Two types of rotary gate microvalves are developed for flow modulation in a microfluidic system that operates at high flow rate and/or uses particulate flow. This research work encompasses design, microfabrication, and experimental evaluation of these microvalves in three distinct areas compliant micromechanism, microfluidics, and electromagnetic actuation. The microvalve consists of a suspended gate that rotates in the plane of the chip to regulate flow through the orifices. The gate is suspended by a novel fully-compliant in-plane rotary bistable micromechanism (IPRBM) that advantageously constraints the gate in all other degrees of freedom. Multiple inlet/outlet orifices provide flexibility of operating the microvalve in three different flow/port configurations. The suspended gate is made of a soft magnetic material and is electromagnetically actuated like a rotor in a variable-reluctance stepper motor. Therefore, an external electromagnetic (EM) actuation at the integrated set of posts (stator) causes the gate mass to switch from its default angular position to a second angular position. The microvalve chip is fabricated by electroplating a soft magnetic material, Permalloy (Ni80Fe20) in a sacrificial photoresist mold on a Silicon substrate. The inlet/outlet orifices are then etched into the Silicon substrate from the back-side using deep-reactive ion etch process. Finally, the gate structure is released by stripping the PR and seed layers. This research work presents the realization of a new microvalve design that is distinct from traditional diaphragm-type microvalves. The test results are encouraging and show the potential of these microvalves in effectively modulating flow in microfluidic systems that may not require a tight seal. The microvalve uses a novel in-plane rotary bistable micromechanism that may have other applications such as optical shutters, micro-locks, and passive check valves.

This research focuses on the development of polymer microfabrication technologies for the realization of two major components of a pneumatic tactile display: a microactuator array and a complementary microvalve (control) array. The concept, fabrication, and characterization of a kinematically-stabilized polymeric microbubble actuator (¡°endoskeletal microbubble actuator¡±) were presented. A systematic design and modeling procedure was carried out to generate an optimized geometry of the corrugated diaphragm to satisfy membrane deflection, force, and stability requirements set forth by the tactile display goals. A refreshable Braille cell as a tactile display prototype has been developed based on a 2x3 endoskeletal microbubble array and an array of commercial valves. The prototype can provide both a static display (which meets the displacement and force requirement of a Braille display) and vibratory tactile sensations. Along with the above capabilities, the device was designed to meet the criteria of lightness and compactness to permit portable operation. The design is scalable with respect to the number of tactile actuators while still being simple to fabricate. In order to further reduce the size and cost of the tactile display, a microvalve array can be integrated into the tactile display system to control the pneumatic fluid that actuates the microbubble actuator. A piezoelectrically-driven and hydraulically-amplified polymer microvalve has been designed, fabricated, and tested. An incompressible elastomer was used as a solid hydraulic medium to convert the small axial displacement of a piezoelectric actuator into a large valve head stroke while maintaining a large blocking force. The function of the microvalve as an on-off switch for a pneumatic microbubble tactile actuator was demonstrated. To further reduce the cost of the microvalve, a laterally-stacked multilayer PZT actuator has been fabricated using diced PZT multilayer, high aspect ratio SU-8 photolithography, and molding of electrically conductive polymer composite electrodes.

Safe, effective hydrogen fuel cells are one of the contenders for the next shift in mobile power technology. One of the solutions to the inherent risks of high pressure hydrogen fuel cells is an outer low pressure container with an inner high pressure containers containing a micro-electromechanical systems (MEMS) valve which regulating the pressure. These MEMS valves consist of several etched Si-chips stacked and bonded, which shall withstand the pressure and temperature range in the high pressure fuel cell as well as the embrittlement caused by the hydrogen gas. Hydrogen embrittlement is a phenomena where materials, mostly metals, lose their ductility due to diffusion of hydrogen atoms into their grain boundaries. A suitable method for stacking the chips is needed and thus a literature study was conducted. Several chip-to-chip bonding methods were investigated in the purpose of finding the most suitable methods tolerating temperatures between -40 to 85°C, pressure up to 1000 bar, hermetically sealing, withstanding hydrogen embrittlement and still bond with particulate contaminations caused by testing each chip. The method found to be best fitting for the purpose was anodic bonding with an alkali glass. Alternatively anodic bonding with a ceramic glass system could be considered if technique from alkali glass is adaptable.

Microvalves are essential components of the miniaturization of the fluidic systems to control of fluid flow in a variety of applications as diverse as chemical analysis systems, micro-fuel cells, and integrated fluidic channel arrangements for electronic cooling. Using microvalves, these systems offer important advantages: they can operate using small sample volumes and provide rapid response time. This PhD dissertation presents the world first electromagnetically actuated microvalve fabricated on a single wafer with CMOS compatibility. In this dissertation, the design, fabrication, and testing results of two different types of electromagnetic microvalves are presented: the on/off microvalve and the bistable microvalve with latching mechanism. The microvalves operate with power consumption of less than 1.5 W and can control the volume flow rate of DI water, or a 50% diluted methanol solution in the range 1 - 50 µL in. The leaking rate of the on/off microvalve is the order of 30 nL/min. The microvalve demonstrated a response time for latching of 10 ms in water and 0.2 ms in air. This work has resulted in a US patent, application no. 10/699,210.Other inventions that have been developed as a result of this research are bidirectional, and bistable-bidirectional microactuators with latching mechanism, that can be utilized for optical switch, RF relay, micro mirror, nano indenter, or nano printings.

Temperature-responsive hydrogels are polymer particles whose equilibrium size depends on the temperature of the water they are immersed in. Here we present an equivalent circuit model of a temperature-controlled microvalve based on hydrogel particles. The resulting network model consists of three physical subsystems. The thermal subsystem considers the heat capacities and thermal resistances of the layers of the valve and the coupling to the ambient environment. The polymeric subsystem describes the relaxation of the hydrogel particles to the temperature-dependent equilibrium size. The fluidic subsystem consists of the supply channel and a chamber whose cross section varies according to the size of the hydrogel particles. All subsystems are described and coupled within one single circuit. Thus the transient behavior of the valve can be calculated using a circuit simulator. Simulation results for a setup are presented and compared with experiments.