En aquesta tesi es detalla la metodologia per obtindre sensors de gasos basats en òxid de tungstè nanoestructurat sobre suports micromecanitzats de silici. Aquesta nanoestructuració s’ha fet mitjançant una capa d’alúmina porosa como a motlle, pel que s’ha desenvolupat una metodologia per a compatibilitzar l'anodització de l’alumini, i altres metalls com el tungstè, amb els processos estàndards del silici. S’han desenvolupat dos tipus de capes nanoestructurades, nanotubs i nanopunts de WO3. Els nanotubs s’han obtingut depositant mitjançant polvorització catòdica reactiva la capa sensible sobre alúmina porosa recobrint les parets dels pors. Els nanopunts s’han obtingut anoditzant una bicapa d’alumini i tungstè, on la primera anodització crea la alúmina porosa i la segona fa créixer els nanopunts d’òxid de tungstè en la base dels pors. S’ha analitzat la composició, morfologia i funcionament com a sensors de gasos d’ambdós materials nanoestructurats i s’han comparat els resultats amb sensors basats en materials sense nanoestructuració. / En esta tesis se detalla la metodologia para obtener sensores de gases basados en óxido de tungsteno nanoestructurado sobre soportes micromecanizados de silicio. Dicha nanoestructuración se ha obtenido empleando una capa de alúmina porosa como molde, por lo que se desarrolla una metodología para compatibilizar la anodización del aluminio, y otros metales como el tungsteno, con los procesos estándares del silicio. Se han desarrollado dos tipos de capas nanoestructuradas, nanotubos y nanopuntos de WO3. Los nanotubos se han obtenido depositando por pulverización catódica reactiva la capa sensible sobre alúmina porosa recubriendo las paredes de sus poros. Los nanopuntos se han obtenido anodizando una bicapa de aluminio y tungsteno, donde la primera anodización crea la alúmina porosa y la segunda hace crecer los nanopuntos de óxido de tungsteno en la base de los poros. Se ha analizado la composición, morfología y funcionamiento como sensores de gases en ambos casos y se han comparado los resultados con los de sensores sin nanoestructuración. / This thesis shows the methodology to obtain nanostructured tungsten oxide layer as sensing material on silicon micromachined gas sensor devices. A porous anodised alumina layer was used as pattern to obtain it, so a technique has been developed to make compatible the anodising of aluminium and other metals like tungsten with the standard silicon processes. Two different nanostructuring approaches were developed, nanotube and nanodot based tungsten oxide layers. The WO3 nanotube layer has been obtained by the tungsten oxide deposition using reactive sputtering on the porous alumina layer. As a result a continuous sensing layer coats the pores without clogging them. WO3 nanodot layers were obtained by the anodising of an aluminium and tungsten bilayer, where the first anodising process grows the porous alumina layer and the second one generates the tungsten oxide nanodots in the end of the pores. Compositional and morphological studies and the study of their behaviour as gas sensors where conducted for the two nanomaterials. The results have been compared with the flat tungsten oxide layers on micromachined gas sensors.

In today’s communication devices, the need for high performance inductors is increasing as they are extensively used in RF integrated circuits (RFICs). This need is even more pronounced for variable inductors as they are widely required in tunable filters, voltage controlled amplifiers (VCO) and low noise amplifiers (LNA). For RFICs, the main tuning elements are solid state varactors that are used in conjunction with invariable inductors. However, they have limited linearity, high resistive losses, and low self resonant frequencies. This emphasizes the need for developing another tuning element that can be fabricated monolithically with ICs and can offer high range of tuning. Due to the ease of CMOS integration and low cost silicon based IC fabrication, the inductors currently used are a major source of energy loss, therefore driving the overall quality factor and performance of the chip down. During the last decade there has been an increase in research in RF MicroelectroMechanical Systems (RF MEMS) to develop high quality on chip tunable RF components. MEMS capacitors were initially proposed to substitute the existing varactors, however they can not be easily integrated on top of CMOS circuits. RF MEMS variable inductors have recently attracted attention as a better alternative. The research presented here explores using porous anodic alumina (PAA) in CMOS and MEMS fabrication. Due to its low cost and low temperature processing, PAA is an excellent candidate for silicon system integration. At first, PAA is explored as an isolation layer between the inductor and the lossy silicon substrate. Simulations show that although the dielectric constant of the PAA is tunable, the stress produced by the required thicker layers is problematic. Nevertheless, the use of PAA as a MEMS material shows much more promise. Tunable RF MEMS inductors based on bimorph sandwich layer of aluminum PAA and aluminum are fabricated and tested. A tuning range of 31% is achieved for an inductance variation of 5.8 nH to 7.6 nH at 3 GHz. To further improve the Q, bimorph layers of gold and PAA are fabricated on Alumina substrates. A lower tuning range is produced; however the quality factor performance is greatly improved. A peak Q of over 30 with a demonstrated 3% tuning range is presented. Depending on the need for either high performance or tunability, two types of tunable RF MEMS inductors are presented. Although PAA shows promise as a mechanical material for MEMS, the processing parameters (mainly stress and loss tangent) need to be improved if used as an isolation layer. To our knowledge, this is the first time this material has been proposed and successfully used as a structural material for MEMS devices and CMOS processes.

With the rapid growth in the wireless industry there has been increasing demand to make devices with better performance. This means lower power, lower voltage, smaller, and in general more efficient. This has lead to the interest in and necessity for good quality passive components. Good quality passive components make better filters, baluns, voltage controlled oscillators, and matching networks. There has been a lot of work over the last ten years focused on improving the quality of inductors. Typical inductors fabricated on silicon have Q factors of approximately 10. This is because silicon is conductive and therefore acts like a lossy ground plane and develops interfering currents. Improvements that have been attempted include thicker metal layers, thicker dielectric layers, patterned ground shields, as well as using multiple metal layers. These methods, however, still do not improve inductors to the quality of those built on insulating substrates such as glass. The main successful attempt on silicon has been where the inductor coil is released so that it is in the air supported by posts. In some work the inductor coil is raised 50 to 100µm above the underpass by methods like etching or photoresist molding. The suspended inductor approach was applied to an insulating substrate to fabricate and characterize unique suspended inductors and transformers. Inductors were released to have 1µm of air underneath the coil by the use of a release etch. Transformers were made in a similar way except two released layers where used. The top coil, done in plated gold, was released as well as an interconnection layer. Such a small air gap and the transformers with two released metal layers are a couple of the unique features of this thesis work. The devices were characterized up to 20GHz before and after release. An improvement in the peak Q factor (up to 70), as well as in the self-resonance frequency (up to 4GHz higher) was noticed after release. This is expected due to the reduction in parasitics. The results were then compared with simulations and a couple closed form expressions, both of which were able to give a reasonable accuracy. There was also success in getting good high frequency transformers. Even though some good high-Q inductors were fabricated as part of this thesis, there is still further work that can be done. This includes packaging, integration with capacitors, and further optimization.

In today’s communication devices, the need for high performance inductors is increasing as they are extensively used in RF integrated circuits (RFICs). This need is even more pronounced for variable inductors as they are widely required in tunable filters, voltage controlled amplifiers (VCO) and low noise amplifiers (LNA). For RFICs, the main tuning elements are solid state varactors that are used in conjunction with invariable inductors. However, they have limited linearity, high resistive losses, and low self resonant frequencies. This emphasizes the need for developing another tuning element that can be fabricated monolithically with ICs and can offer high range of tuning. Due to the ease of CMOS integration and low cost silicon based IC fabrication, the inductors currently used are a major source of energy loss, therefore driving the overall quality factor and performance of the chip down. During the last decade there has been an increase in research in RF MicroelectroMechanical Systems (RF MEMS) to develop high quality on chip tunable RF components. MEMS capacitors were initially proposed to substitute the existing varactors, however they can not be easily integrated on top of CMOS circuits. RF MEMS variable inductors have recently attracted attention as a better alternative. The research presented here explores using porous anodic alumina (PAA) in CMOS and MEMS fabrication. Due to its low cost and low temperature processing, PAA is an excellent candidate for silicon system integration. At first, PAA is explored as an isolation layer between the inductor and the lossy silicon substrate. Simulations show that although the dielectric constant of the PAA is tunable, the stress produced by the required thicker layers is problematic. Nevertheless, the use of PAA as a MEMS material shows much more promise. Tunable RF MEMS inductors based on bimorph sandwich layer of aluminum PAA and aluminum are fabricated and tested. A tuning range of 31% is achieved for an inductance variation of 5.8 nH to 7.6 nH at 3 GHz. To further improve the Q, bimorph layers of gold and PAA are fabricated on Alumina substrates. A lower tuning range is produced; however the quality factor performance is greatly improved. A peak Q of over 30 with a demonstrated 3% tuning range is presented. Depending on the need for either high performance or tunability, two types of tunable RF MEMS inductors are presented. Although PAA shows promise as a mechanical material for MEMS, the processing parameters (mainly stress and loss tangent) need to be improved if used as an isolation layer. To our knowledge, this is the first time this material has been proposed and successfully used as a structural material for MEMS devices and CMOS processes.

The impact of H2 partial pressure (H2 pp) during the hydrotreating of heavy gas oil, derived from Athabasca bitumen, over commercial NiMo/¥ã-Al2O3 catalyst was studied in a micro-trickle bed reactor. The experimental conditions were varied as follows: temperature: 360 to 400¨¬C, pressure: 7 to 11 MPa, gas/oil ratio: 400 to 1270 mL/mL, H2 purity range of 0 to 100 vol. % (with the rest either CH4 or He), and LHSV range of 0.65 to 2 h-1. The two main objectives of the project were to study the nature of the dependence of H2 pp on temperature, pressure, gas/oil ratio, LHSV (Liquid Hourly Space Velocity), and H2 purity. The project was divided into three phases: in phase one the effect of H2 purity on hydrotreating of heavy gas oil (HGO) was studied, in phase two the nature of H2 pp dependency and the effect of H2 pp on hydrotreating of HGO was investigated, and in phase three kinetic studies were carried out using different kinetic models.<p> The objective of phase one was to study the effect of hydrogen purity on hydrotreating of HGO was studied in a trickle bed reactor over a commercial Ni−Mo/¥ã-alumina catalyst. Methane was used as a diluent for the hydrogen stream, and its effect on the catalyst performance was compared to that of helium, which is inert toward the catalyst. Furthermore, a deactivation study was conducted over a period of 66 days, during which the catalyst was subjected to H2 purities ranging from 75 to 95% (with the rest methane); no significant deterioration in the hydroprocessing activities of the catalyst was observed. Therefore, it was concluded that methane was inert toward a commercial Ni−Mo/¥ã-alumina catalyst. However, its presence resulted in hydrogen partial pressure reduction, which in turn led to a decrease in hydrodesulphurization (HDS), hydrodenitrogenation (HDN), hydrodearomatization (HDA) conversions. This reduction can be offset by increasing the total pressure of the system. HDS, HDN, HDA, and mild hydrocracking (MHC) conversions were studied. Also determined were cetane index, density, aniline point, diesel index, and fractional distribution of the products.<p> The main objective of phase two was to study the effects of H2 pp on hydrotreating conversions, feed vaporization, H2 dissolution, and H2 consumption were studied. The results show that HDN and HDA are significantly more affected by H2 partial pressure than HDS; with the HDN being the most affected. For instance as the inlet H2 partial pressure was increased from 4.6 to 8.9 MPa HDS, HDN, and HDA conversions increased for 94.9%, 55.1%, and 46.0% to 96.7%, 83.9%, and 58.0% , respectively. Moreover, it was observed that H2 dissolution and H2 consumption increased with increasing H2 pp. No clear trend was observed for the effect of H2 pp on feed vaporization.<p> In phase three the kinetics of HDS, HDN, and HDA were studied. The power law, multi-parameter, and Langmuir - Hinshelwood type models were used to fit the data. The prediction capacities of the resulting models were tested. It was determined that, while multi-parameter model yielded better prediction, L-H had an advantage in that it took a lesser number of experimental data to determine its parameters. Kinetic fitting of the data to a pseudo-first-order power law model suggested that conclusions on the effect of H2 pp on hydrotreating activities could be equally drawn from either inlet or outlet hydrogen partial pressure. However, from the catalyst deactivation standpoint, it is recommended that such conclusions are drawn from the outlet H2 partial pressure, since it is the reactor point with the lowest hydrogen partial pressure.

Research on nanofluids has been undertaken for several years because of the reported enhancements of thermal properties such as thermal conductivity and enhanced heat transfer performance in laminar flow. Nanofluid is the fluid where nanoparticles are dispersed in a base fluid. Thermal conductivity and viscosity are considered to be the most prominent factors in the efficient use of nanofluids. A change in thermal conductivity and viscosity also changes the convective heat transfer coefficient. Nanoparticles can be metallic or non-metallic and also can have different shapes. In this study, Poly-Alpha-Olefin (PAO) has been used as a base fluid with Alumina (Al2O3) nanoparticles. Poly-Alpha-Olefin is commonly used for engine lubrication in military applications and cooling in electronic and industrial devices. Several nanofluid samples were made by METSS Corp. in Ohio, USA using different dispersants, different base fluids and different morphology of alumina nanoparticles. The mass fraction of nanoparticles is from 2.5 to 20 percent. The thermal properties of each sample such as thermal conductivity and viscosity have been measured. Thermal conductivity of nanofluids and pure base fluids were both measured and the thermal conductivity enhancement has been calculated. Also, the heat transfer coefficient has been determined for laminar flow under constant heat flux conditions. Results indicate that all the tested nanofluids and base fluid samples show a Newtonian behavior. Among the nanofluid samples, NF-048, which contains non-spherical Alumina nanoparticles exhibits the greatest thermal conductivity enhancement when compared to pure PAO. Heat transfer tests were conducted with pure PAO and NF-048, and an enhancement in convective heat transfer coefficient was observed. The thermal conductivity of NF-048 increases with temperature, which is consistent with heat transfer results. Furthermore, the percentage enhancement in convective heat transfer coefficient was shown to increase non-linearly with the axial distance in the heat transfer section. NF-048 exhibits a lower Re (Reynolds number)*Ra (Rayleigh number) than pure PAO under laminar flow constant heat flux conditions indicating that nanoparticle morphology and composition are the two main factors responsible for convective heat transfer enhancement at low Reynolds number.

Abstract With the development of new technology and the stringent requirement for the international environmental regulation, the silver-oxide cadmium composites with the best contact performance will be prohibited due to the anxiety to cause cancer. Therefore, this study intends to develop a new contact materials with the best contact performance and cost. This study intends to use the silver powder (2~4£gm) as the major component, and the alumina ceramic powders (0.5£gm) as the minor component. The self-development mixer is used to uniformly mix silver powder with alumina powder, and then the powder metallurgy is used to make the electric contacts. Under the supply voltage and current, as well as the mixing conditions, the contact erosion amount, the arc energy, and the contact resistance are measured to investigate the erosion mechanism. Results show that the electric contact with 4%wt alumina ceramic powder has the best performance. Furthermore, the new electric contacts of silver base alumina composite material appear the acceptable performance compared with the commercial electric contacts.

We have investigated the chemical sensitivity of nanoporous (NP) alumina-coated surface acoustic wave (SAW) devices that have been surface-modified with polymeric mediating films. The research in this dissertation covers the refinement of the NP alumina coating, development of dendrimer and/or polymer surface modifications, design of composite ultrathin vapor-phase analyte gates, and preparation of selectively permeable, polymeric films that mediate analyte transport. Nanoporous alumina SAW devices were fabricated from planar Al SAW devices using an anodization process that yields a high-surface-area transduction platform. Refinement of the anodization process results in a homogeneously porous substrate capable of ~40 times the analyte sensitivity of conventional planar SAW devices. Attempts to directly impart selective gas-phase analyte permeation with monolayers of amine-terminated, poly(amidoamine) (PAMAM) dendrimer films were investigated with and without secondary functionalization. We also prepared and characterized pore-bridging polymeric composite ultrathin films (~12 nm) of PAMAM dendrimers and poly(maleic anhydride)-c-poly(methyl vinylether) (Gantrez). Access to the underlying pores of the NP alumina coating can be modulated through the sequential deposition of the composite film. These tailorable ultrathin films result in impermeable surface- modifications which fully gate the analyte response without filling the porous structure. Thin spin-cast films (40 nm) of polydimethylsiloxane (PDMS) were developed to simultaneously provide selective sorption and permeation characteristics towards vapor-phase analytes. The porous nature of the underlying alumina coating provides for this real-time evaluation of sorption and permeation. The results suggest that the thin films offer preferential sorption of non-polar organics and selective permeability towards water vapor.

Recently, wet sand blasting on coated cutting tool inserts has drawn interest to the tooling industry due to its positive effects on cutting performance and tool life. This performance boost has partly been attributed to the buildup of compressive residual stresses in the coating during the blasting process. However, the mechanism of forming residual stresses in ceramic coatings during sand blasting is not fully understood. This work utilize x-ray diffraction as the main tool to study the formation and relaxation of residual stresses after wet sand blasting and annealing on 001, 012 and 110 textured α-Al2O3 coatings. To minimize the influence of stress gradients in the samples, all stress measurements were set up with a fixed analysis depth of 2 µm. Sand blasting was made with an alumina based slurry at 2, 3.2 and 4 bar pressure and the anneal was done at temperatures from 400 to 1000 °C for 2 hours or more. The coating hardness was evaluated by nanoindentation. Finally, the activation energy for the relaxation of residual stresses was estimated using the Zener-Wert-Avrami function. The results reveal the highest compressive residual stress with up to -5.3 GPa for the 012 texture while the stresses for the 001 and 110 textures peaked at -3.1 and -2.0 GPa, respectively. Further, a hardness gradient was present after blasting of the 001 and 012 textured samples indicating a higher stress at the surface of the coating. The 110 textured sample is the most brittle resulting in flaking of the coating during sand blasting. The different deformation mechanisms are related to difference in active slip planes between coatings with different textures. Both the stress and hardness decreased after heat treatment and the activation energy for stress relaxation was found to be as 1.1 ± 0.3 eV, 1.9 ± 0.2 eV and 1.2 ± 0.1 eV for the 001, 012 and 110 textures, respectively.

The mechanical responses of the comminuted ceramic under impact is important in understanding penetration resistance of the target, modeling the penetration process, developing ceramic models and designing better armor systems. To determine the dynamic compressive responses of ceramic rubbles, a novel loading/reloading feature in SHPB experiments was developed to produce two consecutive loading pulses in a single dynamic experiment with two strikers and two shapers. The first pulse pulverizes the intact specimen into rubble after characterizing the intact material. After unloading of the first pulse, a second pulse loads the comminuted specimen and gives the dynamic constitutive behavior of the rubble.With this new experimental technique, several series of experiments were conducted on an oxide ceramic -- alumina AD995 and a non-oxide ceramic--hot pressed silicon carbide, SiC-N, with different strain rates, various volume dilatations and damaged levels under 26 MPa, 56 MPa and 104 MPa confinement. The results show that the strength of the damaged ceramic is not very sensitive to strain rates within this research range and the pulse separation once the damage attains a critical level. When slightly damaged far below a critical level, the specimen remains nearly elastic; when transitionally damaged, the specimen strength gradually decrease from the slight damage level to the heavy damage level. Increasing confinement increases the strength of the ceramics. The crack patterns were dominantly axial splitting for the slight damage, axial splitting and fragmentation for the intermediate damage, and fragmentation and comminution for the heavy damage. For SiC-N, the volume dilatation history shows a delayed failure. SEM observations indicated that microstructural failure mechanism is intergranular fracture for alumina and transgranular fracture for SiC-N.Mohr-Coulomb criterion was successfully employed to describe the damaged ceramic and the parameters were determined. JH-1 model was employed to describe the failed SiC-N in the linearly segmentation description of the strength and the parameters were also determined. Through the analysis of JH-1 model for SiC-N, the critical damage level can be taken as D = 1.0. JH-2 model was used to describe analytically the damaged AD995 and the parameters were obtained. The critical damage value is 0.88 for alumina determined directly from JH-2 model. The description of JH-1 model is equivalent to Mohr-Coulomb criterion while it is unsuitable for JH-2 model due to the non-linear description. Based on the analysis of existing models and current experimental data, an empirical constitutive material model was developed for the damaged ceramic, which well described the completely damaged ceramic, but was unable to model the partially damaged ceramic.