Optical interconnects based on CMOS compatible photonic integrated circuits are regarded as a promising technique to tackle the issues traditional electronics faces, such as limited bandwidth, latency, vast energy consumption and so on. In recent years, plasmonic integrated components have gained great attentions due to the properties of nano-scale confinement, which may potentially bridge the size mismatch between photonic and electronic circuits. Based on silicon nanowire platform, this thesis work studies the design, fabrication and characterization of several integrated plasmonic components, aiming to combine the benefits of Si and plasmonics. The basic theories of surface plasmon polaritons are introduced in the beginning, where we explain the physics behind the diffraction-free confinement. Numerical methods frequently used in the thesis including finite-difference time-domain method and finite-element method are then reviewed. We summarize the device fabrication techniques such as film depositions, e-beam lithography and inductively coupled plasma etching as well as characterization methods, such as direct measurement method, butt coupling, grating coupling etc. Fabrication results of an optically tunable silicon-on-insulator microdisk and III-V cavities in applications as light sources for future nanophotonics interconnects are briefly discussed. Afterwards we present in details the experimental demonstrations and novel design of plasmonic components. Hybrid plasmonic waveguides and directional couplers with various splitting ratios are firstly experimentally demonstrated. The coupling length of two 170 nm wide waveguides with a separation of 140 nm is only 1.55 µm. Secondly, an ultracompact polarization beam splitter with a footprint of 2×5.1 μm2 is proposed. The device features an extinction ratio of 12 dB and an insertion loss below 1.5 dB in the entire C-band. Thirdly, we show that plasmonics offer decreased bending losses and enhanced Purcell factor for submicron bends. Novel hybrid plasmonic disk, ring and donut resonators with radii of ~ 0.5 μm and 1 μm are experimentally demonstrated for the first time. The Q-factor of disks with 0.5 μm radii are                         , corresponding to Purcell factors of . Thermal tuning is also presented. Fourthly, we propose a design of electro-optic polymer modulator based on plasmonic microring. The figure of merit characterizing modulation efficiency is 6 times better comparing with corresponding silicon slot polymer modulator. The device exhibits an insertion loss below 1 dB and a power consumption of 5 fJ/bit at 100 GHz. At last, we propose a tightly-confined waveguide and show that the radius of disk resonators based on the proposed waveguide can be shrunk below 60 nm, which may be used to pursue a strong light-matter interaction. The presented here novel components confirm that hybrid plasmonic structures can play an important role in future inter- and intra-core computer communication systems. / <p>QC 20140404</p>

Optical devices based on planar lightwave circuit (PLC) technology have the advantages of small size, high reliability, possibility for large scale production, and potential integration with electronics. These devices are widely employed in optical telecommunications, sensing, data storage, imaging, and signal processing. This thesis focuses on some selected PLC based devices, such as power splitters, demultiplexers, triplexers and polarization beam splitters. First, the basic principle of the waveguides and the simulation methods for PLC devices are discussed. A novel effective index method is introduced to reduce a two-dimensional structure to a one-dimensional one, and can be implemented for arbitrarily shaped waveguides. Numerical methods, such as finite-difference mode solver, beam propagation method, finite-difference time-domain method are introduced to analysis the mode profile of the waveguides, and the propagation properties of light in PLC devices. Multimode interference (MMI) couplers are widely used in many PLCs, such as power splitters, ring lasers, optical switches, and wavelength division multiplexers/demultiplexers. In this work, concepts for improving the self-imaging quality of MMI couplers are analyzed and new designs are proposed. A significant improvement in performance together with compact sizes were obtained with taper sections at the input/output of MMI couplers based on SOI, and deeply etched ridges in MMI couplers based on SiO2. A polarization insensitive dual wavelength demultiplexer based on sandwiched MMI waveguides was presented. Novel devices including triplexers and polarization beam splitters were realized by using photonic crystal (PhC) structures. Two stages of directional couplers based on PhC waveguides are cascaded to form an ultracompact triplexer. The special decoupling property of the PhC waveguide based directional coupler was utilized in the design. A novel polarization beam splitter was realized by combining a MMI coupler and a PhC which works as a polarization sensitive reflector. Finally, fabrication and optical characterization of an ultra-compact directional coupler and PhC structures in InP are presented. In a single etching step, by using the lag-effect in inductively coupled plasma reactive ion etching, a compact directional coupler (55 μm) is demonstrated. Carrier life times in PhC structures etched by chemically assisted ion beam etching were investigated, for emitter and switching applications. / QC 20100909

Spontaneous parametric down conversion (SPDC) is used to generate quantum entangled photons through a non-linear crystal. The entanglement of photons is demonstrated by observing the effects of indistinguishability on photons, first through time and energy, then by polarization. The Hong-Ou-Mandel (HOM) effect was also demonstrated. A theoretical derivation of the effect of a non 50/50 beam splitter (BS) is also investigated. The energy of the photons was changed by varying the temperature of the crystal whilst the time difference was changed by varying the relative position of two mirrors. Results showed a clear effect from indistinguishability on both energy and time.

Pour décrire les vibrations à l'intérieur des molécules diatomiques, le potentiel de Morse est une meilleure approximation que le système de l'oscillateur harmonique. Ainsi, en se basant sur la définition des états cohérents et comprimés donnée dans le cadre du problème de l'oscillateur harmonique, la première partie de ce travail suggère une construction des états cohérents et comprimés pour le potentiel de Morse. Deux types d’états seront construits et leurs différentes propriétés seront étudiées en portant une attention particulière aux trajectoires et aux dispersions afin de confirmer la quasi-classicité de ces états. La deuxième partie de ce travail propose d'insérer ces deux types d’états cohérents et comprimés de Morse dans un miroir semi-transparent afin d'introduire un nouveau moyen de créer de l'intrication. Cette intrication sera mesurée à l’aide de l’entropie linéaire et nous étudierons la dépendance par rapport aux paramètres de cohérence et de compression. / In order to describe the vibrations inside a diatomic molecule, the Morse potential is a better approximation than the harmonic oscillator system. Thus, based on the definition of the coherent states given in the context of the harmonic oscillator, the first part of this work suggests a construction for the squeezed coherent states of the Morse potential. Two types of states will be constructed and their diverse properties will be studied with special attention to the trajectories and dispersions in order to confirm their quasi-classicity. The second part of this work proposes to insert those two types of Morse squeezed coherent states in a beam splitter in order to introduce a new way of creating entanglement. This entanglement will be measured by the linear entropy and we will study the dependence with the coherence and squeezing parameters.

Pour décrire les vibrations à l'intérieur des molécules diatomiques, le potentiel de Morse est une meilleure approximation que le système de l'oscillateur harmonique. Ainsi, en se basant sur la définition des états cohérents et comprimés donnée dans le cadre du problème de l'oscillateur harmonique, la première partie de ce travail suggère une construction des états cohérents et comprimés pour le potentiel de Morse. Deux types d’états seront construits et leurs différentes propriétés seront étudiées en portant une attention particulière aux trajectoires et aux dispersions afin de confirmer la quasi-classicité de ces états. La deuxième partie de ce travail propose d'insérer ces deux types d’états cohérents et comprimés de Morse dans un miroir semi-transparent afin d'introduire un nouveau moyen de créer de l'intrication. Cette intrication sera mesurée à l’aide de l’entropie linéaire et nous étudierons la dépendance par rapport aux paramètres de cohérence et de compression. / In order to describe the vibrations inside a diatomic molecule, the Morse potential is a better approximation than the harmonic oscillator system. Thus, based on the definition of the coherent states given in the context of the harmonic oscillator, the first part of this work suggests a construction for the squeezed coherent states of the Morse potential. Two types of states will be constructed and their diverse properties will be studied with special attention to the trajectories and dispersions in order to confirm their quasi-classicity. The second part of this work proposes to insert those two types of Morse squeezed coherent states in a beam splitter in order to introduce a new way of creating entanglement. This entanglement will be measured by the linear entropy and we will study the dependence with the coherence and squeezing parameters.

Nowadays, silicon photonics is a widely studied research topic. Its high-index-contrast and compatibility with the complementary metal-oxide-semiconductor technology make it a promising platform for low cost high density integration. Several general problems have been brought up, including the lack of silicon active devices, the difficulty of light coupling, the polarization dependence, etc. This thesis aims to give new attempts to novel solutions for some of these problems. Both theoretical modeling and experimental work have been done. Several numerical methods are reviewed first. The semi-vectorial finite-difference mode solver in cylindrical coordinate system is developed and it is mainly used for calculating the eigenmodes of the waveguide structures employed in this thesis. The finite-difference time-domain method and beam propagation method are also used to analyze the light propagation in complex structures. The fabrication and characterization technologies are studied. The fabrication is mainly based on clean room facilities, including plasma assisted film deposition, electron beam lithography and dry etching. The vertical coupling system is mainly used for characterization in this thesis. Compared with conventional butt-coupling system, it can provide much higher coupling efficiency and larger alignment tolerance. Two novel couplers related to silicon photonic wires are studied. In order to improve the coupling efficiency of a grating coupler, a nonuniform grating is theoretically designed to maximize the overlap between the radiated light profile and the optical fiber mode. Over 60% coupling efficiency is obtained experimentally. Another coupler facilitating the light coupling between silicon photonic wires and slot waveguides is demonstrated, both theoretically and experimentally. Almost lossless coupling is achieved in experiments. Two approaches are studied to realize polarization insensitive devices based on silicon photonic wires. The first one is the use of a sandwich waveguide structure to eliminate the polarization dependent wavelength of a microring resonator. By optimizing the multilayer structure, we successfully eliminate the large birefringence in an ultrasmall ring resonator. Another approach is to use polarization diversity scheme. Two key components of the scheme are studied. An efficient polarization beam splitter based on a one-dimensional grating coupler is theoretically designed and experimentally demonstrated. This polarization beam splitter can also serve as an efficient light coupler between silicon-on-insulator waveguides and optical fibers. Over 50% coupling efficiency for both polarizations and -20dB extinction ratio between them are experimentally obtained. A compact polarization rotator based on silicon photonic wire is theoretically analyzed. 100% polarization conversion is achievable and the fabrication tolerance is relatively large by using a compensation method. A novel integration platform based on nano-epitaxial lateral overgrowth technology is investigated to realize monolithic integration of III-V materials on silicon. A silica mask is used to block the threading dislocations from the InP seed layer on silicon. Technologies such as hydride vapor phase epitaxy and chemical-mechanical polishing are developed. A thin dislocation free InP layer on silicon is obtained experimentally. / QC20100705

Decades of efforts have pushed the replacement of electrical interconnects by optical links to the interconnects between computers, racks and circuit boards. It may be expected that optical solutions will further be used for inter-chip and intra-chip interconnects with potential benefits in bandwidth, capacity, delay, power consumption and crosstalk. Silicon integration is emerging to be the best candidate nowadays due to not only the dominant status of silicon in microelectronics but also the great advantages brought to the photonic integrated circuits (PICs). Regarding the recent breakthroughs concerning active devices on silicon substrate, the question left is no longer the feasibility of the optical interconnects based on silicon but the competitiveness of the silicon device compared with other alternatives. This thesis focuses on the study of two key components for the optical interconnects, both especially designed and fabricated for silicon platform. One is a high speed electroabsorption modulator (EAM), realized by transferring an InP-based segmented design to the hybrid silicon evanescent platform. The purpose here is to increase the speed of the silicon PICs to over 50  Gb/s or more. The other one is a high performance grating coupler, with the purpose to improve the optical interface between the silicon PICs and the outside fiber-based communication system. An general approach based on the transmission line analysis has been developed to evaluate the modulation response of an EAM with a lumped, traveling-wave, segmented or capacitively-loaded configuration. A genetic algorithm is used to optimize its configuration. This method has been applied to the design of the EAMs on hybrid silicon evanescent platform. Based on the comparison of various electrode design, segmented configuration is adopted for the target of a bandwidth over 40 GHz with as low as possible voltage and high extinction ratio. In addition to the common periodic analysis, the grating coupler is analyzed by the antenna theory assisted with an improved volume-current method, where the directionality of a grating coupler can be obtained analytically. In order to improve the performance of the grating coupler, a direct way is to address its shortcoming by e.g. increasing the coupling efficiency. For this reason, a nonuniform grating coupler with apodized grooves has been developed with a coupling efficiency of 64%, nearly a double of a standard one. Another way is to add more functionalities to the grating coupler. To do this, a polarization beam splitter (PBS) based on a bidirectional grating coupler has been proposed and experimentally demonstrated. An extinction ratio of around -20 dB, as well as a maximum coupling efficiency of over 50% for both polarizations, is achieved by such a PBS with a Bragg reflector underneath. / QC 20100906

Ce travail de thèse porte sur l’étude fondamentale de systèmes nano-électroniques,mesurés à très basse température. Nous avons réalisé des interféromètres électroniques àdeux chemins à partir d’électrons balistiques obtenus dans un gaz 2D d’électrons d’unehétéro-structure GaAs/AlGaAs. Nous montrons que la phase des électrons, et ainsileur état quantique,peut être contrôlée par des grilles électrostatiques. Ces dispositifsse révèlent être des candidats prometteurs pour la réalisation d’un qubit volant. Nousavons développé une simulation numérique évoluée d’un modèle de liaisons fortes à partirde transport quantique ballistique qui décrit toutes les découvertes expérimentales etnous apporte une connaissance approfondie sur les signatures expérimentales de cesdispositifs particuliers. Nous proposons des mesures complémentaires de ce système dequbit volants. Pour atteindre le but ultime, à savoir un qubit volant à un électron unique,nous avons assemblé la source à électron unique précédemment développée dans notreéquipe à un beam splitter électronique. Les électrons sont alors injectés depuis une boîtequantique à un train de boîte quantiques en mouvement. Ce potentiel électrostatique enmouvement est généré par des ondes acoustiques de surface créées par des transducteursinter-digités sur le substrat GaAs piézo-électrique. Nous avons étudié et optimisé chacunde ces composants fondamentaux nécessaires à la réalisation d’un beam splitter à électronunique et développé un procédé local et fiable de fabrication. Ce dispositif nous permet d’étudier les interactions électroniques pour des électrons isolés et pourra servir de basede mesure pour des expériences d’optique quantiques sur un système électronique del’état condensé. Enfin, nous avons développé un outil puissant de simulation du potentielélectrostatique à partir de la géométrie des grilles. Ceci permet d’optimiser la conceptiondes échantillons avant même leur réalisation. Nous proposons ainsi un prototype optimiséde beam splitter à électron unique. / This thesis contains the fundamental study of nano-electronic systems at cryogenictemperatures. We made use of ballistic electrons in a two-dimensional electron gasin a GaAs/AlGaAs heterostructure to form a real two-path electronic interferometerand showed how the phase of the electrons and hence their quantum state can becontrolled by means of electrostatic gates. The device represents a promising candidateof a flying qubit. We developed a sophisticated numerical tight-binding model based onballistic quantum transport, which reproduces all experimental findings and allows togain profound knowledge about the subtle experimental features of this particular device.We proposed further measurements with this flying qubit system. With the ultimate goalof building a single electron flying qubit, we combined the single electron source that hasbeen developed in our lab prior to this manuscript with an electronic beam splitter. Theelectrons are injected from static quantum dots into a train of moving quantum dots.This moving potential landscape is induced in the piezoelectric substrate of GaAs bysurface acoustic waves from interdigial transducers. We studied and optimized all keycomponents, which are necessary to build a single electron beam splitter and built up areliable local fabrication process. The device is capable of studying electron interactionson the single electron level and can serve as a measurement platform for quantum opticsexperiments in electronic solid state systems. Finally, we developed a powerful toolcapable of calculating the potential landscapes of any surface gate geometry, which canbe used as a fast feedback optimization tool for device design and proposed an optimizedprototype for the single electron beam splitter.

<p>The fiber-to-the-x (FTTX) has been widely investigated as a leading access technology to meet the ever growing demand for bandwidth in the last mile. The passive optical network (PON) provides a cost-effective and durable solution. In this thesis, we investigate different aspects of the PON, in the search for cost-effective and high-performance designs of link system and devices.</p> <p>In Chapter 2, we propose a novel upstream link scheme for optical orthogonal frequency division multiplexing (OOFDM)-PON. The colorless laser diodes are used at the optical network units (ONUs), and the overlapped channel spectrum of orthogonal subcarrier multiplexing provides high spectral efficiency. At the optical line terminal (OLT), optical switch and all optical fast Fourier transform (OFFT) are adopted for high speed demultiplexing. The deterioration caused by the laser perturbation is also investigated.</p> <p>In Chapter 3, we design a novel polarization beam splitter (PBS), which is one of the most important components in polarization-controlled optical systems, e.g. the next-generation PON utilizing polarization multiplexing. Our PBS is built on a slab waveguide platform where the light is vertically confined. Planar lenses are formed to collimate and refocus light beam by converting the phase front of the beam. A planar subwavelength grating of a wedge shape induces the form birefringence, where the transverse electric (TE) and transverse magnetic (TM) waves have different effective refractive indices, and are steered to distinct directions. This design provides low insertion loss (< 0.9 dB) and low crosstalk (< -30 dB) for a bandwidth of 100 nm in a compact size, and can be realized by different material systems for easy fabrication and/or monolithic integration with other optical components.</p> <p>In Chapter 4, we study the mode partition noise (MPN) characteristics of the Fabry-Perot (FP) laser diode using the time-domain simulation of noise-driven multi-mode laser rate equation. FP laser is cheaper than the widely used distributed feedback (DFB) laser diode in PON, but its MPN is the major limiting factor in an optical transmission system. We calculate the probability density functions for each longitudinal mode. We also investigate the k-factor, which is a simple yet important measure of MPN. The sources of the k-factor are studied with simulation, including the intrinsic source of the laser Langevin noise, and the extrinsic source of the bit pattern.</p> / Doctor of Philosophy (PhD)

The widespread adoption of photonic circuits requires the economics of volume manufacturing offered by integration technology. A Complementary Metal-Oxide Semiconductor compatible silicon material platform is particularly attractive because it leverages the huge investment that has been made in silicon electronics and its high index contrast enables tight confinement of light which decreases component footprint and energy consumption. Nevertheless, there remain challenges to the development of photonic integrated circuits. Although the density of integration is advancing steady and the integration of the principal components – waveguides, optical sources and amplifiers, modulators, and photodetectors – have all been demonstrated, the integration density is low and the device library far from complete. The integration density is low primarily because of the difficulty of confining light in structures small compared to the wavelength which measured in micrometers. The device library is incomplete because of the immaturity of hybridisation on silicon of other materials required by active devices such as III-V semiconductor alloys and ferroelectric oxides and the difficulty of controlling the coupling of light between disparate material platforms. Metamaterials are nanocomposite materials which have optical properties not readily found in Nature that are defined as much by their geometry as their constituent materials. This offers the prospect of the engineering of materials to achieve integrated components with enhanced functionality. Metamaterials are a class of photonic crystals includes subwavelength grating waveguides, which have already provided breakthroughs in component performance yet require a simpler fabrication process compatible with current minimum feature size limitations. The research reported in this PhD thesis advances our understanding of the structure-property relations of key planar light circuit components and the metamaterial engineering of these properties. The analysis and simulation of components featuring structures that are only just subwavelength is complicated and consumes large computer resources especially when a three dimensional analysis of components structured over a scale larger than the wavelength is desired. This obstructs the iterative design-simulate cycle. An abstraction is required that summarises the properties of the metamaterial pertinent to the larger scale while neglecting the microscopic detail. That abstraction is known as homogenisation. It is possible to extend homogenisation from the long-wavelength limit up to the Bragg resonance (band edge). It is found that a metamaterial waveguide is accurately modeled as a continuous medium waveguide provided proper account is taken of the emergent properties of the homogenised metamaterial. A homogenised subwavelength grating waveguide structure behaves as a strongly anisotropic and spatially dispersive material with a c-axis normal to the layers of a one dimensional multi-layer structure (Kronig-Penney) or along the axis of uniformity for a two dimensional photonic crystal in three dimensional structure. Issues with boundary effects in the near Bragg resonance subwavelength are avoided either by ensuring the averaging is over an extensive path parallel to boundary or the sharp boundary is removed by graded structures. A procedure is described that enables the local homogenised index of a graded structure to be determined. These finding are confirmed by simulations and experiments on test circuits composed of Mach-Zehnder interferometers and individual components composed of regular nanostructured waveguide segments with different lengths and widths; and graded adiabatic waveguide tapers. The test chip included Lüneburg micro-lenses, which have application to Fourier optics on a chip. The measured loss of each lens is 0.72 dB. Photonic integrated circuits featuring a network of waveguides, modulators and couplers are important to applications in RF photonics, optical communications and quantum optics. Modal phase error is one of the significant limitations to the scaling of multimode interference coupler port dimension. Multimode interference couplers rely on the Talbot effect and offer the best in-class performance. Anisotropy helps reduce the Talbot length but temporal and spatial dispersion is necessary to control the modal phase error and wavelength dependence of the Talbot length. The Talbot effect in a Kronig-Penny metamaterial is analysed. It is shown that the metamaterial may be engineered to provide a close approximation to the parabolic dispersion relation required by the Talbot effect for perfect imaging. These findings are then applied to the multimode region and access waveguide tapers of a multi-slotted waveguide multimode interference coupler with slots either in the transverse direction or longitudinal direction. A novel polarisation beam splitter exploiting the anisotropy provided by a longitudinally slotted structure is demonstrated by simulation. The thesis describes the design, verification by simulation and layout of a photonic integrated circuit containing metamaterial waveguide test structures. The test and measurement of the fabricated chip and the analysis of the data is described in detail. The experimental results show good agreement with the theory, with the expected errors due to fabrication process limitations. From the Scanning Electron Microscope images and the measurements, it is clear that at the boundary of the minimum feature size limit, the error increases but still the devices can function.