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Tribological, Kinetic and Thermal Characteristics of Copper Chemical Mechanical PlanarizationLi, Zhonglin January 2005 (has links)
Copper polishing performance depends significantly on the properties of pads, slurries, conditioning, pressure, sliding velocity, slurry flow rate and temperature. A slight variance in each of these parameters will cause significant change in polising results. Various investigations are performed during this study to understand the effect of consumables and other main operating parameters on copper polishing in terms of removal rate, lubrication mechanism, and temperature transients. A modified two-step Langmuir-Hinshelwood removal rate model and a flash heating thermal model are developed to describe the removal mechanism.Results indicate that grain size plays an important role during copper polishing. Smaller grain size may enhance the chemical rate by providing a higher density of favorable reaction sites. However, denser grain boundaries due to smaller grain size may reduce the mechanical rate by increasing the probability of disruption of three body sliding contact. It is found that removal rate increases as slurry flow increases from 60 to 80 cc/min because higher slurry flow rate can provide more reactants to the system. Then removal rate decreases as slurry flow rate is further increased to 140 cc/min, which is due to synergic effects of the wafer temperature, slurry flow and slurry residence time under the wafer. The observed removal rate drop is thought to be due to the change of the wafer temperature at high sliding velocity.Experimental results from eight slurry formulations with various abrasize size and content show that in the case of 13-nm abrasives, the dominant tribological mechanism is that of partial lubrication, while in the case of 35-nm abrasives, the dominant tribological mechanism is that of boundary lubrication. COF values of the slurry with surfactant are generally lower that those of the slurry without surfactant.Logarithmic spiral positive pad, whose spiral groove is at a slight angle to the pad rotation direction, shows the highest average COF. The radial pad results in the smallest average COF. For all types of the grooved pads investigated, CMP is mechanically limited at low pV, and chemically limited at high pV. Non-Prestonian behavior is thought to be due to variations of COF and substrate temperatures.Dual Emission UV Light Enhanced Fluorescence results indicate that during polishing the wafer is tilted towards the center of the pad and that the extent of wafer tilt is a strong function of diamond disc pressure. Increasing the oscillation frequency of the diamond disc or the rotation rate decreases slurry film thickness. Slurry film thickness increases with the slurry flow rate. Also slurry film thickness strongly depends on diamond disc design.
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Development of an Advanced Stem Heating ModelJones, Joshua L. 08 July 2003 (has links) (PDF)
A new one-dimensional heat conduction model for predicting stem heating during fires is presented. The model makes use of moisture and temperature dependent thermal properties for bark and wood. Also, the thermal aspects of the processes of bark swelling, desiccation, and devolatilization are treated in an approximate fashion. Simulation with a surface flux boundary condition requires that these phenomena be accounted for. Previous models have used temperature-time boundary conditions, which prevents them from being directly coupled to fire behavior models. This model uses a flux-time profile for its boundary condition, making it possible to eventually couple it to fire behavior models. Cambial mortality predictions are made through the incorporation of a cell mortality model. The model was developed and validated with laboratory experiments on four species.
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Infrared Neural Modulation: Photothermal Effects on Cortex Neurons Using Infrared Laser HeatingXia, Qingling January 2018 (has links)
It would be of great value to have a precise and non-damaging neuromodulation technique in the field of basic neuroscience research and for clinical treatment of neurological diseases. Infrared neural modulation (INM) is a new modulation modality developed in the last decade, which uses pulsed or continues infrared (IR) light with a wavelength of 1200 to 2200 nm to directly alter neural signals. INM includes both infrared neural stimulation (INS) and infrared neural inhibition (INI). INM is widely investigated for use on peripheral nerves, cochlear nerve fibers, cardiac cells, and the central nervous system. This technique holds the advantages of contact-free and high spatiotemporal precision compared to the traditional electrical stimulation. It does not depend on genetic modification and exogenous absorbers as other optical techniques, such as the optogenetic technique and the enhanced near-infrared neural stimulation (e-NIR). These advantages make INM a viable technique for research and clinical applications. The primary mechanism of the INM is believed to be a photothermal effect, where the IR laser energy absorbed by water leads to a rapid local temperature change. However, so far the details of the mechanism of action potential (AP) generation and inhibition remain elusive. Another issueis that the cells may be endangeredbythe heat exposure, consequently triggering a physiologicalmalfunction or even permanent damage.These concernshave hindered the transfer of the INM technique to the clinical therapy.Therefore, the general aim of this study was to improve the understanding of the details of how INM affects the cells. Laser parameters for safe and efficient stimulation were investigated on the basis of being useful for clinical applications. A tailored heating model and in vitro INM experiments on cortex neurons were used to reach this goal.The first paper was a feasibility study. A 1550nm laser with a beam spot diameter of around 6 mm was used to irradiate the rat cortex neurons, which were seeded on multi-electrode arrays (MEA) and formed well-connected networks. A heating model based on an estimated laser beam (standard Gaussian distribution) was used to simulate temperaturechanges. The damage signal ratio (DSR),based on the temperature,was calculated to predict the heat damage. The average spike rate of all the working electrodes from two MEAs was used to evaluate the degree of theinhibition of the neural networks. Results IVshowed that it is possible to use the 1550 nm laser to safely inhibit the neural network activity and that the degree of the INI is dependent on the power of the laser.The second paper wasan application and mechanism study. The aim of this study was to investigate the safety, efficiency, and cellular mechanism of INI. The same laser as in paper Iwas used in this study. A 20 X objective was used to decrease the beam spot diameteraround 240 μm. The measured laser profile (high order Gaussian beam) was used in the heating model to predict the temperature. The model was verified by local temperature measurements viamicropipette. The action potential rates, measured by the MEA electrodes, were quantified for different temperatures. Bicuculline was added to the cortex neuron cultures to induce hyperexcitation of the neural network. The results showed that the INI is temperature dependent and that the temperature needs to be less than 46 °C at 30 s laser irradiation for safe inhibition. The IR laser couldalso be used to inhibit the hyperexcitedactivity. The degree of inhibition, for the assessed subpopulation of neurons, was better correlated with the action potential amplitude than the width of it and INIcan be accomplished without inhibitory synapses / <p>QC 20180920</p><p></p>
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Expansion av Fjärrvärmeproduktion ur ett Ekonomiskt Perspektiv : En Numeriskt Modellerad Fallstudie / Expansion of District Heating Production in an Economical Perspective : A Numerically Modelled Case StudyHedkvist, Måns January 2021 (has links)
Fjärrvärme i dagens Sverige är ett väletablerat sätt att leverera värme för både industriell och privat användning. Med nästa generations fjärrvärmesystem vid horisonten kan förändringar av existerande fjärrvärmenät komma att bli vanligt förekommande. Trots att det inte är fullt aktuellt med den typen av renoveringar ännu så måste fjärrvärmenät ibland byggas ut för att hantera nya situationer som kan uppstå. För att få en god uppskattning om vad de nya situationerna kommer kräva, och potentiellt kosta, så är simuleringsmodeller ett användbart verktyg. Den här studien har granskat en kommande ökning av effektbehovet och en konsekvent ökning av den producerade värmen angående fjärrvärmesystemet lokaliserat i Malå. Granskningen genomfördes via etablering av en simuleringsmodell som baserats på metoder från tillgänglig litteratur. Empiriska värden användes både som indata till modellen och för feluppskattning. Två hypotetiska scenarier undersöktes där effektbehovet hos en industrikund antas dubbleras, ett som systemet ser ut idag och det andra med ett termiskt energilager i form av en ackumulatortank inkluderat. Simuleringssvaren gav en uppskattning av hur mycket effekt en ny produktionsenhet behöver kunna producera för att nå ett eftersökt mål. Dessa visade på att en ny produktionsenhet med en effekt av minst 10.50 MW är nödvändigt. Vidare så indikerade resultaten att installation av ett sådant energilager med den valda styrningen inte reducerar effektmagnituden hos en ny produktionsenhet. De visade dock på att införande av energilagret kan medföra en reduktion i antalet effektsvängningar som förekommer i systemet. Beroende på övrig konfiguration så minskades förekomsten av antalet effektsvängningar mellan 0.2 till 25.5 procent med ett energilager av den minsta undersökta volymen infört. / District heating in Sweden is a well established way of delivering heat for both industrial and private applications. With the next generation of district heating on the doorstep, changes of existing district heating networks may become a regular occurrence. Despite the fact that these kinds of reconstructions are not quite applicable yet, refurbishments of existing district heating networks are still sometimes necessary in order to deal with new prerequisites that may appear. In order to achieve a good estimation of what these new prerequisites will require and possibly cost, the usage of tools such as models for simulation are valuable. This study has evaluated a future increase of power demand and the subsequent expansion of the produced heat concerning the district heating network located in the city of Malå. The evaluation was carried forth by establishment of a simulation model which was based on present literature. Empirical data was used both as input and for error estimation. Two hypothetical scenarios were examined in which the power demand of an industrial customer is assumed to be doubled. The first represented the system as it is defined presently, while the other introduced a tank thermal energy storage to the system. The results of the simulation yielded an estimate of how much heat a new plant needs to produce in order to attain a set goal. These suggested that the necessary heat production in the new plant needs to be at least 10.50 MW. Furthermore, the results indicated that the inclusion of a thermal energy storage of this kind and with the defined priorities will not reduce the required size of a new production plant. However, they did indicate that the defined thermal energy storage may contribute to a reduction in the number of power fluctuations occurring in the system. Depending on other configurations, the frequency of the power fluctuations were reduced between 0.2 to 25.5 percent with the inlcusion of the smallest examined thermal energy storage.
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