The goal of this work was to compensate for the effects of the Earth’s magnetic field in a vector field magnetic sensor. The magnetic sensor is a part of a low-cost crash avoidance system by Stephane Roussel where the magnetic sensor was used to detect cars passing when it was mounted to a test vehicle. However, the magnetic sensor’s output voltage varied when it changed orientation with respect to the Earth’s magnetic field. This limited the previous work to only analyze detection rates when the test vehicle travelled a single heading. Since one of the goals of this system is to be low-cost, the proposed solution for geomagnetic compensation will only use a single magnetic sensor and a consumer-grade GPS. Other solutions exist for geomagnetic compensation but use extra sensors and can become costly. In order to progress the development of this project into a commercial project, three separate geomagnetic compensation algorithms and a calibration procedure were developed. The calibration procedure compensated for the local magnetic field when the magnetic sensor was mounted to the test vehicle and allowed for consistent magnetic sensor voltage output regardless of the type of test vehicle. The first algorithm, Compensation Scheme 1 (CS1), characterized the local geomagnetic field with a mathematical function from field calibration data. The GPS heading was used as the input and the output is the voltage level of the Earth’s magnetic field. The second algorithm, Compensation Scheme 1.5, used a mathematical model of the Earth’s magnetic field using the International Geomagnetic Reference Field. An algorithm was developed to take GPS coordinates as an input and output the voltage contributed by the mathematical representation of the Earth’s magnetic field. The output voltages from CS1 and CS1.5 were subtracted from the calibrated magnetic sensor data. The third algorithm, Compensation Scheme 2 (CS2), used a high pass filter to compensate for changes of orientation of the magnetic sensor. All three algorithms were successful in compensating for the geomagnetic field and vehicle detection in multiple car headings was possible. Since the goal of the magnetic sensor is to detect vehicles, vehicle detection rates were used to evaluate the effectiveness of the algorithms. The individual algorithms had limitations when used to detect passing cars. Through testing, it was found that CS1 and CS1.5 algorithms were suitable to detect vehicles while stopped in traffic while the CS2 algorithm was suitable vehicle detection while the test vehicle is moving. In order to compensate for the limitations of the individual algorithms, a fused algorithm was developed that used a combination of CS1 and CS2 or CS1.5 and CS2. The vehicle speed was used in order to determine which algorithm to use in order to detect cars. Although the goal of this project is not vehicle detection, the rate of successful vehicle detection was used in order to evaluate the algorithms. The evaluation of the fused algorithm demonstrated the value of using CS1 and CS1.5 to detect vehicles when stopped in traffic, which CS2 algorithm cannot do. For a study conducted in traffic, using the fused algorithm increased vehicle detection rates by 51%-62% from using the CS2 algorithm alone. Since this work successfully compensated for geomagnetic effects of the magnetic sensor, the low-cost crash avoidance system can be further developed since it is no longer limited to driving in a single direction. Other projects that experience unwanted geomagnetic effects in their projects can also implement the knowledge and solutions used in this work.

Mechanical durability of the structures should be continuously monitored during their operation. Structural health monitoring (SHM) techniques are typically used for gathering the information which can be used for evaluating the current condition of a structure regarding the existence, location, and severity of the damage. Damage can occur in a structure after long-term operating under service loads or due to incidents. By detection of these defects at the early stages of their growth and nucleation, it would be possible to not only improve the safety of the structure but also reduce the operating costs. The main goal of this dissertation is to develop a reliable and cost-effective SHM system for inspection of composite and metallic structures. The Surface Response to Excitation (SuRE) method is one of the SHM approaches that was developed at the FIU mechatronics lab as an alternative for the electromechanical impedance method to reduce the cost and size of the equipment. In this study, firstly, the performance of the SuRE method was evaluated when the conventional piezoelectric elements and scanning laser vibrometer were used as the contact and non-contact sensors, respectively, for monitoring the presence of loads on the surface. Then, the application of the SuRE method for the characterization vii of the milling operation for identical aluminum plates was investigated. Also, in order to eliminate the need for a priori knowledge of the characteristics of the structure, some advanced signal processing techniques were introduced. In the next step, the heterodyne method was proposed, as a nonlinear baseline free, SHM approach for identification of the debonded region and evaluation of the strength of composite bonds. Finally, the experimental results for both methods were validated via a finite element software. The experimental results for both SuRE and heterodyning method showed that these methods can be considered as promising linear and nonlinear SHM approaches for monitoring the health of composite and metallic structures. In addition, by validating the experimental results using FEM, the path for further improvement of these methods in future researches was paved.

Since the proliferation of CAD tools, visualizations have gained importance.. They provide invaluable visual feedback at the time of design, regardless whether it is fbi civil engineering or electronic circuit design-layout. Typically dynamic visualizations are produced in a two phase process: the calculation of positions and rendering of the image and its presentation as an animated video clip. This is a slow process that is unsuitable fbr interactive CAD visualizations, because the former two require finite element analysis Faster hardware eases the problem, but does not overcome it, because the algorithms are still too slow. Our MEMS CAD project works towards methods and techniques that are suitable for interactive design, with faster methods. The purpose of this PhD thesis is to contribute to the design of an interactive virtual prototyping of Micro Electro Mechanical Systems (MEMS) This research comprises the analysis of the visualization techniques that are appropriate for these tasks and identifying the difficulties that need to be overcome to be able to offer a MEMS design engineer a meaningful and interactive CAD design environment Such a VR-CAD system is being built in our research group with many participants in the team. Two particular problems are being addressed by presenting algorithms for truthful VR visualization methods: one is for displaying objects that are different in size on the computer screen. The other is modelling unsynchronized motion dynamics, that is different objects moving simultaneously at very high and vety low speed, by proposing stroboscopic simulation to present their dynamics on the screen They require specific size scaling and time scaling and filtering. It is these issues and challenges which make the design of a MEMS CAD tool different from other CAD tools. In the thesis I present algorithms for displaying animated virtual reality for MEMS virtual prototyping in a physically truthful way by using the simulated stroboscopic illumination to filter animated images to make it possible to show unsynchronized motion.. A scaling method was used to show or hide objects which cannot be shown simultaneously on the computer screen because of their large difference in size. The visualization of objects being designed and their animations is done with much consideration of visual perception and computer capability, which is rising attention, but not too often mentioned in the visualization domain.

Reducing cost and time is a major concern in clinical diagnostics. Current molecular diagnostics are multi-step processes that usually take at least several hours or even days to complete multiple reagents delivery, incubations and several washing processes. This highly labor-intensive work and lack of automation could result in reduced reliability and low efficiency. The Laboratory-on-a-chip (LOC), taking advantage of the merger and development of microfluidics and biosensor technology, has shown promise towards a solution for performing analytical tests in a self-contained and compact unit, enabling earlier and decentralized testing. However, challenges are to integrate the fluid regulatory elements on a single platform and to detect target analytes with high sensitivity and selectivity. The goal of this research work is to develop an AC electrokinetic (ACEK) flow through concentrator for in-situ concentration of biomolecules and develop a comprehensive understanding of effects of ACEK flow on the biomolecule transport (in-situ concentration) and their impact on electronic biosensing mechanism and performance, achieving automation and miniaturization. ACEK is a new and promising technique to manipulate micro/bio-fluids and particles. It has many advantages over other techniques for its low applied voltage, portability and compatibility for integration into lab-on-a-chip devices. Numerical study on preconcentration system design in this work has provided an optimization rule for various biosensor designs using ACEK technique. And the microfluidic immunoassay lab-chip designed based on ACET effect has showed promising prospect for accelerated diagnostics. With optimized design of channel geometry, electrode patterns, and properly selected operation condition (ac frequency and voltage), the preconcentration system greatly reduced the reaction time to several minutes instead of several hours, and improved sensitivity of the assay. With the design of immunoassay lab-chip, one can quantitatively study the effect of ACET micropumping and mixing on molecular level binding. Improved sensors with single-chip form factor as a general platform could have a significant impact on a wide-range of biochemical detection and disease diagnostics including pathogen/virus detection, whole blood analysis, immune-screening, gene expression, as well as home land security.

Teleoperation of ground/aerial vehicle extends operator's ability (e.g. expertise, strength, mobility) into the remote environment, and haptic feedback enhances the human operator's perception of the slave environment. In my thesis, two cases are studied: wheeled mobile robot (MWR) haptic tele-driving over the Internet and unmanned aerial vehicle (UAV) haptic teleoperation over the Internet. We propose novel control frameworks for both dynamic WMR and kinematic WMR in various tele-driving modes, and for a "mixed" UAV with translational dynamics and attitude kinematics. The recently proposed passive set-position modulation (PSPM) framework is extended to guarantee the passivity and/or stability of the closed-loop system with time-varying/packet-loss in the communication; and proved performance in steady state is shown by theoretical measurements.For UAV teleoperation, we also derive a backstepping trajectory tracking control with robustness analysis. Experimental results for dynamic/kinematic WMR and an indoor quadrotor-type UAV are presented to show the efficacy of the proposed control framework.

This thesis presents the optimization of deep reactive ion etching process (DRIE) to achieve high precision 3-dimensional integrated micro electro mechanical systems (MEMS) sensors with high aspect ratio structures. Two optimization processes have been performed to achieve 20 &amp / #956 / m depth for 1 &amp / #956 / m opening for a dissolved wafer process (DWP) and to achieve 100 &amp / #956 / m depth for 1 &amp / #956 / m opening for silicon-on-glass (SOG) process. A number of parameters affecting the etch rate and profile angle are investigated, including the step times, etch step pressure, platen power, and electrode temperature. Silicon etch samples are prepared and processed in METU-MET facilities to understand and optimize the DRIE process parameters that can be used for the production of MEMS gyroscopes and accelerometers. The etch samples for DWP are masked using a photoresist, Shipley S1813. After the optimization process, vertical trench profiles are achieved with minimum critical dimension loss for trench depths up to 20 &amp / #956 / m. Since the selectivity of the resist is not sufficient for 100 &amp / #956 / m deep trench etch process, silicon dioxide (SiO2) is used as the mask for this process. At the end of the optimization processes, more than 100 &amp / #956 / m depth for 1 &amp / #956 / m opening with almost vertical sidewalls are achieved. In summary, this study provides an extensive understanding of the DRIE process for successful implementations of integrated MEMS sensors.

RFID has been characterized as a “disruptive technology” that has the potential to revolutionize numerous key sectors. A key advantage of passive RFID applications is the ability to wirelessly transmit automatic identification and related information using very little power. This paper presents an experimental investigation to inform the optimal configuration for programming passive ultra-high frequency (UHF) RFID media in dynamic applications. Dynamic programming solutions must be designed around the tag’s functionality, the physical programming configuration and environment. In this investigation, we present a methodology to determine an optimal configuration to maximize the systems programming efficiency for dynamic applications.

This thesis reports the development of micromachined accelerometers and gyroscopes that can be used for micromachined inertial measurement units (IMUs). Micromachined IMUs started to appear in the market in the past decade as low cost, moderate performance alternative in many inertial applications including military, industrial, medical, and consumer applications. In the framework of this thesis, a number of accelerometers and gyroscopes have been developed in three different fabrication processes, and the operation of these fabricated devices is verified with extensive tests. In addition, the fabricated accelerometers were combined with external readout electronics to obtain hybrid accelerometer systems, which were tested in industrial test facilities. The accelerometers and gyroscopes are designed and optimized using the MATLAB analytical simulator and COVENTORWARE finite element simulation tool. First set of devices is fabricated using a commercial foundry process called SOIMUMPs, while the second set of devices is fabricated using the electroplating processes developed at METU-MET facilities. The third set of devices is designed for a new advanced process based on DRIE, which is under development. Mechanical and electrical test results of the fabricated accelerometers and gyroscopes are in close agreement with the designed values. The testing of the SOI and nickel accelerometers is also performed in industrial test environments. In order to perform these tests, accelerometers are hybrid connected to commercially available capacitive readout circuits. These accelerometer systems require only two DC supply voltages for operation and provide an analog output voltage related to the input acceleration. The industrial tests show that the SOI accelerometer system yields a 799 &micro / g/&amp / #8730 / Hz average noise floor, a 1.8 mg/&amp / #8730 / Hz peak noise floor, a 22.2 mV/g sensitivity, and a 0.1 % nonlinearity, while the nickel accelerometer system yields a 228 &micro / g/&amp / #8730 / Hz average noise floor, a 375 &micro / g/&amp / #8730 / Hz peak noise floor, a 1.02 V/g sensitivity, and a 0.23 % nonlinearity. Long-term drift components of the accelerometers are determined to be smaller than 20 mg. These systems are the highest performance micromachined accelerometer systems developed in Turkey, and they can be used in implementation of a national inertial measurement unit.

Στις τελευταίες δεκαετίες η σμίκρυνση (miniaturization) έχει αποτελέσει ένα σημαντικό παράγοντα στην ανάπτυξη της τεχνολογίας. Ένας από τους κύριους στόχους της μέσω της μικρομηχανικής (micro-engineering) είναι η παραγωγή ολοκληρωμένων Μικρο-Ηλεκτρο-Μηχανικών Συστημάτων (MEMS), τα οποία χρηςιμοποιούνται σήμερα ως υποσυστήματα σε πάρα πολλές εφαρμογές. Αντικείμενο της παρούσας διατριβής είναι ο παράλληλος χειρισμός καθώς και η ανοιχτού βρόχου/άνευ αισθητήρων συναρμολόγηση μικροαντικειμένων χωρίς τη χρήση μικροβραχιόνων. Για το σκοπό αυτό η έρευνα επικεντρώθηκε σε τέσσερις διαφορετικές διαδικασίες/προσεγγίσεις: α) το μικροχειρισμό με τρισδιάστατα πεδία δυνάμεων, β) το μικροχειρισμό με προγραμματιζόμενα πεδία δυνάμεων στο επίπεδο, γ) το χειρισμό μικροαντικειμένων έγκλειστων σε σταγόνες υγρού και δ) την αυτοσυναρμολόγηση μικροαντικειμένων με ηλεκτροστατικές δυνάμεις. / In the last decades, miniaturization has become an important factor in the development of technology. One of its main objectives through the discipline of micro-engineering is the production of integrated Micro-Electro-Mechanical Systems (MEMS), which are currently used as sub-systems in many applications. The target of this thesis is the parallel manipulation and the open-loop/sensorless assembly of microparts without the use of microrobots. For this purpose, the research was focused on four different procedures: a) micromanipulation with 3D force fields, b) micromanipulation with programmable force fields on a plane, c) manipulation of microparts enclosed in a droplet of liquid and d)self-assembly of microparts with electrostatic forces.

abstract: A Microbial fuel cell (MFC) is a bio-inspired carbon-neutral, renewable electrochemical converter to extract electricity from catabolic reaction of micro-organisms. It is a promising technology capable of directly converting the abundant biomass on the planet into electricity and potentially alleviate the emerging global warming and energy crisis. The current and power density of MFCs are low compared with conventional energy conversion techniques. Since its debut in 2002, many studies have been performed by adopting a variety of new configurations and structures to improve the power density. The reported maximum areal and volumetric power densities range from 19 mW/m2 to 1.57 W/m2 and from 6.3 W/m3 to 392 W/m3, respectively, which are still low compared with conventional energy conversion techniques. In this dissertation, the impact of scaling effect on the performance of MFCs are investigated, and it is found that by scaling down the characteristic length of MFCs, the surface area to volume ratio increases and the current and power density improves. As a result, a miniaturized MFC fabricated by Micro-Electro-Mechanical System(MEMS) technology with gold anode is presented in this dissertation, which demonstrate a high power density of 3300 W/m3. The performance of the MEMS MFC is further improved by adopting anodes with higher surface area to volume ratio, such as carbon nanotube (CNT) and graphene based anodes, and the maximum power density is further improved to a record high power density of 11220 W/m3. A novel supercapacitor by regulating the respiration of the bacteria is also presented, and a high power density of 531.2 A/m2 (1,060,000 A/m3) and 197.5 W/m2 (395,000 W/m3), respectively, are marked, which are one to two orders of magnitude higher than any previously reported microbial electrochemical techniques. / Dissertation/Thesis / Doctoral Dissertation Electrical Engineering 2016