This poster was presented in the Materials for Advanced Metallization (MAM) 2014 Conference in Chemnitz, Germany. Abstract: Atomic Layer Deposition (ALD) has emerged as an ubiquitous method for the deposition of conformal and homogeneous ultra-thin films on complex topographies and large substrates in microelectronics. Electrochemical deposition (ECD) is the first choice for the deposition of copper (Cu) into the trenches and vias of the interconnect system for ULSI circuits. The ECD of Cu necessitates an electrically conductive seed layer for filling the interconnect structures. ALD is now considered as a solution for conformal deposition of Cu seed layers on very high aspect ratio (AR) structures also for technology nodes below 20 nm, since physical vapor deposition is not applicable for structures with high AR. Cu seed layer deposition by the reduction of Cu2O, which has been deposited from the Cu(I) β-diketonate precursor [(nBu3P)2Cu(acac)], has been successfully carried out on different substrates like Ta, TaN, SiO2, and Ru [1, 2]. However, still many questions are unanswered regarding the underlying surface chemistry of the precursor on many substrates, leading to different growth modes during ALD. In this work, the surface chemistry of [(nBu3P)2Cu(acac)] on SiO2 substrate is investigated by in-situ X-ray photoelectron spectroscopy (XPS), reporting vital information about the oxidation state and the atomic concentration after chemisorption on the substrates kept at different temperatures. The aim of the investigation is to understand the stepwise change in the precursor oxidation state with increasing substrate temperature and to identify the temperature limit for the thermal ALD with this Cu precursor on SiO2. For the experiments, the Cu precursor was evaporated on SiO2 substrates kept at temperatures between 22 °C and 300 °C. The measured C/Cu and P/Cu concentration indicated that most of the nBu3P ligands were released either in the gas phase or during adsorption (Fig. 1a). No disproportionation was observed for the Cu precursor in the temperature range between 22 °C and 145 °C. Similarly, in this temperature range the Auger parameter calculated from Cu 2p3/2 and Cu L3VV spectra was found to be 360.0±0.2 eV, comparable to Cu(I) oxidation state [3]. However, disproportionation of the Cu precursor was observed above 200 °C, since C/Cu concentration ratio decreased and substantial metallic Cu was present on the substrate. Hence, 145 °C is the temperature limit for the ALD of Cu2O from this precursor, as the precursor must not alter its chemical state after chemisorption on the substrate. 500 ALD cycles with the probed Cu precursor and wet O2 as co reactant were carried out on SiO2 at 145 °C. After ALD, in situ XPS analysis confirmed the presence of Cu2O on the substrate. Ex-situ spectroscopic ellipsometry indicated an average film thickness of 2.5 nm of Cu2O deposited with a growth per cycle of 0.05 Å/cycle, comparable to previous experiments. References: [1] T. Waechtler, S. Oswald, N. Roth, A. Jakob, H. Lang, R. Ecke, S. E. Schulz, T. Gessner, A. Moskvinova, S. Schulze, M. Hietschold, J. Electrochem. Soc., 156 (6), H453 (2009). [2] T. Waechtler, S. -F. Ding, L. Hofmann, R. Mothes, Q. Xie, S. Oswald, C. Detavernier, S. E. Schulz, X. -P. Qu, H. Lang, T. Gessner, Microelectron. Eng., 88, 684 (2011). [3] J. P. Espinós, J. Morales, A. Barranco, A. Caballero, J. P. Holgado, A. R. González Elipe, J. Phys. Chem. B, 106, 6921 (2002).

Turkey is on the main migratory route for many bird species although especially passerine migration is little known. The objective of this study is to document and analyze the diversity, abundances, daily and seasonal phenologies of migrating passerines at METU as well as compare seasonal phenologies with those obtained at Manyas KuScenneti(Balikesir) and Cernek(Samsun) stations. The study covers autumn 2001, spring and autumn 2002 migration seasons. Methodology is based on the capture and ringing of passerines. In the first two seasons, intermittent sampling was the rule, but in autumn 2002 the study was continuous throughout the day and the season. Totally 1,832 individuals of 60 passerine species were ringed. Blackcap (Sylvia atricapilla) and Willow Warbler (Phylloscopus trochilus) were the two most common species. Blackcap dominates species composition in autumn seasons with a very high percentage (%33). Daily captures peaked in the early morning and with a smaller peak one hour before the sunset. Several waves of migrants were detected in autumn 2002, with most peaks in close correlation with those recorded at Cernek station, indicating some connection between migrant populations using both sites for stopover. Fat depositon rates showed at least Yalincak is a high quality stopover site for most migrant species since many species gained weight up to around 50% within a period of 10 days. This is the first study documenting passerine migration in Turkey, and it revealed that small wooded landscapes within less hospitable habitats provide crucial stopover habitat for many migrant passerines.

No description available.

<p>In the research presented in this licentiate thesis the surface specific technique Vibrational Sum Frequency Spectroscopy, VSFS, combined with the Langmuir trough has been utilized to investigate Langmuir monolayers and Langmuir-Blodgett (LB) deposited mono- and bilayers of phospholipids. Their molecular structure, stability, and hydration were probed to gain additional understanding of important properties aiming at facilitating the use of such layers as model systems for biological membranes.</p><p>VSFS was applied to <em>in situ</em> studies of the degradation of Langmuir monolayers of 1,2-diacyl-phosphocholines with identical C-18 chains having various degrees of unsaturation. The time-dependent change of the monolayer area at constant surface pressure as well as the sum frequency intensity of the vinyl-CH stretch at the C=C double bonds were measured to monitor the degradation. It was shown that a rapid degradation of the monolayers of unsaturated phospholipids occurred when exposed to the laboratory air compared to the fully saturated lipid, and that the degradation could be inhibited by purging the ambient air with nitrogen. The degradation was attributed to oxidation mediated by reactive species in the air.</p><p>The molecular structure and order of Langmuir monolayers of 1,2-distearoyl-phosphocholine (18:0 PC) and their hydrating water were investigated at different surface pressures using VSFS. The spectroscopic data indicated a well ordered monolayer at all surface pressures with a more intense signal at higher pressures attributed to the subsequent increase of the number density and more ordered lipid molecules due to the tighter packing. Water molecules hydrating the headgroups or being in contact with the hydrophobic parts were observed and distinguished by their vibrational frequencies, and found to have different average orientations.</p><p>Additionally, monolayers of 18:0 PC, its fully deuterated analogue, and 1,2-distearoyl-phosphoserine (18:0 PS) were Langmuir-Blodgett (LB) deposited on CaF₂ substrates and VSFS was used to investigate the structure and order of the films as well as the hydrating water. The CH-region, water region, and lower wavenumber region containing phosphate, ester, carboxylic acid, and amine signals were probed to obtain a complete picture of the molecule. The data indicates that all deposited monolayers formed a well ordered and stable film and the average orientation of the aliphatic chains was determined using the antisymmetric methyl stretch.</p> / <p>I forskningen som presenteras i denna licentiatavhandling har den ytspecifika vibrationssumfrekvensspektroskopin, VSFS, använts tillsammans med Langmuirtråget för att studera Langmuir-monolager och Langmuir-Blod-gett (LB) deponerade monolager och bilager av fosfolipider. För att utvidga förståelsen av egenskaper som är viktiga för att underlätta användandet av dem som modellsystem för biologiska membran undersöktes såväl deras molekylära struktur som stabilitet och hydratisering.</p><p>VSFS användes för att genomföra <em>in situ</em>-studier av nedbrytningen av Langmuir-monolager av 1,2-diacyl-fosfokoliner med identiska 18 kolatomer långa sidokedjor med varierande antal omättade kol-kol-bindningar. För att övervaka nedbrytningen mättes såväl den tidsberoende förändringen av monolagernas area vid konstant yttryck som sumfrekevensintensiteten från dubbelbindningarnas CH-vibration. När monolagerna bestående av omättade fosfolipider utsattes för laboratorieluften bröts de ner hastigt jämfört med det helt mättade monolagret. Denna nedbrytning som sannolikt orsakades av reaktiva ämnen i luften kunde inhiberas fullständigt genom att ersätta den omgivande luften med kvävgas.</p><p>Den molekylära strukturen och ordningen hos Langmuir-monolager av 1,2-distearoyl-fosfokolin (18:0 PC) och deras hydratiseringsvatten undersöktes vid olika yttryck med VSFS. Den spektroskopiska datan visar att monolagerna är välordnade vid alla yttryck samt att sumfrekvenssignalens styrka ökar med ökande yttryck på grund av såväl det större antalet molekyler per ytenhet som den högre ordningen då molekylerna packas tätare. Vattenmolekyler som hydratiserar huvudgrupperna eller är i kontakt med hydrofoba delar och har olika medelorientering observerades och kunde identifieras genom sina vibrationsfrekvenser.</p><p>Vidare deponerades monolager av 18:0 PC, dess fullt deuterade analog och 1,2-distearoyl-fofsfoserin (18:0 PS) på substrat av CaF₂ och VSFS användes för att undersöka filmernas struktur och ordning såväl som hydratiseringsvattnet. CH- och vattenregionerna samt lågvågtalsområdet som innehåller fosfat-, ester-, karboxylsyra- och aminsignaler undersöktes för att få en fullständig bild av den molekylära strukturen. Data visar att alla deponerade monolager bildade en välordnad och stabil film och kolvätekedjornas medelorientering bestämdes med hjälp av signalen från den antisymmetriska metylvibrationen.</p> / QC 20100924

In the research presented in this licentiate thesis the surface specific technique Vibrational Sum Frequency Spectroscopy, VSFS, combined with the Langmuir trough has been utilized to investigate Langmuir monolayers and Langmuir-Blodgett (LB) deposited mono- and bilayers of phospholipids. Their molecular structure, stability, and hydration were probed to gain additional understanding of important properties aiming at facilitating the use of such layers as model systems for biological membranes. VSFS was applied to in situ studies of the degradation of Langmuir monolayers of 1,2-diacyl-phosphocholines with identical C-18 chains having various degrees of unsaturation. The time-dependent change of the monolayer area at constant surface pressure as well as the sum frequency intensity of the vinyl-CH stretch at the C=C double bonds were measured to monitor the degradation. It was shown that a rapid degradation of the monolayers of unsaturated phospholipids occurred when exposed to the laboratory air compared to the fully saturated lipid, and that the degradation could be inhibited by purging the ambient air with nitrogen. The degradation was attributed to oxidation mediated by reactive species in the air. The molecular structure and order of Langmuir monolayers of 1,2-distearoyl-phosphocholine (18:0 PC) and their hydrating water were investigated at different surface pressures using VSFS. The spectroscopic data indicated a well ordered monolayer at all surface pressures with a more intense signal at higher pressures attributed to the subsequent increase of the number density and more ordered lipid molecules due to the tighter packing. Water molecules hydrating the headgroups or being in contact with the hydrophobic parts were observed and distinguished by their vibrational frequencies, and found to have different average orientations. Additionally, monolayers of 18:0 PC, its fully deuterated analogue, and 1,2-distearoyl-phosphoserine (18:0 PS) were Langmuir-Blodgett (LB) deposited on CaF2 substrates and VSFS was used to investigate the structure and order of the films as well as the hydrating water. The CH-region, water region, and lower wavenumber region containing phosphate, ester, carboxylic acid, and amine signals were probed to obtain a complete picture of the molecule. The data indicates that all deposited monolayers formed a well ordered and stable film and the average orientation of the aliphatic chains was determined using the antisymmetric methyl stretch. / I forskningen som presenteras i denna licentiatavhandling har den ytspecifika vibrationssumfrekvensspektroskopin, VSFS, använts tillsammans med Langmuirtråget för att studera Langmuir-monolager och Langmuir-Blod-gett (LB) deponerade monolager och bilager av fosfolipider. För att utvidga förståelsen av egenskaper som är viktiga för att underlätta användandet av dem som modellsystem för biologiska membran undersöktes såväl deras molekylära struktur som stabilitet och hydratisering. VSFS användes för att genomföra in situ-studier av nedbrytningen av Langmuir-monolager av 1,2-diacyl-fosfokoliner med identiska 18 kolatomer långa sidokedjor med varierande antal omättade kol-kol-bindningar. För att övervaka nedbrytningen mättes såväl den tidsberoende förändringen av monolagernas area vid konstant yttryck som sumfrekevensintensiteten från dubbelbindningarnas CH-vibration. När monolagerna bestående av omättade fosfolipider utsattes för laboratorieluften bröts de ner hastigt jämfört med det helt mättade monolagret. Denna nedbrytning som sannolikt orsakades av reaktiva ämnen i luften kunde inhiberas fullständigt genom att ersätta den omgivande luften med kvävgas. Den molekylära strukturen och ordningen hos Langmuir-monolager av 1,2-distearoyl-fosfokolin (18:0 PC) och deras hydratiseringsvatten undersöktes vid olika yttryck med VSFS. Den spektroskopiska datan visar att monolagerna är välordnade vid alla yttryck samt att sumfrekvenssignalens styrka ökar med ökande yttryck på grund av såväl det större antalet molekyler per ytenhet som den högre ordningen då molekylerna packas tätare. Vattenmolekyler som hydratiserar huvudgrupperna eller är i kontakt med hydrofoba delar och har olika medelorientering observerades och kunde identifieras genom sina vibrationsfrekvenser. Vidare deponerades monolager av 18:0 PC, dess fullt deuterade analog och 1,2-distearoyl-fofsfoserin (18:0 PS) på substrat av CaF2 och VSFS användes för att undersöka filmernas struktur och ordning såväl som hydratiseringsvattnet. CH- och vattenregionerna samt lågvågtalsområdet som innehåller fosfat-, ester-, karboxylsyra- och aminsignaler undersöktes för att få en fullständig bild av den molekylära strukturen. Data visar att alla deponerade monolager bildade en välordnad och stabil film och kolvätekedjornas medelorientering bestämdes med hjälp av signalen från den antisymmetriska metylvibrationen. / QC 20100924

This poster was presented in the Materials for Advanced Metallization (MAM) 2014 Conference in Chemnitz, Germany. Abstract: Atomic Layer Deposition (ALD) has emerged as an ubiquitous method for the deposition of conformal and homogeneous ultra-thin films on complex topographies and large substrates in microelectronics. Electrochemical deposition (ECD) is the first choice for the deposition of copper (Cu) into the trenches and vias of the interconnect system for ULSI circuits. The ECD of Cu necessitates an electrically conductive seed layer for filling the interconnect structures. ALD is now considered as a solution for conformal deposition of Cu seed layers on very high aspect ratio (AR) structures also for technology nodes below 20 nm, since physical vapor deposition is not applicable for structures with high AR. Cu seed layer deposition by the reduction of Cu2O, which has been deposited from the Cu(I) β-diketonate precursor [(nBu3P)2Cu(acac)], has been successfully carried out on different substrates like Ta, TaN, SiO2, and Ru [1, 2]. However, still many questions are unanswered regarding the underlying surface chemistry of the precursor on many substrates, leading to different growth modes during ALD. In this work, the surface chemistry of [(nBu3P)2Cu(acac)] on SiO2 substrate is investigated by in-situ X-ray photoelectron spectroscopy (XPS), reporting vital information about the oxidation state and the atomic concentration after chemisorption on the substrates kept at different temperatures. The aim of the investigation is to understand the stepwise change in the precursor oxidation state with increasing substrate temperature and to identify the temperature limit for the thermal ALD with this Cu precursor on SiO2. For the experiments, the Cu precursor was evaporated on SiO2 substrates kept at temperatures between 22 °C and 300 °C. The measured C/Cu and P/Cu concentration indicated that most of the nBu3P ligands were released either in the gas phase or during adsorption (Fig. 1a). No disproportionation was observed for the Cu precursor in the temperature range between 22 °C and 145 °C. Similarly, in this temperature range the Auger parameter calculated from Cu 2p3/2 and Cu L3VV spectra was found to be 360.0±0.2 eV, comparable to Cu(I) oxidation state [3]. However, disproportionation of the Cu precursor was observed above 200 °C, since C/Cu concentration ratio decreased and substantial metallic Cu was present on the substrate. Hence, 145 °C is the temperature limit for the ALD of Cu2O from this precursor, as the precursor must not alter its chemical state after chemisorption on the substrate. 500 ALD cycles with the probed Cu precursor and wet O2 as co reactant were carried out on SiO2 at 145 °C. After ALD, in situ XPS analysis confirmed the presence of Cu2O on the substrate. Ex-situ spectroscopic ellipsometry indicated an average film thickness of 2.5 nm of Cu2O deposited with a growth per cycle of 0.05 Å/cycle, comparable to previous experiments. References: [1] T. Waechtler, S. Oswald, N. Roth, A. Jakob, H. Lang, R. Ecke, S. E. Schulz, T. Gessner, A. Moskvinova, S. Schulze, M. Hietschold, J. Electrochem. Soc., 156 (6), H453 (2009). [2] T. Waechtler, S. -F. Ding, L. Hofmann, R. Mothes, Q. Xie, S. Oswald, C. Detavernier, S. E. Schulz, X. -P. Qu, H. Lang, T. Gessner, Microelectron. Eng., 88, 684 (2011). [3] J. P. Espinós, J. Morales, A. Barranco, A. Caballero, J. P. Holgado, A. R. González Elipe, J. Phys. Chem. B, 106, 6921 (2002).

The thesis consists of two parts. Part 1 deals with the preparation of thin films and sub-micron powders of complex metal oxides by nebulized spray pyrolysis (NSP) and Part 2 consists of Brillouin scattering studies of solid materials exhibiting interesting phase transitions. The simple technique of NSP has been employed to prepare thin films of A12O3, PbTiO3, Pb(Zr0.5Ti0.5)O3 (PZT) and PbZrO3 on single crystal substrate. The films were characterized by various techniques for their composition, structure, morphology and dielectric properties. Ferroelectric (FE) films of the configuration FE/LaNiO3/SiO2/Si (FE = PbTiO3 and PZT), wherein the LaNiO3 barrier electrode was also deposited on the SiO2/Si substrate by NSP, have been investigated. The films exhibit satisfactory ferroelectric properties. PbZrO3 films deposited on LaNiO3/SiO2/Si substrates show good features, including a reversible AFE ↔ FE transition. Sub-micron particles of TiO2, ZrO2, Pb(Zr0.5Ti0.5)O3, Al2O3, S1O2 and mullite have been prepared by NSP and characterized by various techniques. Brillouin scattering has been used, for the first time, not only to characterize the Peierls transition but also the incommensurate to commensurate transition in the one-dimensional blue bronze, K0.3M0O3. The charge density wave transition in NbSe2 has also been investigated by Brillouin scattering. The charge ordering and antiferromag-netic transitions in single crystals of the rare earth manganates, Nd0.5Ca0.5MnO3 and Pr0.63Ca 0.37MnO3, have been investigated by Brillouin scattering. It is noteworthy that the temperature variation of the Brillouin shift and intensity parallel to that of the magnetization, thereby throwing light on magnetic excitations in charge-ordered state. Brillouin scattering investigations of C60 and C70 films have yielded values of the elastic moduli.