A usinagem de estruturas micrométricas pode ser feita com pulsos laser de nano, pico ou fentossegundos. Destes, porém, somente os mais curtos podem resultar em uma interação não térmica com a matéria, o que evita a fusão, formação de rebarba e zona afetada pelo calor. Devido à sua baixa potência média, contudo, a sua utilização na produção em massa somente pode ser considerada em casos muito especiais, isto é, quando o processamento não-térmico é essencial. Este é o caso da usinagem de semicondutores, aços elétricos, produção de MEMS (sistemas micro eletro-mecânicos), de micro canais e diversos dispositivos médicos e biológicos. Assim, visando a produção destes tipos de estruturas, uma estação de trabalho foi construída com capacidade de controlar os principais parâmetros de processo necessários para uma usinagem micrométrica com laser de pulsos ultracurtos. Os principais problemas deste tipo de estação são o controle da fluência e do posicionamento do ponto focal. Assim, o controle do diâmetro do feixe (no foco) e da energia devem ser feitos com grande precisão. Além disso, o posicionamento do ponto focal com precisão micrométrica nos três eixos, também é de fundamental importância. O sistema construído neste trabalho apresenta soluções para estes problemas, utilizando diversos sensores e posicionadores controlados simultaneamente por um único programa. A estação de trabalho recebe um feixe vindo de um laser de pulsos ultracurtos localizado em outro laboratório, e manipula este feixe de maneira a focalizá-lo com precisão na superfície da amostra a ser usinada. Os principais parâmetros controlados dinamicamente são a energia, o número de pulsos e o posicionamento individual de cada um deles. A distribuição espacial da intensidade, a polarização e as vibrações também foram medidas e otimizadas. O sistema foi testado e aferido com medidas de limiar de ablação do silício, que é um material bastante estudado neste regime de operação laser. Os resultados, quando confrontados com a literatura, mostram a confiabilidade e a precisão do sistema. A automatização, além de aumentar esta precisão, também aumentou a rapidez na obtenção dos resultados. Medidas de limiar de ablação também foram realizadas para o metal molibdênio, levando a resultados ainda não vistos na literatura. Assim, de acordo com o objetivo inicial, o sistema foi desenvolvido e está pronto para utilização em estudos que levem à produção de estruturas micrométricas. / Machining of very small structures has been made with nano, pico and femtosecond pulsed lasers. Among then, only femtosecond lasers may result in nonthermal interaction with matter, avoiding melting, formation of slag and heat affected zone. Mass production with such lasers yet can only be considered in cases where nonthermal effects are of prime importance. This is the case in machining of semiconductors and electric steels, the production of MEMS, microchannels, and many medical and biological devices. Hence, a workstation for production of such kind of microstructures was built with the capability of controlling the main parameters necessary for the machining process. Control of the laser fluence and focus positioning are the main concern in this kind of processing. So, the control of the laser beam diameter (in the focus) and of the pulse energy must be very precise. Positioning of focal point with micrometric precision in the three axes is also fundamental. The system built in this work provides solutions for these problems incorporating several sensors and positioning stages simultaneously controlled by a single software. The workstation receives a laser beam coming from another laboratory and delivers it to the surface of the sample managing with precision the main process parameters. The system can dynamically control the energy, number of pulses and positioning for each individual laser spot. Besides, the spatial distribution of the laser intensity, polarization and vibrations were also measured and optimized. The system was tested and calibrated with threshold ablation measurement for silicon, which is well studied in this regime of laser operation. The results where compared with data found in the literature and attested the reliability and precision of the system. Besides the increase in precision, the automation also turned much faster the data acquisition. Threshold ablation for metallic molybdenum was also obtained and resulted in data not found in the literature yet. Concluding the initial goal, the workstation was developed and is ready to be used in studies that can lead to production of micrometric structures.

A usinagem de estruturas micrométricas pode ser feita com pulsos laser de nano, pico ou fentossegundos. Destes, porém, somente os mais curtos podem resultar em uma interação não térmica com a matéria, o que evita a fusão, formação de rebarba e zona afetada pelo calor. Devido à sua baixa potência média, contudo, a sua utilização na produção em massa somente pode ser considerada em casos muito especiais, isto é, quando o processamento não-térmico é essencial. Este é o caso da usinagem de semicondutores, aços elétricos, produção de MEMS (sistemas micro eletro-mecânicos), de micro canais e diversos dispositivos médicos e biológicos. Assim, visando a produção destes tipos de estruturas, uma estação de trabalho foi construída com capacidade de controlar os principais parâmetros de processo necessários para uma usinagem micrométrica com laser de pulsos ultracurtos. Os principais problemas deste tipo de estação são o controle da fluência e do posicionamento do ponto focal. Assim, o controle do diâmetro do feixe (no foco) e da energia devem ser feitos com grande precisão. Além disso, o posicionamento do ponto focal com precisão micrométrica nos três eixos, também é de fundamental importância. O sistema construído neste trabalho apresenta soluções para estes problemas, utilizando diversos sensores e posicionadores controlados simultaneamente por um único programa. A estação de trabalho recebe um feixe vindo de um laser de pulsos ultracurtos localizado em outro laboratório, e manipula este feixe de maneira a focalizá-lo com precisão na superfície da amostra a ser usinada. Os principais parâmetros controlados dinamicamente são a energia, o número de pulsos e o posicionamento individual de cada um deles. A distribuição espacial da intensidade, a polarização e as vibrações também foram medidas e otimizadas. O sistema foi testado e aferido com medidas de limiar de ablação do silício, que é um material bastante estudado neste regime de operação laser. Os resultados, quando confrontados com a literatura, mostram a confiabilidade e a precisão do sistema. A automatização, além de aumentar esta precisão, também aumentou a rapidez na obtenção dos resultados. Medidas de limiar de ablação também foram realizadas para o metal molibdênio, levando a resultados ainda não vistos na literatura. Assim, de acordo com o objetivo inicial, o sistema foi desenvolvido e está pronto para utilização em estudos que levem à produção de estruturas micrométricas. / Machining of very small structures has been made with nano, pico and femtosecond pulsed lasers. Among then, only femtosecond lasers may result in nonthermal interaction with matter, avoiding melting, formation of slag and heat affected zone. Mass production with such lasers yet can only be considered in cases where nonthermal effects are of prime importance. This is the case in machining of semiconductors and electric steels, the production of MEMS, microchannels, and many medical and biological devices. Hence, a workstation for production of such kind of microstructures was built with the capability of controlling the main parameters necessary for the machining process. Control of the laser fluence and focus positioning are the main concern in this kind of processing. So, the control of the laser beam diameter (in the focus) and of the pulse energy must be very precise. Positioning of focal point with micrometric precision in the three axes is also fundamental. The system built in this work provides solutions for these problems incorporating several sensors and positioning stages simultaneously controlled by a single software. The workstation receives a laser beam coming from another laboratory and delivers it to the surface of the sample managing with precision the main process parameters. The system can dynamically control the energy, number of pulses and positioning for each individual laser spot. Besides, the spatial distribution of the laser intensity, polarization and vibrations were also measured and optimized. The system was tested and calibrated with threshold ablation measurement for silicon, which is well studied in this regime of laser operation. The results where compared with data found in the literature and attested the reliability and precision of the system. Besides the increase in precision, the automation also turned much faster the data acquisition. Threshold ablation for metallic molybdenum was also obtained and resulted in data not found in the literature yet. Concluding the initial goal, the workstation was developed and is ready to be used in studies that can lead to production of micrometric structures.

Οι ηλεκτρομηχανικές συσκευές αποθήκευσης δεδομένων πολύ μικρής κλίμακας που βασίζονται στη χρήση ακίδων (probes) αποτελούν ανερχόμενες εναλλακτικές επιλογές για τη βελτίωση της πυκνότητας αποθήκευσης, του χρόνου πρόσβασης των δεδομένων και της απαιτούμενης ισχύος σε σχέση με τις συμβατικές συσκευές αποθήκευσης. Μία υλοποίηση μιας τέτοιας συσκευής χρησιμοποιεί θερμομηχανικές μεθόδους για την αποθήκευση πληροφορίας σε λεπτές μεμβράνες πολυμερών υλικών. Στην περίπτωση αυτή, η ψηφιακή πληροφορία αποθηκεύεται με τη μορφή κοιλωμάτων πάνω στο πολυμερές υλικό, τα οποία δημιουργούνται από τις ακίδες, διαμέτρου μερικών nm. Με στόχο την αύξηση του ρυθμού εγγραφής και ανάγνωσης χρησιμοποιούνται δισδιάστατες διατάξεις από ακίδες που λειτουργούν παράλληλα, με κάθε ακίδα να εκτελεί λειτουργίες εγγραφής /ανάγνωσης /διαγραφής σε ξεχωριστό αποθηκευτικό πεδίο. Η μετατόπιση του αποθηκευτικού μέσου σε σχέση με τη διάταξη των ακίδων επιτυγχάνεται με τη χρησιμοποίηση ηλεκτρομηχανικού συστήματος μικρής κλίμακας (MEMS). Η διάταξη MEMS αποτελείται από ένα μικρής κλίμακας σύστημα σάρωσης (microscanner) και από το τσιπ της δισδιάστατης διάταξης των ακίδων. Το σύστημα σάρωσης έχει δυνατότητα κίνησης σε δύο διευθύνσεις (x/y). Αντικείμενο της διπλωματικής εργασίας είναι η μοντελοποίηση του συστήματος σάρωσης μικρής κλίμακας. Η μοντελοποίηση του συστήματος έγινε με βάση το σύστημα του απλού αρμονικού ταλαντωτή με απόσβεση. Στα πλαίσια της εργασίας μελετάται η απόκριση του συστήματος σε διάφορους τύπους διεγέρσεων, ενώ για την προσομοίωση της συμπεριφοράς του microscanner αναπτύχθηκε εφαρμογή στην γλώσσα προγραμματισμού Visual Basic. Η εφαρμογή περιλαμβάνει γραφικό περιβάλλον με δυνατότητα ρύθμισης των παραμέτρων εξομοίωσης. / Micro-electro-mechanical-system (MEMS)-based scanning-probe storage devices are emerging as potential ultra-high-density, low-access-time, and low-power alternatives to conventional data storage. One implementation of probe-based storage uses thermomechanical means to store and retrieve information in thin polymer films. Digital information is stored by making indentations on the thin polymer film with the tips of atomic force microscope (AFM) cantilevers, which are a few nanometers in diameter. To increase the data rate, an array of probes is used, in which each probe performs read/ write/ erase operations over an individual storage field. Displacement of the storage medium relative to the array of cantilevers is achieved by using micro-electro-mechanical-system (MEMS). The MEMS assembly consists of the microscanner and the cantilever array chip. The microscanner with x and y motion range carries the storage medium. This diploma dissertation presents the modeling of the microscanner. The system models as a damped harmonic oscillator. The model response on different driven forces has been studied, whereas an application in Visual Basic has been generated to simulate the system motion. The application comprises graphic interface with simulation parameters modulation.

Made available in DSpace on 2014-12-17T14:58:23Z (GMT). No. of bitstreams: 1 SynaraLLC_DISSERT.pdf: 6169690 bytes, checksum: faa4a0309db3cf8ab6507bf4b090a9cc (MD5) Previous issue date: 2014-02-03 / Lubricant is responsible for reducing the wear on the friction protect the metal against oxidation, corrosion and dissipates excess heat, making it essential for the balance of a mechanical system, consequently prolonging the useful life of such a system. The origin of lubricating oils is usually mineral being extracted from the petroleum. But the search for a new source of production of lubricants and fuels it is necessary to meet future demands and reduce the possible environmental damage. For this reason, looking alternative means to produce certain products derived from petroleum, such as biodiesel, for example. Returning to the realm of lubricants, also one realizes this need for new raw materials for their production. Vegetable oil is a renewable resource and biodegradable, and its use entails advantages in environmental, social and economic. The development of this project aims to characterize the carnauba oil as a lubricant plant, or biolubricant. To analyze the oil carnauba tests as checking density, flash point, fire point, viscosity, viscosity, acid number, pH, copper corrosion, thermal conductivity and thermal resistivity were developed. In addition, for conducting the wear on the friction and the gradient of the system temperature, the analysis equipment is designed for wear on the friction. Based on these results, it is observed that the oil carnauba show good correlation to its application as biolubricant / O lubrificante ? respons?vel por reduzir o desgaste relativo ao atrito, proteger o metal contra a oxida??o, corros?o e dissipar o calor excessivo, tornando-se essencial para o equil?brio de um sistema mec?nico, consequentemente prolongando a vida ?til de tal sistema. A origem dos ?leos lubrificantes ?, em geral, mineral sendo extra?dos a partir do petr?leo. Mas a busca por uma nova fonte de produ??o de lubrificantes e combust?veis faz-se necess?rio para suprir futuras demandas e diminuir os poss?veis danos ambientais; por este motivo, procuram-se formas alternativas para produ??o de determinados produtos derivados do petr?leo, como o biodiesel, por exemplo. Voltando para a esfera dos lubrificantes, percebe-se tamb?m essa necessidade de novas mat?riasprimas para a sua produ??o. O ?leo vegetal ? um recurso renov?vel e biodegrad?vel, e a sua utiliza??o implica em vantagens nos aspectos ambientais, sociais e econ?micos. O desenvolvimento deste projeto tem como objetivo caracterizar o ?leo de carna?ba como um lubrificante vegetal, ou biolubrificante. Para analisar o ?leo de carna?ba foram desenvolvidos ensaios como verifica??o de massa espec?fica, ponto de fulgor, ponto de combust?o, viscosidade, ?ndice de viscosidade, ?ndice de acidez, pH, corros?o ao cobre, condutividade t?rmica e resistividade t?rmica. Em complemento, para realizar an?lises de desgaste relativo ao atrito e do gradiente de temperatura do sistema, foi desenvolvido o equipamento para an?lise de desgaste relativo ao atrito. Diante dos resultados obtidos, observa-se que o ?leo de carna?ba apresenta uma boa correla??o para sua aplica??o como biolubrificante

Master of Science / Department of Mechanical and Nuclear Engineering / Warren N. White / This thesis describes the process of testing and implementing ultrasonic transducers for ball position feedback on a ball-and-beam apparatus. Also included are specifications for equipment to allow feedback and command signals to be wireless, not hardwired to the control computer. The author presents various ball-and-beam configurations as well as details about the specific configuration used for this work. These details include choices in sensors, materials, hardware, construction, and controller. After the apparatus has been described, the author provides information to support claims about system performance. The conclusions presented specify the necessary hardware to make the system wireless and indicate that acoustic sensors can complete a successful ball-on-beam balancing system.

Les microphones à électret dédiés à l'électronique grand public et les applications médicales (les audioprothèses) ont atteint les limites de la miniaturisation. Depuis la sortie du premier microphone basé sur une technologie microsystème sur silicium (MEMS: Micro-Electro-Mechanical Systems), les microphones à électret sont progressivement remplacés par les microphones MEMS. Les MEMS utilisent le silicium car il offre des caractéristiques mécaniques exceptionnelles avec de bonnes propriétés électriques et la technologie de fabrication est maintenant bien maîtrisée. La plupart des microphones MEMS qui sont décrits dans la littérature sont constitués d’une membrane qui vibre en dehors du plan du capteur, et utilisent la transduction capacitive. La miniaturisation de tels microphones est limitée car leur sensibilité est liée à la valeur de la capacité qui dépend de la taille de la membrane. En outre, les capteurs capacitifs sont très sensibles aux capacités parasites et aux non-linéarités. Cette thèse présente une nouvelle architecture de microphone MEMS qui utilise des micro-poutres qui vibrent dans le plan capteur. La transduction du signal est réalisée par des nanojauges piézorésistives intégrées dans le microsystème et attachées aux micro-poutres. Ce système de détection original ne présente pas les inconvénients de la détection capacitive et à la différence des piézorésistors classiques intégrés dans la membrane de silicium, les nanofils suspendus permettent d’éliminer les courants de fuite. De plus, l'amélioration de la détection est possible puisque le coefficient piézo-résistif longitudinal est inversement proportionnel à la section du nanofil. Les fluctuations de pression acoustique entraînent les déviations des micro-poutres qui produisent une concentration de contraintes dans les nanogauges. Le comportement du capteur, que l’on cherche à modéliser, est lié à des phénomènes mécaniques, acoustiques et électriques qui sont couplés. En raison des dimensions micrométriques du MEMS, les effets des dissipations thermique et visqueuse doivent être pris en compte dans le comportement acoustique. Pour prédire de façon fiable le comportement du capteur, deux modèles vibroacoustiques sont utilisés: un modèle éléments finis basé sur l'ensemble des équations de Navier-Stokes linéarisées et un modèle approché basé sur un schéma à constantes localisées (représentation par circuit électrique équivalent). Les deux modèles sont complémentaires dans le processus de conception pour déterminer la réponse en fréquence et le taux de bruit du capteur. Le travail est complété par la description des processus technologiques et les défis liés à la fabrication du prototype. Puis deux approches pour la caractérisation fonctionnelle du microphone MEMS sont présentées, la première en tube d’impédance, la seconde en champ libre. / Electret microphones dedicated to consumer electronics and medical applications (hearing aids) have reached the miniaturization limits. Since the release of the first microphone based on Silicon micromachining, electret microphones are constantly replaced by MEMS microphones. MEMS (Micro-Electro-Mechanical Systems) microphones use Silicon that provides exceptional mechanical characteristics along with good electric properties and mature fabrication technology. Regardless of the transduction principle (capacitive, piezoresistive, piezoelectric, optical), all of the MEMS microphones reported in the state of the art literature are based on a membrane deflecting out of the plane of the base wafer. Most of the reported microphones and all of the commercially available MEMS use capacitive transduction. Downscaling of capacitive microphones is problematic, since the sensitivity depends on capacitance value. Moreover capacitive sensors suffer of high sensitivity to parasitic capacitance and nonlinearity. The drawbacks of capacitive detection may be overcome with use of piezoresistive properties of Silicon nanowires. Unlike the classical piezoresistors integrated into silicon membrane, suspended nanowires do not suffer of leakage current. Further improvement of piezoresistive detection is possible since the longitudinal piezoresistive coefficient rises inversely proportional to nanowire section. This thesis presents the considerations of novel MEMS microphone architecture that uses microbeams which deflect in the plane of the base wafer. Signal transduction is achieved by piezoresistive nanogauges integrated in the microsystem and attached to the microbeams. Acoustic pressure fluctuations lead to the deflection of the microbeams which produces a stress concentration in the nanogauges. Accurate simulations of the discussed transducer couple acoustic, mechanical and electric behavior of the system. Due to micrometric dimensions of the MEMS acoustic system, thermal and viscous dissipative effects have to be taken into account. To reliably predict the sensor behavior two acoustic models are prepared: the complete Finite Element Model based on the full set of linearized Navier-Stokes equations and the approximative model based on the Lumped Elements (Equivalent Cirtuit Representation). Both models are complementary in the design process to finally retrieve the frequency response and the noise budget of the sensor. The work is completed by the description of the technological process and the challenges related to the prototype microfabrication. Then the approach to the MEMS microphone characterization in pressure-field and free-field is presented.

Le fonctionnement du cerveau repose sur la libération de molécules telles que les neurotransmetteurs et les métabolites dans le milieu interstitiel. L’étude de ces molécules est donc primordiale afin de mieux comprendre leur rôle physiologique et pathologique. Pour cela, les biocapteurs enzymatiques implantables sont un outil prometteur de par leurs capacités de détection quantitative, en temps réel et dans les tissus profonds. En fonction des dimensions du biocapteur, l’impact de l’implantation peut avoir des conséquences considérables sur la composition chimique du fluide interstitiel. De plus, chaque implantation induit localement une réaction inflammatoire dite « réaction au corps étranger ». La réduction de ces réactions est indispensable afin d’obtenir des estimations plus précises de la concentration des molécules présentes. Dans ce sens, ce manuscrit exposera deux voies de réduction de l’impact lésionnel dû à l’implantation de biocapteurs. Tout d’abord, il sera présenté la miniaturisation de biocapteurs enzymatiques jusqu’à des diamètres externes inférieurs à 15 µm. Et il sera démontré in vivo que ces biocapteurs ultra miniaturisés ont le potentiel d’être implantés dans le cerveau sans induire de dommages détectables aux tissus et aux vaisseaux sanguins. Ensuite, le développement d’une microsonde fabriquée à l’aide des technologies MEMS couplant une détection électrochimique et optique sera introduit dans le cadre du suivi du fluide interstitiel péri- et intratumoral de glioblastomes modifiés pour émettre de la fluorescence. En intégrant deux types de détection sur une unique micro-aiguille, cette microsonde permet de réduire le nombre d’implantations. Ces deux voies de miniaturisation ouvrent la possibilité de suivre la composition chimique du fluide interstitiel de manière moins invasive, et donc de mieux préserver la physiologie des tissus étudiés dans le cerveau. / Brain function is based on the release of molecules such as neurotransmitters and metabolites into the interstitial fluid. The study of these molecules is essential to better understand their physiological and pathological role. For this purpose, implantable enzymatic biosensors are a promising tool because of their quantitative, real-time and deep tissue detection abilities. Depending on the dimensions of the biosensor, the impact of implantation may have considerable consequences on the chemical composition of the interstitial fluid. In addition, each implantation induces a local inflammatory reaction called "foreign body reaction". The reduction of these reactions is crucial in order to provide more accurate estimations of molecules concentrations present in the interstitial fluid. In this sense, this manuscript will expose two ways of reducing the lesional impact due to the implantation of biosensors. First of all, it will be presented the miniaturization of enzymatic biosensors up to external diameters less than 15 µm. And it will be demonstrated in vivo that these ultra miniaturized biosensors have the potential to be implanted in the brain without inducing detectable damage to tissues and blood vessels. Then, the development of a microprobe fabricated using MEMS technologies combining electrochemical and optical detection will be introduced as part of the monitoring of peri- and intratumoral interstitial fluid from glioblastomes modified to fluoresce. By integrating two types of detection on a single micro-needle, this microprobe reduces the number of implantations. These two miniaturization approaches open up the possibility of following the chemical composition of the interstitial fluid in a less invasive way, and thus of better preserving the physiology of the tissues studied in the brain.

Cancer is a world menace. After years of endeavor seeking the end of it, people started to realize that no matter how powerful the therapy could be, detection at early stage is always a cheaper, easier and more successful solution compared with curative methods for cancer developed onto its advanced stage. However, relatively few early-detection approaches have proven sufficiently effective and practical for mass use as a point-of-care tool. An early-cancer screening tool integrating the desired features of sensitive, informative, portable, and cost-effective is in need for the doctors. The progress in optical imaging and Micro-electro-mechanical system (MEMS) technology offers a promise for an innovative cancer screening alternative that is non-invasive, radiation-free, portable and potentially cost-effective. This dissertation investigates handheld instrumentation as multi-modalities of miniature imaging probes with various designs of MEMS devices, to obtain real-time images of epithelial tissue optical and physiological properties, combining the quantitative advantages of spectral analysis with the qualitative benefits of imaging to distinguish early cancer. This dissertation in sequence presents the handheld instruments in the fashions of Laser-scanning confocal microscopy (LSCM), optical diffuse reflectance imaging, nonlinear optical imaging modalities with their subsequent image-guided managements in oral cancer, skin cancer detection, circulating tumor cell (CTC) imaging, and imaging guided surgeries. One of the main challenges facing miniaturization lies in the mechanism of beam deflection across the sample. This dissertation introduces two generations of MEMS devices desgined, fabricated and incorporated in the imaging probes. A two-axis vertical comb driven silicon micromirror was used in the development of a handheld LSCM for oral cancer detection. Though obtaining numerous advantages, this first generation silicon MEMS micromirror suffers from small aperture size and high voltage requirement for actuation, which result in low collection efficiency in fluorescence imaging and medial safety concerns, respectively. Therefore a stainless steel scanner compatible with electrical discharge machining (EDM) process was fabricated with simplified process, low-voltage magnetic actuation and large fluorescence collection efficiency, with its capability demonstrated in the incorporation and embodiment of a handheld hyperspectral nonlinear imaging probe. Besides, software and controlling innovations for handheld imaging modalities are presented. A feedback controlling system for MEMS scanning status monitoring was developed for stabilized imaging rendering. For the sake of further improved imaging stability in handheld imaging and to enable on-site mosaic for large field viewing, a handheld mosaic system was developed and presented. / text

La surveillance automatique consiste à vérifier le bon fonctionnement d'un système tout au long de sa durée d'utilisation et ce, sans intervention humaine. Elle permet de mettre en place une stratégie de maintenance prévisionnelle qui présente un intérêt économique majeur, en particulier dans le cas de systèmes isolés comme les éoliennes construites en pleine mer. La surveillance automatique se base sur l'acquisition plus ou moins régulière de signaux pendant le fonctionnement du système surveillé. L'analyse de ces signaux doit permettre d'établir un diagnostic et de prendre une décision sur le déclenchement des opérations de maintenance. Dans cette thèse, nous proposons une méthode d'analyse générique permettant de s'adapter à n'importe quel système surveillé. La méthode se déroule en plusieurs étapes. Premièrement, chaque signal est analysé individuellement pour en extraire son contenu spectral, c'est-à-dire identifier les pics spectraux, les séries harmoniques et les bandes de modulation présents dans sa densité spectrale. Ensuite, ce contenu spectral est suivi au cours du temps pour former des trajectoires sur l'ensemble de la séquence de signaux acquis. Ces trajectoires permettent de générer des tendances qui sont le reflet de la santé du système. Enfin, les tendances sont analysées pour identifier un changement au cœur du système qui serait synonyme d'usure ou de défaut naissant. Cette méthodologie est validée sur de nombreux signaux réels provenant de la surveillance de différents systèmes mécaniques. / The automatic monitoring consists in verifying without any human intervention that a system is operating well. The monitoring allows to use a predictive maintenance strategy, which is economically interesting, especially in the case of isolated systems like off-shore wind turbines. The automatic monitoring is based on signals acquired more or less regularly while the monitored system is operating. The analysis of these signals should be sufficient to diagnose the system and to decide whether or not the maintenance operations should be done. In this thesis, we propose a generic analysis method able to adapt itself to any monitored system. This method is composed by several steps. First, each signal is analyzed individually in order to extract its spectral content, that is to identify the spectral peaks, the harmonic series and the modulation sidebands presents in the signal spectrum. Then, the spectral content is tracked through time to construct spectral trajectories in the sequence of acquired signal. These trajectories are used to generate trends which indicate the state of the system health. Finally, the trends are analyzed to identify a change in the system response which would indicate some wear or a fault in is early stage. This analysis method is validated on real world signals acquired on different mechanical systems.

For elderly Canadians, the prevalence of vision impairment caused by degenerative retinal pathologies, such as age-related macular degeneration and retinitis pigmentosa, is at an occurrence rate of 14 percent, and on the rise. It has been shown that visual function can be restored by electrically stimulating intact retinal tissue with an array of micro-electrodes with suitable signals. Commercial retinal implants carrying such a micro-electrode array achieve this, but to date must receive power and data over copper wire cable passing through a permanent surgical incision in the eye wall (sclera). This project is defined by a collaboration with iBIONICS, who are developing retinal implants for treatment of such conditions. iBIONICS has developed the Diamond Eye retinal implant, along with several technology sub-systems to form a comprehensive and viable medical solution. Notably, the Diamond Eye system can be powered wirelessly, with no need for a permanent surgical incision. The thesis work is focused on the formulation, simulation and hardware demonstration of a powering system, mounted on glasses frame, for a retinal implant. The system includes a Micro-Electro-Mechanical System (MEMS) mirror that directs a laser beam to the implant through the pupil opening. The work presented here is built on two main components: an iterative predictor-corrector algorithm (Kalman filter) that estimates pupil coordinates from measurements provided by an image-based eye tracking algorithm; and an misalignment compensation algorithm that maps eye pupil coordinates into mirror coordinates, and compensates for misalignment caused by rigid body motions of the glasses lens mirror and the MEMS mirror with respect to the eye. Pupil tracker and misalignment compensation control performance are illustrated through simulated scenarios. The project also involves the development of a hardware prototype that is used to test algorithms and related software.