The main purpose of this thesis is to study on Galvanic electrochemical etch stop using Au/Si/TMAH formation and tries to find out the conditions that we make micro-structure should need. Through the formation of Au/Si/TMAH, the wafer which have PN junction etch in TMAH, P type Si would be etched and N type Si would be protected. This mechanism improves the following problem¡G(1) the stress problem that due to the heavily boron-doped etch stop; (2) the non-batch fabrication and thermal stress problem that electrochemical etch stop have to use external bias and holder protection. We use TMAH as an etchant. Its advantages are¡G(1) compatible with the COMS process, (2)adding the specific additive that can increase the selectivity of aluminum, even non-etch. The application of this research will be more elasticity. Finally, for testing and verifying the feasibility of the parameters, author applied the designing conditions to fabricate the beam structure.

La compréhension de la chimie prébiotique et la recherche de matière organique d’origine extraterrestre qui lui est associée sont parmi les thématiques fortes de la branche de l’astrobiologie qui concerne notamment la recherche de traces de vie dans notre Système Solaire. C’est avec cet objectif que nous nous sommes intéressés à deux objets du Système Solaire : le satellite saturnien Titan, pour ses aérosols organiques, et Mars, pour son habitabilité avérée et la recherche de matière organique in situ. A ces fins, nous avons mis en œuvre deux techniques permettant d’étudier la matière organique de ces objets : la simulation expérimentale qui permet de reproduire en laboratoire des conditions environnementale extraterrestres et la préparation d’analyse in situ grâce à des laboratoires entièrement automatisés implémentés sur des véhicules mobiles, à savoir les rovers Curiosity/MSL actuellement en activité à la surface de Mars et le futur rover Pasteur de la mission ExoMars. La première partie de cette étude est ainsi consacrée à la simulation expérimentale appliquée à l’étude des aérosols organiques de Titan. Nous avons synthétisé en laboratoire des analogues (tholins) de ces aérosols, puis nous avons étudié leur composition moléculaire par pyrolyse et chromatographie en phase gazeuse couplée à la spectrométrie de masse (Pyr-GC-MS). Nous avons tout particulièrement investigué l’influence de la composition du mélange gazeux permettant la synthèse de nos tholins (taux de méthane dans du diazote) sur leur composition moléculaire. Une étude systématique par Pyr-GC-MS nous a permis d’estimer les conditions optimales d’analyse dont la température de pyrolyse. Dans un second temps, nous nous sommes intéressés à l’analyse in situ du sol martien par les instruments SAM-GC-MS et MOMA-GC-MS à bord du rover Curiosity et du futur rover Pasteur respectivement. Ces deux instruments ont la possibilité de mettre en œuvre des techniques de prétraitements des échantillons par chimie humide (dérivatisation) pour faciliter l’extraction, la volatilisation, la préservation et l’identification de la matière organique présente dans le sol martien. Parmi ces techniques, nous avons optimisé les conditions analytiques de la thermochimiolyse en présence de TMAH sur un sol analogue du sol martien pour assurer le succès des futures analyses in situ du sol de Mars par les instruments SAM et MOMA. / The understanding of prebiotic chemistry, and the search for organic matter of extraterrestrial origin associated with it, are among the strong themes of the astrobiology branch, which concerns in particular the search for traces of life in our Solar System. It is with this objective in mind that we have taken an interest in two objects of the Solar System: the Saturn satellite Titan, for its organic aerosols, and Mars, for its proven habitability and research of organic matter in situ. To this end, we have implemented two techniques to study the organic matter of these objects: experimental simulation, which allows the reproduction of extraterrestrial environmental conditions in the laboratory, and preparation of in situ analysis thanks to fully automated laboratories implemented on the Curiosity/MSL rover currently in operation on the surface of Mars, and the future Pasteur rover of the ExoMars mission. The first part of this study is thus devoted to the experimental simulation applied to the study of organic aerosols from Titan. We synthesized analogs (tholins) of these aerosols in the laboratory, then studied their molecular composition by pyrolysis and gas chromatography coupled to mass spectrometry (Pyr-GC-MS). We investigated in particular the influence of the composition of the gas mixture allowing the synthesis of our tholins (methane content in nitrogen) on their molecular composition. A systematic study by Pyr-GC-MS allowed us to estimate the optimal conditions of analysis including pyrolysis temperature. In a second phase, we were interested in the in situ analysis of the Martian soil by the SAM-GC-MS and MOMA-GC-MS instruments aboard the Curiosity rover and the future Pasteur rover respectively. These two instruments have the possibility of using wet chemistry (derivatization) techniques to pre-treat samples to facilitate extraction, volatilization, preservation and identification of the organic matter present in the Martian soil. Among these techniques, we have optimized the analytical conditions of thermochemolysis in the presence of TMAH on a terrestrial analog of the Martian soil to ensure the success of future in situ analyses of the Mars soil by the SAM and MOMA instruments.

Many applications in microelectromechanical systems such as smart living space sensing system, microchannel system on chip and biomedical sensing system usually require instantaneously compensating or controlling the temperature of chip to acquire more linear and accurate output signal. So it is necessary to develop a micro temperature sensor or micro-hot-plate which has highly thermal isolation and low power characteristics. This thesis aims to design and fabricate a low power micro-hot-plate and a high-sensitivity temperature sensor for portable applications. This dissertation utilized a high power E-beam evaporator to deposit the platinum thin film as the material of temperature sensing and heating. The Pt layer is patterned using the lift-off technique. In addition, the micro-hot-plate can be released from the silicon substrate as a floating thin-plate using TMAH-based anisotropic etching technology. The floating structure can improve the thermal isolation and reduce the power loss through the silicon substrate. In this study, the higher temperature sensitivity (1914 ppm/¢J) and optimized sensing linearity ( > 99.9 %) of the platinum-based temperature sensor is demonstrated. On the other hand, the heating power of the floating micro-hot-plate developed in this research is only 14 mW when it be heated to 300 ¢J and the power efficiency is very high (18.3 ¢J/mW).

Electrostatically actuated silicon membranes were designed, modeled, fabricated, and characterized. The intended application was for use in a microspeaker. Fabrication issues necessitated the use of thick diaphragms with a large gap between the electrodes. The devices did not function as speakers but did show actuation with a high DC voltage. Device dimensions were chosen by examining membrane mechanics, testing the processing steps required for device fabrication, and modeling with COMSOL. Several adhesives were researched to fabricate the device sidewalls, including BCB, PMMA, and TRA-Bond F112. A method for patterning PMMA through photolithography was found using a scanning electron microscope. Masks were designed in AutoCAD to create the electrostatically actuated devices and a microfabrication process was developed to produce diaphragms that could be characterized. Twenty micron thick diaphragms were fabricated by etching an SOI wafer in 25% TMAH and the etch depth was measured with a profilometer. Glass slides were coated with gold and patterned with positive photoresist to create counter-electrodes. The diaphragms were bonded to the glass slides using a forty micron thick layer of patterned SU-8 as sidewalls. Bonding was successful in the initial fabrication testing but not successful for the final devices. The final fabrication run resulted in eight devices that were partially bonded. Three devices were chosen to test the membrane actuation and the data analyzed for statistical significance. A DC voltage was applied to the electrodes with a MEMS driver and the change in force measured with a micro-force displacement system. Data analysis showed device actuation at high voltages (300V) for the medium and large devices.

A técnica analítica mais utilizada para o monitoramento de exposição a metais tóxicos ou para avaliação de deficiência a elementos essenciais é a espectrometria de absorção atômica chama (FAAS) ou com forno de grafite (GF AAS). Entretanto, cada vez mais os laboratórios de pesquisa na área clínica estão mudando seus métodos de análise, baseados nestas técnicas, para a utilização da espectrometria de massas com plasma acoplado (ICP-MS). Isso vem acontecendo porque o ICP-MS permite a determinação de elementos químicos, em diversas matrizes, numa ampla faixa de concentração (ng L-1 a mg L-1), além de possibilitar alta rapidez de análise, capacidade multielementar e limites de detecção menores que outras técnicas analíticas. Uma das principais características do método a ser utilizado para a análise de elementos químicos em rotina por ICP-MS é que ele seja rápido, com o mínimo de manipulação da amostra. Neste sentido, métodos que propõem a análise direta de amostra são mais atrativos. Todavia, ainda é limitado o número de métodos que propõem análise direta de fluidos biológicos por ICP-MS. Neste sentido, o presente trabalho teve como objetivo o desenvolvimento de um método para análise direta de sangue por ICP-MS para determinação de Ag, As, Cd, Co, Mn, Ni, Pb e Se. Para isso, amostras de sangue (200 µL) foram misturadas com 500 µL de hidróxido de tetrametilamônio (TMAH) (10% v/v) e incubadas por 10 minutos. Posteriormente, a solução resultante foi diluída para 10 mL com uma solução contendo 0,05% m/v EDTA; 0,005% v/v Triton® X-100. Em seguida, as amostras foram analisadas diretamente por ICP-MS (ELAN DRC II). Ródio (Rh) foi usado como padrão interno e a calibração das amostras foi feita por meio de ajuste de matriz com sangue base ovino. Os limites de detecção (LD) do método foram de 0,008; 0,02; 0,004; 0,009; 0,003; 0,09; 0,04; 0,1 µg L-1 para Ag, As, Cd, Co, Mn, Ni, Pb and Se, respectivamente. A validação dos resultados foi realizada com análise de um material de referência de sangue do Programa de Proficiência do Institut National de Santé Publique du Quebec, no Canadá. Validação adicional foi obtida pela comparação dos resultados obtidos pela análise de 20 amostras de sangue pelo método proposto e pela técnica de GF AAS. O método foi também comparado a outros dois existentes na literatura e comumente utilizados em laboratórios dos Estados Unidos e Suécia, apresentando limites de detecção comparáveis ou melhores e melhores exatidão e precisão. / The most used analytical technique for monitoring the exposure to toxic metals or for the assessment of the deficiency of essentials elements is the atomic absorption spectrometry with flame (FAAS) or graphite furnace (GF AAS). However, more and more clinical laboratories are changing their methods of analysis, based on this technique, to methods using inductively coupled plasma-mass spectrometry (ICP-MS). It occurs because ICP-MS allows the determination of chemical elements in various types of samples, at concentrations in a wide linear range (ng L-1 to mg L-1), providing high-throughput analysis with multielemental capability with lower detection limits. However, for routine porpuses the method of choice must be fast with minimal sample manipulation.On the other hand, the number of methods proposing direct introduction of biological fluids to the ICP-MS are still limited. This work aimed the development of a method for the direct analysis of blood samples by ICP-MS for the determination of Ag, As, Cd, Co, Mn, Ni, Pb and Se. For this, blood samples (200 L) were mixed with 500 L of tetramethylammonium hydroxide (TMAH) (10% v/v) and left at room temperature during 10 minutes. Subsequently, the resulting solution was diluted to 10 mL with a solution containing 0.05% m/v EDTA + 0005% v / v Triton ® X-100. Thus the samples were analyzed directly by ICP-MS (ELAN DRC II). Rhodium (Rh) was used as internal standard with matrix matching calibration. The method detection limits were: 0.008, 0.02, 0.004, 0.009, 0.003, 0.09, 0.04, 0.1 µg L-1 for Ag, As, Cd, Co, Mn, Ni , Pb, and Se respectively. Method validation was acquired with the analysis of blood reference material provided by the Institut National de Santé Publique du Quebec, Canada. Furthermore, for additional validation 20 ordinary blood samples were analyzed by the proposed method and by GF AAS. The method was also compared with two existing methods in the literature and commonly used in laboratories in the United States and Sweden where comparable or better detection limits and better accuracy and precision were obtained.

A técnica analítica mais utilizada para o monitoramento de exposição a metais tóxicos ou para avaliação de deficiência a elementos essenciais é a espectrometria de absorção atômica chama (FAAS) ou com forno de grafite (GF AAS). Entretanto, cada vez mais os laboratórios de pesquisa na área clínica estão mudando seus métodos de análise, baseados nestas técnicas, para a utilização da espectrometria de massas com plasma acoplado (ICP-MS). Isso vem acontecendo porque o ICP-MS permite a determinação de elementos químicos, em diversas matrizes, numa ampla faixa de concentração (ng L-1 a mg L-1), além de possibilitar alta rapidez de análise, capacidade multielementar e limites de detecção menores que outras técnicas analíticas. Uma das principais características do método a ser utilizado para a análise de elementos químicos em rotina por ICP-MS é que ele seja rápido, com o mínimo de manipulação da amostra. Neste sentido, métodos que propõem a análise direta de amostra são mais atrativos. Todavia, ainda é limitado o número de métodos que propõem análise direta de fluidos biológicos por ICP-MS. Neste sentido, o presente trabalho teve como objetivo o desenvolvimento de um método para análise direta de sangue por ICP-MS para determinação de Ag, As, Cd, Co, Mn, Ni, Pb e Se. Para isso, amostras de sangue (200 µL) foram misturadas com 500 µL de hidróxido de tetrametilamônio (TMAH) (10% v/v) e incubadas por 10 minutos. Posteriormente, a solução resultante foi diluída para 10 mL com uma solução contendo 0,05% m/v EDTA; 0,005% v/v Triton® X-100. Em seguida, as amostras foram analisadas diretamente por ICP-MS (ELAN DRC II). Ródio (Rh) foi usado como padrão interno e a calibração das amostras foi feita por meio de ajuste de matriz com sangue base ovino. Os limites de detecção (LD) do método foram de 0,008; 0,02; 0,004; 0,009; 0,003; 0,09; 0,04; 0,1 µg L-1 para Ag, As, Cd, Co, Mn, Ni, Pb and Se, respectivamente. A validação dos resultados foi realizada com análise de um material de referência de sangue do Programa de Proficiência do Institut National de Santé Publique du Quebec, no Canadá. Validação adicional foi obtida pela comparação dos resultados obtidos pela análise de 20 amostras de sangue pelo método proposto e pela técnica de GF AAS. O método foi também comparado a outros dois existentes na literatura e comumente utilizados em laboratórios dos Estados Unidos e Suécia, apresentando limites de detecção comparáveis ou melhores e melhores exatidão e precisão. / The most used analytical technique for monitoring the exposure to toxic metals or for the assessment of the deficiency of essentials elements is the atomic absorption spectrometry with flame (FAAS) or graphite furnace (GF AAS). However, more and more clinical laboratories are changing their methods of analysis, based on this technique, to methods using inductively coupled plasma-mass spectrometry (ICP-MS). It occurs because ICP-MS allows the determination of chemical elements in various types of samples, at concentrations in a wide linear range (ng L-1 to mg L-1), providing high-throughput analysis with multielemental capability with lower detection limits. However, for routine porpuses the method of choice must be fast with minimal sample manipulation.On the other hand, the number of methods proposing direct introduction of biological fluids to the ICP-MS are still limited. This work aimed the development of a method for the direct analysis of blood samples by ICP-MS for the determination of Ag, As, Cd, Co, Mn, Ni, Pb and Se. For this, blood samples (200 L) were mixed with 500 L of tetramethylammonium hydroxide (TMAH) (10% v/v) and left at room temperature during 10 minutes. Subsequently, the resulting solution was diluted to 10 mL with a solution containing 0.05% m/v EDTA + 0005% v / v Triton ® X-100. Thus the samples were analyzed directly by ICP-MS (ELAN DRC II). Rhodium (Rh) was used as internal standard with matrix matching calibration. The method detection limits were: 0.008, 0.02, 0.004, 0.009, 0.003, 0.09, 0.04, 0.1 µg L-1 for Ag, As, Cd, Co, Mn, Ni , Pb, and Se respectively. Method validation was acquired with the analysis of blood reference material provided by the Institut National de Santé Publique du Quebec, Canada. Furthermore, for additional validation 20 ordinary blood samples were analyzed by the proposed method and by GF AAS. The method was also compared with two existing methods in the literature and commonly used in laboratories in the United States and Sweden where comparable or better detection limits and better accuracy and precision were obtained.

Made available in DSpace on 2016-08-19T12:56:46Z (GMT). No. of bitstreams: 1 Dissertacao Helmara.pdf: 1239564 bytes, checksum: f5a4e670235603269ce13bb3db2a2938 (MD5) Previous issue date: 2013-06-06 / Conselho Nacional de Desenvolvimento Científico e Tecnológico / Due to the implementation of more restricted environmental regulation laws, the control of pollution agent such as sulfur compounds has provides the development of new analytic methodologies for its quantification on different matrices, including biodiesel fuel. Thus, this work aims to compare three different sensors - film bismuth and mercury film on the surface of a glassy carbon electrode and solid silver amalgam (dental) - for the determination of sulfur in biodiesel, by means of stripping voltammetric cathodic square wave mode (VRC/SW) as supporting electrolyte with a solution of sodium acetate (1,4 mol.Lˉ¹) and acetic acid (0.33 mol.Lˉ¹) in metanol/2-propanol. In general, the mercury film electrode (MFE) has presented the best electrochemical behavior to the definition of peak reduction, being then selected as standard electrode to the measurements. The sulfur quantization on biodiesel samples was performed by adding 70 μL of soybean biodiesel and tallow fatty with TMAH, adding later, aliquots of standard sulfur. The method showed good linearity (0.998), suggesting an average sulfur concentration of 6,870x10ˉ7 (± 6,857x10ˉ⁸) mol.Lˉ¹, within a confidence interval of 95%, to a limit of detection 3,294x10ˉ¹º mol.Lˉ¹ and quantification limit of 1,098x10ˉ9 mol.Lˉ¹. Besides, for the untreated sample, the experimental has provided a LD of 6,54 x 10ˉ9 mol.Lˉ¹. Finally the proposed method has been compared with the results of a collaborative study (ANP 01/2012) of the same sample using the Teste-t de Student, verifying that the proposed method and official methods (EN ISO 20846, EN ISO 20884) are statistically equivalent to a confidence level of 95%, thereby demonstrating the feasibility of the method. / O controle da poluição ambiental tem exigido, cada vez mais, a determinação de enxofre em uma variedade de matrizes. Diferentes métodos analíticos têm sido desenvolvidos para determinação deste analito em biodiesel, empregando várias técnicas, que vão desde a análise cromatográfica aos métodos espectroanalíticos. No presente trabalho são apresentados os resultados da avaliação de diferentes sensores eletroquímicos para determinação de enxofre em Biodiesel, utilizando a técnica voltamétrica de redissolução catódica no modo onda quadrada (VRC/SW) tendo como eletrólito suporte uma solução de acetato de sódio (1,4 mol.Lˉ¹) e ácido acético (0,33 mol.Lˉ¹), em metanol/2-propanol. Foram avaliados três sensores (filme de bismuto e filme de mercúrio na superfície de carbono vítreo, e eletrodo sólido de amálgama de prata dentária) na determinação de enxofre, sendo observado que o eletrodo de filme de mercúrio (EFM) apresentou os melhores resultados relacionados ao comportamento eletroquímico na definição do pico de redução. Portanto, o EFM foi o sensor escolhido para aplicação na amostra de biodiesel. A determinação do analito em Biodiesel foi realizada adicionando-se 70 μL de Biodiesel de Soja e Sebo (01/2012, interlaboratorial) tratado com TMAH, adicionando, posteriormente, alíquotas de padrão de enxofre. O método apresentou uma boa linearidade (0,998), determinando-se assim uma concentração média de enxofre de 3,687 x 10ˉ7± 6,857 x 10ˉ⁸ mol.Lˉ¹, a um intervalo de confiança de 95%, para um limite de detecção de 3,294 x 10-10 mol.Lˉ¹ e limite de quantificação de 1,098 x 10ˉ9 mol.Lˉ¹, o que demonstra uma boa sensibilidade da técnica. Além disso, avaliou-se o estudo sem tratamento da amostra, na qual obteve-se LD de 6,54 x 10ˉ9 mol.L-1. O presente método foi comparado com os resultados de um estudo interlaboratorial (ANP 01/2012) da mesma amostra, utilizando o Teste-t de Student, verificando que o método proposto e os métodos oficiais (EN ISO 20846; EN ISO 20884) são estatisticamente equivalentes a um nível de confiança de 95%, demonstrando assim a viabilidade do método.

Submitted by Rosivalda Pereira (mrs.pereira@ufma.br) on 2017-06-02T19:35:12Z No. of bitstreams: 1 AnaLeonardo.pdf: 617676 bytes, checksum: b538fd3ffdb436a8e246ec2a0e138840 (MD5) / Made available in DSpace on 2017-06-02T19:35:12Z (GMT). No. of bitstreams: 1 AnaLeonardo.pdf: 617676 bytes, checksum: b538fd3ffdb436a8e246ec2a0e138840 (MD5) Previous issue date: 2016-07-22 / Conselho Nacional de Desenvolvimento Científico e Tecnológico (CNPQ) / Most analytical methods require a sample preparation to make it compatible with the technique and the equipment used. This paper proposes a comparison between alkaline solubilization using TMAH 25% and acid extraction with heating using HNO3 0.1 mol L -1 as preparation of biodiesel samples in order to determine sodium. The analytical technique used in this study was Flame Atomic Absorption Spectrometry - FAAS. The biodiesel samples used were synthesized from three commercially available oils: babassu oil, corn and soybeans. The interlaboratory biodiesel sample used to compare the proposed method with the official NBR 15556:2008, was provided by Laboratory of Analysis and Research in Analytical Chemistry of Petroleum and Biofuels - LAPQAP/UFMA. The final solution after solubilization with 25% TMAH in methanol was incompatible with FAAS technique. The high viscosity of the sample influenced directly in the aspiration causing significant variations in the readings and making it impossible to continue the analysis. Acid extraction HNO3 0.1mol.L -1 yielded better results, in addition, the physical conditions of the final solution were consistent with FAAS. The LOD and LOQ values were respectively 0.02 and 0.07 mg.Kg-1 for sodium. The obtained recoveries were between 102 and 110% at three different levels of fortification. In comparison with the dilution of biodiesel in xylene established by official standards, quantified concentrations showed values very close. The simplicity, accuracy, precision, less toxicity and low cost of the acidic extraction method suggest that this may be a good alternative for treating biodiesel sample to determine sodium. / A maioria dos métodos analíticos precisa de um preparo da amostra para torná-la compatível com a técnica e o equipamento utilizado. Este trabalho propõe uma comparação entre a solubilização alcalina usando TMAH 25% e a extração ácida com aquecimento usando HNO3 0,1 mol.L-1 como preparo das amostras de biodiesel visando a determinação de sódio. A técnica analítica utilizada no presente trabalho foi Espectrometria de Absorção Atômica com Chama FAAS. As amostras de biodiesel utilizadas foram sintetizadas a partir de três óleos vegetais disponíveis no comércio: babaçu, milho e soja. O Biodiesel interlaboratorial usado na comparação do método proposto com a norma oficial NBR 15556:2008, foi cedido pelo Laboratório de Análise e Pesquisa em Química Analítica de Petróleo e Biocombustíveis - LAPQAP/UFMA. A solução final após a solubilização com TMAH 25% em metanol foi incompatível com FAAS. A alta viscosidade da amostra influenciou diretamente na aspiração causando variações significativas nas leituras impossibilitando a continuidade das análises. A extração ácida com HNO3 0,1mol.L-1 proporcionou melhores resultados, além disso, as condições físicas da solução final foram consistentes com FAAS. Os valores de LD e LQ foram respectivamente: 0,02 e 0,07 mg.Kg-1 para sódio. A recuperação obtida foi entre 102 e 110 % em três níveis diferentes de fortificação. Na comparação com a diluição do biodiesel em xileno estabelecido pelas normas oficiais, as concentrações quantificadas apresentaram valores bem próximos. A simplicidade, exatidão, precisão, menor toxicidade e baixo custo do método de extração ácida, sugerem que esta pode ser uma boa alternativa de tratamento de amostra de biodiesel para determinação de sódio.

Malgré son implication importante dans de nombreux processus environnementaux, la matière organique naturelle (MON) reste mal caractérisée, principalement à cause du caractère réfractaire des structures dans lesquelles elle est impliquée. Si des fonctions amides ont été mises en évidence dans la MON, la structure moléculaire des unités associées est encore inconnue. La pyrolyse couplée à la chromatographie gazeuse et à la spectrométrie de masse (Py-GC-MS) en présence de Tetra-Methyl-Ammonium Hydroxyde (TMAH) est a priori un outil pertinent pour l'analyse de ces structures. Pour mieux comprendre le comportement des structures azotées de la MON au cours de la Py-GC-MS/TMAH, nous avons étudié par cette méthode, les 20 acides aminés protéiques, 17 dipeptides, 4 polypeptides et une protéine, la Sérum Albumine Bovine (SAB). Cette étude a permis de mettre en évidence les principaux mécanismes de pyrolyse des acides aminés (méthylation directe, cyclisation, dimérisation, homolyse, décarboxylation, et déamination), et l'influence de la liaison peptidique sur ces mécanismes. La Py-GC-MS/TMAH des dipeptides et des polypeptides a montré l'importance des produits de cyclisation, en particulier des diketopiperazines et de structures plus complexes basées sur 3 acides aminés, et des produits d'homolyse pour les acides aminés aromatiques. De plus, cette étude a permis d'établir une base de données des produits de pyrolyse des acides aminés et des 17 dipeptides. Enfin, la pyrolyse de la SAB en mélange avec les deux principales macromolécules présentes dans la biomasse (lignine et cellulose) montre que les coefficients de réponse sont défavorables à la protéine.

This thesis presents the development of electrochemical etch-stop techniques (ECES) to achieve high precision 3-dimensional integrated MEMS sensors with wet anisotropic etching by applying proper voltages to various regions in silicon. The anisotropic etchant is selected as tetra methyl ammonium hydroxide, TMAH, considering its high silicon etch rate, selectivity towards SiO2, and CMOS compatibility, especially during front-side etching of the chip/wafer. A number of parameters affecting the etching are investigated, including the effect of temperature, illumination, and concentration of the etchant over the etch rate of silicon, surface roughness, and biasing voltages. The biasing voltages for passivating the n-well and enhancing the etching reactions on p-substrate are determined as -0.5V and -1.6V, respectively, after a series of current-voltage characteristic experiments. The surface roughness due to TMAH etching is prevented with the addition of ammonium peroxodisulfate, AP. A proper etching process is achieved using a 10wt.% TMAH at 85&deg / C with 10gr/lt. AP. Different silicon etch samples are produced in METU-MET facilities to understand and optimize ECES parameters that can be used for CMOS microbolometers. The etch samples are fabricated using various processes, including thermal oxidation, boron and phosphorus diffusions, aluminum and silicon nitride layer deposition processes. Etching with the prepared samples shows the dependency of the depletion layer between p-substrate and n&amp / #8209 / well, explaining the reason of the previous failures during post-CMOS etching of CMOS microbolometers from the front side. Succesfully etched CMOS microbolometers are achieved with back side etching in 6M KOH at 90 &deg / C, where &amp / #8209 / 3.5V and 1.5V are applied to the p-substrate and n-well. In summary, this study provides an extensive understanding of the ECES process for successful implementations of integrated MEMS sensors.