Ce travail s’inscrit dans le processus de développement d’un dispositif de traitement de composés organiques volatils (COV) par plasma non-thermique. L’application industrielle des dispositifs de dépollution par plasma froid se heurte à deux limitations majeures que sont une consommation énergétique importante et la formation de sous-produits. Deux axes d’amélioration de l’efficacité énergétique du procédé à décharges sur barrière diélectrique sont explorés dans ce travail de thèse : le mode de dépôt d’énergie dans la décharge et le couplage du réacteur plasma avec un dispositif catalytique. Concernant le premier axe, l’étude a montré que dans le cas des réacteurs DBD étudiés, le paramètre gouvernant la réactivité chimique du plasma à pression atmosphérique était la densité d’énergie, qu’il s’agisse de production d’ozone ou d’élimination d’un COV de la phase gazeuse. L’étude chimique des sous-produits de dégradation par décharge a été conduite pour trois molécules cibles : l’éthanol, l’acétone et la méthyléthylcétone. Dans le cas de l’éthanol, un schéma cinétique 0D est proposé, montrant l’importance de la dissociation dans les mécanismes de dégradation du COV. Pour le second axe exploré, le réacteur plasma a été couplé à un catalyseur. Deux formulations de catalyseurs ont été utilisées, avec et sans métaux précieux. Dans les deux cas, l’activation du catalyseur à basse température par couplage avec le réacteur plasma est démontrée. La dernière partie de l’étude présente les résultats obtenus sur un réacteur plasma à échelle pilote visant à estimer l’impact de l’augmentation des capacités de traitement d’un réacteur DBD sur l’efficacité énergétique du procédé. / This work deals with the development of a VOC removal method by non-thermal plasma which has several advantages including flexibility, compactness and limited investment costs. Further development of this technology needs to overcome major drawbacks such as high energy consumption for high flow rate treatment and the presence of by-products. The first part of the study focuses on the method of discharge energy deposition and the search for optimization of the process energy efficiency. Development of experimental and measurement tools, in particular for the determination of the electrical power injected into the discharge were carefully carried out. The effect of voltage waveform, signal frequency and electrode shape were investigated. The results show that no energy efficiency improvement could be brought by variation of these parameters and that only energy density is important in the gas treatment process. The second part of the study was devoted to the study of conversion of three pollutants (acetone, ethanol and methylethylketone). Formation of by-products was analyzed and a kinetic scheme is proposed for ethanol conversion. To decrease the level of by-products at the reactor outlet, the association between cold plasma and catalysis was investigated. Catalysis was found to allow an improvement in the oxidation of the pollutants and of the discharge by-products. The last part of this work focused on results obtained with a large flow rate plasma reactor to confirm extension of laboratory scale results to larger equipment. Results confirmed that the extension of low flow rate experimental results is possible.

Emissions of air pollutants from non-conventional sources have been on the rise in the North Texas area over the past decade. These include primary pollutants such as volatile organic compound (VOC) and oxides of nitrogen (NOx) which also act as precursors in the formation of ozone. Most of these have been attributed to a significant increase in oil and gas production activities since 2000 within the Barnett Shale region adjacent to the Dallas-Fort Worth metroplex region. In this study, air quality concentrations measured at the Denton Airport and Dallas Hinton monitoring sites operated by the Texas Commission on Environmental Quality (TCEQ) were evaluated. VOC concentration data from canister-based sampling along with continuous measurement of oxides of nitrogen (NOx), ozone (O3), particulate matter (PM2.5), and meteorological conditions at these two sites spanning from 2000 through 2014 were employed in this study. The Dallas site is located within the urban core of one of the fastest growing cities in the United States, while the Denton site is an exurban site with rural characteristics to it. The Denton Airport site was influenced by natural gas pads surrounding it while there are very few natural gas production facilities within close proximity to the Dallas Hinton site. As of 2013, there were 1362 gas pads within a 10 mile radius to the Denton Airport site but there were only 2 within a 10 mile radius to Dallas Hinton site. The Dallas site displayed higher concentrations of NOx and much lower concentrations of VOC than the Denton site. Extremely high levels of VOC measured at the Denton site corresponded with the increase in oil and gas production activities in close proximity to the monitoring site. Ethane and propane are two major contributors to the measured VOC concentration, suggesting the influence of fugitive emissions of natural gas. In Dallas, the mean and maximum values of ozone had decreased since 2000 by about 2% and 25%, respectively. Similarly NOx decreased by 50% and 18% in the mean and maximum values. However, the mean VOC value showed a 21% decrease while the maximum value increased by about 46%. In Denton, the change in percentage of ozone and NOx were similar to Dallas but the mean VOC concentration increased by about 620% while the max value increased 1960%. Source apportionment analysis confirmed the findings by identifying the production of natural gas to be the primary source of VOC emissions in Denton, while traffic sources were more influential near the Dallas site. In light of the recent proposal by EPA to revise the ozone standard, the influence of these new unconventional sources should be further evaluated.

No description available.

A stable mixed culture, deposited as ATCC 55644, previously shown to degrade petroleum hydrocarbons at relatively high concentrations was used as the source of inoculum. This culture was grown in Stanier’s minimal media, either in the presence of different concentrations of naphthalene, nitrobenzene and toluene (NNT) or naphthalene and toluene (NT) as the sole source of C and/or N. Results showed that the majority of the strains isolated from the mixed culture were able to grow in the presence of NNT or NT. A total of 20 different isolates were isolated from the mixed culture. Individual isolates were grown in Stanier’s minimal medium containing a single hydrocarbon as the source of carbon or carbon and nitrogen. Only one strain was found to grow solely in the presence of nitrobenzene as the source of C and N. Most of the other isolates were able to grow in the presence of naphthalene, toluene, acenaphthene, anthracene, fluoranthene and phenanthrene, n-dodecane, hexadecane, n-pentadecane, n-tetradecane, and n-octadecane. Planktonic and immobilized cells of the controlled mixed culture (ATCC 55644) were grown in separate Sequential Batch Reactors (SBR) using Stanier's media, to which naphthalene, nitrobenzene and toluene were added as the sole source of C and/or N. Biodegradation was determined by measuring the residual hydrocarbon in the SBR and the amount of trapped volatile organic carbon (VOC) and the evolved CO2. Gas chromatography data showed that immobilized cells were able to degrade NNT faster than the planktonic cells. This observation was confirmed by CO2 evolution. Over time the loading of hydrocarbon was significantly increased from a starting level of 400 ppm (Naphthalene), 100 ppm (Nitrobenzene), and 500 ppm (toluene), to a final level of 3000 ppm (Naphthalene), 400 ppm (Nitrobenzene), and 1600 ppm (toluene). While increasing nutrient loading, the frequency of re-feeding with hydrocarbons was changed from an initial re-feeding every 60 hrs to a final re-feeding frequency of 18 hrs. The experiments clearly showed that the attached, mixed microbial community was able to effectively and rapidly degrade high concentrations of hydrocarbons. This demonstrated the practical advantages of employing attached, mixed microbial cultures in a SBR.

No description available.

Die Geruchswahrnehmung von Insekten ist an die spezifischen Anforderungen der Ökosysteme angepasst, in denen sie leben. Von Insekten wahrgenommene Volatile können Informationen über den Ort eines geeigneten Ovipositionsplatzes oder den physiologischen Zustand einer Wirtspflanze geben. Da der Geruchssinn der Insekten sich seit Millionen von Jahren an die Wahrnehmung bestimmter Volatile angepasst hat, können die wahrgenommenen Volatile als Markerstoffe angesehen werden, die zuverlässig einen Ökosystemzustand angeben können. Die Identifikation dieser Markerzustände und die Evaluation ihrer Nützlichkeit für spurenanalytische Anwendungen ist das Ziel dieser Arbeit. Es wurden drei Themen ausgewählt um die Verwendungsmöglichkeit des Insektengeruchssinns für Sensoranwendungen zu überprüfen: Fleischfrische, Todeszeitbestimmung (post mortem Intervall, PMI) und frühzeitige Feuererkennung. Spurenanalytik (GC-MS), Elektrophysiologie (EAG, GC-MS/EAD), Verhaltensversuche und Feldtests wurden angewandt, um die chemoökologische Interaktion der Schmeißfliege Calliphora vicina und der „Feuerkäfer“ Melanophila cuspidata, Merimna atrata and Acanthocnemus nigricans mit ihrer natürlichen Umgebung zu untersuchen. Die Resultate aus diesen Methoden erlaubten die Selektion von Volatilen, die drei Kriteria erfüllen: hohe Quantität, zuverlässige Emission und die ausschliessliche Emission von der untersuchten und keiner anderen Quelle. Diese drei Auswahlkriterien wurden aufgestellt um zu gewährleisten, dass die ausgewählten Markervolatile nicht nur zuverlässig mit dem physiologischen Status der Substrate (Alter von verderbendem Fleisch, PMI, Temperatur von erhitzten Spänen) korrelieren, sondern auch den Ansprüchen technischen Sensorsysteme genügen. Im Falle des alternden Fleisches unter warmen und trockenen Bedingungen ist Nonanal ein Zeiger für die korrekte Reifung des Fleisches zu Schinken. Dimethyl Trisulfid, Phenol und Indol zeigen das Verderben des Fleisches unter warmen und feuchten Bedingungen an. Bei niedrigen Temperaturen sind zunehmende 2,3 Butandiol Emission und abnehmende Nonanal Emission ein Zeiger für zunehmendes Verderben des Fleisches, sowohl unter trockenen als auch feuchten Bedingungen. Allerdings wurde 2,3 Butandiol nicht von C. vicina wahrgenommen, da die Fliege während der Vegetationszeit aktiv ist und unter diesen Bedingungen Dimethyl Trisulfid, Phenol und Indol emittiert werden. Nonanal, Hexanal, Dimethyl Disulfid, Dimethyl Trisulfid, Butan-1-ol und Phenol wurden als nützliche Volatile zur Eingrenzung der Leichenliegezeit ausgewählt. Die genannten Aldehyde sind typisch für die frühen Stadien der Verwesung, gefolgt von Butan-1-ol und den Schwefelsulfiden. Phenol wird hauptsächlich in den späteren Verwesungsstadien emittiert. Allerdings werden Phenol und 1-Butanol nicht von der Fliege wahrgenommen, da diese ein Generalist ist und nicht zwischen dem geblähten und aktivem Stadium der Verwesung unterscheiden muss. Daher wird zusätzlich die Geruchswahrnehmung des Speckkäfers Dermestes maculans betrachtet. Die Untersuchung anderer necrophager Insekten können weitere Einblicke in die Zeitabhängigkeit der Volatilemissionen während der Vertebratenverwesung geben. Die im Rahmen dieser Arbeit gewonnenen Ergebnisse erlauben eine Korrelation zwischen Emissionen und Leichenliegezeit und können eine Grundlage für eine volatilenbasierte post mortem Zeitbestimmung für Polizeikräfte sein. Terpene, aliphatische Aldehyde, Furfural und Methoxyphenole werden von erhitztem Holz emittiert. Komponenten aus all diesen Stoffklassen werden von M. cuspidata und M. atrata wahrgenommen, da diese Käfer den Erhitzungszustand von Baumstämmen nach einem Feuer erkennen können, um einen geeigneten Ovipositionsplatz zu finden. A. nigricans nimmt vor allem Methoxyphenole wahr, wohingegen M. atrata und M. acuminata Furfural zur Orientierung verwenden. Diese Unterschiede komplementieren das bekannte Verhalten dieser Käfer in ihrer natürlichen Umgebung, da A. nigricans auf verkohlten Stämmen, die große Mengen von Methoxyphenolen emittieren, seine Eier ablegt, und M. atrata und M. cuspidata auf Stämmen ihre Eier ablegen, die vom Feuer zwar äußerlich verkohlt, aber innerlich nur erhitzt wurden und daher Furfural emittieren. Halbleitergassensoren, die Furfural mit einer ausreichenden Selektivität vermessen können, können Holzbrände schon während ansteigender Temperatur und damit vor der Entzündung detektieren. Derartige Sensoren können sowohl als neuartige Frühwarnsysteme für die holzverarbeitende Industrie als auch für Waldbrandwarnsysteme oder den Haushalt dienen.

This thesis describes the investigation of three aspects of the formation of secondary organic aerosol (SOA): * Aerosol formation from mixed precursors * Global modelling of SOA formation * Modelling of dynamics of SOA formation based on empirical data collected from smog chamber experiments. The formation and growth processes of secondary organic aerosol were investigated using smog chamber experimentation and modelling techniques to gain a better understanding of the application of SOA yield values in modelling both SOA mass and dynamics. Published SOA yields from a range of volatile organic compounds (VOCs) are used to model SOA mass on a local, regional or global scale, based on the assumption that the SOA yield of a mixture is the sum of the yields of the components. Experimental investigations into SOA yield from mixtures of VOC revealed potential uncertainties that would result from applying these yields to systems containing multiple VOCs. SOA formation in systems of toluene or m-xylene, compared with systems of these VOCs and propene, have shown that the introduction of propene (which has a zero SOA yield) to smog chamber photo-oxidations of toluene or m-xylene delays the formation and suppresses the overall yield of SOA from 450 to 90 µg m-3 ppm-1 for the toluene system and from 325 to 125 µg m-3 ppm-1 for the mvxylene system compared with systems of individual species without propene. The SOA partitioning yield data also indicates that partitioning of species to existing aerosol is suppressed in the mixed systems. Gas-phase modelling of these experiments showed that potential SOA species were expected to be formed sooner due to the increased system reactivity provided by propene. The observed delay in SOA nucleation, similar consumption rates of toluene and m-xylene in both the single and mixed systems and the gas-phase modelling results suggest that the addition of propene to hydrocarbon SOA systems modifies the gas-phase chemistry leading to the formation of potential SOA species from toluene and m-xylene. This result calls into question the bulk and partitioning yield values that have been published for pure substances as well as the validity of applying individual VOC yields to VOC mixture. Application of SOA yields to the global scale provides estimates of annual global SOA formation, global contributions from various VOCs and regional SOA distributions. Two SOA modules, using bulk and partitioning yield methods, were added to a global atmospheric chemical transport model, MOZART-2. The bulk yield method, representing the maximum possible global SOA burden, gave an annual production of 24.5 Tg of SOA, which is slightly lower than previous estimates (30 - 270 Tg yr-1). The partitioning method, which gives a more realistic estimate of SOA formation, produced 15.3 Tg yr-1; the biogenic fraction (13.6 Tg yr-1) compares to a previous estimate of biogenic SOA of 18.5 Tg yr-1 and 2.5 to 44 Tg yr- 1 using the partitioning method. Anthropogenic SOA contributions of 1.1 Tg yr-1 from MOZART-2 compared to recent estimates of 0.05 -2.62 Tg yr-1. SOA production was found to be dependent on oxidant availability and VOC emissions in South America and Asia. The partitioning method produced significantly less SOA due to limited availability of OC. Thepartitioning method also produced a peak SOA concentration of 10 µg m-3 over South America in September and showed that SOA is at maximum production for most of the year in Asia and Europe. The two SOA formation methods also provides data to analyse the restrictions to SOA formation in particular regions, based on the maximum amount of SOA able to form (bulk yield method) and the more realistic partitioning estimate from the same region. Limitations to SOA formation in a particular region can be attributed to deficiencies in OC availability or VOC oxidant concentrations. Comparisons to limited observational and modelled data suggest that the MOZART-2 SOA model provides a good representation of global averaged SOA. SOA mass concentrations, predicted by models such as MOZART-2, can be used in part to model the dynamics of an SOA population (e.g. size of particles, number concentrations etc.). Aerosol properties such as size and number concentration can then be used to estimate their effect on climate and health. The explicit representation of the processes that affect aerosol dynamics, such as nucleation, condensation, evaporation and coagulation can be complex and use significant computational resources. Simplification of the discrete coagulation equation and empirical coagulation coefficients for continuum and non-continuum regime diffusion kinetics provided a simplified method of coagulation capable of predicting the evolution of inert sodium chloride aerosol in chamber experiments. A variable coagulation coefficient (linked to the mean particle number concentration of each experiment) was developed. This method is an empirical surrogate for the standard coefficient corrections applied to Brownian based diffusion in the continuum regime to account for the different kinetic effects within the transition and free molecular diffusion regimes. This method removes the need for calculating individual coefficients for each particle interaction. Estimates of modeluncertainty show that within uncertainty limits the model provides a good representation of experimental data. Correlation and index of agreement (IOA) calculations revealed good statistical agreement between modelled and experimental. Some experiments showed degrees of coagulation under prediction using the variable coefficient technique. Investigations into the effect of aerosol type and size, temperature and humidity may be necessary to refine the variable coefficient calculation technique. The model showed little sensitivity to model time step and is capable of high resolution representation of the aerosol. Mass concentration is conserved within the model whereas some error due to numerical diffusion within the number concentrations results from the bin sectioning technique used. The simplicity of this sectioning method over other methods and the minimal effect of numerical diffusion establishes a simplified method of modelling relative to the high resolution of the aerosol distribution the model achieves. It is suggested that the efficiency improvements introduced by the approaches used in developing this model provide an efficient ultra-fine coagulation modelling for atmospheric models. A semi-empirical model for SOA dynamics (SPLAT) incorporating coagulation, nucleation, condensation and evaporation was developed. The aim of the model and the development process was to predict, with high resolution and minimal computational expense, the formation and growth of SOA given a SOA mass input as a function of time. The average size distribution profile from chamber experimental data was used as part of the nucleation module. This technique provided an alternative method of representing the particle distribution compared to those models that assume a single diameter of nucleated particle or a fixed log-normal mode for the entire evolution of SOA. All SPLAT simulations assume organic nucleation events within the experiments modelled, although it is stilluncertain whether they occur in the atmosphere. The modelled nucleation events have produced a single nucleation burst, a result of immediate domination of condensation as soon as nucleation occurs. This deficiency is likely to be a result of the assumption of free molecular diffusion for condensation. The rate of condensation, calculated at every time step, is based on the aerosol size distributed surface area and the particle-size-dependent saturation mass concentrations. The SPLAT coagulation module was a version of the model developed in Chapter 6. Comparisons between experimental and modelled data showed good agreement. These comparisons revealed the shortcomings in the nucleation module while a statistical analysis of the modelled and experimental data has shown SPLAT to be effective in modelling a range of SOA systems. The complexity introduced in modelling aerosol dynamics in high resolution is offset in SPLAT by efficiency improvements due to the insensitivity of the model to time step size and simplified methods of bin sectioning, nucleation, coagulation, condensation and evaporation. Published SOA yields can be applied to predict SOA mass at local, regional or global scales. Although previously unreported uncertainties in these yields have been shown to exist, the MOZART-2 global chemical transport model has shown that SOA mass concentration can be predicted with reasonable quality, considering the scale of the model and limited observational data. These global scale SOA mass predictions can be used purely for global burden and occurrence, or as the input for modelling the dynamics of an aerosol population, which is significant for estimating an aerosol population's effect on climate change and health. SOA mass concentrations from chamber experiments were used as input to a SOA dynamics model. This model (SPLAT) then predicted the evolution of particle number concentrations and size within these experiments based on this mass input. Application of the dynamics model to the output of the MOZART-2 model could then provide a comprehensive global scale SOA modelling package.

La présence de microorganismes peut être révélée par des métabolites volatils caractéristiques. Cette approche est particulièrement intéressante pour la détection non-invasive de pathogènes dans des échantillons complexes comme les matrices alimentaires, les échantillons sanguins, ou encore les plaies chroniques. Des capteurs nanoporeux à grande surface spécifique ont été préparés par voie sol-gel (xérogels) ; leur rôle est à la fois de capturer, concentrer et permettre une détection optique des Composés Organiques Volatils (COV) microbiens. Des capteurs dopés avec une molécule sonde, l'acide 5,5′ dithiobis 2 nitrobenzoïque, ont été développés pour mettre en évidence le sulfure d'hydrogène (H2S) produit par Salmonella, un pathogène d'intérêt dans le domaine de l'agroalimentaire. La capture d'H2S provoque un changement de couleur du capteur dès 5 ppm. Une partie du travail de recherche porte également sur la détection de métabolites dits « exogènes », libérés suite à l'hydrolyse d'un substrat enzymatique. C'est alors l'activité enzymatique qui est spécifique du micro-organisme ciblé. Deux COV exogènes sont envisagés : la β naphthylamine (β NA) et le 2 nitrophénol (2 NP). La première est issue d'activités enzymatiques peptidases, le second est issu d'activités glycosidases ou estérases. Pour ce dernier, une détection directe est possible dès 14 ppb grâce à son absorbance intrinsèque dans le visible. Après un travail sur la composition chimique des xérogels, une mise en forme originale par moulage des gels en forme de coin de cube permet une lecture de l'absorbance des xérogels en réflexion. Enfin, les capteurs obtenus ont été testés vis-à-vis de COV générés par 3 pathogènes: Salmonella, Escherichia coli et Staphylococcus aureus dans des matrices complexes (sang et échantillons alimentaires). / The presence of micro-organisms can be revealed by specific volatile metabolites. This approach is interesting for the non-invasive detection of pathogenic species in complex samples, such as food, blood or exudate. Nanoporous materials developing a high surface area have been prepared by sol-gel process (xerogels). They trap, concentrate and reveal the presence of microbial Volatile Organic Compounds (VOC) by means of an optical detection. Sensors have been doped with a probe molecule (5,5′ dithiobis 2 nitrobenzoic acid) in order to detect hydrogen sulfide emitted by foodborne pathogen Salmonella. The colour of sensor changes in the presence of 5 ppm of H2S. Another detection method is the use of enzymatic substrates which release exogenous VOCs. In this approach, the enzymatic activity is specific to the targeted pathogenic bacteria. Sensors have been developed for two exogenous VOCs: β naphthylamine (β NA) and 2 nitrophenol (2-NP). β NA is issued from peptidase activity, whereas 2 NP is produced by glycosidase or esterase activity. The latter can be detected above 14 ppb through absorbance in the visible region. The work focused both on the chemical composition of the xerogels and on their shape. After molding the xerogels into a trihedral prism (“corner reflector”), the absorbance can be easily monitored using the reflected light. VOCs produced by 3 pathogenic bacteria, Salmonella, Escherichia coli and Staphylococcus aureus, in complex media (blood and food samples) have been monitored with the obtained sensors.

Les Composés Organiques Volatils (COV), émis dans l'atmosphère sous différentes formes par les activités industrielles, sont considérés comme des polluants principaux de l'air. Pour le traitement des forts débits de gaz faiblement concentrés en COV, caractéristiques des principales sources de COV industriels, il n'existe que très peu de procédés adaptés et efficaces d'où le plasma non thermique. Sa faible consommation d'énergie et sa grande compacité font du traitement par plasma non-thermique un candidat prometteur. Ma thèse consiste à élaborer et étudier un dispositif de traitement des COV basé sur l'utilisation de décharges à barrière diélectrique de surface, décharges ayant la caractéristique de produire un vent électrique dirigé. Pour ce faire, nous avons conçu et optimisé une pompe plasma chimiquement active, composée d'un assemblage de cellules à surfaces actives, capable d'aspirer et de traiter simultanément de l'air pollué en COV. Il a fallu d'abord travailler sur l'optimisation paramétrique : électrique, géométrique et matériaux, d'une surface active élémentaire. Puis concevoir un canal actif constitué de deux surfaces actives optimales placées en vis-à-vis, pour finalement aboutir à la construction d'une pompe plasma prototype ayant un débit de pompage de 10 Nm3/h. Cette pompe originale par sa capacité de traitement chimique, constitue le prototype d'étude physique et chimique de cette thèse. Elle a permis d'effectuer des essais d'élimination de 5 COV différents injectés dans l'air : acétone, méthyl-éthyle cétone, butyraldéhyde, méthyl-valérate, méthyl-butyrate et d'en évaluer les taux d'abattement respectifs, mais aussi, d'identifier à l'aide de la chromatographie en phase gazeuse couplée à la spectrométrie de masse, les principaux sous-produits de la dégradation. / The Volatile Organic Compounds (VOC) emitted in the atmosphere by various forms is considered as principal atmospheric pollutant. In order to treat a high flow of gaz with a low concentration, few efficient methods exist like the non-thermal plasma. Its low power consumption and compactness make the non-thermal plasma treatment a promising candidate. My thesis deals with the development and study of a VOC treatment device based on the surface dielectric barrier discharges which have the characteristic of producing an oriented electric wind. To do this, we have designed and optimized a chemically active plasma pump, composed of an assembly of active surfaces, capable of drawing and treating simultaneously the air polluted in VOC. At first, we had to work on the optimization of the following parameters: electrical, geometric and material of an elementary active surface. And then conceive an active channel consisting of two optimal active surfaces disposed in a mirror effect, eventually leading to the construction of a prototype plasma pump having a flow rate approximately equal to 10 Nm3/h. This original pump by its capacity of chemical treatment consists on the physical and chemical prototype of the thesis. It allowed testing the conversion of 5 different VOCs injected into air which are: ketone, methyl ethyl ketone, butyraldehyde, methyl penatanoate, methyl butyrate and evaluate the respective abatement rates, but also identifying the main by-products of degradation, using the gas chromatography coupled to the mass spectrometry.

La miniaturisation et la complexification croissante des composants microélectroniques induit une sensibilisation et une fragilisation accrue des composants vis-à-vis des contaminations présentes dans les zones de productions appelées “salles blanches”. Dans ces espaces, le contrôle actuel de la contamination organique n’est pas suffisant puisqu’il ne permet pas d’éviter la contamination de surface des plaquettes de silicium et des optiques des robots de production utilisés pour la photolithographie. Un contrôle accru des concentrations des contaminants organiques dans les atmosphères des salles blanches devient donc nécessaire et de nouvelles méthodes analytiques doivent être développées et validées. Dans le cadre de ce travail, des méthodes d’analyse ont été développées et validées afin de disposer d’une gamme d’outils permettant un suivi rigoureux des contaminations. Ces outils permettent d’identifier et de quantifier les contaminations surfaciques des plaquettes de silicium par des composés organiques semi-volatils (phtalates et organophosphorés) mais aussi de déterminer les concentrations de composés organiques volatils présents dans l’atmosphère des salles blanches. Ces méthodes font appel aux technologies du WOS/ATD-GC-MS « Wafer Outgassing System/Automated Thermal Desorber–Gas Chromatography–Mass Spectrometry » et de la DART-ToF-MS « Direct Analysis in Real Time-Time of Flight–Mass Spectrometry » pour les analyses de surfaces et au PTR-ToF-MS « Proton Transfer Reaction – Time of Flight - Mass Spectrometry » pour l’analyse de l’atmosphère. / The recent advances in the miniaturization and complexification of microelectronic components induce an increase in the sensitivity of these components regarding the organic contamination present in the production zone called “clean room”. Although, the control of organic contamination in the clean room is very rigorous it does not avoid the contamination of silicon wafer surfaces and robot lenses used in the photolithography process. The later implies that new analytical methodologies should be developed and validated. In this work, analytical methods were developed and validated in order to have a panel of tools which allows careful monitoring of organic contaminants. These tools allow the identification and quantitation of the contamination of silicon wafer surface by semi-volatiles organic compounds (phthalates and organophosphates) and the determination of volatile organic compounds concentrations in the clean room atmosphere. These methods uses the WOS/ATD-GC-MS « Wafer Outgassing System/Automated Thermal Desorber–Gas Chromatography–Mass Spectrometry » technology and the DART-ToF-MS « Direct Analysis in Real Time-Time of Flight–Mass Spectrometry » technology for wafer surface analysis and the PTR-ToF-MS « Proton Transfer Reaction – Time of Flight - Mass Spectrometry » technology for gas-phase analysis.