Metrological data from sample surfaces can be obtained by using a variety of profilometry methods. Atomic Force Microscopy (AFM), which relies on contact inter-atomic forces to extract topographical images of a sample, is one such method that can be used on a wide range of surface types, with possible nanometer range resolution. However, AFM images are commonly distorted by convolution, which reduces metrological accuracy. This type of distortion is more significant when the sample surface contains high aspect ratio features such as lines, steps or sharp edges - structures commonly found in semiconductor devices and applications. Aiming at mitigating these distortions and recovering metrology soundness, we introduce a novel image deconvolution scheme based on the principle of stereo imaging. Multiple images of a sample, taken at different angles, allow for separation of convolution artifacts from true topographic data. As a result, perfect sample reconstruction and probe shape estimation can be achieved in certain cases. Additionally, shadow zones, which are areas of the sample that cannot be probed by the AFM, are greatly reduced. Most importantly, this technique does not require a priori probe characterization. It also reduces the need for slender or sharper probes, which, on one hand, induce less convolution distortion but, on the other hand, are more prone to wear and damage, thus decreasing overall system reliability. / Singapore-MIT Alliance (SMA)

This thesis deals with the design and implementation of a visually guided robotic assembly system. Stereo imaging, three dimensional location extraction and object recognition will be the features of this system. This thesis study considers a system utilizing an eye-in-hand configuration. The system involves a stereo rig mounted on the end effector of a six-DOF ABB IRB-2000 industrial robot. The robot is controlled by a vision system, which uses open-loop control principles. The goal of the system is to assemble basic geometric primitives into their respective templates. Recognition

Surface characteristics such as topography and critical dimensions serve as important indicators of product quality and manufacturing process performance especially at the micrometer and the nanometer scales. This paper first reviews different technologies used for obtaining high precision 3-D images of surfaces, along with some selected applications. Atomic force microscopy (AFM) is one of such methods. These images are commonly distorted by convolution effects, which become more prominent when the sample surface contains high aspect ratio features. In addition, data artifacts can result from poor dynamic response of the instrument used. In order to achieve reliable data at high throughput, dynamic interactions between the instrument's components need to be well understood and controlled, and novel image deconvolution schemes need to be developed. Our work aims at mitigating these distortions and achieving reliable data to recover metrology soundness. A summary of our findings will be presented. / Singapore-MIT Alliance (SMA)

The primary purpose of this study was to determine the effectiveness of implementing desktop 3-dimensional (3D) stereo images of human anatomy into an undergraduate human anatomy distance laboratory. User perceptions of 2D and 3D images were gathered via questionnaire in order to determine ease of use and level of satisfaction associated with the 3D software in the online learning environment. Mayer's (2001, p. 184) principles of design were used to develop the study materials that consisted of PowerPoint presentations and AVI files accessed via Blackboard. The research design employed a mixed-methods approach. Volunteers each were administered a demographic survey and were then stratified into groups based upon pre-test scores. A total sample size of 62 pairs was available for combined data analysis. Quantitative research questions regarding the effectiveness of 2D versus the 3D treatment were analyzed using a doubly-multivariate repeated measures (Doubly- MANOVA) design. Paired test scores achieved by undergraduates on a laboratory practical of identification and spatial relationships of the bones and features of a human skull were used in the analysis. The questionnaire designed to gather user perceptions consisted of quantitative and qualitative questions. Response frequencies were analyzed for the two groups and common themes were noted. Results revealed a statistically significant difference in group means for the main effect of the treatment groups 2D and 3D and for the variables of identification and relationship with the 3D group outperforming the 2D group on both dependent variables. Effect sizes were determined to be small, 0.215 for the identification variable and 0.359 for the relationship variable. Overall, all students liked the convenience of using PowerPoint and AVI files online. The 3D group felt their PowerPoint was more realistic than did the 2D group and both groups appreciated the detailed labeling of the online images. One third of the volunteers in the 3D group indicated that "eye strain" was what they liked least about working with the 3D images. Results indicate that desktop, stereo imaging may be incorporated effectively into online anatomy and physiology courses, but that more work needs to be done to ensure less eye strain.

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La mission BepiColombo est une des pierres angulaires du programme scientifique de l'ESA. Elle permettra l'étude de la planète Mercure grâce à deux sondes mises en orbite autour de la planète. Une des deux sondes, Mercury Planetary Orbiter (MPO) développée par l'ESA, sera dédiée à l'étude de la surface et de l'intérieur de la planète. La mission est prévue pour un lancement en 2016 et une arrivée sur Mercure en janvier 2024. L’IAS est responsable de l’étalonnage de l'ensemble d'imageurs SIMBIO-SYS (Spectrometer and Imagers for MPO BepiColombo-Integrated Observatory SYStem) composé d’une caméra haute résolution (HRIC), d’une caméra stéréoscopique (STC) et d’un imageur hyperspectral visible et proche-infrarouge (VIHI). Ces instruments devraient profondément modifier nos connaissances de la composition et de la géomorphologie de la surface de Mercure. Ma thèse a consisté à participer à la définition et à la mise en place des caractéristiques et des fonctionnalités du dispositif expérimental d'étalonnage qui se compose principalement d’une cuve à vide contenant les instruments, d’un banc optique rassemblant les sources d'étalonnage et les éléments optiques qui reconstituent les conditions d'observation de Mercure, des interfaces mécaniques permettant le positionnement de l'expérience à l'intérieur de la cuve, des interfaces thermiques visant à explorer les températures de fonctionnement des différentes parties des expériences, des interfaces informatiques assurant la communication avec l'expérience et le pilotage du dispositif d'étalonnage en fonction des tests à réaliser. J’ai modélisés et validé expérimentalement certaines performances du dispositif. Enfin, j’ai défini en étroite collaboration avec les équipes italiennes co-responsables des trois instruments les différentes séquences d’étalonnage qui seront utilisées lors de l’étalonnage. / BepiColombo is one of the cornerstones of the scientific program of ESA. It will study the planet Mercury with two spacecrafts in orbit around the planet. One of the two spacecrafts, the Mercury Planetary Orbiter (MPO), will be dedicated to the study of the surface and interior of the planet. The mission is scheduled for launch in 2016 and arrival at Mercury in January 2024. IAS is responsible for the calibration of the imaging system SIMBIO-SYS (Spectrometers and Imagers for MPO BepiColombo Integrated Observatory-SYStem) which consists of a high-resolution camera (HRIC), a stereoscopic camera (STC) and a visible and near-infrared hyperspectral imager (VIHI). These instruments should deeply change our understanding of the composition and geomorphology of Mercury surface. My research subject allowed me to participate in all the activities concerning the definition, implementation and validation of the calibration facilities at the IAS. These facilities are divided into different sub-systems: a thermal vacuum chamber containing the instrument during all the calibration campaign that shall simulate the environmental conditions (temperature and pressure), an optical bench with optical components and radiometrically calibrated sources reproducing the observational conditions as it will be seen by the instrument once placed in Mercury’s orbit, mechanical interfaces allowing the positioning and guidance of the instrument when placed inside the vacuum chamber with the required precision and accuracy, thermal interfaces facilitating the thermal excursion of the detectors, software interfaces so as to automatize and control the entire system. I developed a radiometric model of the calibration system and instrument to refine the calibration sources. In parallel, I performed several measurements of some subsystems so as to validate the optical assembly and to improve its control. Finally as a result of a close collaboration with the three Italian scientific teams of the instrument, I elaborate the fully package of the calibration sequences and the detailed instrument configuration that will be used during the calibration campaign.