Graduation date: 1993

Pulsed laser deposition method was employed to grow MgO thin films with preferred orientation on bare Si(100) and SiO₂/Si(100) substrates. The orientation of MgO thin films was systematically investigated by varying deposition parameters. XRD analysis showed that the preferred orientation of MgO thin films would change from (111) to (100) when laser fluence decreased and oxygen pressure increased to certain extend. But it was difficult to fabricate completely (100)-oriented MgO films. Substrate temperature seemed to have little influence on the orientation of MgO thin films at high laser fluence. SEM images of the MgO thin films on Si(100) deposited at 400°C and the laser fluence of 5J/cm² in the oxygen ambient of 200mTorr demonstrated that there was no presence of interfacial reactions or cracks and the film surface was very smooth. Such film is suitable as buffer layers for the growth of high-quality ferroelectric and superconducting overlayers. / Singapore-MIT Alliance (SMA)

Thin film lithium microbatteries were investigated in this project in which LiCoO₂ cathodes about 200 to 500 nm were fabricated by pulsed-laser deposition (PLD) at different processing parameters such as laser energy and fluence, substrate temperature, background gas pressure, and target-substrate distance. Structure, microstructure and composition of as-deposited LiCoO₂ films were determined by XRD, SEM and XPS. Optimal deposition parameters were identified. Relaxation of open-circuit voltage of as-prepared cells and charge-discharge cycling were conducted to characterize the electrochemical properties of microbatteries made of these LiCoO₂ films. / Singapore-MIT Alliance (SMA)

[by] A. Eisenstein. / "Reprinted from Journal of applied physics, vol. 17, No. 11, 874-878, November, 1946." / Includes bibliographical references.

Thesis (Ph.D.)--University of Delaware, 2006. / Principal faculty advisor: Robert G. Hunsperger, Dept. of Electrical and Computer Engineering. Includes bibliographical references.

Thesis (Ph.D.)--University of Delaware, 2006. / Principal faculty advisor: Jochen Lauterbach, Dept. of Chemical Engineering. Includes bibliographical references.

Thesis (M.Phil.)--Hong Kong University of Science and Technology, 2006. / Includes bibliographical references. Also available in electronic version.

Thesis (Ph.D.)--University of Delaware, 2006. / Principal faculty advisors: John F. Rabolt and D. Bruce Chase, Dept. of Materials Science & Engineering. Includes bibliographical references.

Thesis (Ph.D.)--University of Delaware, 2006. / Principal faculty advisor: Romain Valéry Roy, Dept. of Mechanical Engineering. Includes bibliographical references.

Thesis (M.M.S.E.)--University of Delaware, 2006. / Principal faculty advisor: Robert L. Opila, Dept. of Materials Science. Includes bibliographical references.