abstract: Nitride semiconductors have wide applications in electronics and optoelectronics technologies. Understanding the nature of the optical recombination process and its effects on luminescence efficiency is important for the development of novel devices. This dissertation deals with the optical properties of nitride semiconductors, including GaN epitaxial layers and more complex heterostructures. The emission characteristics are examined by cathodoluminescence spectroscopy and imaging, and are correlated with the structural and electrical properties studied by transmission electron microscopy and electron holography. Four major areas are covered in this dissertation, which are described next. The effect of strain on the emission characteristics in wurtzite GaN has been studied. The values of the residual strain in GaN epilayers with different dislocation densities are determined by x-ray diffraction, and the relationship between exciton emission energy and the in-plane residual strain is demonstrated. It shows that the emission energy increases withthe magnitude of the in-plane compressive strain. The temperature dependence of the emission characteristics in cubic GaN has been studied. It is observed that the exciton emission and donor-acceptor pair recombination behave differently with temperature. The donor-bound exciton binding energy has been measured to be 13 meV from the temperature dependence of the emission spectrum. It is also found that the ionization energies for both acceptors and donors are smaller in cubic compared with hexagonal structures, which should contribute to higher doping efficiencies. A comprehensive study on the structural and optical properties is presented for InGaN/GaN quantum wells emitting in the blue, green, and yellow regions of the electromagnetic spectrum. Transmission electron microscopy images indicate the presence of indium inhomogeneties which should be responsible for carrier localization. The temperature dependence of emission luminescence shows that the carrier localization effects become more significant with increasing emission wavelength. On the other hand, the effect of non-radiative recombination on luminescence efficiency also varies with the emission wavelength. The fast increase of the non-radiative recombination rate with temperature in the green emitting QWs contributes to the lower efficiency compared with the blue emitting QWs. The possible saturation of non-radiative recombination above 100 K may explain the unexpected high emission efficiency for the yellow emitting QWs Finally, the effects of InGaN underlayers on the electronic and optical properties of InGaN/GaN quantum wells emitting in visible spectral regions have been studied. A significant improvement of the emission efficiency is observed, which is associated with a blue shift in the emission energy, a reduced recombination lifetime, an increased spatial homogeneity in the luminescence, and a weaker internal field across the quantum wells. These are explained by a partial strain relaxation introduced by the InGaN underlayer, which is measured by reciprocal space mapping of the x-ray diffraction intensity. / Dissertation/Thesis / Ph.D. Physics 2012

京都大学 / 0048 / 新制・課程博士 / 博士(工学) / 甲第18281号 / 工博第3873号 / 新制||工||1594(附属図書館) / 31139 / 京都大学大学院工学研究科電子工学専攻 / (主査)教授 川上 養一, 教授 藤田 静雄, 准教授 須田 淳 / 学位規則第4条第1項該当 / Doctor of Philosophy (Engineering) / Kyoto University / DFAM

This thesis reports a comprehensive study of quaternary BeMgZnO alloy and BeMgZnO/ZnO heterostructures for UV-optoelectronics electronic applications. It was shown that by tuning Be and Mg contents in the heterostructures, high carrier densities of two-dimensional electron gas (2DEG) are achievable and makes its use possible for high power RF applications. Additionally, optical bandgaps as high as 5.1 eV were achieved for single crystal wurtzite material which allows the use of the alloy for solar blind optoelectronics (Eg>4.5eV) or intersubband devices. A systematic experimental and theoretical study of lattice parameters and bandgaps of quaternary BeMgZnO alloy was performed for the whole range of compositions. Composition independent bowing parameters were determined which allows accurate predictions of experimentally measured values. The BeMgZnO thin films were grown by plasma assisted molecular beam epitaxy (P-MBE) in a wide range of compositions. The optimization of the growth conditions and its effects on the material properties were explored. The surface morphology and electrical characteristics of the films grown on (0001) sapphire were found to critically depend on the metal-to-oxygen ratio. Samples grown under slightly oxygen-rich conditions exhibited the lowest RMS surface roughness (as low as 0.5 nm). Additionally, the films grown under oxygen-rich conditions were semi-insulating (>105 Ω∙cm), while the films grown under metal-rich conditions were semiconducting (~102 Ω∙cm). Additionally, with increasing bandgap Stokes shift increases, reaching ~0.5 eV for the films with 4.6 eV absorption edge suggests the presence of band tail states introduced by potential fluctuations and alloying. From spectrally resolved PL transients, BeMgZnO films grown on a GaN/sapphire template having higher Mg/Be content ratio exhibit smaller localization depth and brighter photoluminescence at low temperatures. The optimum content ratio for better room temperature optical performance was found to be ~2.5. The BeMgZnO material system and heterostructures are promising candidates for the device fabrication. 2DEG densities of MgZnO/ZnO heterostructures were shown to improve significantly (above 1013 cm-2) by adding even a small amount of Be (1-5%). As an essential step toward device fabrication, reliable ohmic contacts to ZnO were established with remarkably low specific contact resistivities below 10-6 Ohm-cm2 for films with 1018 cm-3 carrier density.

InGaN based blue and near-ultraviolet light emitting diodes and laser diodes have been successfully commercialized for many applications such as general lighting, display backlighting and high density optical storage devices. Despite having a comparably high defect density, these devices are known for their efficient operation, which is attributed to localization in potential fluctuations preventing carriers from reaching the centers of nonradiative recombination. Nitride research is currently headed towards improving deep ultraviolet AlGaN and green InGaN emitters with higher Al and In molar fractions. The efficiency of these devices trails behind the blue counterparts as the carrier localization does not seem to aid in supressing nonradiative losses. In addition, the operation of ternary nitride heterostructure based devices is further complicated by the presence of large built-in electric fields. Although the problem can be ameliorated by growing structures in nonpolar or semipolar directions, the step from research to production still awaits. In this thesis, carrier dynamics and localization effects have been studied in three different nitride ternary compounds: AlGaN epitaxial layers and quantum wells with high Al content, nonpolar m-plane InGaN/GaN quantum wells and lattice matched AlInN/GaN heterostructures. The experimental methods of this work mainly consist of spectroscopy techniques such as time-resolved photoluminescence and differential transmission pump-probe measurements as well as spatial photoluminescence mapping by means of scanning near-field microscopy. The comparison of luminescence and differential transmission measurements has allowed estimating the localization depth in AlGaN quantum wells. Additionally, it has been demonstrated that the polarization degree of luminescence from m-InGaN quantum wells decreases as carriers diffuse to localization centers.What is more, dual-scale localization potential has been evidenced by near-field measurements in both AlGaN and m-InGaN. Larger scale potential fluctuation have been observed directly and the depth of nanoscopic localization has been estimated theoretically from the recorded linewidth of the near-field spectra. Lastly, efficient carrier transport has been observed through AlInN layer despite large alloy inhomogeneities evidenced by broad luminescence spectra and the huge Stokes shift. Inhomogeneous luminescence from the underlying GaN layer has been linked to the fluctuations of the built-in electric field at the AlInN/GaN interface. / <p>QC 20121101</p>

abstract: Multiple quantum well (MQW) structures have been employed in a variety of solid state devices. The InGaAs/GaAs material system is of special interest for many optoelectronic applications. This study examines epitaxial growth and defect creation in InGaAs/GaAs MQWs at its initial stage. Correlations between physical properties, crystal perfection of epitaxial structures, and growth conditions under which desired properties are achieved appear as highly important for the realization and final performance of semiconductor based devices. Molecular beam epitaxy was utilized to grow InGaAs/GaAs MQW structures with a variation in deposition temperature T_dep among the samples to change crystalline and physical properties. High resolution x-ray diffraction and transmission electron microscopy were utilized to probe crystal properties, whereas photoluminescence spectroscopy evaluated optical response. An optimal growth temperature T_dep=505&deg;C was found for 20% In composition. The density of 60&deg; primary and secondary dislocation loops increased continuously at lower growth temperatures and reduced crystal perfection, as evaluated by lateral and vertical coherence lengths and diffuse scattering in reciprocal space maps. Likewise, the strength of non-radiative Shockley-Read-Hall recombination increased as deposition temperature was reduced. Elevated deposition temperature led to InGaAs decay in the structures and manifested in different crystalline defects with a rather isotropic distribution and no lateral ordering. High available thermal energy increased atomic surface diffusivity and resulted in growth surface instability against perturbations, manifesting in lateral layer thickness undulations. Carriers in structures grown at elevated temperature experience localization in local energy minima.InGaAs/GaAs MQW structures reveal correlation between their crystal quality and optical properties. It can be suggested that there is an optimal growth temperature range for each In composition with high crystal perfection and best physical response. / Dissertation/Thesis / Masters Thesis Electrical Engineering 2014

The modern InGaN technology demonstrates high efficiencies only in the blue spectral region and low current operation modes. The growth of InGaN quantum wells (QWs) on nonbasal crystallographic planes (NBP) has potential to deliver high-power blue and green light emitting diodes and lasers. The emission properties of these QWs are largely determined by the localization of carriers in the minima of spatially inhomogeneous band potential, which affects the recombination dynamics, spectral characteristics of the emission, its optical polarization and carrier transport. Understanding it is crucial for increasing the efficiency of NBP structures to their theoretical limit. In this thesis, the influence of carrier localization on the critical aspects of light emission has been investigated in semipolar  and nonpolar  InGaN QWs. For this purpose, novel multimode scanning near-field optical microscopy configurations have been developed, allowing mapping of the spectrally-, time-, and polarization-resolved emission. In the nonpolar QW structures the sub-micrometer band gap fluctuations could be assigned to the selective incorporation of indium on different slopes of the undulations, while in the smoother semipolar QWs – to the nonuniformity of QW growth. The nanoscale band potential fluctuations and the carrier localization were found to increase with increasing indium percentage in the InGaN alloy. In spite to the large depth of the potential minima, the localized valence band states were found to retain properties of the corresponding bands. The reduced carrier transfer between localization sites has been suggested as a reason for the long recombination times in the green-emitting semipolar QWs. Sharp increase of the radiative lifetimes has been assigned to the effect of nanoscale electric fields resulting from nonplanar QW interfaces. Lastly, the ambipolar carrier diffusion has been measured, revealing ~100 nm diffusion length and high anisotropy. / <p>QC 20170919</p>

InGaN based light emitting devices operating in the blue and near UV spectral regions are commercialized and used in many applications. InGaN heterostructures experience compositional inhomogeneity and thus potential fluctuations, such that regions of higher indium composition are formed and correspond to lower potentials. The indium rich regions form localization centers that save carriers from non-radiative recombination at dislocations, thus despite the large defect density, their quantum efficiency are surprisingly large. However, the conventional c-plane InGaN QWs suffer from high internal piezoelectric and spontaneous fields. These fields are detrimental for the performance of such structures as they lead to the quantum confined stark effect causing red-shift of the emission as well as reducing the electrons and holes wavefunctions overlap, thereby reducing the radiative recombination rate. However, growth of InGaN QWs on semipolar and nonpolar planes greatly reduced the polarization fields. Semipolar and nonpolar QWs experience an outstanding property which is polarized luminescence, opening a new frontier for applications for InGaN emitting devices. While nonpolar QWs have larger degree of polarized emission than semipolar QWs, semipolar QWs can emit in longer wavelengths due to their higher indium uptake. In this thesis, semipolar 20¯21 and nonpolar m-plane InGaN/GaN QWs were investigated. Photoluminescence, spectral and polarization dynamics were all studied in order to form a whole picture of the carrier dynamics in the QWs. Time resolved photoluminescence measurements were conducted for following carriers distribution between extended and localized states. Both the semipolar and nonpolar samples showed efficient luminescence through short radiative recombination times, as well as carrier localization in lower potential sites after thermal activation of excitons. Carrier localization was found to be benign as it didn’t degrade the performance of the samples or decrease the polarization ratio of their emission. However, the structures showed modest potential variations with the absence of deep localization centers or quantum dots. High polarization ratios were measured for both samples, which is well-known for nonpolar QWs. The high polarization ratio for the semipolar sample is of great importance, thus semipolar 20¯21 QWs should be considered for longer wavelength emitters with highly polarized spontaneous emission.