Abstract This thesis presents a novel method for fabricating quantum dot light-emitting devices (QDLEDs) based on colloidal inorganic light-emitting nanoparticles incorporated into an organic semiconductor matrix. CdSe core/ZnS shell nanoparticles were inkjet-printed in air and sandwiched between organic hole and electron transport layers to produce efficient photon-emissive media. The light-emitting devices fabricated here were tested as individual devices and integrated into a display setting, thus endorsing the capability of this method as a manufacturing approach for full-colour high-definition displays. By choosing inkjet printing as a deposition method for quantum dots, several problems currently inevitable with alternative methods are addressed. First, inkjet printing promises simple patterning due to its drop-on-demand concept, thus overruling a need for complicated and laborious patterning methods. Secondly, manufacturing costs can be reduced significantly by introducing this prudent fabrication step for very expensive nanoparticles. Since there are no prior demonstrations of inkjet printing of electroluminescent quantum dot devices in the literature, this work dives into the basics of inkjet printing of low-viscosity, relatively highly volatile quantum dot inks: piezo driver requirements, jetting parameters, fluid dynamics in the cartridge and on the surface, nanoparticle assembly in a wet droplet and packing of dots on the surface are main concerns in the experimental part. Device performance is likewise discussed and plays an important role in this thesis. Several compositional QDLED structures are described. In addition, different pixel geometries are discussed. The last part of this dissertation deals with the principles of QDLED displays and their basic components: RGB pixels and organic thin-film transistor (OTFT) drivers. Work related to transistors is intertwined with QDLED work; ideas for surface treatments that enhance nanoparticle packing are carried over from self-assembled monolayer (SAM) studies in the OTFT field. Moreover, all the work done in this thesis project was consolidated by one method, atomic force microscopy (AFM), which is discussed throughout the entire thesis.

The thesis describes surface topography of a-CSi:H films deposited by continuous wave plasma enhanced chemical vapor deposition (PECVD) based on tetravinylsilane monomer (TVS). Thin films are completely used in many fields of modern technologies and their physical and mechanical properties are affected by thin film preparation techniques. In this thesis the thin films were deposited by PECVD method on silicon wafers with the pure TVS monomer. Deposited samples were topographically described and analyzed using atomic force microscopy (AFM). The main characteristics which were described are RMS roughness, autocorrelation function and a size distribution of grains on the thin film surface. Analysis was realized with two sets of samples with different powers and thickness. The main results were statistically evaluated like a mixture of object on the surface prepared in different deposition conditions.

Tato Diplomová práce se zabývá povrchovou analýzou nanokompozitní folie polyetherimidu (PEI) vyztuženého exfoliovanými grafitickými nanodestičkami (xGnP). Analyzovány byly take vzorky nevyztužené PEI folie a samostatné nanodestičky. Vzorky nanokompozitu a PEI folie byly plazmaticky leptány s využitím argonového plazmatu po dobu 1, 3 a 10 hod. Skenovací elektronová mikroskopie (SEM) byla použita pro charakterizaci samostatných nanodestiček rozptýlených na křemíkovém substrátu, původních či leptaných vzorků PEI folie a nanokompozitu. Nanodestičky byly identifikovány při povrchu leptané nanokompozitní folie. Mikroskopie atomárních sil (AFM) byla použita pro zobrazení povrchové topografie separovaných nanodestiček a odkrytých destiček při povrchu leptaného kompozitu. Povrchová drsnost (střední kvadratická hodnota, vzdálenost nejnižšího a nejvyššího bodu) leptaného nanokompozitu narůstala s prodlužující se dobou leptání. Akustická mikroskopie atomárních sil (AFAM) byla použita pro charakterizaci elastické anizotropie leptaných kompozitních vzorků. Nanoindentační měření umožnila charakterizaci lokálních mechanických vlastností PEI a nanokompozitních folií.

Proposed diploma thesis is focused on preparation and characterization of the plasma polymer thin films based on tetravinylsilane monomer (TVS). Plasma enhanced chemical vapour deposition (PECVD) method involving pulse and continual plasma discharge modes were used for thin film deposition on silicon wafer pieces. Reactive plasma composition was containing pure TVS or mixtures of TVS and argon or oxygen gas. Atomic force microscopy was used for surface topography and roughness characterization. Cyclic nanoindentation was involved to measurements to determine the Young’s modulus and hardness of prepared films and scratch test was performed to evaluate the degree of adhesion. Special attention was drawn to the characterization of films with a Young’s modulus below 10 GPa. Tip geometry of indenter influence on scratch test was also commented. Surface and mechanical properties of thin films in relation to the deposition conditions were correlated to the obtained results and final analysis of deposition conditions influence is proposed.

Heteroepitaxial SiGeC layers have attracted immenseattention as a material for high frequency devices duringrecent years. The unique properties of integrating carbon inSiGe are the additional freedom for strain and bandgapengineering as well as allowing more aggressive device designdue to the potential for increased thermal budget duringprocessing. This work presents different issues on epitaxialgrowth, defect density, dopant incorporation and electricalproperties of SiGeC epitaxial layers, intended for variousdevice applications. Non-selective and selective epitaxial growth of Si1-x-yGexCy(0≤x≤30, ≤y≤0.02) layershave been optimized by using high-resolution x-ray reciprocallattice mapping. The incorporation of carbon into the SiGematrix was shown to be strongly sensitive to the growthparameters. As a consequence, a much smaller epitaxial processwindow compared to SiGe epitaxy was obtained. Differentsolutions to decrease the substrate pattern dependency (loadingeffect) of SiGeC growth have also been proposed. The key pointin these methods is based on reduction of surface migration ofthe adsorbed species on the oxide. In non-selective epitaxy,this was achieved by introducing a thin silicon polycrystallineseed layer on the oxide. The thickness of this seed layer had acrucial role on both the global and local loading effect, andon the epitaxial quality. Meanwhile, in selective epitaxy,polycrystalline stripes introduced around the oxide openingsact as migration barriers and reduce the loading effecteffectively. Chemical mechanical polishing (CMP) was performedto remove the polycrystalline stripes on the oxide. Incorporation and electrical properties of boron-doped Si1-x-yGexCylayers (x=0.23 and 0.28 with y=0 and 0.005) with aboron concentration in the range of 3x1018-1x1021atoms/cm3 have also been investigated. In SiGeClayers, the active boron concentration was obtained from thestrain compensation. It was also found that the boron atomshave a tendency to locate at substitutional sites morepreferentially compared to carbon. These findings led to anestimation of the Hall scattering factor of the SiGeC layers,which showed good agreement with theoretical calculations. Keywords:Silicon germanium carbon (SiGeC), Epitaxy,Chemical vapor deposition (CVD), Loading effect, Highresolution x-ray diffraction (HRXRD), Hall measurements, Atomicforce microscopy (AFM).

The treatment of polymer surfaces by low pressure plasmas is of technological interest in a variety of applications for modification and functionalisation. Until now the interactions of the individual plasma species (especially electrons) with polymeric material have not been subject of a microscopic study.In an anticipated chapter the inner plasma parameters were characterised by Langmuir probe measurements, leading to a precise knowledge about the density and energy distributions of plasma electrons and ions. The values for electrons were later used for an exclusive treatment with this species. The main part of this thesis describes and interprets the chemical composition after UV, plasma and electron treatment by x-ray photoelectron spectroscopy (XPS), structural changes by atomic force microscopy (AFM) and their combination to distinguish the fundamental interactions with polyethylene and polypropylene surfaces. It was found that all treatments show specific modification behaviour according to the chemical composition, topography and modification depth. For an argon microwave discharge, the plasma effects can also be obtained by a combination of UV and electron treatment. Fundamental radical reactions have been traced indirectly by chemical derivatisation as well as their passivation reactions through cross-linkage and the creation of double bonds.

Micro and nanofabrication technologies have been used extensively in many biomedical and biological applications. Integration of MEMS technology and biology (BioMEMS) enables precise control of the cellular microenvironments and offers high throughput systems. The focus of this research was to develop three dimensional (3-D) isotropic microstructures for comprehensive analysis on cell-substrate interactions. The aim was to investigate whether the normal and cancerous cells differentially respond to their underlying substrate and whether the differential response of the cells leads to a novel label-free technique to distinguish between normal and cancerous cells. Three different generations of 3-D isotropic microstructures comprised of curved surfaces were developed using a single-mask, single-etch step process. Our experimental model included HS68 normal human fibroblasts, MCF10A normal human breast epithelial cells and MDA-MB-231 metastatic human breast cancer cells. Primary findings on the first generation of silicon substrates demonstrated a distinct adhesion and growth behavior in HS68 and MDA-MB-231 cells. MDA-MB-231 cells deformed while the fibroblasts stretched and elongated their cytoskeleton on the curved surfaces. Unlike fibroblasts, MDA-MB-231 cells mainly trapped and localized inside the deep microchambers. Detailed investigations on cytoskeletal organization, adhesion pattern and morphology of the cells on the second generation of the silicon substrates demonstrated that cytoskeletal prestress and microtubules organization in HS68 cells, cell-cell junction and cell-substrate adhesion strength in MCF10A cells, and deformability of MDA-MB-231 cells (obtained by using AFM technique) affect their behavior inside the etched cavities. Treatment of MDA-MB-231 cells with experimental breast cancer drug, SAHA, on the second generation of substrates, significantly altered the cells morphology, cytoarchitecture and adhesion pattern inside the 3-D microstructures. Third generation of silicon substrates was developed for comprehensive analysis on behavior of MDA-MB-231 and MCF10A cells in a co-culture system in response to SAHA drug. Formation of colonies of both cell types was evident inside the cavities within a few hours after seeding the cells on the chips. SAHA selectively altered the morphology and cytoarchitecture in MDA-MB-231 cells. Most importantly, the majority of MDA-MB-231 cells stretched inside the etched cavities, while the adhesion pattern of MCF10A cells remained unaltered. In the last part of this dissertation, using AFM analysis, we showed that the growth medium composition has a pronounced effect on cell elasticity. Our findings demonstrated that the proposed isotropic silicon microstructures have potential applications in development of biosensor platforms for cell segregation as well as conducting fundamental biological studies. / Ph. D.

Cancer progression is accompanied with alterations in the cell biomechanical phenotype, including changes in cell structure, morphology, and responses to microenvironmental stress. These alterations result in an increased deformability of transformed cells and reduced resistance to mechanical stimuli, enabling motility and invasion. Therefore, single cell biomechanical properties could be served as a powerful label-free biomarker for effective characterization and early detection of single cancer cells. Advances and innovations in microsystems and nanotechnology have facilitated interrogation of the biomechanical properties of single cells to predict their tumorigenicity, metastatic potential, and health state. This dissertation utilized Atomic Force Microscopy (AFM) for the cell biomechanical phenotyping for cancer diagnosis and early detection, efficacy screening of potential chemotherapeutic agents, and also cancer stem-like/tumor initiating cells (CSC/TICs) characterization as the critical topics received intensive attention in the search for effective cancer treatment. Our findings demonstrated the capability of exogenous sphingosine to revert the aberrant biomechanics of aggressive cells and showed a unique, mechanically homogeneous, and extremely soft characteristic of CSC/TICs, suitable for their targeted isolation. To make full use of cell biomechanical cues, this dissertation also considered the application of nonlinear viscoelastic models such as Fractional Zener and Generalized Maxwell models for the naturally complex, heterogeneous, and nonlinear structure of living cells. The emerging need for a high-throughput clinically relevant alternative for evaluating biomechanics of individual cells led us to the development of a microfluidic system. Therefore, a high-throughput, label-free, automated microfluidic chip was developed to investigate the biophysical (biomechanical-bioelectrical) markers of normal and malignant cells. Most importantly, this dissertation also explored the biomechanical response of cells upon a dynamic loading instead of a typical transient stress. Notably, metastatic and non-metastatic cells subjected to a pulsed stress regimen exerted by AFM exhibited distinct biomechanical responses. While non-metastatic cells showed an increase in their resistance against deformation and resulted in strain-stiffening behavior, metastatic cells responded by losing their resistance and yielded slight strain-softening. Ultimately, a second generation microfluidic chip called an iterative mechanical characteristics (iMECH) analyzer consisting of a series of constriction channels for simulating the dynamic stress paradigm was developed which could reproduce the same stiffening/softening trends of non-metastatic and metastatic cells, respectively. Therefore, for the first time, the use of dynamic loading paradigm to evaluate cell biomechanical responses was used as a new signature to predict malignancy or normalcy at a single-cell level with a high (~95%) confidence level. / Ph. D.

Face à la quête constante de miniaturisation, les nanosciences ont connu un essor fulgurant lors de la dernière décennie. Au sein de ces dernières, les procédés lithographiques – clé de voûte de l’industrie des semi-conducteurs – permettent désormais d’accéder à des nanomatériaux fonctionnels. Malgré les récents développements technologiques, l’obtention de nanostructures possédant une résolution inférieure à 100 nm reste un défi majeur pour la communauté scientifique.Devant l’intérêt grandissant de développer des méthodes alternatives en nanolithographie, notre groupe s’est tourné vers une approche chimique, nommée nanolithographie par sonde locale catalytique (cSPL). Combinant la robustesse de la catalyse organométallique et la flexibilité offerte par la microscopie à sonde locale, notre stratégie permet la nanostructuration de surfaces organominérales par la création de liaisons covalentes dans des conditions douces. Cette approche innovante constitue le premier exemple d’immobilisation d’un catalyseur homogène à la surface d’une pointe d’un microscope à force atomique (AFM), dans l’optique de contrôler spatialement une réactivité chimique, l’époxydation localisée d’alcènes terminaux. Ces fonctions époxydes ont été employées comme points d’ancrage dans la nanostructuration à façon de surfaces de silicium avec une large variété de nucléophiles. De plus, l’optimisation des paramètres physico-chimique influant sur la réaction, a permis d’atteindre des résolutions latérales de l’ordre de 40 nm et laisse entrevoir de nombreuses perspectives dans la nanostructuration tridimensionnelle de matériaux organiques. / In regard to the constant quest for miniaturization, the field of nanosciences has known a tremendous expansion over the last decade. More precisely, lithographic technologies - key processes for the semi-conductor industry – allow to access to functional nanomaterials. Despite recent technological developments, the synthesis of nanostructures with a sub-100 nm resolution remains a major challenge for the scientific community.Due to the growing interest in the design of new nanolithographic methods, our group has focused its efforts on the development of a chemical approach, named catalytic scanning probe lithography (cSPL). Unifying the robustness of organometallic catalysis and the flexibility offered by scanning probe microscopy, our strategy allows the nanostructuration of organomineral surfaces in a soft controlled manner by the formation of covalent bonds. This innovative approach represents the first example of the immobilization of an homogeneous catalyst on the edge of an atomic force microscope (AFM) tip, in order to spatially control a chemical reaction: the localized epoxidation reaction of terminal alkenes. Those epoxides were then used as anchoring sites, in the nanostructuration of silicon wafers with a broad range of nucleophiles. Moreover, the different physico-chemical parameters influencing the reaction were optimized, allowing us to reach lateral resolutions down to 40 nm and opening new perspectives in the field of 3D-nanostructuration of organic materials.

Wir haben blau, grün und orange leuchtende organische Nanofäden oder Nanonadeln und Mikroringe aus para-Hexaphenyl (p-6P), alpha-Quaterthiophen (alpha-4T) und alpha-Sexithiophen (alpha-6T) mittels Organischer Molekularstrahlepitaxie (OMBE) auf Muskovit Glimmer hergestellt. Die Aggregate haben wir mit der Atomkraftmikroskopie, mit der Fluoreszenz-Mikroskopie und durch UV-vis Spektroskopie charakterisiert. Auf der Muskovit Oberfläche wachsen p-6P Fäden parallel zueinander auf und zeigen zwei verschiedene Orientierungsdomänen entlang [110] und [1-10]. Mit Hilfe einer systematischen statistischen Analyse diskutieren wir das Wachstum dieser p-6P Nadeln für verschiedene Wachstumsbedingungen. Zusätzlich zu den Fäden haben wir p-6P Cluster auf der Oberfläche beobachtet. Nadeln werden durch die Aggregation solcher Cluster gebildet. Ein Realraummodell der Morphologie der Nadeln sowie ein Modell für deren Wachstum werden vorgestellt. Indem wir Glimmer zunächst mit einer dünnen Goldschicht bedecken und die Wachstumsparameter variieren, erreichen wir eine weitgehende Kontrolle der Morphologie der Nadeln (Länge von 0,5 Mikrometer bis 1 mm, Höhe von 25 bis 300 nm und Breite von 100 bis 600 nm). Im Gegensatz zu p-6P orientieren Thiophene ihre Wachstumsrichtungen an allen hoch symmetrischen Richtungen von Glimmer. Es wird gezeigt, dass die Mechanismen für das Fadenwachstum von beiden Oligomere gleich sind, nämlich eine Kombination aus Epitaxie und einer Dipol-unterstützten Ausrichtung. Auch die Strukturen dieser Fäden sind ähnlich: die Moleküle liegen parallel angeordnet auf der Oberfläche, ihre Längsachsen orientieren sich schräg zur Längsachse der Fäden. Auf mit Wasser oder Methanol vorbehandeltem Glimmer wachsen diese beiden Oligomere als gebogene Fäden und Mikroringe auf. Diese Oberflächenvorbehandlungen sowie das Wachstum von p-6P auf Gold/Glimmer unterstützen auch den Wachstumsmechanismus auf der sauberen Glimmer-Oberfläche. / By using organic molecular beam epitaxy (OMBE) blue, green and orange light emitting organic nanofibers or nanoneedles and microrings from para-hexaphenyl (p-6P), alpha-quaterthiophene (alpha-4T) and alpha-sexithiophene (alpha-6T), respectively, on muscovite mica surfaces are generated. The aggregates are characterized by atomic force microscopy, fluorescence microscopy and UV-vis spectroscopy. On muscovite mica, p-6P fibers usually grow mutually parallel showing two domains of their orientations with an angle of 120 degree in between. The detail growth of nanofibers from p-6P by performing a systematic statistical analysis of fibers as a function of various growth conditions is discussed. Furthermore, the morphology exhibits p-6P clusters, which are found to be fibers´ building blocks. A real space model of the fiber and a model for their growth are also presented. By introducing a thin gold layer on mica prior to p-6P deposition together with varying growth parameters, the morphology of fibers is controlled in a wide range (length from 0.5 micrometer to 1 mm, height from 25 to 300 nm and width from 100 to 600 nm). In contrast to p-6P, thiophene fibers exhibit various orientations close to mica high symmetry directions. It is shown that the mechanism behind the fiber growth from all molecules on mica is the same, i.e. a combination of epitaxy and dipole assisted growth process. The fiber microscopic structures are similar, too: molecules take lying orientations and they hold themselves parallel pointing their long axes along an oblique direction off the long fiber axis. The growth of both types of oligomers on water or methanol treated mica surfaces leads to the formation of bent fibers and microrings. This surface pretreatment and the growth of p-6P on gold/mica support the fiber growth mechanism on plain mica.