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京都大学 / 新制・課程博士 / 博士(人間・環境学) / 甲第23286号 / 人博第1001号 / 新制||人||236(附属図書館) / 2020||人博||1001(吉田南総合図書館) / 京都大学大学院人間・環境学研究科相関環境学専攻 / (主査)教授 内本 喜晴, 教授 田部 勢津久, 教授 高木 紀明 / 学位規則第4条第1項該当 / Doctor of Human and Environmental Studies / Kyoto University / DFAM

京都大学 / 0048 / 新制・課程博士 / 博士(人間・環境学) / 甲第21432号 / 人博第870号 / 2018||人博||870(吉田南総合図書館) / 京都大学大学院人間・環境学研究科相関環境学専攻 / (主査)教授 内本 喜晴, 教授 田部 勢津久, 教授 吉田 鉄平 / 学位規則第4条第1項該当 / Doctor of Human and Environmental Studies / Kyoto University / DFAM

京都大学 / 新制・課程博士 / 博士(人間・環境学) / 甲第23995号 / 人博第1047号 / 新制||人||245(附属図書館) / 2022||人博||1047(吉田南総合図書館) / 京都大学大学院人間・環境学研究科相関環境学専攻 / (主査)教授 内本 喜晴, 教授 中村 敏浩, 教授 陰山 洋, 教授 雨澤 浩史 / 学位規則第4条第1項該当 / Doctor of Human and Environmental Studies / Kyoto University / DFAM

京都大学 / 新制・課程博士 / 博士(人間・環境学) / 甲第23287号 / 人博第1002号 / 新制||人||236(附属図書館) / 2020||人博||1002(吉田南総合図書館) / 京都大学大学院人間・環境学研究科相関環境学専攻 / (主査)教授 内本 喜晴, 教授 田部 勢津久, 准教授 戸﨑 充男 / 学位規則第4条第1項該当 / Doctor of Human and Environmental Studies / Kyoto University / DFAM

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京都大学 / 新制・課程博士 / 博士(人間・環境学) / 甲第24710号 / 人博第1083号 / 新制||人||253(附属図書館) / 2022||人博||1083(吉田南総合図書館) / 京都大学大学院人間・環境学研究科相関環境学専攻 / (主査)教授 内本 喜晴, 教授 田部 勢津久, 教授 吉田 鉄平, 教授 雨澤 浩史 / 学位規則第4条第1項該当 / Doctor of Human and Environmental Studies / Kyoto University / DFAM

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Les attentes pour les prochaines générations de batteries pour le véhicule électrique sont grandes, que ce soit en termes d’autonomie, d’impact environnemental, de vitesse de charge et de coût. Les systèmes dits tout solide comprenant un électrolyte, non plus liquide, mais solide et non-inflammable pourrait répondre à ces attentes.La céramique de type grenat Li7La3Zr2O12 (LLZO) est un électrolyte solide prometteur au vue de sa bonne conductivité, stabilité chimique et électrochimique. La contrainte majeure réside dans le besoin de densifier la céramique à haute température afin de la rendre conductrice. Aucune méthode standard d’assemblage/mise en forme n’existe pour obtenir une cellule tout solide dense avec des interfaces peu résistives.Dans cette optique, les travaux de thèse ont permis d’optimiser le protocole de synthèse par voie « tout solide » de l’oxyde LLZO et sa mise en forme grâce à la technique de compression uniaxiale à chaud (CUC). Les conditions d’assemblage de cellules symétriques Li/LLZO/Li ont permis d’étudier l’interface Li-métal/LLZO et son impact sur la dissolution/redéposition du lithium. La faisabilité de densifier une « demi-cellule » (cathode composite/LLZO) en une seule étape a également été étudiée en ajustant les paramètres de température et pression du protocole de CUC. / Next generation batteries expectations for electric vehicle are significant, whether in terms of autonomy, environmental impact, charging speed and cost. The all solid-state batteries with a non-flammable solid electrolyte, rather than the conventional liquid one, could meet those criteria.Garnet-type ceramic Li7La3Zr2O12 (LLZO) is a promising solid electrolyte given its good Li-ion conductivity, chemical and electrochemical stability. The major constraint is the need to densify the ceramic at high temperature in order to make it conductive. No standard method exists to build a dense all-solid cell with low interfacial resistance.In this context, the PhD work managed to optimize the solid-state synthesis protocol of the LLZO oxide and his densification by the hot-pressing technique. The conditions of symmetrical Li/LLZO/Li cell assembly allowed to study the Li-metal/LLZO interface and its impact on lithium plating/striping behavior. Feasibility of densifying a “half-cell” (composite cathode/LLZO) in one single step was also studied by adjusting the hot-pressing temperature and pressure parameters.

The deposition of boron oxide (B₂O₃) films on silicon substrates is of significant interest in microelectronics for ultrashallow doping applications. However, thickness control and conformality of such films has been an issue in high aspect ratio 3D structures which have long replaced traditional planar transistor architectures. B₂O₃ films are also unstable in atmosphere, requiring a suitable capping barrier for passivation. The growth of continuous, stoichiometric B₂O₃ and boron nitride (BN) films has been demonstrated in this dissertation using Atomic Layer Deposition (ALD) and enhanced ALD methods for doping and capping applications. Low temperature ALD of B₂O₃ was achieved using BCl₃/H₂O precursors at 300 K. In situ x-ray photoelectron spectroscopy (XPS) was used to assess the purity and stoichiometry of deposited films with a high reported growth rate of ~2.5 Å/cycle. Free-radical assisted ALD of B₂O₃ was also demonstrated using non-corrosive trimethyl borate (TMB) precursor, in conjunction with mixed O₂/O-radical effluent, at 300 K. The influence of O₂/O flux on TMB-saturated Si surface was investigated using in situ XPS, residual gas analysis mass spectrometer (RGA-MS) and ab initio molecular dynamics simulations (AIMD). Both low and high flux regimes were studied in order to understand the trade-off between ligand removal and B₂O₃ growth rate. Optimization of precursor flux was discovered to be imperative in plasma and radical-assisted ALD processes. BN was investigated as a novel capping barrier for B₂O₃ and B-Si-oxide films. A BN capping layer, deposited using BCl₃/NH₃ ALD at 600 K, demonstrated excellent stoichiometry and consistent growth rate (1.4 Å/cycle) on both films. Approximately 13 Å of BN was sufficient to protect ~13 Å of B₂O₃ and ~5 Å of B-Si-oxide from atmospheric moisture and prevent volatile boric acid formation. BN/B₂O₃/Si heterostructures are also stable at high temperatures (>1000 K) commonly used for dopant drive-in and activation. BN shows great promise in preventing upward boron diffusion which causes a loss in the dopant dose concentration in Si. The capping effects of BN were extended to electrochemical battery applications. ALD of BN was achieved on solid Li-garnet electrolytes using halide-free tris(dimethylamino)borane precursor, in conjunction with NH₃ at 723 K. Approximately 3 nm of BN cap successfully inhibited Li₂CO₃ formation, which is detrimental to Li-based electrolytes. BN capped Li-garnets demonstrated ambient stability for at least 2 months of storage in air as determined by XPS. BN also played a crucial role in stabilizing Li anode/electrolyte interface, which drastically reduced interfacial resistance to 18 Ω.cm², improved critical current density and demonstrated excellent capacitance retention of 98% over 100 cycles. This work established that ALD is key to achieving conformal growth of BN as a requirement for Li dendrite suppression, which in turn influences battery life and performance.