Inorganic material based electronics and photonics on unconventional substrates have shown tremendous unprecedented applications, especially in areas that traditional wafer based electronics and photonics are unable to cover. These areas range from flexible and conformal consumer products to biocompatible medical devices. This thesis presents the research on single crystal silicon nanomembrane photonics on different substrates, especially flexible substrates. A transfer method has been developed to transfer silicon nanomembrane defect-freely onto glass and flexible polyimide substrates. Using this method, intricate single crystal silicon nanomembrane device, such as photonic crystal microcavity, has been transferred onto flexible substrates. To test the device, subwavelength grating couplers are designed and implemented to couple light in and out of the transferred waveguides with high coupling efficiency. The cavity shows a quality factor ~ 9000 with water cladding and ~30000 with glycerol cladding, which is comparable to the same cavity demonstrated on silicon-on-insulator platform, indicating the high quality of the transferred silicon nanomembrane. The device could be bended to a radius less than 15 mm. The experiments show that the resonant wavelength shifts to longer wavelength under tensile stress, while it shifts to shorter wavelength under compressive stress. The sensitivity of the cavity is ~70 nm/RIU, which is independent of bending radius. This demonstration opens vast possibilities for a whole new range of high performance, light-weight and conformal silicon photonic devices. The techniques and devices (e.g. wafer bonding, stamp printing, subwavelength grating couplers, and modulator) generated in the research can also be beneficial for other research fields. / text

III-nitride nanostructures have generated tremendous scientific and technological interests in studying and engineering their low dimensional physics phenomena. Among these, 2D planar, free standing III-nitride nanomembranes are unrivalled in their scalability for high yield manufacture and can be mechanically manipulated. Due to the increase in their surface to volume ratio and the manifestation of quantum phenomena, these nanomembranes acquire unique physical properties. Furthermore, III-nitride membranes are chemically stable and biocompatible. Finally, nanomembranes are highly flexible and can follow curvilinear surfaces present in biological systems. However, being free-standing, requires especially new techniques for handling nanometers or micrometers thick membrane devices. Furthermore, effectively transferring these membrane devices to other substrates is not a direct process which requires the use of photoresists, solvents and/or elastomers. Finally, as the membranes are transferred, they need to be properly attached for subsequent device fabrications, which often includes spin coating and rinsing steps. These engineering complications have impeded the development of novel devices based on III-nitride membranes. In this thesis, we demonstrate the versatility of III-nitride membranes where we develop a thermal bio-sensor nanomembrane and solar energy photo-anode membrane. First, we present a novel preparation technique of nanomembranes with new characteristics; having no threading dislocation cores. We then perform optical characterization to reveal changes in their defect densities compared to the bulk crystal. We also study their mechanical properties where we successfully modulate their bandgap emission by 55 meV through various external compressive and tensile strain fields. Furthermore, we characterize the effect of phonon-boundary scattering on their thermal properties where we report a reduction of thermal conductivity from 130 to 9 W/mK. We employ these modifications to develop a thermal biosensor, which conformally gets attached to cells to measure their thermal properties. We also assess the statistical significance of our measurements to differentiate between different cell lines based on their measured thermal properties. Finally, we demonstrate the application of nanomembranes in solar-based water-splitting by merging them with nanowires to form nanowire membranes which are used to fabricate membrane photo-anodes. Finally, through optical, chemical and electrochemical measurements, we demonstrate their superior operations compared to typical fabrication techniques.

Title: Theoretical studies of rolled-up and wrinkled nanomembranes Author: Mgr. Peter Cendula Department: Department of Condensed Matter Physics Thesis Supervisors: Prof. Dr. Oliver G. Schmidt, Prof. RNDr. Václav Holý, CSc. Abstract : The thesis is devoted to three similar topics from the field of rolled-up and wrinkled nanomembranes. We start by recalling classical theory of thin plates, which will be used to describe deformation of nanomembranes. In the first topic, relaxation of internal strain is studied when a flat film is partially released from the substrate by etching the sacrificial layer underneath. Energetic competition of the tube and wrinkle shape is quantitatively investigated. Similar model is used to investigate the limiting maximum value of tube rotations. In the second topic, roll-up of initially wrinkled film is shown to favor tubes forming on the flat edge of rectangular wrinkled pattern, enabling precise control of tube position. Experiment is provided to justify our theoretical predictions. In the third topic, quantum well is assumed inside a wrin- kled nanomembrane. Shift of transition energy induced by lateral modulation due to bending strain is quantified, being of interest for strain-sensitive optical detectors and emitters. In addition, lateral localization of electron and hole due to...

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No. of bitstreams: 1 torikai_K_me_bauru.pdf: 9782713 bytes, checksum: 3775eee15d15983b2b404989e8170b7b (MD5) Previous issue date: 2018-12-04 / Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES) / Fundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP) / A eletrônica orgânica mostrou-se comercialmente viável e competitiva, já sendo integrada em diversas tecnologias, e.g., displays flexíveis de OLED, painéis solares de grande área, dispositivos biocompatíveis/vestíveis, entre outras. A utilização de materiais orgânicos na fabricação de dispositivos eletrônicos explora vantagens como: flexibilidade mecânica, baixas temperaturas de processamento e possibilidade de se implementar melhorias e ajustes por meio de sínteses químicas. Entretanto, a eletrônica inorgânica já bem estabelecida ainda se destaca na área da eletrônica robusta, uma vez que os semicondutores orgânicos (OSCs) são bastante suscetíveis a condições mais extremas, como exposição a gases e radiação. Nesse sentido, a tecnologia de nanomembranas autoenroladas (NM) tem mostrado, nos últimos anos, um grande potencial na fabricação de dispositivos híbridos ultracompactos em uma arquitetura inédita para transistores orgânicos de filmes finos (OTFTs). A partir das técnicas tradicionais de microfabricação—fotolitografia, deposição de filmes finos—fabricou-se OTFTs sobre NMs que, uma vez liberadas do substrato através da remoção sistemática de uma camada de sacrifício, remodelam os dispositivos em uma arquitetura tubular tridimensional, reduzindo a área ocupada em aproximadamente 90% e protegendo os OSCs da área ativa do OTFT entre as múltiplas voltas das NMs. Assim, mostrou-se que a arquitetura confere novas propriedades aos OTFTs sem prejudicar as propriedades elétricas, suportando centenas de ciclos de compressão mecânica e mostrando-se resistentes a radiação ultravioleta e a vapores agressivos, como a amônia. Por fim, para validar a arquitetura de OTFT inédita, mostra-se que a estratégia utilizada é válida para diferentes OSCs e pode ser utilizada na fabricação de circuitos eletrônicos mais complexos a partir da associação de múltiplos dispositivos, como o inversor aqui apresentado. / In the recent years, the organic electronics’ commercial viability and competitiveness became apparent, integrating a diversity of technologies, e.g., OLED flexible displays, large-area solar panels and biocompatible and wearable devices. The manufacturing of electronic devices with organic materials aims at exploiting inherent characteristics— mechanical flexibility, low processing temperatures and the potential of boosting and tailoring specific properties through chemical synthesis. However, there’s still a gap between the well-established inorganic and the organic electronics concerning applications on rugged electronics, since the organic semiconductors (OSCs) are very susceptible to harsh conditions, e.g., exposition to UV radiation and gases. In this sense, recent advances on strained nanomembrane (NM) technology has shown enormous potential in the manufacturing of hybrid ultracompact devices in a novel organic thin-film transistor (OTFT) architecture. Through traditional microfabrication techniques—photolithography, thin-film deposition—OTFTs were fabricated on top of strained NMs, which promotes a reshaping of the devices into a 3D tubular architecture when released from the substrate. This process promotes a reduction in about 90% of the footprint area while protecting the OSC in the active area in between the multiple device windings. Therefore, the OTFTs have been endowed with new proprieties without loss of electric performance, while enduring hundreds of mechanical compression cycles and showing increased resilience against UV radiation and hazardous vapors, such as ammonia. Finally, to validate this novel OTFT architecture, this strategy has been shown to be valid for different OSCs and can be used to manufacture electronic circuits through the association of multiple devices, such as the inverter reported in this study. / CAPES: Código de financeamento 001 / FAPESP: Jovem Pesquisador 2014/25979-2

Large on-chip bandwidths required for high performance electronic chips will render optical components essential parts of future on-chip interconnects. Silicon photonics enables highly integrated photonic integrated circuit (PIC) using CMOS compatible process. In order to maximize the bandwidth density and design flexibility of PICs, vertical integration of electronic layers and photonics layers is strongly preferred. Comparing deposited silicon, single crystalline silicon offers low material absorption loss and high carrier mobility, which are ideal for multi-layer silicon PIC. Three different methods to build multi-layer silicon PICs based on single crystalline silicon are demonstrated in this dissertation, including double-bonded silicon-on-insulator (SOI) wafers, transfer printed silicon nanomembranes, and adhesively bonded silicon nanomembranes. 1-to-12 waveguide fanouts using multimode interference (MMI) couplers were designed, fabricated and characterized on both double-bonded SOI and transfer printed silicon nanomembrane, and the results show comparable performance to similar devices fabricated on SOI. However, both of these two methods have their limitations in optical interconnects applications. Large and defect-free silicon nanomembrane fabricated using adhesive bonding is identified as a promising solution to build multi-layer silicon PICs. A double-layer structure constituted of vertically integrated silicon nanomembranes was demonstrated. Subwavelength length based fiber-to-chip grating couplers were used to couple light into this new platform. Three basic building blocks of silicon photonics were designed, fabricated and characterized, including 1) inter-layer grating coupler based on subwavelength nanostructure, which has efficiency of 6.0 dB and 3 dB bandwidth of 41 nm, for light coupling between layers, 2) 1-to-32 H-tree optical distribution, which has excess loss of 2.2 dB, output uniformity of 0.72 dB and 3 dB bandwidth of 880 GHz, 3) waveguide crossing utilizing index-engineered MMI coupler, which has crossing loss of 0.019 dB, cross talk lower than -40 dB and wide transmission spectrum covering C-band and L-band. The demonstrated integration method and silicon photonic devices can be integrated into the CMOS back-end process for clock distribution and global signaling. / text

Over the past two decades, organic semiconductors played a growing part as active layers in several electronic systems such as sensors, field‑effect transistors or light emitting diodes to cite a few. In fact, organic materials offer a high versatility and flexibility. However, pure organic systems often lack stability and robustness, which can be overcome by combining them with inorganic scaffolds. In this work, a conducting polymer, polypyrrole (PPy) is employed to create new sensor elements based on the combination of both inorganic and organic layers. Electrical measurements, infrared spectroscopy and current sensing atomic force microscopy provides a better understanding of the polymer behavior upon immersion in aqueous solutions. The observed discharge in water leads to a straightforward application of the device as an in‑flow sensor for several acids like HCl, H2SO4 and H3PO4. The wide range of sensing concentrations as well as the low detection limit place the present detector among the best reported so far in the literature. In a further step to turn towards lab‑in‑a‑tube devices, tubular‑shaped‑integrated microelectrodes are developed by using the rolled‑up technology. As a proof of concept, the successful integration of PPy as an active layer and its use as a gas sensor for volatile organic compounds (VOCs) is demonstrated. Finally, by adapting the rolled‑up top electrodes, as developed by Bof Bufon et al. for self‑assembled monolayers (SAMs), thin PPy films (<50 nm) are vertically contacted and their electrical characteristics measured as a function of temperature and electric field. From the transport investigations, it is observed that an insulating‑to‑metallic transition occurs in the polymeric film by increasing the bias voltage. Other molecular layers like CuPc can be incorporated in these platforms, opening the way towards emerging organic devices.

On demand single-photon and entangled-photon sources are key building-blocks for many proposed photonic quantum technologies. For practical device applications, epitaxially grown quantum dots (QDs) are of increasing importance due to their bright photon emission with sharp line width. Particularly, they are solid-state systems and can be easily embedded within a light-emitting diode (LED) to achieve electrically driven sources. Therefore, one would expect a full-fledged optoelectronic quantum network that is running on macroscopically separated, QD-based single- and entangled-photon devices. An all-electrically operated wavelength-tunable on demand single-photon source (SPS) is demonstrated first. The device consists of a LED in the form of self-assembled InGaAs QDs containing nanomembrane integrated onto a piezoelectric crystal. Triggered single photons are generated via injection of ultra-short electrical pulses into the diode, while their energy can be precisely tuned over a broad range of about 4.8 meV by varying the voltage applied to the piezoelectric crystal. High speed operation of this single-photon emitting diode up to 0.8 GHz is demonstrated. In the second part of this thesis, a fast strain-tunable entangled-light-emitting diode (ELED) is demonstrated. It has been shown that the fine structure splitting of the exciton can be effectively overcome by employing a specific anisotropic strain field. By injecting ultra-fast electrical pulses to the diode, electrically triggered entangled-photon emission with high degree of entanglement is successfully realized. A statistical investigation reveals that more than 30% of the QDs in the strain-tunable quantum LED emit polarization-entangled photon-pairs with entanglement-fidelities up to f+ = 0.83(5). Driven at the highest operation speed ever reported so far (400 MHz), the strain-tunable quantum LED emerges as unique devices for high-data rate entangled-photon applications. In the end of this thesis, on demand and wavelength-tunable LH single-photon emission from strain engineered GaAs QDs is demonstrated. Fourier-transform spectroscopy is performed, from which the coherence time of the LH single-photon emission is studied. It is envisioned that this new type of LH exciton-based SPS can be applied to realize an all-semiconductor based quantum interface in the foreseeable distributed quantum networks.

Over the past two decades, organic semiconductors played a growing part as active layers in several electronic systems such as sensors, field‑effect transistors or light emitting diodes to cite a few. In fact, organic materials offer a high versatility and flexibility. However, pure organic systems often lack stability and robustness, which can be overcome by combining them with inorganic scaffolds. In this work, a conducting polymer, polypyrrole (PPy) is employed to create new sensor elements based on the combination of both inorganic and organic layers. Electrical measurements, infrared spectroscopy and current sensing atomic force microscopy provides a better understanding of the polymer behavior upon immersion in aqueous solutions. The observed discharge in water leads to a straightforward application of the device as an in‑flow sensor for several acids like HCl, H2SO4 and H3PO4. The wide range of sensing concentrations as well as the low detection limit place the present detector among the best reported so far in the literature. In a further step to turn towards lab‑in‑a‑tube devices, tubular‑shaped‑integrated microelectrodes are developed by using the rolled‑up technology. As a proof of concept, the successful integration of PPy as an active layer and its use as a gas sensor for volatile organic compounds (VOCs) is demonstrated. Finally, by adapting the rolled‑up top electrodes, as developed by Bof Bufon et al. for self‑assembled monolayers (SAMs), thin PPy films (<50 nm) are vertically contacted and their electrical characteristics measured as a function of temperature and electric field. From the transport investigations, it is observed that an insulating‑to‑metallic transition occurs in the polymeric film by increasing the bias voltage. Other molecular layers like CuPc can be incorporated in these platforms, opening the way towards emerging organic devices.

On demand single-photon and entangled-photon sources are key building-blocks for many proposed photonic quantum technologies. For practical device applications, epitaxially grown quantum dots (QDs) are of increasing importance due to their bright photon emission with sharp line width. Particularly, they are solid-state systems and can be easily embedded within a light-emitting diode (LED) to achieve electrically driven sources. Therefore, one would expect a full-fledged optoelectronic quantum network that is running on macroscopically separated, QD-based single- and entangled-photon devices. An all-electrically operated wavelength-tunable on demand single-photon source (SPS) is demonstrated first. The device consists of a LED in the form of self-assembled InGaAs QDs containing nanomembrane integrated onto a piezoelectric crystal. Triggered single photons are generated via injection of ultra-short electrical pulses into the diode, while their energy can be precisely tuned over a broad range of about 4.8 meV by varying the voltage applied to the piezoelectric crystal. High speed operation of this single-photon emitting diode up to 0.8 GHz is demonstrated. In the second part of this thesis, a fast strain-tunable entangled-light-emitting diode (ELED) is demonstrated. It has been shown that the fine structure splitting of the exciton can be effectively overcome by employing a specific anisotropic strain field. By injecting ultra-fast electrical pulses to the diode, electrically triggered entangled-photon emission with high degree of entanglement is successfully realized. A statistical investigation reveals that more than 30% of the QDs in the strain-tunable quantum LED emit polarization-entangled photon-pairs with entanglement-fidelities up to f+ = 0.83(5). Driven at the highest operation speed ever reported so far (400 MHz), the strain-tunable quantum LED emerges as unique devices for high-data rate entangled-photon applications. In the end of this thesis, on demand and wavelength-tunable LH single-photon emission from strain engineered GaAs QDs is demonstrated. Fourier-transform spectroscopy is performed, from which the coherence time of the LH single-photon emission is studied. It is envisioned that this new type of LH exciton-based SPS can be applied to realize an all-semiconductor based quantum interface in the foreseeable distributed quantum networks.