Diffusion of adsorbed n-alkanes was studied by means of electron beam induced deposition (EBID) technique. Carbon ring-like and pillar-like deposits were produced on bulk and thin substrates in a scanning electron microscope (SEM) operated in a “spot” mode. Residual nalkanes used as a precursor gas were delivered to the beam interaction region (BIR) via surface diffusion. The model of adsorbate diffusion along a heterogeneous surface with different diffusion coefficients D1 and D2 outside and inside the BIR, respectively, was proposed to explain the measured deposition rates. The estimates for diffusion coefficients ranging from ~1x10-10 to ~1x10-7 cm2s-1 at room temperature on surfaces with different roughness were obtained. These estimates most likely should be attributed to n-decane molecules expected to play the key role in the deposition process. Clusters of polymerized molecules produced by irradiation were assumed to act as effective traps hampering surface diffusion. For high D1/D2 ratios the deposition rates were found to be practically independent of the substrate material and initial roughness.

The increasing miniaturization of electric and mechanical components makes the synthesis and assembly of nanoscale structures an important step in modern technology. Functional materials, such as the ferroelectric perovskites, are vital to the integration and utility value of nanotechnology in the future. In the present work, chemical methods to synthesize one-dimensional (1D) nanostructures of ferroelectric perovskites have been studied. To successfully and controllably make 1D nanostructures by chemical methods it is very important to understand the growth mechanism of these nanostructures, in order to design the structures for use in various applications. For the integration of 1D nanostructures into devices it is also very important to be able to make arrays and large-area designed structures from the building blocks that single nanostructures constitute. As functional materials, it is of course also vital to study the properties of the nanostructures. The characterization of properties of single nanostructures is challenging, but essential to the use of such structures. The aim of this work has been to synthesize high quality single-crystalline 1D nanostructures of ferroelectric perovskites with emphasis on PbTiO3 , to make arrays or hierarchical nanostructures of 1D nanostructures on substrates, to understand the growth mechanisms of the 1D nanostructures, and to investigate the ferroelectric and piezoelectric properties of the 1D nanostructures. In Paper I, a molten salt synthesis route, previously reported to yield BaTiO3 , PbTiO3 and Na2Ti6O13 nanorods, was re-examined in order to elucidate the role of volatile chlorides. A precursor mixture containing barium (or lead) and titaniumwas annealed in the presence of NaCl at 760 °C or 820 °C. The main products were respectively isometric nanocrystalline BaTiO3 and PbTiO3. Nanorods were also detected, but electron diffraction revealed that the composition of the nanorods was respectively BaTi2O5/BaTi5O11 and Na2Ti6O13 for the two different systems, in contradiction to the previous studies. It was shown that NaCl reacted with BaO(PbO) resulting in loss of volatile BaCl2 (PbCl2 ) and formation and preferential growth of titanium oxide-rich nanorods instead of the target phase BaTiO3 (or PbTiO3 ). The molten salt synthesis route may therefore not necessarily yield nanorods of the target ternary oxide as reported previously. In addition, the importance of NaCl(g) for the growth of nanorods below the melting point of NaCl was demonstrated in a special experimental setup, where NaCl and the precursors were physically separated. In Paper II and III, a hydrothermal synthesis method to grow arrays and hierarchical nanostructures of PbTiO3 nanorods and platelets on substrates is presented. Hydrothermal treatment of an amorphous PbTiO3 precursor in the presence of a surfactant and PbTiO3 or SrTiO3 substrates resulted in the growth of PbTiO3 nanorods and platelets aligned in the crystallographic <100> orientations of the SrTiO3 substrates. PbTiO3 nanorods oriented perpendicular to the substrate surface could also be grown directly on the substrate by a modified synthesis method. The hydrothermal method described in Paper II and III was developed on the basis of the method described in Appendices I and II. In Paper IV, a template-assisted method to make PbTiO3 nanotubes is presented. An equimolar Pb-Ti sol was dropped onto porous alumina membranes and penetrated into the channels of the template. Single-phase PbTiO3 perovskite nanotubes were obtained by annealing at 700 °C for 6 h. The nanotubes haddiameters of 200 - 400 nm with a wall thickness of approximately 20 nm. Excess PbO or annealing in a Pb-containing atmosphere was not necessary in order to achieve single phase PbTiO3 nanotubes. The influence of the heating procedure and the sol concentration is discussed. In Paper V, a piezoresponse force microscopy study of single PbTiO3 nanorods is presented. The piezoelectric properties were studied in both vertical and lateral mode. Piezoelectric activity and polarization switching was observed in the vertical mode, demonstrating the ferroelectric nature of the nanorods. The nanorods decomposed after repeated cycling of the dc bias at one spot on the nanorod, which resulted in parts of the nanorod disappearing and/or accumulation of particles on the surface of the nanorod. In Paper VI, a method to contact single nanorods by electron beam induced deposition of platinum is presented. An organometallic compound, (trimethyl)-methylcyclopentadienylplatinum(IV), was used as precursor. A home-made apparatus was constructed for the purpose and was mounted onto a scanning electron microscope. Calculations based on apparatus geometry and molecular flow were used to estimate the deposition time and the height of the deposits. The location and height of the deposits were controlled so that single nanorods could be successfully contacted at the ends of the nanorods. Fabrication of a sample device for piezoresponse force microscopy studies of single nanorods using an axial dc bias setup is described in Appendix IV. A proposed experimental setup for such studies is also presented.

Electron Beam Induced Deposition (EBID) is a direct write fabrication process with applications in circuit edit and debug, mask repair, and rapid prototyping. However, it suffers from significant drawbacks, most notably low purity. Work over the last several years has demonstrated that deposition from bulk liquid precursors, rather than organometallic gaseous precursors, results in high purity deposits of low resistivity (LPEBID). In this work, it is shown that the deposits resulting from LP-EBID are only highly conductive when deposited at line doses below 25μC/cm. When the dose exceeds this value, the resulting structure is highly porous providing a poor conductive pathway. It is also shown that beam current has no significant effect on the resistivity of the deposits. Nanowires with resistivity significantly lower than the previous best result of 67μΩ•cm were achieved, with the lowest resistivity being only 6.6μΩ•cm, only a factor of 4 higher than that bulk copper of 1.7μΩ•cm.

Electron Beam Induced Deposition (EBID) is an emerging additive nanomanufacturing tool which enables growth of complex 3-D parts from a variety of materials with nanoscale resolution. Fundamentals of EBID and its application to making a robust, low-contact-resistance electromechanical junction between a Multiwall Carbon Nanotube (MWNT) and a metal electrode are investigated in this thesis research. MWNTs are promising candidates for next generation electrical and electronic devices, and one of the main challenges in MWNT utilization is a high intrinsic contact resistance of the MWNT-metal electrode junction interface. EBID of an amorphous carbon interface has previously been demonstrated to simultaneously lower the electrical contact resistance and to improve mechanical characteristics of the MWNT-electrode junction. In this work, factors contributing to the EBID formation of the carbon joint between a MWNT and an electrode are systematically explored via complimentary experimental and theoretical investigations. A comprehensive dynamic model of EBID using residual hydrocarbons as a precursor molecule is developed by coupling the precursor mass transport, electron transport and scattering, and surface deposition reaction. The model is validated by comparison with experiments and is used to identify different EBID growth regimes and the growth rates and shapes of EBID deposits for each regime. In addition, the impact of MWNT properties, the electron beam impingement location and energy on the EBID-made carbon joint between the MWNT and the metal electrode is critically evaluated. Lastly, the dominant factors contributing to the overall electrical resistance of the MWNT-based electrical interconnect and relative importance of the mechanical contact area of the EBID-made carbon joint to MWNT vs. that to the metal electrode are determined using carefully designed experiments.

Within this work, a set of depositions induced by focused electron beam was prepared. The depositions were prepared in the presence of water vapours from trimethyl(methylcyclopentadienyl)platinum(IV) precursor. The dependence of prepared materials purity on beam accelerating voltage and water vapour pressure was measured. The best platinum content was achieved at (27,2 ± 0,4) at. %, with beam accelerating voltage 5 kV, beam current 1600 pA and water vapour pressure 100 Pa. Due to subsequent long-term exposure to light, air humidity and air oxygen, the platinum content was increased to (39,2 ± 2,1) at. %.

Focused electron beam induced deposition (FEBID) is a versatile tool to produce nanostructures through electron-induced decomposition of metal-containing precursor molecules. However, the metal content of the resulting materials is often low. Using different Ag(I) complexes, this study shows that the precursor performance depends critically on the molecular structure. This includes Ag(I) 2,2-dimethylbutanoate, which yields high Ag contents in FEBID, as well as similar aliphatic Ag(I) carboxylates, aromatic Ag(I) benzoate, and the acetylide Ag(I) 3,3-dimethylbutynyl. The compounds were sublimated on inert surfaces and their electron-induced decomposition was monitored by electron-stimulated desorption (ESD) experiments in ultrahigh vacuum and by reflection−absorption infrared spectroscopy (RAIRS). The results reveal that Ag(I) carboxylates with aliphatic side chains are particularly favourable for FEBID. Following electron impact ionization, they fragment by loss of volatile CO2. The remaining alkyl radical converts to a stable and equally volatile alkene. The lower decomposition efficiency of Ag(I) benzoate and Ag(I) 3,3-dimethylbutynyl is explained by calculated average local ionization energies (ALIE) which reveal that ionization from the unsaturated carbon units competes with ionization from the coordinate bond to Ag. This can stabilise the ionized complex with respect to fragmentation. This insight provides guidance with respect to the design of novel FEBID precursors.

Bottom-up nanofabrication, although still in its early stages with formidable challenges, is considered a potential alternative method to address the limitations of traditional top-down techniques by offering benefits including process simplification, cost reduction, and environmental friendliness. DNA-templated nanofabrication, one of the most powerful bottom-up methods, presents an innovative way to create advanced nanoelectronics. In this approach, nanomaterials with specific electronic, photonic, or other functions are precisely and programmably positioned on DNA nanostructures from a disordered collection of smaller parts. These self-assembled structures offer significant potential for improving many fields such as biosensing, drug delivery and electronic device manufacturing. This dissertation reports the successful fabrication of semiconductor-metal Schottky contacts using a DNA origami scaffold. The scaffold, consisting of DNA strands organized into a specific bar-shaped architecture, facilitates the competitive arrangement of gold and cadmium sulfide nanorods, forming heterojunctions, and addressing previous limitations in semiconductor nanomaterial availability. Electrical characterization reveals nonlinear Schottky barrier properties, with electrical conductivity ranging from 1.1 to 3.7 — 104 S/m, marking a several million-fold increase over prior work. This research establishes the feasibility of using cadmium sulfide prepared as a n-type semiconductor material and an innovative self-assembly approach for making nanoscale Schottky contacts, paving the way for the future development of DNA-based nanoscale logic gate circuits.

L'enginyeria de les propietats plasmòniques de les nanoestructures metàl·liques requereix un control acurat de les seves formes i distribució. Això normalment s'aconsegueix amb l'ús de la litografia per feix d'electrons sobre polímers electro-sensibles combinat amb la deposició de capes fines de metall i el lift-off. La deposició directa i localitzada de metalls induïda per un feix d'electrons (FEBID per Focused Electron Beam Induced Deposition) és un mètode alternatiu querecentment ha rebut un interès creixent en microelectrònica però encara no ha despertat massa atenció dins la comunitat d'òptica. L'FEBID és el resultat de la descomposició local, per un feixd'electrons focalitzat, de les molècules d'un precursor adsorbides sobre una superfície. Aquesta s'ha aplicat majoritàriament en la escriptura directa de contactes o per a la reparació de circuits, però amb l'ús de metalls nobles podria aprofitar-se per a l'òptica de plasmons.En aquesta tesi es demostra l'ús de l'FEBID per a fabricar nanoestructures d'or per a aplicacions d'òptica de plasmons. S'investiguen els efectes del material del substrat i dels paràmetres de deposició, com ara el corrent del feix i la pressió de vapor d'aigua, sobre el ritme de creixement i la puresa de l'or. S'ha emprat un recuit ex situ de la mostra com a mètode de millora de la puresa. Les mesures òptiques de dispersió sobre les estructures purificades evidencien que suporten plasmons de superfície localitzats. Aquest mètode de fabricació permet el creixement d'estructures plasmòniques amb una elevada relació d'aspecte i ha de facilitar l'escriptura en superfícies no planes com l'extremitat d'una sonda de rastreig allargada. / La ingeniería de las propiedades plasmónicas de las nanoestructuras metálicas requiere un control preciso de sus formas y distribución. Esto normalmente se consigue con el uso de la litografía por haz de electrones sobre polímeros electro-sensibles combinado con la deposición de capas finas de metal y el lift-off. La deposición directa y localizada de metales inducida por un haz de electrones (FEBID por Focused Electron Beam Induced Deposition) es un método alternativo que recientemente ha despertado un interés creciente en microelectrónica pero todavía no ha recibido demasiada atención dentro de la comunidad de óptica. La FEBID es el resultado de la descomposición local, por un haz de electrones focalizado, de las moléculas de un precursor adsorbidas sobre una superficie. Esta se ha aplicado mayoritariamente en la escritura directa de contactos o para la reparación de circuitos, pero con el uso de metales nobles podría ser aprovechada para la óptica de plasmones.En esta tesis se demuestra el uso de la FEBID para fabricar nanoestructuras de oro para aplicaciones de óptica de plasmones. Se investigan los efectos del material del sustrato y de los parámetros de deposición, como la corriente del haz y la presión de vapor de agua, sobre el ritmo de crecimiento y la pureza del oro. Se ha utilizado un recocido ex situ de la muestracomo método de mejora de la pureza. Las medidas ópticas de dispersión sobre las estructuras purificadas evidencian que soportan plasmones de superficie localizados. Este método de fabricación permite el crecimiento de estructuras plasmónicas con una elevada relación de aspecto y tiene que facilitar la escritura en superficies no planas como la extremidad de una sonda de rastreo alargada. / Engineering the plasmon properties of metal nanostructures requires an accurate control on their shapes and distribution. This is conventionally achieved by using electron-beam lithography on electro-sensitive polymers combined with thin-metal-film deposition and lift-off. Direct local deposition of metals induced by a focused electron beam (FEBID for Focused ElectronBeam Induced Deposition) is an alternative method that has been receiving a growing interest in microelectronics but it has not yet received much attention in the optical community. The FEBID is the result of the local decomposition, by a focused electron beam, of precursor molecules adsorbed on a surface. It has mostly been applied to direct-contact writing or to circuit reparation, but can be applied advantageously to plasmon optics when involving noble metals.In this thesis the use of the FEBID to fabricate gold nanostructures for plasmon optics applications is demonstrated. The effects of the substrate material and the deposition parameters, such as beam current and water vapor pressure, on both the deposition rate and the gold purity are investigated. Ex-situ annealing of the sample is used as a purity improvement method. Scattering optical measurements on the purified structures evidence that they support localized surface plasmon resonances. This fabrication method enables to grow high aspect ratio plasmonic structures and to render much easier nano-patterning on non-flat surfaces such as the extremity of an elongated scanning probe.