Silicon based on-chip optical phased arrays are an enabling technology to achieving agile and compact large angle beam steering. In this work, a single layer array is presented, and approaches to multilayer 3D photonic integration for achieving a 2D array are also discussed. Finally, two dimensional optical beam steering is achieved using both thermo-optic and wavelength tuning. Various structures are considered as an alternative to the conventionally used shallow etched surface gratings to achieve narrow beam widths in the far field along with low switching power. The corrugated waveguide interspersed with 2D photonic crystal for crosstalk suppression is presented as a novel structure for coupling to free space that can provide lithographically defined index contrast in a single fabrication step, along with the smallest beam widths presented to date, at 0.25°. In addition, a polysilicon overlay with an oxide etch stop layer on top of a silicon waveguide is also presented as a grating coupler that achieves narrow far field beam widths. With this structure, two dimensional steering of 20° X 15° is demonstrated with a 16 element optical phased array, with a beam width of 1.2° X 0.4° and maximum power consumption of 20mW per channel. / text

Theory, design, fabrication and characterization of on-chip optical beam steering systems are presented in this dissertation. Silicon photonics is being considered for integration with conventional CMOS technology for large-band width and low loss on and off-chip communications. We choose silicon nanomembrane, or silicon-on-insulator (SOI) substrates for implementation of large-angle and agile beam steeres. While working on the targeted device, we contributed to the theory, modeling, engineering and implementation of different building blocks. Multimode-interference couplers (MMIs) constitute important parts of this dissertation. These devices are commonly used as on-chip beam splitters, optical switches and on-chip static phase shifters. The MMIs’ principles of operation are suited in more details and design rules are derived for the first time. MMI based beam splitters with number of outputs as large as 12 are fabricated and tested on SOI wafers. Traditionally, MMIs devices were designed by means of computationally expensive numerical simulations. Numerically and experimentally, we show that our analytical design rules make design of MMIs with low insertion loss and highly uniform outputs possible without additional optimization processes. Optical phased arrays include phase shifter blocks. In the first prototype, we use micro-heaters for tuning the optical phase. The bread-loafing effect, which is generally considered an undeniable phenomenon in the silicon industry, is engineered to realize a mechanical structure to efficiently direct heat toward the silicon waveguides. We also investigate slow light photonic crystal based delay lines to be used as phase shifters. An important drawback of such devices is the low coupling efficiency between slow-light photonic crystal waveguides and fast light strip waveguides. We numerically and experimentally investigate the coupling efficiency, and show for the first time that a few-period long fast-light photonic crystal waveguide without any group index tapering suffices for efficient coupling. The prototype is fabricated, packaged and tested and optical beam steering angle over ±30degrees is demonstrated. Finally, preliminary investigations for 3D implementation of the beam steerer system are presented to clarify the approaches to take for future works. / text

<p>Optical beam steering is of significant importance for various emerging applications such as light detection and ranging (LiDAR), free space optical communication, and holographic display. However, the development of schemes for dynamic spatio-temporal beam steering has been limited in the past. A previous study achieved dynamic and continuous angular beam steering of isolated ultrashort pulses from a mode-locked laser by using a passive metasurface emulating a diffraction grating followed by a lens. In this thesis, we experimentally demonstrate dynamic spatio-temporal steering of high repetition rate pulse trains using a spatial array of frequency combs with a uniform gradient in their carrier-envelope offsets. To accomplish this, we leverage the capabilities of a virtually imaged phased array (VIPA), which is a side-entrance Fabry-Perot etalon, and employ successive spatial Fourier transforms facilitated by a 4f optical lens system. Our experimental results successfully demonstrate the periodic scanning of ultrashort pulse trains generated from an electro-optic comb at a repetition rate of ~10 GHz. The scanning occurs in discrete steps of ~115 μm and ~20 ps in the spatial and temporal domains, respectively.</p>

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Optofluidic sensing utilizes the advantages of both microfluidic and optical science to achieve tunable and reconfigurable high-performance sensing purpose, which has established itself as a new and dynamic research field for exciting developments at the interface of photonics, microfluidics, and the life sciences. With the trend of developing miniaturized electronic devices and integrating multi-functional units on lab-on-a-chip instruments, more and more desires request for novel and powerful approaches to integrating optical elements and fluids on the same chip-scale system in recent years. By taking advantage of the electrowetting phenomenon, the wettability of liquid droplet on micro/nano-structured surfaces and the Leidenfrost effect, this doctoral research focuses on developing high-performance optofluidic sensing systems, including optical beam adaptive steering, whispering gallery mode (WGM) optical sensing, and surface-enhanced Raman spectroscopy (SERS) sensing. A watermill-like beam steering system is developed that can adaptively guide concentrating optical beam to targeted receivers. The system comprises a liquid droplet actuation mechanism based on electrowetting-on-dielectric, a superlattice-structured rotation hub, and an enhanced optical reflecting membrane. The specular reflector can be adaptively tuned within the lateral orientation of 360°, and the steering speed can reach ~353.5°/s. This work demonstrates the feasibility of driving a macro-size solid structure with liquid microdroplets, opening a new avenue for developing reconfigurable components such as optical switches in next-generation sensor network. Furthermore, the WGM sensing system is demonstrated to be stimulated along the meridian plane of a liquid microdroplet, instead of equatorial plane, resting on a properly designed nanostructured chip surface. The unavoidable deformation along the meridian rim of the sessile microdroplet can be controlled and regulated by tailoring the nanopillar structures and their associated hydrophobicity. The nanostructured superhydrophobic chip surface and its impact on the microdroplet morphology are modeled by Surface Evolver (SE), which is subsequently validated by the Cassie-Wenzel theory of wetting. The influence of the microdroplet morphology on the optical characteristics of WGMs is further numerically studied using the Finite-Difference Time-Domain method (FDTD) and it is found that meridian WGMs with intrinsic quality factor Q exceeding 104 can exist. Importantly, such meridian WGMs can be efficiently excited by a waveguiding structure embedded in the planar chip, which could significantly reduce the overall system complexity by eliminating conventional mechanical coupling parts. Our simulation results also demonstrate that this optofluidic resonator can achieve a sensitivity as high as 530 nm/RIU. This on-chip coupling scheme could pave the way for developing lab-on-a-chip resonators for high-resolution sensing of trace analytes in various applications ranging from chemical detections, biological reaction processes to environmental protection. Lastly, this research reports a new type of high-performance SERS substrate with nanolaminated plasmonic nanostructures patterned on a hierarchical micro/nanostructured surface, which demonstrates SERS enhancement factor as high as 1.8 x 107. Different from the current SERS substrates which heavily relies on durability-poor surface structure modifications and various chemical coatings on the platform surfaces which can deteriorate the SERS enhancement factor (EF) as the coating materials may block hot spots, the Leidenfrost effect-inspired evaporation approach is proposed to minimize the analyte deposition area and maximize the analyte concentration on the SERS sensing substrate. By intentionally regulating the temperature of the SERS substrate during evaporation process, the Rhodamine 6G (R6G) molecules inside a droplet with an initial concentration of 10-9 M is deposited within an area of 450 μm2, and can be successfully detected with a practical detection time of 0.1 s and a low excitation power of 1.3 mW. / Doctor of Philosophy / Over the past two decades, optofluidics has emerged and established itself as a new and exciting research field for novel sensing technique development at the intersection of photonics, microfluidics and the life sciences. The strong desire for developing miniaturized lab-on-a-chip devices and instruments has led to novel and powerful approaches to integrating optical elements and fluids on the same chip-scale systems. By taking advantage of the electrowetting phenomenon, the wettability of liquid droplet on micro/nano-structured surfaces and the Leidenfrost effect, this doctoral program focuses on developing high-performance optofluidic sensing systems, including optical beam adaptive steering, whispering gallery mode (WGM) optical sensing, and surface-enhanced Raman spectroscopy (SERS) sensing. During this doctoral program, a rotary electrowetting-on-dielectric (EWOD) beam steering system was first fabricated and developed with a wide lateral steering range of 360° and a fast steering speed of 353.5°/s, which can be applied in telecommunication systems or lidar systems. Next, the meridian WGM optical sensing system was optically simulated using finite difference time domain (FDTD) method and was numerically validated to achieve a high quality-factor Q exceeding 104 and a high refractive index sensitivity of 530 nm/RIU, which can be applied to the broad areas of liquid identification or single molecule detection. Lastly, a SERS sensing platform based on a hierarchical micro/nano-structured surface was accomplished to exhibit a decent SERS enhancement factor (EF) of 1.81 x 107. The contact angle of water droplet on the SERS substrate is 134° with contact angle hysteresis of ~32°. Therefore, by carefully controlling the SERS surface temperature, we employed Leidenfrost evaporation to concentrate the analytes within an extremely small region, enabling the high-resolution detection of analytes with an ultra-low concentration of ~10-9 M.

This dissertation proposes, studies and experimentally demonstrates novel liquid crystal (LC) optics to solve challenging problems in RF and photonic signal processing, freespace and fiber optic communications and microscopic imaging. These include free-space optical scanners for military and optical wireless applications, variable fiber-optic attenuators for optical communications, photonic control techniques for phased array antennas and radar, and 3-D microscopic imaging. At the heart of the applications demonstrated in this thesis are LC devices that are non-pixelated and can be controlled either electrically or optically. Instead of the typical pixel-by-pixel control as is custom in LC devices, the phase profile across the aperture of these novel LC devices is varied through the use of high impedance layers. Due to the presence of the high impedance layer, there forms a voltage gradient across the aperture of such a device which results in a phase gradient across the LC layer which in turn is accumulated by the optical beam traversing through this LC device. The geometry of the electrical contacts that are used to apply the external voltage will define the nature of the phase gradient present across the optical beam. In order to steer a laser beam in one angular dimension, straight line electrical contacts are used to form a one dimensional phase gradient while an annular electrical contact results in a circularly symmetric phase profile across the optical beam making it suitable for focusing the optical beam. The geometry of the electrical contacts alone is not sufficient to form the linear and the quadratic phase profiles that are required to either deflect or focus an optical beam. Clever use of the phase response of a typical nematic liquid crystal (NLC) is made such that the linear response region is used for the angular beam deflection while the high voltage quadratic response region is used for focusing the beam. Employing an NLC deflector, a device that uses the linear angular deflection, laser beam steering is demonstrated in two orthogonal dimensions whereas an NLC lens is used to address the third dimension to complete a three dimensional (3-D) scanner. Such an NLC deflector was then used in a variable optical attenuator (VOA), whereby a laser beam coupled between two identical single mode fibers (SMF) was mis-aligned away from the output fiber causing the intensity of the output coupled light to decrease as a function of the angular deflection. Since the angular deflection is electrically controlled, hence the VOA operation is fairly simple and repeatable. An extension of this VOA for wavelength tunable operation is also shown in this dissertation. A LC spatial light modulator (SLM) that uses a photo-sensitive high impedance electrode whose impedance can be varied by controlling the light intensity incident on it, is used in a control system for a phased array antenna. Phase is controlled on the Write side of the SLM by controlling the intensity of the Write laser beam which then is accessed by the Read beam from the opposite side of this reflective SLM. Thus the phase of the Read beam is varied by controlling the intensity of the Write beam. A variable fiber-optic delay line is demonstrated in the thesis which uses wavelength sensitive and wavelength insensitive optics to get both analog as well as digital delays. It uses a chirped fiber Bragg grating (FBG), and a 1xN optical switch to achieve multiple time delays. The switch can be implemented using the 3-D optical scanner mentioned earlier. A technique is presented for ultra-low loss laser communication that uses a combination of strong and weak thin lens optics. As opposed to conventional laser communication systems, the Gaussian laser beam is prevented from diverging at the receiving station by using a weak thin lens that places the transmitted beam waist mid-way between a symmetrical transmitter-receiver link design thus saving prime optical power. LC device technology forms an excellent basis to realize such a large aperture weak lens. Using a 1-D array of LC deflectors, a broadband optical add-drop filter (OADF) is proposed for dense wavelength division multiplexing (DWDM) applications. By binary control of the drive signal to the individual LC deflectors in the array, any optical channel can be selectively dropped and added. For demonstration purposes, microelectromechanical systems (MEMS) digital micromirrors have been used to implement the OADF. Several key systems issues such as insertion loss, polarization dependent loss, wavelength resolution and response time are analyzed in detail for comparison with the LC deflector approach. A no-moving-parts axial scanning confocal microscope (ASCM) system is designed and demonstrated using a combination of a large diameter LC lens and a classical microscope objective lens. By electrically controlling the 5 mm diameter LC lens, the 633 nm wavelength focal spot is moved continuously over a 48 [micro]m range with measured 3-dB axial resolution of 3.1 [micro]m using a 0.65 numerical aperture (NA) micro-objective lens. The ASCM is successfully used to image an Indium Phosphide twin square optical waveguide sample with a 10.2 [micro]m waveguide pitch and 2.3 [micro]m height and width. Using fine analog electrical control of the LC lens, a super-fine sub-wavelength axial resolution of 270 nm is demonstrated. The proposed ASCM can be useful in various precision three dimensional imaging and profiling applications.