voie la plus appropriée est la réaction directe du CO2 et du méthanol en présence d’un catalyseur capable d’activer le dioxyde de carbone. Dans ce travail, l’activité des complexes de type métallophthalocyanines a été testée en conditions atmosphériques et sous haute pression et haute température. Les méthodes de spectroscopie infrarouge, UV-visible etRMN ont été mise en oeuvre pour caractériser les intermédiaires réactionnels formés. Les travaux ont démontré que ces complexes métalliques possèdent une capacité d’activation du CO2 et du méthanol pour former le carbonate de diméthyle, tout en ayant une activité catalytique encore trop faible pour envisager de développer un procédé industriel. Ce type de complexes a cependant montré une activité satisfaisante pour la synthèse de carbonate de propylène à partir de CO2 et d’oxyde de propylène. / Since the 1970’s, the synthesis of organic carbonates has been of a strong interest in applications in the chemical industry as an intermediate in the synthesis of polycarbonates, as a solvent and more recently as a possible additive in gasoline due to its high oxygen content. Until now, industrial dimethyl carbonate synthesis has been based on the use of harmful reagents such as phosgene and carbon monoxide. To bring it into line with the requirements of green chemistry, research has been carried out to find a cleaner way of synthesis that could be also applied at an industrial scale. It was found that one of the most suitable chemical routes is the use of carbon dioxide and methanol in the presence of a catalyst that is able to activate the CO2 molecule. In this work, the activity of metallophthalocyanine complexes was tested under atmospheric, as well as high pressure and high temperature conditions. Infrared, UV-visible and RMN spectroscopy has been used to attempt to identify the reaction intermediates. In this work metallophthalocyanine complexes have been shown to activate methanol and CO2 molecules by forming dimethyl carbonate. However, the yields are too low to develop a chemical process at the industrial scale. Nevertheless, this type of complex has shown to be active in the synthesis of propylene carbonate from carbon dioxide and propylene oxide.

O objetivo deste trabalho consistiu-se no desenvolvimento de um método para a produção de aerogéis de amido para a impregnação de óleo de café verde. Para atingir este objetivo foram estabelecidas três etapas: (1) desenvolvimento de um método de secagem supercrítica usando misturas de dióxido carbono supercrítico (CO2-sc) e etanol (EtOH); (2) fabricação de aerogéis na presença de CO2 e (3) impregnação supercrítica de extrato de óleo de café verde nos aerogéis de amido produzidos. Os aerogéis produzidos na primeira e segunda etapa foram caracterizados por adsorção-dessorção de nitrogênio a baixa temperatura (BET e BJH), microscopia eletrônica de varredura (MEV), e por difração de Raio-X para conhecer seu padrão cristalino e cristalinidade. A metodologia de secagem desenvolvida durante o presente trabalho permitiu obter resultados bastante positivos dado que os materiais (monólitos) exibiram áreas superficiais de 95 m2/g que estão de acordo com os melhores materiais descritos na literatura. Por outro lado, esta metodologia (200 bar e 40°C utilizando 2 ml/min de CO2 com 11% de etanol) permitiu uma redução significativa do tempo e secagem (de 24 h para 6 h). No que diz respeito à fabricação dos aerogéis na presença de CO2 foram testadas diferentes condições para melhorar as caraterísticas dos materiais anteriormente descritos. Neste caso, a estratégia passou pelo desenvolvimento de partículas de aerogel em vez de monólitos, avaliando o impacto da quantidade de amido no sol e da temperatura de gelatinização nas caraterísticas físico-químicas dos materiais. Os resultados demonstraram que os melhores materiais exibiram áreas superficiais de 185 m2/g, sendo obtidos com 10% de amido a 40° C. Por outro lado, verificou-se igualmente que o aumento da temperatura era responsável pela diminuição do domínio cristalino. No entanto, na presença de CO2 este efeito de diminuição não foi tão extenso como na sua ausência. O último ponto do presente trabalho consistiu na impregnação dos matérias obtidos de modo a avaliar a sua aplicabilidade como matriz de impregnação para moléculas de interesse alimentar. Neste estudo foram utilizados os monólitos obtidos na primeira etapa como matriz de impregnação de óleo de café verde em condições supercríticas (300 bar e 40°C). Os resultados obtidos demostraram uma eficiência de impregnação de 39 mg de óleo /100 mg de monólito em 12h. O presente trabalho demonstrou ser possível desenvolver uma nova metodologia de secagem de aerogéis sem etapa de troca de solvente e com uma redução apreciável do tempo de secagem. Por outro lado, foi possível obter partículas de aerogéis com caraterísticas bastante interessante para a impregnação de moléculas de interesse alimentar. Por fim este trabalho apresenta ótimas perspectivas para o desenvolvimento de um processo integrado para a fabricação de aerogéis e impregnação dos mesmos em CO2 supercrítico, demostrando boas perspectivas para o desenvolvimento de materiais biocompatíveis para aplicações nas indústrias alimentar, dermatológica ou mesmo farmacêutica. / The objective of this work was the development of a method for the production of starch aerogels for the impregnation of green coffee oil. To achieve this goal, three steps were established: (1) development of a supercritical drying method using mixtures of supercritical carbon dioxide (CO2-sc) and ethanol (EtOH); (2) fabrication of aerogels in the presence of CO2 and (3) supercritical impregnation of green coffee oil extract in the starch aerogels produced. The aerogels produced in the first and second stages were characterized by adsorptiondesorption of nitrogen at low temperature (BET and BJH), scanning electron microscopy (SEM), and by X-ray diffraction to know its crystalline pattern and crystallinity. The drying methodology developed during the present work allowed to obtain very positive results since the materials (monoliths) exhibited superficial areas of 95 m2/g that are in agreement with the best materials described in the literature. This methodology (200 bar and 40°C using 2 ml/min of CO2 with 11% of ethanol) allowed a significant reduction of the time and drying (from 24 h to 6 h). Regarding the manufacture of aerogels in the presence of CO2, different conditions were tested to improve the characteristics of the previously described materials. In this case, the strategy involved the development of aerogel particles instead of monoliths, evaluating the impact of the amount of starch in sol and the gelatinization temperature on the physical-chemical characteristics of the materials. The results showed that the best materials exhibited surface areas of 185 m2/g and were obtained with 10% starch at 40°C. On the other hand, it was also verified that the increase in temperature was responsible for the decrease of the crystalline domain. However, in the presence of CO2 this decrease effect was not as extensive as in its absence. The last point of the present work was the impregnation of the obtained materials in order to evaluate its applicability as impregnation matrix for molecules of alimentary interest. In this study, the monoliths obtained in the first stage were used as impregnation matrix of green coffee oil under supercritical conditions (300 bar and 40°C). The results showed an impregnation efficiency of 39 mg of oil/100 mg of monolith in 12 hours. The present work demonstrated that it is possible to develop a new drying methodology for aerogels without a solvent exchange step and with an appreciable reduction of the drying time. Likewise, it was possible to obtain particles of aerogels with very interesting characteristics for the impregnation of molecules of alimentary interest. Finally, this work leaves great prospects for the development of an integrated process for the manufacture of aerogels and their impregnation in supercritical CO2, demonstrating good prospects for the development of biocompatible materials for applications in the food, dermatological or even pharmaceutical industries.

L’innovation technologique dans les filières énergétiques est une manière pertinente de réaliser des économies d’énergie et de répondre aux préoccupations environnementales. Le chauffage représente la principale consommation d’énergie dans le secteur de l’habitat en France et contribue fortement aux rejets de gaz à effet de serre. Un nouveau conceptde compresseur thermique a été développé par la société boostHEAT. Il est destiné à remplacer le compresseur mécanique conventionnel d’un système de pompe à chaleur au CO2 pour former un système “tritherme”. Ce compresseur thermique est constitué d’un cylindre muni d’un piston déplaceur, d’un échangeur réchauffeur, d’un régénérateur etd’un échangeur refroidisseur. Le réchauffeur est connecté à la partie chaude du cylindre d’une part, et au régénérateur, d’autre part. Le refroidisseur est connecté au régénérateur d’une part, et à la partie froide du cylindre d’autre part. Cette dernière est connectée à la branche basse pression (évaporateur) de la pompe à chaleur par un clapet d’admission, età la branche haute pression de la pompe à chaleur (échangeur haute pression) par l’intermédiaire d’un clapet de refoulement. Après avoir exposé le principe de fonctionnement du compresseur thermique, la conception de ses principaux composants et le banc d’essai expérimental, nous présentons un modèle détaillé permettant de décrire le fonctionnementdu compresseur thermique et d’étudier l’influence de différents paramètres sur ses performances énergétiques. Le modèle développé est validé par comparaison avec les résultats de l’expérience. Enfin, le cycle de pompe à chaleur au CO2 supercritique, muni de deux étages du compresseur thermique, est étudié et optimisé. / Technological innovation in energy systems is a good way to improve energy efficiencies and respond to environmental preoccupations. Heating accounts for the primary energy consumption in the housing sector and contributes significantly to emissions of greenhouse gas. A new concept of thermal compressor was developed by the boostHEAT company. It is intended to replace the conventional mechanical compressor of a CO2 heat pump system to form a "trithermal" system.This compressor is made up of a cylinder with a displacer piston, a heater, a regenerator and a cooler. The heater is connected to the hot part of the cylinder on the one hand and to the regenerator on the other hand. The cooler is connected to the regenerator on the one hand and to the cold part of the cylinder on the other hand. The cold part of the cylinder is connected to the low pressure branch of the heat pump (evaporator) through an automatic inlet valve, and to the high pressure branch of the heat pump (gas cooler) through an automatic exhaust valve. After explaining the operating principle of the thermal compressor, the design of its main components and the experimental test bench, we present a detailed model for describing the operation of the thermal compressor. This model allows the study of the influence of several parameters on the energy performance of the thermal compressor. The model is then validated by comparison with experimental results. Finally, the supercritical CO2 heat pump cycle with two stages of thermal compressor is studied and optimized.

Este trabalho teve como objetivo a utilização da tecnologia que emprega CO2 em estado supercrítico para estudar a formação de micropartículas de óleos essenciais encapsulados em polissacarídeos. O referido tema tem caráter inovador e inédito, já que a tecnologia supercrítica tem sido utilizada na formação e impregnação de partículas, principalmente de solutos sólidos, mas não tem sido aplicada na encapsulação de óleos essenciais. Os processos estudados, RESS (Rápida Expansão de uma Solução Supercrítica) ou o PGSS (Partículas de Soluções ou Suspensões em Gás Saturado) envolvem baixas temperaturas, possibilitando a não degradação de compostos voláteis e termossensíveis, tornando-os mais estáveis. Foram utilizados nesta pesquisa, polímeros que são, normalmente, utilizados no processo convencional de \"aroma em pó\". Mesmo sendo insolúveis ou parcialmente solúveis em CO2 supercrítico houve o intuito de aproveitar estudos comprovados de estabilidade de óleos essenciais encapsulados nestes materiais e ainda manter o custo do produto já que polissacarídeos tem, relativamente, baixo valor comercial, quando comparado aos polímeros que são empregados nos estudos que usam estes processos. Ensaios preliminares foram realizados com diferentes polímeros: Amido modificado, dextrina, maltodextrina e Purity Gum Ultra®, (gentilmente cedidos pela Corn Products, atual Ingredion Incorporated, Mogi Guaçu, SP, BR) no intuito de selecionar o material de parede mais apropriado para a microencapsulação do óleo essencial, representado pelo limoneno. Os resultados preliminares comprovaram que houve impregnação e possível microencapsulação do limoneno, observados e constatados através de análises de microscopia (óptica, eletrônica e de fluorescência confocal a laser) especialmente para Purity Gum Ultra®, a qual apresentou comportamento desejável como estabilidade da dispersão preliminar e morfologia, em comparação com os outros polissacarídeos testados (dextrina, amido modificado e maltodextrina). Os ensaios subsequentes (dimensionamento das partículas, microscopia eletrônica de varredura, microscopia confocal na presença de fluoresceína, estabilidade térmica e quantificação do teor de limoneno microencapsulado) determinaram definitivamente a eficiência da Purity Gum Ultra® como polímero mais apropriado como agente encapsulante, e com isso foi demonstrada a eficiência da técnica proposta para esta finalidade. Ainda, a técnica de microencapsulação empregada (PGSS) apresentou valores significativos na retenção do limoneno com até 86% quando a suspensão foi preparada utilizando etanol (EtOH) e lecitina de soja como surfactante, sendo um relevante indicativo de que o processo de microencapsulação via PGSS proporcionou eficiente retenção do limoneno, além de apresentar outras vantagens sobre os processos de microencapsulação convencionais utilizados na indústria de alimentos. O processo de microencapsulação que utiliza CO2 supercrítico é considerado como \"tecnologia limpa\", aliado a este solvente ser considerado abundante, barato e ambientalmente seguro. Neste estudo constatou-se que, além do emprego de baixa temperatura no processo (50 - 60º C), não houve necessidade do emprego de água na suspensão. / This study aimed to use the technology that employs CO2 in supercritical state to study the formation of microparticles encapsulated essential oils in polysaccharides. The supercritical technology has been used in impregnating particles, mostly of solid solutes, but has not been applied to the encapsulation of essential oils. The studied processes RESS (Rapid Expansion of a Supercritical Solution) or PGSS (Particles Solutions or Suspensions in Saturated Gas) involving low temperatures, not allowing degradation of volatile and polymers that are normally used in the conventional process of \"aroma powder\" were used in this study. Even though it is insoluble or partially soluble in supercritical CO2 proven in order to take advantage of the stability studies of encapsulated essential oils in these materials and still keep the cost of the product as polysaccharides have relatively low value when compared to the polymers that are employed in studies using these processes. Preliminary tests were performed with different polymers : modified starch, dextrin, maltodextrin and Purity Gum Ultra ®, ( kindly provided by Corn Products, Current Ingredion Incorporated, Mogi, SP, BR ) in order to select the most appropriate material for wall microencapsulation of essential oil, represented by limonene. Preliminary results showed that there was possible impregnation and microencapsulation of limonene, observed and recorded through analysis of microscopy (optical, electron and confocal) especially for Purity Gum Ultra ®, which showed desirable behavior such as dispersion and stability of primary morphology compared to other polysaccharides tested (dextrin, modified starch and maltodextrin). Subsequent tests (particle sizing, scanning electron microscopy, confocal microscopy in the presence of fluorescein, thermic stability and quantification of the limonene content microencapsulated definitely determined the efficiency of Purity Gum Ultra ® as the most appropriate polymer as agent encapsulating and it has been demonstrated the efficiency of the proposed technique for this purpose. The technique employed for microencapsulation (PGSS) showed significant amounts of limonene retention of up to 86% when the suspension was prepared using ethanol (EtOH) and soy lecithin as surfactant. Being indicative of a material that microencapsulation by PGSS provided efficient retention of limonene, besides other advantages over conventional microencapsulation processes used in the food industry. The microencapsulation process that uses CO2 supercritical is considered \"clean technology \" due to the low toxicity of CO2 besides this solvent is considered abundant, inexpensive and environmentally safe. In this study it was found that, in addition to using low temperature process ( 50 - 60º C ), there was no need for the use of water in suspension.

Ce travail présente l’étude d’un procédé de production de 5-hydroxymethylfurfural (HMF), une molécule plateforme prometteuse pour la production de carburants et de polymères biosourcés. La première partie de ce travail a consisté à développer la synthèse du HMF à partir d’hexoses lignocellulosiques dérivés de la biomasse, plus particulièrement du fructose, en milieu diphasique CO2-H2O haute pression, une technologie efficace et respectueuse de l’environnement pour le traitement de la biomasse. À partir d'expériences cinétiques et de leur modélisation, l'effet du CO2 comme catalyseur acide réversible a été évalué. Par ailleurs, le rendement en HMF s'est avéré limité en raison de réactions de dégradation. Un moyen pertinent d’augmenter le rendement en HMF en empêchant sa dégradation a consisté à coupler sa synthèse avec son extraction simultanée par le CO2 supercritique, ce qui a conduit à un procédé de réaction extractive. Dans ce contexte, des coefficients de partage de HMF entre le CO2 supercritique et l’eau ont été évalués expérimentalement, en supposant que l'équilibre soit atteint à tout moment dans le dispositif d'extraction. Les données expérimentales ont permis l’application de modèles thermodynamiques pour décrire le système ternaire CO2-HMF-H2O afin de trouver des conditions de fonctionnement favorables au procédé. Le couplage de la modélisation cinétique et du procédé d'extraction par le CO2, basé sur l'équilibre thermodynamique du mélange, a rendu possible la prédiction des meilleures conditions de fonctionnement du procédé de réaction extractive du HMF à partir de sucres issus de biomasse lignocellulosique. Ce mode de fonctionnement a permis d'exploiter tous les avantages de l'utilisation du CO2 pour les réactions de conversion de la biomasse : catalyseur acide réversible et solvant d'extraction / This work aims at developing a new production process for 5-hydroxymethylfurfural (HMF), a promising bio-based platform chemical for the production of fuels and renewably sourced polymers. In the first part of this work, synthesis of HMF from lignocellulosic biomass-derived hexoses, and more particularly fructose, was carried out in a two-phase high-pressure CO2-H2O system, regarded as an efficient and eco-friendly technology in biomass processing. From kinetic experiments and their modeling, the effect of CO2 as a potential reversible acid catalyst was assessed. Also, HMF yield was shown to be limited due to sequential degradation reactions. Arelevant way to increase HMF yield by preventing its degradation has consisted in coupling its synthesis with simultaneous extraction by supercritical CO2, leading to a one-pot extractive reaction process. In that context, partition coefficients of HMF between supercritical CO2 and water have been experimentally evaluated, assuming that equilibrium is achieved at any time in the extraction device. Experimental data has enabled the application of thermodynamic models to describe the ternary CO2-HMF-H2O system in order to find favourable operating conditions for the process. Coupling the kinetic modelling with the CO2 extracting process modelling, based on the thermodynamic equilibrium of the mixture, has provided the theoretical tool allowing prediction of the best operating conditions for the one pot extractive process of HMF production from sugars issued from lignocellulosic biomass. This operating mode allowed exploiting all advantages of the use of CO2 for such reactions of biomass conversion: reversible acid catalyst and extracting solvent.

Recently, memory-cells employing discrete traps as the charge storage media have been attracting a lot of attention as a promising candidate to replace conventional DRAM or Flash memories. Conventional floating gate (FG) non-volatile memories (NVMs) present critical issues on device scalability beyond the sub-50nm node. In achieving non-volatility in conventional FG memories, thicker control and tunnel oxide (~8nm) are required to guarantee longer retention time. Relatively, nano-dots memories causes more resistant leakage charges by localized storage sites, thus improving the device retention characteristics. Hence, nano-dots memories allow more aggressive scaling of the tunnel oxide and exhibit superior characteristics compared to Flash memories in term of operation voltage, write / erase speed, retention time and endurance. The advantages of metal nano-dots compared with other material counterparts include higher density of states , stronger coupling with the channel, better size scalability, and the design freedom of engineering the work function to optimize device characteristics. However, tungsten nano-dots are the most interested in all of metal dots is that tungsten metal has more extra attractive advantages, such as ultra high melting point make high process temperature caused superior thermal stability of device and wide application in VLSI technology nowadays caused real possibility of tungsten nano-dots NVMs fabricated in industry in practice. This dissertation is divided into four sections: (1) discussion of basic properties for tungsten nano-dots memory devices; (2) Tunneling Oxide Engineering,; (3) Improvement by novel processes; and (4) The influence with supercritical CO2 (SCCO2) and vapor treatment. Initially, formative mechanism of tungsten nano-dots and electrical characteristics of devices was investigated in the first section. Tungsten nano-dots were formed by oxidizing tungsten silicide / amorphous silicon double stack film at high temperature condition. From electrical measurement, the better characteristics have been achieved for oxidation condition at 1050¢XC / 120 sec. Secondly, the rapid thermal anneal (RTA) oxidation is used to grow tunnel oxide by two different forming gas (O2/N2O). Comparison of electrical characteristics, program characteristics of the device using tunnel oxide with N2O process is inferior than the common device. However, endurance is a important electrical characteristics in the semiconductor device especially apply on the non-volatile memory. Thirdly, novel processes were employed into fabrication of tungsten nano-dots memory devices, include the N2O oxidation and NH3 plasma treatment. The purpose of novel processes is production additional trapping states in nonvolatile memories, which is considerably as combination nano-dots with SONOS structure. In the final section, the application of supercritical CO2 with vapor on tungsten nano-dots memoery devices have been studying. It is found that the device treated by SCCO2 which electrical characteristics is improved obviously. Furthermore, this technology also can fabricate the nano-dots memory which is like the device used high temperature oxidation process. It suggests that the SCCO2 with vapor treatment could oxidize silicide film under a low temperature environment. This novel oxidation process has some advantages and could be noticed in the semiconductor industry.

The purpose of the thesis is to investigate the improvement of single-crystal Si solar cell efficiency using porous Indium tin oxide (ITO)/ITO double layer antireflection(AR) coating. The resistivity, transmittance and refraction index of the porous ITO films prepared by supercritical CO2 treatment were investigated. At a 2000 psi pressure and 60¡CC, the resistivity of porous ITO films is 15 £[-cm, the average transmittance is better than 95 %, and the refraction index is 1.54. In addition, the resistivity of ITO thin films fabricated by reactive ratio-frequency magnetron sputtering is 7¡Ñ10-4 £[-cm, the average transmittance are 85 %, and the refraction index is 2.0. For the single crystal-Si solar cell with porous ITO/ITO double layer AR coating, the open circuit voltage, short circuit current, fill factor and efficiency are measured.

Non-volatile memory can keep the data without supplying power, and it is suitable for portable electronic products due to the advantage of low power consumption. In current industrial production, high-temperature and long-time process are necessary for the fabrication of non-volatile memory, which are heavy loadings on production capacity and lots cost. Therefore, decreasing the temperature of the process is a trend. Recently using the oxidation treatment of supercritical carbon dioxide fluid can efficiently decrease the temperature of the process. In this thesis, the mixture layer of Zn, Sn, and SiO2 is applied to reduce the temperature of process, and to employ the defects of ZnO and SnO2 as floating gate for electron storage to fabricate the nonvolatile memory device. Zn and Sn are applied due to the low temperature melting points. To ensure the layer of cosputtering with Zn and Sn to be able to successfully fabricate as nano material device, the process of traditional rapid temperature annealing treatment was applied for first step. The co-sputtered Zn-Sn-SiO2 thin film was deposited on the tunneling oxide layer, and then the thin film was treated with varied annealing temperature to precipitate ZnO and SnO2 nanocrystals. After that, the C-V measurement is applied to analyze the change of the electrical and material properties. Using a positive bias, the electrons are injected into the oxide layer, by the threshold voltage the offset is occurred, which is defined as the memory window of the memory effect, and the property of nonvolatile memory will be applied. In addition, no matter the charge is injected from the gate oxide or tunnel oxide, the defects position of DLTS¡¦s peak is with the same property. The supercritical carbon dioxide fluid technology has been performed to study the memory effect. The capability of electron injection, storages and the defect, in the storage layer were studied by the C-V measurement and DLTS. The experiment confirmed that the Zn-Sn alloy has the memory property after it been treated by the supercritical carbon dioxide fluid technology. It has shown that Zn can promote to the storage capability ability due to the formation of deep level defects of SnO2 from the DLTS spectra. A new species is found at 0.93 eV with low activation energy and high capability of electron storage. The defect formation mechanism of Zn, ZnO, Zn-O-Si, Sn, and SnO are analyzed by found by the XPS and DLTS. The device fabrication using Zn-Si alloy and supercritical carbon dioxide fluid technology has the potential to reduce the process temperature and to improve the memory property of nonvolatile memory device.

In the study, conductive distributed Bragg reflectors (DBRs) fabricated at room temperature based on porous indium tin oxide (ITO) on dense ITO bilayers were proposed for resonant cavity organic light emitting diodes (RCOLEDs). In the fabrication of the ITO DBRs, the low refractive index porous ITO films were obtained by applying supercritical CO2 treatment at different temperature and pressures on the spin-coated sol-gel ITO films. On the other hand, the high refractive index ITO films were grown at room temperature by long-throw reactive ratio-frequency magnetron sputtering. The refractive index of the porous ITO film and ITO films were 1.54 and 2.0, respectively. For the DBR with 4 pairs ITO bilayers, the optical reflectance of more than 70 % was achieved. The stop band and the average resistivity is 140 nm and 2.2¡Ñ10-3 £[-cm, respectively. Finally, electrical and optical characteristics of the RCOLEDs fabricated on the ITO DBR were investigated and compared with those of the conventional OLEDs. The maximum luminous efficiency of 3.79 cd/A was obtained at 347 mA/cm2 for the RCOLED. This luminous efficiency was 26 % higher than that of the conventional OLED.

No description available.