Varactors form an important part of many communication circuits. They are utilized in oscillators, tunable matching networks, tunable filters and phase-shifters. This thesis deals with the design, analysis, characterization and applications of a novel MEMS varactor. Lower actuation voltage and higher dynamic range are the two important issues widely addressed in the study of MEMS varactors. The pull-in instability, due to which only 33% of the gap between plates could be covered smoothly, greatly reduces useful dynamic range of MEMS varactors. We propose a torsional MEMS varactor that exploits “displacement amplification” whereby pull-in is overcome and wide dynamic range is achieved. The torsion beam in the device undergoes torsion as well as bending. Behavior of the device has been analyzed through torque and force balance. Based on the torque balance and the force balance expressions, theoretical limits of torsion angle and bending for stable operation have been derived. Torsional MEMS varactors and its variants are fabricated through a commercial fabrication process (polyMUMPS) and extensive characterization has been carried out. Capacitance-voltage characteristics show a maximum dynamic range of 1:16 with parasitic capacitance subtracted out from the capacitance values. A bidirectional torsional varactor, in which the top AC plate moves not only towards bottom plate but also away from bottom plate, is also tested. The bottom AC plate is isolated from low resistivity substrate with a thin nitride layer. This gives rise to large parasitic capacitances at higher frequencies. So to avoid this, a varactor with both AC plates suspended in air is designed and fabricated. A dynamic range of 1:8 including parasitic capacitances has been achieved. Self-actuation is studied on fabricated structures and a torsional varactor that overcomes self-actuation has been proposed. Hysteresis behavior of the torsional varactor is analyzed for different AC signals across the varactor plates. Effects of residual stress on C-V characteristics are studied and advantages and disadvantages of residual stress on device performance are discussed. The torsional varactors have been cycled between Cmax and Cmin for 36 hours continuously without any failure. High-frequency characteristics of torsional varactors are analyzed through measurements on one-port and two port configurations. Measurements are done on polyMUMPS devices to study the capacitance variation with voltage, quality factor (Q) and capacitance variation with frequency. Effects of substrate are de-embedded from the device and characteristics of device are studied. An analog phase shifter based on torsional varactor proposed and analyzed through HFSS simulations. Very high tuning range can be achieved with a LC-VCO based on torsional varactors. A LC VCO with the torsional varactor as a capacitor in LC tank is designed. The torsional varactor and IC are fabricated separately and are integrated through wire bonding. Bond-wires are used as inductors.

Accelerometer sensors fabricated with micromachining technologies started to take place of yesterday&rsquo / s bulky sensors in many application areas. The application areas include a wide range from consumer electronics and health systems to military and aerospace applications. Therefore, the performance requirements extend form 1 &mu / g&rsquo / s to 100 thousand g&rsquo / s. However, high performance strategic grade MEMS accelerometer sensors still do not exist in the literature. Smart designs utilizing the MEMS technology is necessary in order to acquire high performance specifications. This thesis reports a high performance accelerometer with a new process by making the use of bulk micromachining technology. The new process includes the utilization of Silicon-on-Insulator (SOI) wafer and its buried oxide (BOX) layer. The BOX layer helps to realize interdigitated finger structures, which commonly find place in surface micromachined CMOS-MEMS capacitive accelerometers. The multi-metal layered CMOS-MEMS devices inherently incorporate interdigitated finger structures. Interdigitated finger structures are highly sensitive to acceleration in comparison with comb-finger structures, which generally find usage in bulk-micromachined devices, due to absence of anti-gap. The designed sensors based on this fabrication process is sought to form a fully-differential signal interfaced sensor with incorporation of the advantages of high sensitive interdigitated finger electrodes and high aspect ratio SOI wafer&rsquo / s bulk single crystal silicon device. Under the light of the envisaged process, sensor designs were made, and verified using a computing environment, MATLAB, and a finite element analysis simulator, CoventorWARE. The verified two designs were fabricated, and all the tests, except the centrifuge test, were made at METU-MEMS Research Center. Among the fabricated sensors, the one designed for the high performance achieves a capacitance sensitivity of 178 fF with a rest capacitance of 8.1 pF by employing interdigitated finger electrodes, while its comb-finger implementation can only achieve a capacitance sensitivity of 75 fF with a rest capacitance of 10 pF.

Micro-electro-mechanical systems (MEMS) technology has had an increasing impact on industry and our society. A wide range of MEMS devices are used in every aspects of our life, from microaccelerators and microgyroscopes to microscale drug-delivery systems. The increasing complexity of microsystems demands diverse microfabrication methods and actuation strategies to realize. Currently, it is challenging for existing microfabrication methods—particularly 3D microfabrication methods—to integrate multiple materials into the same component. This is a particular challenge for some applications, such as microrobotics and microfluidics, where integration of magnetically-responsive materials would be beneficial, because it enables contact-free actuation. In addition, most existing microfabrication methods can only fabricate flat, layered geometries; the few that can fabricate real 3D microstructures are not cost efficient and cannot realize mass production. This dissertation explores two solutions to these microfabrication problems: first, a method for integrating magnetically responsive regions into microstructures using photolithography, and second, a method for creating three-dimensional freestanding microstructures using a modified micromolding technique. The first method is a facile method of producing inexpensive freestanding photopatternable polymer micromagnets composed NdFeB microparticles dispersed in SU-8 photoresist. The microfabrication process is capable of fabricating polymer micromagnets with 3 µm feature resolution and greater than 10:1 aspect ratio. This method was used to demonstrate the creation of freestanding microrobots with an encapsulated magnetic core. A magnetic control system was developed and the magnetic microrobots were moved along a desired path at an average speed of 1.7 mm/s in a fluid environment under the presence of external magnetic field. A microfabrication process using aligned mask micromolding and soft lithography was also developed for creating freestanding microstructures with true 3D geometry. Characterization of this method and resolution limits were demonstrated. The combination of these two microfabrication methods has great potential for integrating several material types into one microstructure for a variety of applications.

With the rise of automation in traditional manufacturing processes, more companies are beginning to integrate computer integrated manufacturing (CIM) cells on their production floors. Through CIM cell integration, companies have the ability to reduce process time and increase production. One of the problems created with CIM cell automation is caused by the dependency the sequential steps have on one another. Dependency created by the previous step increases the probability that a process error could occur due to previous variation. One way to eliminate this dependency is through the use of an in-process measuring device such as a Renishaw spindle probe used in conjunction with a computer numerical control (CNC) milling machine. Western Kentucky University (WKU) utilizes a CIM cell in the Senator Mitch McConnell Advanced Manufacturing and Robotics laboratory. The laboratory is located in the Architectural and Manufacturing Sciences department and gives students the opportunity to learn how automated systems can be integrated. The CIM cell consists of three Mitsubishi six-axis robots, a Haas Mini-mill, a Haas GT-10 lathe, an AXYZ, Inc. CNC router table, 120 watt laser engraver, an Automated Storage and Retrieval System (ASRS), material handling conveyor, and vision station. The CIM cell functions throughout the curriculum as a means for applied learning and research. The researcher used this CIM cell in order to determine if an in-process measuring device, such as the Renishaw spindle probe, had the ability to affect process capability. The researcher conducted the study to see if an in-process measuring device can be integrated into the CIM cell located in the Senator Mitch McConnell Advanced Manufacturing and Robotics laboratory to eliminate compounding variation. The researcher discovered that through the use of a Renishaw 40-2 spindle probe used in conjunction with a CNC Haas Mini Mill, process capability has the potential to be improved in a CIM cell by accounting for compounding variation present in the process.

Orientador: Luiz Otavio Saraiva Ferreira / Dissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Mecanica / Made available in DSpace on 2018-08-06T16:27:32Z (GMT). No. of bitstreams: 1 Espindola_AlexeyMarques_M.pdf: 1293939 bytes, checksum: 66ab2d16dc552294762d6c3708cda71b (MD5) Previous issue date: 2006 / Resumo: Os sistemas microfluidicos estão evoluindo rapidamente, encontrando vastas aplicações na mais diversas áreas do conhecimento. Os Lab-on-Chips, LOCs, são dispositivos capazes de realizar análises químicas e bioquímicas em um único chip. Este dispositivo pode causar grande impacto no mercado de análises laboratoriais, por este motivo vem ganhando grande atenção Para realizar estas análises os LOCs necessitam de microbombas capazes de transportar quantidades ínfimas de fluidos em seus canais de maneira acurada e uniforme. Desta forma, o interesse em modelar e fabricar microbombas tomou-se uma área fértil para a pesquisa. Neste trabalho foi desenvolvida a modelagem de uma microbomba peristáltica de elastõmero, tipo de bomba mais conveniente para Lab-on-Chips, utilizando a técnica de analogias eletro-mecânicas que consiste em representar um dispositivo por um circuito elétrico equivalente. As análises das simulações podem ser realizadas usando programas de análise de circuitos elétricos. Dois modelos foram apresentados neste trabalho. O primeiro é a reprodução do modelo de bomba criado por Jacques Goulpeau, em que o modelo de uma válvula é extrapolando para toda a microbomba. O segundo contém o circuito elétrico equivalente da bomba completa mostrando a interações entre suas partes. Os resultados mostram que o comportamento da microbomba não pode ser completamente descrito pelo modelo extrapolado a partir de uma válvula, devido às interações entre três válvulas. As simulações do circuito equivalente da bomba completa mostraram que os efeitos das interações entre as válvulas explicam claramente a diferença entre a vazão prevista pelo modelo de Goulpeau e os dados experimentais por ele obtidos, sendo possível ajustar o modelo aos dados experimentais / Abstract: Microfluidies systems are growing rapidly, finding a large nwnber of applications in many fields. Lab-on-ehips, LOC, are deviees that ean perform ehemical and biochemical analyses in a ehip. This device ean cause high impact on laboratorial analyses market, and then it is gaining large attention. In order to execute these analyses on LOC, mieropumps are necessary to transport a tiny quantity of fluid between the channeIs with accuracy and uniformity. Thus, the interests of modeling and fabrication mieropwnps are increasing and become a fertile research field. The goal of this work were a modeling of elastomer peristaltic micropwnp, the most suitable pwnp for LOCs, using the electro- mechanical analogy technique that consist in represent the device in a electrical equivalent networks. Then the simulation analyses can be done on electrical simulation tools. Two models were presented in this work. The first is reproduction of the pwnp model made by Jacques Goulpeau et aI., where the valve model is extrapolated to the whole mieropwnp. The second contains the electrical equivalent circuit that represents the whole device showing the interactions between its eomponents. The results showed that micropump behavior eouldn't completely deseribe by the extrapolated model ftom a valve, because the interactions between the three valves. The simulations of electrical equivalent eircuit of the whole pwnp showed that the interaction between the valves explain the difference between of flow rate foreseen by Goulpeau model and his experimental data, being possible to adjust the model to the experimental data / Mestrado / Mecanica dos Sólidos e Projeto Mecanico / Mestre em Engenharia Mecânica

During the past two decades, many researchers have developed methods for the detection of structural defects at the early stages to operate the aerospace vehicles safely and to reduce the operating costs. The Surface Response to Excitation (SuRE) method is one of these approaches developed at FIU to reduce the cost and size of the equipment. The SuRE method excites the surface at a series of frequencies and monitors the propagation characteristics of the generated waves. The amplitude of the waves reaching to any point on the surface varies with frequency; however, it remains consistent as long as the integrity and strain distribution on the part is consistent. These spectral characteristics change when cracks develop or the strain distribution changes. The SHM methods may be used for many applications, from the detection of loose screws to the monitoring of manufacturing operations. A scanning laser vibrometer was used in this study to investigate the characteristics of the spectral changes at different points on the parts. The study started with detecting a load on a plate and estimating its location. The modifications on the part with manufacturing operations were detected and the Part-Based Manufacturing Process Performance Monitoring (PbPPM) method was developed. Hardware was prepared to demonstrate the feasibility of the proposed methods in real time. Using low-cost piezoelectric elements and the non-contact scanning laser vibrometer successfully, the data was collected for the SuRE and PbPPM methods. Locational force, loose bolts and material loss could be easily detected by comparing the spectral characteristics of the arriving waves. On-line methods used fast computational methods for estimating the spectrum and detecting the changing operational conditions from sum of the squares of the variations. Neural networks classified the spectrums when the desktop – DSP combination was used. The results demonstrated the feasibility of the SuRE and PbPPM methods.

This dissertation studies the manipulation of particles using acoustic stimulation for applications in microfluidics and templating of devices. The term particle is used here to denote any solid, liquid or gaseous material that has properties, which are distinct from the fluid in which it is suspended. Manipulation means to take over the movements of the particles and to position them in specified locations. Using devices, microfabricated out of silicon, the behavior of particles under the acoustic stimulation was studied with the main purpose of aligning the particles at either low-pressure zones, known as the nodes or high-pressure zones, known as anti-nodes. By aligning particles at the nodes in a flow system, these particles can be focused at the center or walls of a microchannel in order to ultimately separate them. These separations are of high scientific importance, especially in the biomedical domain, since acoustopheresis provides a unique approach to separate based on density and compressibility, unparalleled by other techniques. The study of controlling and aligning the particles in various geometries and configurations was successfully achieved by controlling the acoustic waves. Apart from their use in flow systems, a stationary suspended-particle device was developed to provide controllable light transmittance based on acoustic stimuli. Using a glass compartment and a carbon-particle suspension in an organic solvent, the device responded to acoustic stimulation by aligning the particles. The alignment of light-absorbing carbon particles afforded an increase in visible light transmittance as high as 84.5%, and it was controlled by adjusting the frequency and amplitude of the acoustic wave. The device also demonstrated alignment memory rendering it energy-efficient. A similar device for suspended-particles in a monomer enabled the development of electrically conductive films. These films were based on networks of conductive particles. Elastomers doped with conductive metal particles were rendered surface conductive at particle loadings as low as 1% by weight using acoustic focusing. The resulting films were flexible and had transparencies exceeding 80% in the visible spectrum (400-800 nm) These films had electrical bulk conductivities exceeding 50 S/cm.

During the past two decades, many researchers have developed methods for the detection of structural defects at the early stages to operate the aerospace vehicles safely and to reduce the operating costs. The Surface Response to Excitation (SuRE) method is one of these approaches developed at FIU to reduce the cost and size of the equipment. The SuRE method excites the surface at a series of frequencies and monitors the propagation characteristics of the generated waves. The amplitude of the waves reaching to any point on the surface varies with frequency; however, it remains consistent as long as the integrity and strain distribution on the part is consistent. These spectral characteristics change when cracks develop or the strain distribution changes. The SHM methods may be used for many applications, from the detection of loose screws to the monitoring of manufacturing operations. A scanning laser vibrometer was used in this study to investigate the characteristics of the spectral changes at different points on the parts. The study started with detecting a load on a plate and estimating its location. The modifications on the part with manufacturing operations were detected and the Part-Based Manufacturing Process Performance Monitoring (PbPPM) method was developed. Hardware was prepared to demonstrate the feasibility of the proposed methods in real time. Using low-cost piezoelectric elements and the non-contact scanning laser vibrometer successfully, the data was collected for the SuRE and PbPPM methods. Locational force, loose bolts and material loss could be easily detected by comparing the spectral characteristics of the arriving waves. On-line methods used fast computational methods for estimating the spectrum and detecting the changing operational conditions from sum of the squares of the variations. Neural networks classified the spectrums when the desktop – DSP combination was used. The results demonstrated the feasibility of the SuRE and PbPPM methods.

With wind turbines growing in size, operation and maintenance has become a more important area of research with the goal of making wind energy more profitable. Wind turbine blades are subjected to intense fluctuating loads that can cause significant damage over time. The need for advanced methods of alleviating blade loads to extend the lifespan of wind turbines has become more important as worldwide initiatives have called for a push in renewable energy. An area of research whose goal is to reduce the fatigue damage is smart rotor control. Smart bladed wind turbines have the ability to sense aerodynamic loads and compute an actuator response to manipulate the aerodynamics of the wind turbine. The wind turbine model for this research is equipped with two different smart rotor devices. Independent pitch actuators for each blade and trailing edge flaps (TEFs) on the outer 70 to 90% of the blade span are used to modify aerodynamic loads. Individual Pitch Control (IPC) and Individual Flap Control (IFC) are designed to control these devices and are implemented on the NREL 5 MW wind turbine. The consequences of smart rotor control lie in the wind turbine’s power capture in below rated conditions. Manipulating aerodynamic loads on the blades cause the rotor to decelerate, which effectively decreases the rotor speed and power output by 1.5%. Standard Region 2 generator torque control laws do not take into consideration variations in rotor dynamics which occur from the smart rotor controllers. Additionally, this research explores new generator torque control algorithms that optimize power capture in below rated conditions. FAST, an aeroelastic code for the simulation of wind turbines, is utilized to test the capability and efficacy of the controllers. Simulation results for the smart rotor controllers prove that they are successful in decreasing the standard deviation of blade loads by 26.3% in above rated conditions and 12.1% in below rated conditions. As expected, the average power capture decreases by 1.5%. The advanced generator torque controllers for Region 2 power capture have a maximum average power increase of 1.07% while still maintaining load reduction capabilities when coupled with smart rotor controllers. The results of this research show promise for optimizing wind turbine operation and increasing profitability.

This thesis presents the design, construction, and control of a two-wheeled inverted pendulum (TWIP) robotic walker prototype for assisting mobility-impaired users with balance and fall prevention. A conceptual model of the robotic walker is developed and used to illustrate the purpose of this study. A linearized mathematical model of the two-wheeled system is derived using Newtonian mechanics. A control strategy consisting of a decoupled LQR controller and three state variable controllers is developed to stabilize the platform and regulate its behavior with robust disturbance rejection performance. Simulation results reveal that the LQR controller is capable of stabilizing the platform and rejecting external disturbances while the state variable controllers simultaneously regulate the system’s position with smooth and minimum jerk control. A prototype for the two-wheeled system is fabricated and assembled followed by the implementation and tuning of the control algorithms responsible for stabilizing the prototype and regulating its position with optimal performance. Several experiments are conducted, confirming the ability of the decoupled LQR controller to robustly balance the platform while the state variable controllers regulate the platform’s position with smooth and minimum jerk control.